Matches 1 - 50 out of 99 1 2 >


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US20170146416 CAPACITIVE PRESSURE DIFFERENCE SENSOR AND METHOD FOR ITS MANUFACTURE  
A simply constructed and cost effectively manufacturable pressure difference sensor, comprising first and second counterelectrodes, a conductive disk arranged between the two counterelectrodes, a...
US20180044166 MEMS Sensor, Especially Pressure Sensor  
A MEMS sensor with improved overload resistance for metrological registering of a measured variable comprises a plurality of layers, especially silicon layers, arranged on one another. The layers...
10330548 Capacitive pressure difference sensor and method for its manufacture  
A pressure difference sensor includes first and second counterelectrodes, a conductive disk between the counterelectrodes, a first insulating layer connecting an outer edge of the disk with an...
10730741 MEMS sensor, especially pressure sensor, for metrological registering of a measured variable  
A MEMS sensor with improved overload resistance for metrological registering of a measured variable comprises a plurality of layers, especially silicon layers, arranged on one another. The layers...
EP3268304A1 MEMS SENSOR, IN PARTICULAR A PRESSURE SENSOR  
The invention relates to a MEMS sensor for metrologically sensing a measurement variable having improved resistance to overloading, which MEMS sensor comprises a plurality of layers (1, 3, 5), in...
EP3158305A1 CAPACITIVE DIFFERENTIAL PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF  
A differential pressure sensor which is of simple design and can be produced cost-effectively is described, comprising a first and a second counterelectrode (1, 3), a conductive plate (5) arranged...
EP3158305B1 CAPACITIVE DIFFERENTIAL PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF  
WO/2015/197344A1 CAPACITIVE DIFFERENTIAL PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF  
A differential pressure sensor which is of simple design and can be produced cost-effectively is described, comprising a first and a second counterelectrode (1, 3), a conductive plate (5) arranged...
WO/2016/142291A1 MEMS SENSOR, IN PARTICULAR A PRESSURE SENSOR  
The invention relates to a MEMS sensor for metrologically sensing a measurement variable having improved resistance to overloading, which MEMS sensor comprises a plurality of layers (1, 3, 5), in...
DE102014108748A1 A capacitive differential pressure sensor and method for its preparation  
It describes a simply constructed and economically producible differential pressure sensor, which is arranged with a first and a second counter electrode (1, 3), one between the two counter...
DE102015103485A1 MEMS sensor, esp. Pressure sensor  
It is a MEMS sensor for the metrological detection of a measured variable with improved overload resistance describes the several successive layers arranged (1, 3, 5), esp. Silicon layers,...
WO/2014/095417A1 HYDRAULIC MEASURING UNIT WITH COPLANAR PRESSURE INLETS AND DIFFERENTIAL PRESSURE SENSOR HAVING SUCH A MEASURING UNIT  
A hydraulic measuring unit comprises: a measuring unit body with a process connection surface (16) oriented in one direction and having a first and second hydraulic path (32, 33), which extend...
DE102012025070A1 Hydraulic movement with coplanar pressure inputs and differential pressure sensor with such a measuring mechanism  
A hydraulic measuring unit comprises a measuring unit body with a oriented in a direction Process connection surface 16 having a first and a second hydraulic path 32, 33, which extended from the...
10101231 Overload safe pressure sensor, especially pressure difference sensor  
A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A...
US20160041054 Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken  
A pressure difference sensor includes a pressure difference measuring cell, which has a measuring cell platform with pressure contactable measuring chambers in its interior, a first mounting...
US20140021563 Pressure Resistently Encapsulated, Pressure Difference Sensor  
A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a...
US20130047738 PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE  
A method for the manufacture of a platform having a membrane bed includes providing a platform body, which comprises silicon; and removing silicon material from a surface of the platform body by...
US20120265455 OVERLOAD SAFE PRESSURE SENSOR, ESPECIALLY PRESSURE DIFFERENCE SENSOR  
A pressure sensor includes a sensor body with a sensor chamber in the interior, at least a first separating membrane, forming a first separating membrane chamber connected with the sensor body. A...
9689768 Mechanical stabilizing and electrical as well as hydraulic adapting of a silicon chip by ceramics  
A pressure difference sensor includes a pressure difference measuring cell, which has a measuring cell platform with pressure contactable measuring chambers in its interior, a first mounting...
9054222 Pressure resistently encapsulated, pressure difference sensor  
A pressure difference sensor includes a capsule, which has a ceramic capsule body. The capsule has a transducer seat in its interior, wherein there is arranged in the transducer seat a...
EP2691754B1 PRESSURE-TIGHT ENCAPSULATED DIFFERENTIAL PRESSURE SENSOR  
EP2566808A2 COUNTERBEARING WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR COMPRISING SUCH A COUNTERBEARING AND METHOD FOR THE PRODUCTION THEREOF  
A method for the production of a counterbearing with a membrane bed comprises the following steps: providing a counterbearing body comprising silicon and removing the silicon material by means of...
EP2516979B1 OVERLOAD-PROOF PRESSURE SENSOR, IN PARTICULAR DIFFERENTIAL PRESSURE SENSOR  
EP2691754A1 PRESSURE-TIGHT ENCAPSULATED DIFFERENTIAL PRESSURE SENSOR  
EP2566808B1 METHOD FOR THE PRODUCTION OF A COUNTERBEARING WITH ASPHERICAL MEMBRANE BED  
EP2516979A1 OVERLOAD-PROOF PRESSURE SENSOR, IN PARTICULAR DIFFERENTIAL PRESSURE SENSOR  
The invention relates to a pressure sensor (1) comprising a sensor body having a sensor chamber in the interior, at least one first separating membrane (16a, 16b), which is connected to the sensor...
EP2936103B1 MECHANICAL STABILIZATION AND ELECTRICAL AND HYDRAULIC ADAPTATION OF A SILICON CHIP BY CERAMICS  
EP2936103A2 MECHANICAL STABILIZATION AND ELECTRICAL AND HYDRAULIC ADAPTATION OF A SILICON CHIP BY CERAMICS  
The invention relates to a differential pressure sensor comprising a differential pressure measuring cell (10) having a measuring cell body with measuring chambers (13, 15) in the interior thereof...
WO/2014/095416A2 MECHANICAL STABILIZATION AND ELECTRICAL AND HYDRAULIC ADAPTATION OF A SILICON CHIP BY CERAMICS  
The invention relates to a differential pressure sensor comprising a differential pressure measuring cell (10) having a measuring cell body with measuring chambers (13, 15) in the interior thereof...
WO/2011/076477A1 OVERLOAD-PROOF PRESSURE SENSOR, IN PARTICULAR DIFFERENTIAL PRESSURE SENSOR  
The invention relates to a pressure sensor (1) comprising a sensor body having a sensor chamber in the interior, at least one first separating membrane (16a, 16b), which is connected to the sensor...
WO/2011/138148A3 COUNTERBEARING WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR COMPRISING SUCH A COUNTERBEARING AND METHOD FOR THE PRODUCTION THEREOF  
A method for the production of a counterbearing with a membrane bed comprises the following steps: providing a counterbearing body comprising silicon and removing the silicon material by means of...
WO/2014/095416A3 MECHANICAL STABILIZATION AND ELECTRICAL AND HYDRAULIC ADAPTATION OF A SILICON CHIP BY CERAMICS  
The invention relates to a differential pressure sensor (1) comprising a differential pressure measuring cell (10) having a measuring cell body with measuring chambers (13, 15) in the interior...
WO/2012/055605A3 PRESSURE TRANSDUCER  
A pressure transducer comprises: a housing 10 having a transducer chamber 12 which has first and second stop surfaces 14, 16 opposite one another; and a transducer core 30, wherein a first channel...
WO/2011/138148A2 COUNTERBEARING WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR COMPRISING SUCH A COUNTERBEARING AND METHOD FOR THE PRODUCTION THEREOF  
A method for the production of a counterbearing with a membrane bed comprises the following steps: providing a counterbearing body comprising silicon and removing the silicon material by means of...
WO/2012/130512A1 PRESSURE-TIGHT ENCAPSULATED DIFFERENTIAL PRESSURE SENSOR  
A differential pressure transducer 1 comprises a capsule 2 having a ceramic capsule body 20 and a converter receiver in the interior, in which there is arranged a semiconductor pressure converter...
WO/2012/055605A2 PRESSURE TRANSDUCER  
A pressure transducer comprises: a housing 10 having a transducer chamber 12 which has first and second stop surfaces 14, 16 opposite one another; and a transducer core 30, wherein a first channel...
DE102014115803A1 MEMS sensor, in particular a differential pressure sensor  
A MEMS sensor (100) for detecting a measured variable, in particular a differential pressure sensor for detecting a differential pressure comprises: a sensor body comprising at least two connected...
DE102010043043A1 Pressure Transducers  
A pressure transducer, comprising: a housing 10 having a transducer chamber 12, which first and second stop surfaces 14, 16 which are opposite to each other; and a transducer core 30, wherein at...
DE102010028773A1 Abutment with aspherical diaphragm bed, pressure sensor with such a thrust bearing and methods for their preparation  
A method of making a thrust bearing with a diaphragm bed comprising the steps of: providing a thrust bearing body comprising silicon and wherein removal of the silicon material by means of laser...
DE102011006517A1 Explosion-proof Differential Pressure Sensor  
A Differenzdruckmessaufnehmer 1 comprises a capsule 2 comprising a ceramic capsule body 20, and a transducer receptacle inside, in which a semiconductor pressure transducer 3 is located, which has...
DE102012113033A1 Mechanical stabilization and electrical and hydraulic adaptation of a silicon chip by ceramics  
A differential pressure sensor 1 comprises a differential pressure-measuring cell 10, which has a measuring cell body with pressurizable measuring chambers 13, 15 having in its interior and having...
DE102009055149A1 Overload safe, pressure sensor, especially differential pressure sensor  
A pressure sensor 1 comprises a sensor body with a sensor chamber inside, at least one first separation membrane 16a, 16b, which is connected to the sensor body to form a first separation membrane...
9797796 Hydraulic measuring mechanism with coplanar pressure inputs and pressure difference sensor having such a measuring mechanism  
A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform having a process connection surface and two pressure input openings, in which, in...
US20180031434 Pressure Difference Sensor  
A pressure difference sensor for providing a pressure measurement signal, comprising: a pressure difference measuring cell, which is suppliable with first and second pressures and which outputs...
10458874 Pressure difference sensor for providing a pressure measurement signal  
A pressure difference sensor for providing a pressure measurement signal, comprising: a pressure difference measuring cell, which is suppliable with first and second pressures and which outputs...
US20170138808 Pressure Difference Sensor  
A pressure difference sensor, comprising a pressure difference measuring cell having a measuring membrane, two platforms, between which the measuring membrane is arranged, and a transducer, as...
US20150369683 HYDRAULIC MEASURING MECHANISM WITH COPLANAR PRESSURE INPUTS AND PRESSURE DIFFERENCE SENSOR HAVING SUCH A MEASURING MECHANISM  
A hydraulic measuring mechanism for registering pressure differences, comprising a measuring mechanism platform 10 having a process connection surface 16 and two pressure input openings, in which,...
10101232 Pressure difference sensor with protection against static overloads  
A pressure difference sensor, comprising a pressure difference measuring cell having a measuring membrane, two platforms, between which the measuring membrane is arranged, and a transducer, as...
9442033 Pressure difference sensor and method for its manufacture  
A pressure difference sensor includes a measuring membrane, which is arranged between two platforms and connected pressure-tightly with the platforms, in each case, via a first insulating layer...
US20190219469 CAPACITIVE PRESSURE SENSOR AND METHOD FOR ITS MANUFACTURE  
A simply composed, cost effectively manufacturable, pressure sensor is described, comprising a platform, an electrically conductive measuring membrane connected with the platform to enclose a...

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