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9036897 Storage medium storing computer program for determining at least one of exposure condition and mask pattern  
A computer readable storage medium is provided, storing a computer-executable program for causing a computer to determine at least one of mask pattern and exposure condition of an exposure...
9036896 Inspection system and method for inspecting line width and/or positional errors of a pattern  
A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more...
9031314 Establishing coordinate systems for measurement  
In one aspect, in general, a measurement system includes a projector for illuminating a pattern on a surface of the object, at least two imaging devices for obtaining images of a portion of an...
9013714 Method of analyzing video or image data of an absorbent article  
A method for determining the proper placement of an absorbent article on an undergarment is provided. The method includes receiving a still or video image of the absorbent article in the...
8963963 Video-based image control system  
A method of using stereo vision to interface with a computer is provided. The method includes capturing a stereo image, and processing the stereo image to determine position information of an...
8953894 Pattern matching method and image processing device  
A pattern matching method for a scanning electron microscope comprises a step of performing pattern matching of only an upper layer pattern between an image (101) in which a pattern consisting of...
8948497 System and method for increasing resolution of images obtained from a three-dimensional measurement system  
A system uses range and Doppler velocity measurements from a lidar system and images from a video system to estimate a six degree-of-freedom trajectory (6DOF) of a target. The 6DOF transformation...
8937654 Machine vision inspection system comprising two cameras having a rotational offset  
A machine vision inspection system comprises an optical portion providing an image of a field of view of a workpiece which may be a magnified image. A first camera and a second camera provide...
8934704 Visual inspection device, visual inspection method, and computer program  
Inputs of a plurality of images constituting a group of images of items regarded as non-defective items are accepted and stored, and a defect threshold for detecting a defective portion of an...
8934705 Persistent feature detection  
Methods are presented for improved detection of persistent or systematic defects induced during the manufacture of a product. In particular, the methods are directed to the detection of defects...
8930011 Method of measuring an overlay of an object  
A method of measuring an overlay of an object is provided. In the method, first information of a first structure may be obtained. A preliminary structure may be formed on the first structure....
8928485 Charged corpuscular ray apparatus  
The present invention relates to the acquisition of tilted series images of a minute sample in a short time. The present invention relates to: measuring in advance the relation between an amount...
8923601 Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof  
A method for inspecting overlay shift defect during semiconductor manufacturing is disclosed herein and includes a step for providing a charged particle microscopic image of a sample, a step for...
8921733 Methods and systems for trimming circuits  
Removing material from the surface of a first circuit comprises generating a first laser pulse using a pulse generator; targeting a spot on the first circuit using a focusing component; delivering...
8903516 Visual alignment system and method for workpiece marking  
An alignment system for permanently marking a workpiece with a marking device includes a camera, a display operatively connected to the camera and configured to generate an image as a function of...
8904315 Circuit arrangements and associated apparatus and methods  
There is provided a method comprising: examining the location of one or more feature(s) of the one or more component(s) of a circuit arrangement to determine the displacement of the location of...
8903541 Method and arrangement for positioning electronic devices into compartments of an input medium and output medium  
A method for positioning electronic devices into compartments of an input medium is disclosed. At least one electronic device is packable in a single compartment of the input medium. Known...
8897593 Determining image quality based on distribution of representative autocorrelation coefficients  
An image evaluation device includes: a partial area extracting section extracting plural partial areas from an original image; an extracted image generating section generating an extracted image...
8885919 Semiconductor fault analysis device and fault analysis method  
A failure analysis apparatus 1A is provided with a voltage applying unit 14 for applying a bias voltage to a semiconductor device S, an imaging device 18 for acquiring an image, and an image...
8885949 Pattern shape determining method, pattern shape verifying method, and pattern correcting method  
According to the pattern shape determining method of the embodiment, a first reference position of a pattern shape is set on a first pattern and a second reference position of a pattern shape is...
8867859 Illumination estimation for images  
An image comprising varying illumination is selected. Instances of a repeating pattern in the image is determined. Illumination values for pixels at locations within instances of the repeating...
8854450 Alignment method for assembling substrates in different spaces without fiducial mark and its system  
An alignment method for assembling substrates in different spaces without fiducial mark and its system are provided, and the alignment method has steps of: pre-defining partially standard...
8855403 Method of discriminating between an object region and a ground region and method of measuring three dimensional shape by using the same  
A method of discriminating a region and a method of measuring a three dimensional shape are disclosed. The method includes irradiating light onto a substrate having a measurement target formed...
8853087 Method of manufacturing semiconductor device and system for manufacturing semiconductor device  
A target space ratio of a monitor pattern on a substrate for inspection is determined to be different from a ratio of 1:1. A range of space ratios in a library is determined to include the target...
8849008 Determining calibration parameters for a lithographic process  
A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was...
8842902 Server and method for aligning part of product with reference object  
In a method for aligning a part of a product (moving object) with a reference object, triangle data of the moving object is acquired, and feature elements of the moving object is fitted according...
8837810 System and method for alignment in semiconductor device fabrication  
A method of determining overlay error in semiconductor device fabrication includes receiving an image of an overlay mark formed on a substrate. The received image is separated into a first image...
8831370 Wavelength diverse scintillation reduction  
Systems, including apparatus and methods, for obtaining and/or correcting images, particularly from atmospheric and/or other distortions. These corrections may involve, among others, collecting...
8818078 Apparatus and method for optically measuring creep  
A method of measuring creep strain in a gas turbine engine component, where at least a portion of the component has a material disposed thereon, and where the material has a plurality of markings...
8810580 Method and tool for creating irregular-shaped tables  
A computerized method of creating an irregular-shaped table of cells comprises detecting one or more cells of a table to be removed, removing each detected cell from the table and creating a table...
8811716 Method to determine fiducial point for holographic data storage  
A method to determine a fiducial point for holographic data storage is disclosed, which utilizes a gray-level frame to sequentially retrieve a regional image used as a retrieved image with the...
8811719 Inferring spatial object descriptions from spatial gestures  
Three-dimensional (3-D) spatial image data may be received that is associated with at least one arm motion of an actor based on free-form movements of at least one hand of the actor, based on...
8811662 Method and apparatus for calibrating and re-aligning an ultrasound image plane to a navigation tracker  
The present disclosure relates to acquiring image data of a subject with an imaging system that has been calibrated. The imaging system can include an ultrasound imaging system that collects one...
8798794 Method and system for highly precisely positioning at least one object in an end position in space  
An object is highly precisely moved by an industrial robot to an end position by the following steps, which are repeated until the end position is reached within a specified tolerance: Recording a...
8782879 Workpiece transfer apparatus  
A workpiece transfer apparatus includes a nozzle unit and an imaging unit. The nozzle unit includes a tubular body, a suction hole opening at one end of the tubular body and an end face member of...
8781213 Optical alignment systems for forming LEDs having a rough surface  
An alignment system for aligning a wafer when lithographically fabricating LEDs having an LED wavelength ╬╗LED is disclosed. The system includes the wafer. The wafer has a roughened alignment mark...
8781208 Inspection method and inspection apparatus  
The application relates to a method of inspecting an object and an inspection apparatus. The object has a plurality of features and the method includes the step of identifying a current primary...
8781211 Rotational multi-layer overlay marks, apparatus, and methods  
In one embodiment, a semiconductor target for determining overlay error, if any, between two or more successive layers of a substrate or between two or more separately generated patterns on a...
8774494 Method and system for accurate alignment and registration of array for DNA sequencing  
In a genome sequencing system and methodology, a protocol is provided to achieve precise alignment and accurate registration of an image of a planar array of nanoballs subject to optical analysis....
8768514 Image taking system and electronic-circuit-component mounting machine  
An image taking system including: (a) a lighting device capable of changing a light emission time to various time length values; (b) an image taking device configured to take an image of a subject...
8768040 Substrate identification and tracking through surface reflectance  
A method of identifying individual silicon substrates, and particularly solar cells, is disclosed. Every solar cell possesses a unique set of optical properties. The method identifies these...
8768041 Intelligent airfoil component surface imaging inspection  
A method for inspecting surfaces including acquiring a surface image from a surface of a component; providing an image registration for the surface image; inspecting the component in response to...
8754664 Inspection method and device  
The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the...
8750597 Robust inspection alignment of semiconductor inspection tools using design information  
A method of performing inspection alignment point selection for semiconductor devices includes importing, with a computer device, one or more semiconductor design files corresponding to an area of...
8745546 Mask overlay method, mask, and semiconductor device using the same  
A mask overlay method, and a mask and a semiconductor device using the same are disclosed. According to the disclosed mask overlay technique, test marks and front layer overlay marks corresponding...
8737719 Alignment unit control apparatus and alignment method  
An alignment unit control apparatus according to the present invention includes: an imaging section configured to control cameras to image a plurality of regions on a surface of a substrate to...
8724883 Method for inspecting measurement object  
An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern...
8687875 Comparator based acceleration for media quantization  
A method for comparator based quantization acceleration for an encoding process. The method includes computing coefficients for a discrete cosine transform encoding operation and determining a...
8675948 Mask inspection apparatus and mask inspection method  
A mask inspection apparatus includes irradiation means for irradiating a sample with an electron beam, electron detection means for detecting a quantity of electrons generated from the sample...
8675959 Computer-readable recording medium and image processing apparatus  
A computer-readable recording medium has stored therein an image processing program for causing a computer to execute a process including identifying, on a taken image of a jig having a plurality...