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9006972 |
Microplasma generator and methods therefor
A low-temperature, atmospheric-pressure microplasma generator comprises at least one strip of metal on a dielectric substrate. A first end of the strip is connected to a ground plane and the... |
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8993982 |
Switchable ion gun with improved gas inlet arrangement
A switchable ion gun switchable between a cluster mode setting for producing an ion beam substantially comprising ionised gas clusters and an atomic mode setting for producing an ion beam... |
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8969838 |
Systems and methods for protecting an EUV light source chamber from high pressure source material leaks
A device is described herein which may comprise a chamber, a fluid line, a pressurized source material in the fluid line, a component restricting flow of the source material into the chamber, a... |
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8933415 |
Laser ion source and heavy particle beam therapy equipment
One embodiment of a particle accelerator includes: a vacuum container with its inside evacuated to produce vacuum, the vacuum container being formed with a laser beam entrance window for allowing... |
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8872427 |
Plasma generating apparatus
A plasma generating apparatus includes: a power supply one of whose electrodes is connected to vacuum chamber walls of N vacuum chambers; an oscillator which outputs a pulse signal at every... |
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8866390 |
Hybrid plasma reactor
A hybrid plasma reactor includes a first plasma chamber for providing a first ring-shaped plasma discharge space, second plasma chambers providing a second plasma discharge space connected to the... |
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8835869 |
Ion sources and methods for generating an ion beam with controllable ion current density distribution
Ion sources and methods for generating an ion bean with a controllable ion current density distribution. The ion source includes a discharge chamber having an optical grid position proximate at a... |
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8835870 |
Targets for generating ions and treatment apparatuses using the targets
Provided is an ion beam treatment apparatus including the target. The ion beam treatment apparatus includes a substrate having a first surface and a second surface opposed to the first surface,... |
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8822947 |
Particle beam generating device
A particle beam generating device includes at least one accelerator unit for generating a particle beam and at least one emission unit for the output of the at least one particle beam onto a... |
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8803424 |
RF/VHF impedance matching, 4 quadrant, dual directional coupler with V RMS/IRMS responding detector circuitry
A physical vapor deposition system may include an RF generator configured to transmit an AC process signal to a physical vapor deposition chamber via an RF matching network. A detector circuit may... |
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8796932 |
Microscale digital vacuum electronic gates
Systems and methods in accordance with embodiments of the invention implement microscale digital vacuum electronic gates. In one embodiment, a microscale digital vacuum electronic gate includes: a... |
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8779400 |
Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample
An ion beam machining and observation method relevant to a technique of cross sectional observation of an electronic component, through which a sample is machined by using an ion beam and a... |
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8771480 |
Processing biomass and petroleum containing materials
Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful products, such as fuels. For example, systems can use feedstock materials, such as... |
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8773018 |
Tuning a dielectric barrier discharge cleaning system
Apparatus and methods for generating and optimizing a plasma discharge are provided. The device includes a plasma generating device, one or more sensors, and at least one controller for adjusting... |
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8759788 |
Ion source
In one embodiment an ion source includes an arc chamber and an emitter having a surface disposed in the arc chamber, where the emitter is configured to generate a plasma in the arc chamber. The... |
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8747624 |
Processing biomass containing materials
Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful products, such as fuels. For example, systems can use feedstock materials, such as... |
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8742665 |
Plasma source design
Embodiments of the present invention generally provide a plasma source apparatus, and method of using the same, that is able to generate radicals and/or gas ions in a plasma generation region that... |
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8736175 |
Current control in plasma processing systems
A plasma processing system for generating plasma to process at least a wafer. The plasma processing system includes a coil for conducting a current for sustaining at least a portion of the plasma.... |
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8736177 |
Compact RF antenna for an inductively coupled plasma ion source
An inductively coupled plasma ion source for a focused ion beam (FIB) system is disclosed, comprising an insulating plasma chamber with a feed gas delivery system, a compact radio frequency (RF)... |
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8735766 |
Cathode assembly and method for pulsed plasma generation
A cathode assembly and a method for generation of pulsed plasma are disclosed. The cathode assembly comprises a cathode holder connected to multiple longitudinally aligned cathodes, preferably of... |
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8729805 |
Plasma generator and discharge device and reactor using plasma generator
A plasma generator has a first member 2 containing a dielectric material, and an electrode group composed of a plurality of electrodes and including a first assembly 6 partially including a... |
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8729804 |
Switching module of adjusting a visual angle and related backlight system
A switching module capable of adjusting a visual angle is disclosed. The switching module includes an edge-type optical substrate, a light source disposed by a side of the edge-type optical... |
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8716938 |
Thermionic emission device
A thermionic emission device includes an insulating substrate, a patterned carbon nanotube film structure, a positive electrode and a negative electrode. The insulating substrate includes a... |
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8674607 |
Plasma processing apparatus and processing gas supply structure thereof
There is provided a plasma processing apparatus for generating inductively coupled plasma in a processing chamber and performing a process on a substrate accommodated in the processing chamber.... |
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8669543 |
System and method for generating extreme ultraviolet light, and laser apparatus
An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window... |
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8669538 |
Method of improving ion beam quality in an implant system
A system for improving ion beam quality is disclosed. According to one embodiment, the system comprises an ion source, having a chamber defined by a plurality of chamber walls; an RF antenna... |
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8669705 |
Stable surface wave plasma source
A surface wave plasma (SWP) source is described. The SWP source comprises an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a... |
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8633648 |
Gas conversion system
A gas conversion system using microwave plasma is provided. The system includes: a microwave waveguide; a gas flow tube passing through a microwave waveguide and configured to transmit microwaves... |
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8618501 |
Ion generating device for duct
Provided is an ion generating device for an air-conditioner duct, which can be easily attached to the inside of an existing air conditioner duct and can ensure a desired ion generation quantity.... |
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8610355 |
Reactor structure and plasma treatment apparatus
A distance from a negative output terminal of a secondary winding of the transformer to a feeding terminal of the cathode plate is longer than a distance from a positive output terminal of the... |
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8610354 |
Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge
The invention is related to a gas discharge-based radiation source which emits short-wavelength radiation, wherein an emitter is ionized and compressed by pulse-shaped currents between two... |
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8610353 |
Plasma generating apparatus, plasma processing apparatus and plasma processing method
An apparatus for generating plasma, comprises: a microwave generator configured to generate a microwave; a wave guide which is connected to the microwave generator, wherein the wave guide is... |
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8581494 |
Discharge lamp for GDS with an axial magnetic field
A glow discharge spectrometer discharge lamp includes: a lamp body having a vacuum enclosure connected to pump elements and to injector elements for injecting an inert gas into the enclosure; a... |
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8575565 |
Ion source apparatus and methods of using the same
An ion beam source that emits an ion beam in a direction of a substrate is provided. A cathode with a discharge opening defined therein is included. An anode is also included and spaced apart from... |
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8563924 |
Windowless ionization device
An ionization device comprises: a plasma source configured to generate a plasma. The plasma comprises light, plasma ions and plasma electrons. The plasma source comprises an aperture disposed such... |
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8536539 |
Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator
An ion beam generator includes a discharge tank for generating plasma that includes ions. A lead-out electrode has an annular grid portion provided with openings for leading out the ions generated... |
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8530832 |
Ion sources for improved ionization
Improved apparatuses and methods are provided for ionizing samples and analyzing the samples with mass spectrometry. |
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8525412 |
Method and system for selectively tuning the frequency of a resonator assembly for a plasma lamp
A plasma lamp system is described with the capability to tune the resonant frequency of the resonator of the plasma lamp system after the manufacturing process has been completed. The tuning... |
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8519355 |
Charged particle source
A charged particle source comprises at least one gas inlet configured to supply gas particles, at least one tip having a tip apex being biased to provide an electrical field for generating charged... |
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8487536 |
Dense plasma focus device and method
A dense plasma focus device is disclosed as having an anode with a non-constant radius and a cathode coupled to the anode, the cathode also having a non-constant radius. The anode and/or the... |
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8481965 |
Process for the production of electric energy by the extraction of electrons from atoms and molecules
The process of the present application facilitates the production of electric energy by the deliberate extraction of electrons from atoms and molecules of a gas, vapor, liquid, particulate solid,... |
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8482206 |
Transient plasma ball generation system at long distance
A new device based on very short pulsed discharges, generating plasmas balls and plumes over very long distances (up to several meters). These plasma balls travel in a dielectric guide at the end... |
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8481980 |
Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample
An ion beam machining and observation method relevant to a technique of cross sectional observation of an electronic component, through which a sample is machined by using an ion beam and a... |
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8439649 |
Sputter ion pump with enhanced anode
A sputter ion pump including an evacuateable envelope having a chamber, first and second cathodes and an anode disposed in the chamber. The anode can have an outer layer of a non-evaporable getter... |
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8415884 |
Stable surface wave plasma source
A surface wave plasma (SWP) source is described. The SWP source comprises an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a... |
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8338796 |
Electron beam emitter with slotted gun
An electron beam emitter includes an electron generator for generating electrons. The electron generator can have a housing containing at least one electron source for generating the electrons.... |
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8324592 |
Ion source and a method of generating an ion beam using an ion source
Multiple control electrodes are provided asymmetrically within the plasma chamber of an ion source at respective positions along the length of the plasma chamber. Biasing the control electrodes... |
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8324591 |
Method for generating a pulsed flux of energetic particles, and a particle source operating accordingly
A method for generating a pulsed flux of energetic particles comprises the following steps: —initiating an ion plasma at a first electrode (111) in a vacuum chamber (110) and allowing said plasma... |
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8304744 |
Closed drift ion source
A closed drift ion source is provided, having an anode that serves as both the center magnetic pole and as the electrical anode. The anode has an insulating material cap that produces a closed... |
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8294370 |
High frequency generator for ion and electron sources
A device for coupling ionization energy into an ion or electron source, which is excited inductively or inductively-capacitively is provided. The device includes: a discharge vessel for a gas,... |