Match Document Document Title
9041492 Unreleased mems resonator and method of forming same  
A microelectromechanical (MEM) resonator includes a resonant cavity disposed in a first layer of a first solid material disposed on a substrate and a first plurality of reflectors disposed in the...
9035513 Vibrator and portable information terminal having the vibrator  
It is possible to provide a vibrator configured so as to prevent the leakage of an adhesive out from between a frame and a diaphragm member and a portable information terminal having the vibrator....
9003887 Ultrasonic sensor  
An ultrasonic sensor includes a cylindrical case having a bottom and a side wall, a piezoelectric element attached to an inner bottom surface of the case, a terminal retainer configured to hold...
8981624 Temperature control of micromachined transducers  
A micromachined structure, comprises a substrate and a cavity in the substrate. The micromachined structure comprises a membrane layer disposed over the substrate and spanning the cavity.
8963401 Vibration actuator  
There is provided a vibration actuator including: a housing providing an internal space and including holes formed to allow the internal space to be in communication with the outside; a diaphragm...
8939556 Fluid ejection device  
A fluid ejection device includes a flexible membrane, an adhesive layer, a piezoelectric material layer, and first and second electrically conductive layers. The adhesive layer and the...
8928204 Piezoelectric vibration module  
Disclosed herein is a piezoelectric vibration module including a vibration plate that is surrounded by an upper case and a lower case, and includes a first stopper capable of preventing direct...
8914955 Method for manufacturing piezoelectric element and method for manufacturing liquid ejection head  
A method for manufacturing a piezoelectric element includes a process for forming a first conductive layer, a process for forming a piezoelectric layer having a region serving as an active region,...
8902023 Acoustic resonator structure having an electrode with a cantilevered portion  
An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A...
8899729 Piezoelectric actuator and liquid transport apparatus provided with piezoelectric actuator  
A piezoelectric actuator includes a vibration plate which is joined to a flow passage unit to cover a pressure chamber formed in the flow passage unit, a piezoelectric layer arranged on the...
8896183 Ultrasonic vibration device  
In an inner bottom surface of a case, a substantially oblong recess having a long axis and a short axis forms a vibration area. A piezoelectric element is bonded to the center of the recess. On...
8881353 Method of producing piezoelectric/electrostrictive film type device  
Provided is a method of producing a piezoelectric/electrorestrictive film type device including a vibrating laminate obtained by laminating electrode films and piezoelectric/electrorestrictive...
8878418 Thermoelectric generator  
A thermoelectric generator including a membrane maintained by lateral ends and capable of taking a first shape when its temperature reaches a first threshold and a second shape when its...
8872604 Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor  
A device includes: a first electrode having a first electrode thickness; a first acoustic propagation layer disposed on the first electrode, the first piezo-electric layer having a first acoustic...
8858447 Ultrasonic transducer and method of manufacturing the same  
An ultrasonic transducer and a method of manufacturing the same. The ultrasonic transducer includes a substrate, a supporting unit that is disposed on the substrate and comprises a through-hole, a...
8853915 Bonding on silicon substrate having a groove  
A method and apparatus for bonding on a silicon substrate are disclosed. An apparatus includes a membrane having a membrane surface, a groove in the membrane surface, a transducer having a...
8841819 Acoustic wave device  
An acoustic wave device includes: a first piezoelectric thin film resonator including a first lower electrode, a first upper electrode and a first piezoelectric film sandwiched between the first...
8829768 Haptic feedback device  
Disclosed is a haptic feedback device used in an electronic device for providing haptic feedback. The haptic feedback device includes an electronic board defining at least two supporting elements...
8819903 Manufacturing method of a piezoelectric element and a liquid ejecting head  
A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second...
8803405 Ultrasonic transducer, biological sensor, and method for manufacturing an ultrasonic transducer  
An ultrasonic transducer includes a resin substrate, a support film and a piezoelectric element. The resin substrate has an opening. The support film blocks off the opening in the resin substrate....
8798310 Optically clear diaphragm for an acoustic transducer and method for making same  
The present disclosure relates to a diaphragm that may be used with a mechanical-to-acoustical transducer. The diaphragm may include a layer of optically clear film, a damping layer and another...
8798293 Piezoelectric speaker  
A piezoelectric speaker includes a cover with a receiving space and a vibrating speaker unit accommodated in the receiving space. The vibrating speaker unit includes a piezoelectric oscillator...
8796904 Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer  
In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode, the...
8791776 Acoustic wave resonator having a gasket  
In one aspect of the invention, an acoustic wave device includes a substrate, an acoustic isolator formed in or on the substrate, a bottom electrode formed on the acoustic isolator, a...
8766510 Actuator  
The invention relates to a method of making an actuator comprising a plurality of force elements and an actuator made according to the method. The method comprises providing a coupler for coupling...
8766512 Integration of piezoelectric materials with substrates  
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a...
8749118 Vibrating actuator assembly  
A vibrating actuator assembly includes a diaphragm, at least one vibrator at the diaphragm and that vibrates when an electric signal is applied thereto, a vibration shaft having one end connected...
8749119 Piezoelectric device  
A piezoelectric device prevents damage to a piezoelectric thin film caused by etching and the manufacturing cost of the piezoelectric device is reduced. On a surface of a support layer formed on a...
8732921 Method for manufacturing piezoelectric actuator  
A method for manufacturing a piezoelectric actuator is disclosed that includes forming a vibration plate, forming a plurality of electrodes on the vibration plate, forming a piezoelectric layer on...
8723623 Acoustic wave device, method of manufacturing acoustic wave device and transmission apparatus  
An acoustic wave device includes a substrate and a plurality of piezoelectric thin film resonators formed over the substrate. Each of the plurality of the piezoelectric thin film resonators...
8713768 Method of producing piezoelectric actuator  
A method of producing a piezoelectric actuator includes a first electrode film forming process; a monomolecular film forming process; a pattering process of removing a monomolecular film having a...
8710716 Actuator, actuator structure and method of manufacturing actuator  
An actuator includes: a diaphragm having a thickness equal to or greater than 0.5 μm and equal to or less than 20 μm; a piezoelectric body layer which is provided on a first surface side of the...
8692631 Bulk acoustic wave resonator and method of fabricating same  
An acoustic resonator with improved quality factor and electro-mechanical coupling is disclosed. In one embodiment, the acoustic resonator includes an acoustic mirror formed on the top surface of...
8692441 Method for forming an ultrasonic transducer, and associated apparatus  
A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material...
8686619 Piezoelectric actuator, liquid transport apparatus, and method for producing piezoelectric actuator  
A piezoelectric actuator is provided, including a piezoelectric layer which is joined to a joining member and which has a coefficient of linear expansion smaller than a coefficient of linear...
8680746 Piezoelectric actuator and electronic device  
Provided is a small-size thin piezoelectric actuator which can be mounted on a mobile electronic device and operate with a low power consumption also provided is an electronic device which uses...
8664830 Ultrasonic device  
An ultrasonic device is configured to transmit ultrasonic waves and includes a substrate, a diaphragm, a piezoelectric member and a control unit. The substrate has an opening. The diaphragm covers...
8648671 Bulk acoustic wave resonator structure, a manufacturing method thereof, and a duplexer using the same  
A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a...
8624466 Component having stress-reduced mounting  
A component (1) is proposed wherein the suspension of the component (1) is effected in a stress-reduced manner. The component (1) can rest on a membrane (4) or be held by a spring element (2). The...
8610333 Acoustic wave devices  
In one aspect of the invention, an acoustic wave device includes a substrate, and at least one acoustic wave resonator having a bottom electrode adjacent to the substrate, a top electrode, a...
8584330 Method for manufacturing a piezoelectric actuator  
A method for manufacturing a piezoelectric actuator is provided. The method includes: forming a diffusion-preventive layer having an electrical conductivity on a partial surface thereof on a...
8586195 Method for forming an acoustic mirror with reduced metal layer roughness and related structure  
According to an exemplary embodiment, a method of forming a metal layer having reduced roughness includes a step of forming a seed layer over a dielectric layer. The method further includes a step...
8575822 Piezoelectric/electrostrictive actuator  
A piezoelectric/electrostrictive actuator, including a piezoelectric/electrostrictive element that includes at least one laminate including one piezoelectric/electrostrictive layer and one pair of...
8569927 Piezoelectric actuator unit and liquid transporting apparatus  
A piezoelectric actuator unit includes a piezoelectric layer, a first electrode and a second electrode which are arranged to be sandwiching the piezoelectric layer, and which form an active...
8569930 Piezoelectric actuator and audio components  
One object of the present invention is to an achieve increase of amplitude of vibrations and/or flattening of frequency dependence of the amplitude of a piezoelectric actuator. Piezoelectric...
8569931 Piezoelectric vibrator and electronic device using same  
A piezoelectric vibrator is used in an electronic device having a screen. The piezoelectric vibrator includes a diaphragm, at least one piezoelectric layer attached to the diaphragm, and a...
8544157 Method for producing a liquid transport apparatus  
A method for producing a liquid transport apparatus includes forming a recess, on a surface of a vibration plate on a side not facing the pressure chamber, in one of areas which are defined by...
8539655 Fabrication process for a piezoelectric mirror device  
A piezoelectric mirror device fabrication process, including: dividing a silicon wafer into a multiplicity of segments, wherein on one surface of said silicon wafer per segment, a pair of lower...
8536763 Ultrasonic transducer, ultrasonic sensor, method of manufacturing ultrasonic transducer, and method of manufacturing ultrasonic sensor  
An ultrasonic transducer includes: a support member having an opening section; a diaphragm adapted to cover the opening section; and a piezoelectric member provided to the diaphragm and at least...
8524571 Vacuum wafer level packaging method for micro electro mechanical system device  
Disclosed is a vacuum wafer level packaging method for a micro electro mechanical system device, including: forming a plurality of via holes on an upper wafer for protecting a micro electro...