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9034105 Solid precursor sublimator  
An apparatus and method for holding a solid precursor in a sublimator such that the solid precursor can be vaporized for saturating a carrier gas. The apparatus may include alternating disks or...
9034685 Methodology for forming pnictide compositions suitable for use in microelectronic devices  
The present invention provides methods for making pnictide compositions, particularly photoactive and/or semiconductive pnictides. In many embodiments, these compositions are in the form of thin...
9016675 Apparatus and method for supporting a workpiece during processing  
An apparatus for supporting a workpiece during processing of the workpiece is disclosed. The apparatus comprises: a chassis having a vacuum chamber that is connectable to a vacuum source; a...
9005365 Method and apparatus for depositing LED organic film  
In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic...
9004462 Method and apparatus to help promote contact of gas with vaporized material  
Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element...
9004002 Mask assembly having a plurality of projections at a boundary of adjacent two deposition masks  
A mask assembly is disclosed to improve organic material deposition efficiency including: a plurality of deposition masks, at least one of opposite ends of each of the plurality of deposition...
8999064 Apparatus for forming thin film  
A thin film forming apparatus according to the embodiment includes a plurality of vapor deposition sources respectively separated from each other, a plurality of nozzle bodies connected to upper...
8997528 Method for producing synthetic quartz glass  
A known method for producing synthetic quartz glass comprises the method steps of: forming a stream of a SiO2 feedstock material which contains octamethylcyclotetrasiloxane (D4) as the main...
8992684 Epitaxy reactor internal component geometries for the growth of superior quality group III-nitride materials  
The geometry of transition from cylindrical to rectangular shape through the conical part in hydride vapor phase epitaxial (HVPE) systems for deposition of III-nitride films is disclosed. It is...
8986455 Thermal evaporation sources for wide-area deposition  
A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant;a manifold body having within it a hollow expansion chamber that...
8986458 Plasma processing apparatus  
The present invention provides a plasma processing apparatus capable of bringing plasma close to a processing target and separating the plasma from the processing target. The plasma processing...
8986456 Precursor delivery system  
A precursor source vessel for providing vaporized precursor to a reaction chamber is provided. The precursor source vessel includes a lid having a first port, a second port, and a third port. The...
8986457 Evaporation source assembly, film deposition device and film deposition method  
An evaporation source assembly used for depositing film on a substrate is provided, the evaporation source assembly comprises: a body comprising a top element, a bottom element and side walls...
8984911 Atomizing method for producing synthetic quartz glass  
The present invention relates to a method for producing synthetic quartz glass, comprising the steps of: providing a liquid SiO2 feedstock material (105), which comprises more than 70% by wt. of...
8980008 Apparatus and methods for manufacturing thin-film solar cells  
Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in...
8973407 Method for producing synthetic quartz glass  
A method for producing synthetic quartz glass comprises providing a liquid SiO2 feedstock material containing mainly octamethylcyclotetrasiloxane D4, vaporizing the SiO2 feedstock material into a...
8961692 Evaporating apparatus  
Provided is an evaporating apparatus that deposits a deposition material onto a treatment object. The evaporating apparatus includes a base, a deposition source, and first and second correction...
8962077 Vapor deposition particle emitting device, vapor deposition apparatus, vapor deposition method  
A vapor deposition particle emitting device (30) includes a hollow rotor (40) provided with a first and a second nozzle sections (50 and 60), a rolling mechanism, and heat exchangers (52 and 62),...
8956458 Vapor deposition device and vapor deposition method  
A vapor deposition device includes a vapor deposition chamber, a heating chamber, a mixing chamber, a first reservoir for storing trichlorosilane gas, and a second reservoir for storing silane gas...
8951349 Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same  
A thin film deposition apparatus including a deposition source having a crucible to contain a deposition material and a heater to heat and vaporize the deposition material; a nozzle unit disposed...
8951350 Coating methods and apparatus  
An apparatus deposits a coating on a part. The apparatus comprises a chamber and a sting assembly for carrying the part. The sting assembly is shiftable between: an inserted condition where the...
8932682 Method for manufacturing a light emitting device  
It is an object of the present invention to provide a deposition device that can selectively form a thin film without using a shadow mask with respect to a substrate having a large size. In the...
8931506 Gas supply apparatus equipped with vaporizer  
An energy-saving, downsized gas supply apparatus equipped with a vaporizer is provided, wherein the gas supply apparatus is capable of stably and easily performing highly accurate gas flow rate...
8921142 Method and apparatus for manufacturing organic EL device  
Provided is a method and an apparatus for manufacturing an organic EL device which make it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for...
8920566 Wire feed pressure lock system  
A pressure lock system passes a wire along a wire path from a wire source at a high pressure first region to a destination at a low pressure second region. The pressure lock system includes a...
8911555 Method and device for coating substrates from the vapor phase  
In a method for coating substrates with materials to be vaporized in a vacuum coating system, the vaporization material is deposited on the substrate by double vaporization using an intermediate...
8904819 Evaporator with internal restriction  
An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the...
8899174 Device and method for fabricating display device  
A device for manufacturing a display device includes a deposition source; a deposition thickness calculator for calculating a deposition thickness of a deposition material deposited on a...
8900366 Apparatus for depositing a multilayer coating on discrete sheets  
A tool for depositing multilayer coatings onto a substrate. In one configuration, the tool includes a includes an in-line organic material deposition station operating under at least one of a...
8894770 Process and apparatus to treat metal surfaces  
A method for treating metal parts is provided that includes positioning a metal part within a reactor chamber, and positioning a boron containing solid form having a porosity of at least 10% by...
8894769 Material evaporation chamber with differential vacuum pumping  
The invention concerns a material evaporation chamber including a vacuum chamber (10), a first pumping unit (13) to pump said chamber and sources of material. According to the invention, a wall...
8889214 Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display  
A deposition amount measuring apparatus includes a plate-shaped body having a rotating shaft, a plurality of deposition amount sensors along side surfaces of the body, the deposition amount...
8888918 Vapor collection  
An apparatus for collecting condensed vapor during physical vapor deposition includes an enclosure configured to be placed adjacent to one or more vapor sources in a vacuum chamber. The enclosure...
8882920 Thin film deposition apparatus  
A thin film deposition apparatus to form a fine pattern on a large substrate. The thin film deposition apparatus includes a deposition source, a first nozzle that is disposed at a side of the...
8882921 Thin film deposition apparatus  
A thin film deposition apparatus capable of forming a precise deposition pattern on a large substrate includes a deposition source; a first nozzle disposed at a side of the deposition source...
8882918 Vapor deposition apparatus  
A vapor deposition apparatus (50) includes: a mask unit (54) including a vapor deposition source (70), a vapor deposition mask (60), and a mask holding member (80); a substrate holder (52); and at...
8882922 Organic layer deposition apparatus  
An organic layer deposition apparatus capable of reducing or minimizing shifting of a pattern, caused when a patterning slit sheet sags.
8876975 Thin film deposition apparatus  
A thin film deposition apparatus can be simply applied to produce large-sized display devices on a mass scale and improves manufacturing yield. The thin film deposition apparatus for forming a...
8869593 Condensation apparatus  
The invention provides an apparatus for increasing the size of gas-entrained particles in order to render the gas-entrained particles detectable by a particle detector, the apparatus comprising an...
8871027 Electrical contacts for use with vacuum deposition sources  
The present invention provides electrical contact assemblies can be used with vacuum deposition sources. In one exemplary application, the electrical contact assemblies of the present invention...
8866389 Plasma temperature control apparatus and plasma temperature control method  
The plasma temperature control apparatus includes a plasma generating section 40 that turns a plasma-generating gas into plasma, and a plasma-generating gas temperature control section 30 that...
8858710 Chemical solution vaporizing tank and chemical solution treating system  
An object is to suppress differences in concentration between processing gases supplied to a plurality of works in a chemical solution vaporizing tank. The chemical solution vaporizing tank...
8858714 Injector for a vacuum evaporation source  
An injector for a vacuum evaporation source includes an injection duct (1) having a longitudinal axis (11) and an inlet port (2) able to be connected to a vacuum evaporation source, and at least...
8852345 Method and apparatus for electronic device manufacture using shadow masks  
Electronic devices are formed on a substrate that is advanced stepwise through a plurality of deposition vessels. Each deposition vessel includes a source of deposition material and has at least...
8845808 Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device  
A vapor deposition device (50) in accordance with the present invention is a vapor deposition device for forming a film on a film formation substrate (60), the vapor deposition device including a...
8845807 Linear evaporation source and deposition apparatus having the same  
A linear evaporation source and a deposition apparatus having the same are disclosed. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and...
8846547 Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method  
A thin film deposition apparatus that is suitable for manufacturing large-sized display devices on a mass scale and that can be used for high-definition patterning, a method of manufacturing an...
8839740 Simple chemical vapor deposition systems for depositing multiple-metal aluminide coatings  
A chemical vapor deposition (CVD) system and method for applying an aluminide coating constituted by two or more extrinsic metal components on a jet engine component. The aluminide coating is...
8826856 Optical thin-film vapor deposition apparatus and optical thin-film production method  
An optical thin-film vapor deposition apparatus and method are capable of producing an optical thin-film by vapor depositing a vapor deposition substance onto substrates (14) within a vacuum...
8821638 Continuous deposition apparatus  
Provided is a continuous deposition apparatus wherein replacement operations of a feeding unit and a take-up unit are easily performed. The continuous deposition apparatus is provided with: a...