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US20140216156 ACCELERATION SENSOR  
An acceleration sensor includes a first and second anchors above a substrate, a first weight portion supported by the first anchor, a first electrode extended from the first weight portion, a...
US20120055249 PHYSICAL QUANTITY SENSOR  
A physical quantity sensor includes an anchor portion, a movable portion displaceable in a height direction, a supporting portion rotatably connected to the anchor portion and the movable portion,...
US20140298909 Micro-Electromechanical Structure with Low Sensitivity to Thermo-Mechanical Stress  
The invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of compensating the effect of the thermo-mechanical stress by incorporating and...
US20110252887 Electrical Damping for Isolation and Control of Mems Sensors Experiencing High-G Launch  
A system and method for damping undesired motion of a suspended structure that is connected by one or more flexures that have an elastic limit to a fixed structure in a MEMS sensor, wherein the...
US20120024064 TECHNIQUES FOR APPROXIMATING A DIFFERENCE BETWEEN TWO CAPACITANCES  
A system includes a capacitance adjustment module and a control module. The capacitance adjustment module is configured to connect one or more of N capacitors in parallel with one of a first and...
US20110132089 Inertial Sensor  
In order to provide an inertial sensor such as an acceleration sensor which can be downsized and in which a high SNR can be obtained as having a plurality of measurement ranges, an inertial sensor...
US20120240679 TETHERED, LEVITATED-MASS ACCELEROMETER  
The present invention has three aspects: 1. A concept for a force-balanced accelerometer in which the proof mass is levitated inside an enclosure and has an electrically conductive path to the...
US20120042729 MEMS accelerometer with enhanced structural strength  
The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) accelerator with enhanced structural strength. The MEMS accelerator is located on a substrate, and it includes:...
US20140298910 MICROELECTROMECHANICAL Z-AXIS OUT-OF-PLANE STOPPER  
The present invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of incorporating z-axis out-of-plane stoppers that are controlled to...
US20110132088 FLEXURE ASSEMBLIES AND METHODS FOR MANUFACTURING AND USING THE SAME  
In one embodiment, an accelerometer includes a suspension frame, a proof mass, and a plurality of flexures suspending the proof mass from the suspension frame. The flexures allow the proof mass to...
US20110219875 FORCE SENSOR WITH REDUCED NOISE  
A MEMS or NEMS device for detecting a force following a given direction, comprising a support (4) and at least one seismic mass (2) capable of moving under the effect of the force to be measured...
US20140360268 ANCHOR-TILT CANCELLING ACCELEROMETER  
Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or...
US20120125104 ANCHOR-TILT CANCELLING ACCELEROMETER  
Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or...
US20110296915 MULTI-AXIS CAPACITIVE ACCELEROMETER  
A accelerometer includes a base, a pair of fixed sensing blocks anchored to the base, a plurality of elastic linkages connected to the base, and a movable sensing block sandwiched between the pair...
US20110265568 Stacked lateral overlap transducer (slot) based three-axis accelerometer  
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using accelerometers. Some such accelerometers include a...
US20120125103 Z-AXIS CAPACITIVE ACCELEROMETER  
A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical...
US20140305211 VARIABLE CAPACITANCE ACCELEROMETER WITH MEANDERING FLEXURES  
An accelerometer comprises a support (12), a proof mass (14) supported for movement relative to the support (12) by a plurality of mounting legs (16), a plurality of fixed capacitor fingers...
US20130067984 LINEARITY ENHANCEMENT OF CAPACITIVE TRANSDUCERS BY AUTO-CALIBRATION USING ON-CHIP NEUTRALIZATION CAPACITORS AND LINEAR ACTUATION  
A system and method are disclosed for automatically calibrating capacitive transducers to neutralize feed-through capacitance using linear actuation. The method includes starting with an initial...
US20130327147 Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method  
A micromechanical device measures an acceleration, a pressure or the like. It comprises a substrate having at least one fixed electrode, a seismic mass moveably arranged on the substrate, at least...
US20090095079 BULK ACOUSTIC WAVE ACCELEROMETERS  
Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant...
US20120186347 MEMS SENSOR WITH DUAL PROOF MASSES  
A microelectromechanical systems (MEMS) sensor (20) includes a substrate (26) and suspension anchors (34, 36) formed on a planar surface (28) of the substrate (26). The MEMS sensor (20) further...
US20150096377 Systems and methods to determine stiction failures in MEMS devices  
Various embodiments of the invention provide for stiction testing in MEMS devices, such as accelerometers. In certain embodiments, testing is accomplished by a high voltage smart circuit that...
US20100300203 SENSOR FOR DETECTING ACCELERATION AND ANGULAR VELOCITY  
A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes,...
US20130247667 ACCELEROMETER  
An accelerometer comprises a support, a first mass element and a second mass element, the mass elements being rigidly interconnected to form a unitary movable proof mass, the support being located...
US20110067495 MICROMACHINED ACCELEROMETER WITH MONOLITHIC ELECTRODES AND METHOD OF MAKING THE SAME  
A capacitive accelerometer having one or more micromachined acceleration sensor assembly is disclosed. The acceleration sensor assembly comprises a spring-mass-support structure, a top cap and a...
US20100107763 TRANSDUCER WITH DECOUPLED SENSING IN MUTUALLY ORTHOGONAL DIRECTIONS  
A microelectromechanical systems (MEMS) transducer (90) is adapted to sense acceleration in mutually orthogonal directions (92, 94, 96). The MEMS transducer (90) includes a proof mass (100)...
US20130192371 ACCELERATOR SENSOR STRUCTURE AND USE THEREOF  
A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection...
US20090116675 MEMS DIAPHRAGM STRUCTURE AND METHOD FOR FORMING THE SAME  
A diaphragm (14) is formed using MEMS technology. The diaphragm (14) has a hinge structure, and at least one of a hinge upper corner portion and a hinge lower corner portion of the diaphragm (14)...
US20090308159 Micromechanical Acceleration Sensor  
With a sensor having a centrifugal mass in the form of a balancing rocker which is deflectable in the z-direction, to avoid asymmetrical clipping in the case of lever arms of the balancing rocker...
US20110023606 MICROMECHANICAL ACCELERATION SENSOR  
A micromechanical acceleration sensor, including at least one substrate, one or more frames, at least a first frame of which is suspended directly or indirectly on the substrate by at least one...
US20100024553 MICROMECHANICAL Z-SENSOR  
A micromechanical z-sensor includes a sensitivity, a torsion spring, and a seismic additional mass, the torsion spring having a spring width, and the seismic additional mass including webs having...
US20110011182 CAPACITIVE ACCELERATION SENSOR  
A capacitive acceleration sensor includes an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration, a sealing structure...
US20150122024 Accelerometer with Offset Compensation  
An accelerometer has a movable mass suspended above a substrate, and a variable acceleration capacitor supported by the substrate. The movable mass has a mass anchor securing the mass to the...
US20150040668 INERTIAL DEVICE WITH PEDOMETER FUNCTION AND PORTABLE ELECTRIC APPLIANCE INCORPORATING SAID INERTIAL DEVICE  
An inertial device that is integratable in a portable electronic device includes: an inertial sensor for generating at least one raw acceleration signal in response to accelerations caused by...
US20130042686 INERTIA SENSING APPARATUS  
The invention relates to an inertia sensing apparatus, comprising a substrate, a first and second inertia sensing elements. The first inertia sensing element is connected to a substrate and has a...
US20140251012 PSEUDO-DIFFERENTIAL ACCELEROMETER WITH HIGH ELECTROMAGNETIC INTERFERENCE REJECTION  
A pseudo-differential accelerometer resistant to EMI is disclosed that includes a device with a sensor core connected to an integrated circuit including a chopper, differential amplifier, and...
US20140283605 HIGH-SENSITIVITY, Z-AXIS MICRO-ELECTRO-MECHANICAL DETECTION STRUCTURE, IN PARTICULAR FOR AN MEMS ACCELEROMETER  
A z-axis micro-electro-mechanical detection structure, having a substrate defining a plane and a suspended mass carried by two anchorage elements. The suspended mass includes a translating mass,...
US20130319117 MEMS SENSOR WITH STRESS ISOLATION AND METHOD OF FABRICATION  
A MEMS sensor (20, 86) includes a support structure (26) suspended above a surface (28) of a substrate (24) and connected to the substrate (24) via spring elements (30, 32, 34). A proof mass (36)...
US20120167685 IN-PLANE CAPACITIVE MEMS ACCELEROMETER  
A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass—formed from a single...
US20100313660 MEMS DEVICE AND METHOD OF FABRICATING THE MEMS DEVICE  
A MEMS device capable of detecting external force with high sensitivity is disclosed. The MEMS device includes: first and second support portions arranged on a substrate; a first movable portion...
US20150241467 MICROELECTROMECHANICAL STRUCTURE WITH FRAMES  
A robust microelectromechanical structure that is less prone to internal or external electrical disturbances. The structure includes a mobile element with a rotor suspended to a support, a first...
US20120160029 ACCELERATION SENSOR  
An acceleration sensor of the present invention comprises a first mass body which is held by first beams and can be displaced by acceleration, fixed electrodes which are so arranged as to convert...
US20140338452 TRI-AXIAL MEMS ACCELEROMETER  
A tri-axial MEMS accelerometer includes a top cap silicon wafer and a bottom cap silicon wafer coupled with a measurement mass. The measurement mass has a two level structure, each level having an...
US20140352434 EXTENDED-RANGE CLOSED-LOOP ACCELEROMETER  
A microelectromechanical systems (MEMS) accelerometer with extended operational capabilities beyond a closed-loop saturation. The present invention combines the closed-loop feedback signal and the...
US20110138913 VERTICAL ACCELEROMETER  
Provided is a vertical accelerometer for measuring acceleration applied perpendicular to a substrate to increase sensitivity thereof. The vertical accelerometer includes a substrate, and a...
US20140338450 Acceleration sensor  
An acceleration sensor having a substrate and a seismic mass; the acceleration sensor has a main extension plane and includes a spring device, via which the substrate and the seismic mass are...
US20150260752 ACCELERATION SENSOR  
An acceleration sensor includes: an X detection portion that detects acceleration in an X direction by swinging a first movable electrode about a pair of beam portions; a Y detection portion that...
US20150233966 Rocker device for a micromechanical z sensor  
A rocker device for a micromechanical Z sensor includes: two trough-shaped rocker arms mountable around a torsion pivot, the rocker device being configured asymmetrically with respect to the...
US20110179871 TILT SENSOR UNIT  
Acceleration sensors and a microcomputer are mounted on a sensor mounting board. At this time, the accelerations sensors are arranged so that, even in the case where any detection axes of the...
US20120152020 INERTIAL SENSOR  
Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the...

Matches 1 - 50 out of 328 1 2 3 4 5 6 7 >