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US20140026658 MEMS DEVICE AND A METHOD OF USING THE SAME  
A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a...
US20140026660 MEMS DEVICE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism...
US20150033855 MEMS DEVICE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism...
US20140345379 Microgyroscope for Determining Rotational Movements About Three Spatial Axes which are Perpendicular to One Another  
A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (I) on which a plurality of masses (2, 3)...
US20140026661 MEMS DEVICE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism...
US20140026659 MEMS DEVICE AND A METHOD OF USING THE SAME  
A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a...
US20150033856 MEMS GYROSCOPE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a driving mechanism, a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass. The MEMS...
US20150033854 MEMS GYROSCOPE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic...
US20160154020 MEMS GYROSCOPE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass, wherein the magnetic sensing...
US20160154070 WAFER BONDING METHOD FOR USE IN MAKING A MEMS GYROSCOPE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a...
US20150226555 MEMS GYROSCOPE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism...
US20140190257 MEMS DEVICE AND A METHOD OF USING THE SAME  
A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a...
US20160153780 MEMS GYROSCOPE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprises a movable portion capable of moving in response to angular velocity, a conducting wire attached to the movable portion...
US20070119258 Resonant vibratory device having high quality factor and methods of fabricating same  
The invention provides resonant vibratory sensors to render such resonant vibratory sensors more beneficial than conventional MEMS-based and non-MEMS-based resonant vibratory sensors for various...
US20070272015 ANGULAR RATE SENSOR  
An angular rate sensor formed into a planar shape, which detects an angular rate around a first axis in the plane, includes a rotating oscillator rotatably supported in the plane and around the...
US20130263661 PHYSICAL QUANTITY DETECTION DEVICE, PHYSICAL QUANTITY DETECTOR, ELECTRONIC APPARATUS, AND MANUFACTURING METHOD OF PHYSICAL QUANTITY DETECTION DEVICE  
A physical quantity detection device includes a base; a movable body that is supported by the base, and is displaced depending on a physical quantity; a physical quantity detection element that is...
US20140116135 INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE  
An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first...
US20100302385 ANGULAR VELOCITY SENSOR, AMPLIFICATION CIRCUIT OF ANGULAR VELOCITY SIGNAL, ELECTRONIC APPARATUS, SHAKE CORRECTION APPARATUS, AMPLIFICATION METHOD OF ANGULAR VELOCITY SIGNAL, AND SHAKE CORRECTION METHOD  
An angular velocity sensor includes a sensor device and an amplification circuit. The sensor device generates a detection signal corresponding to an angular velocity. The amplification circuit...
US20140116136 MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE  
An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the...
US20130111992 PROOF MASS POSITIONING FEATURES HAVING TANGENTIAL CONTACT SURFACES  
A micro electromechanical system (MEMS) includes a substrate, a first curved surface located at a position above a surface of the substrate, and a second curved surface generally opposite to the...
US20100058861 Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers  
Transducers comprising a frame structure made of piezoelectric material convert energy, through piezoelectric effect, between electrostatic energy associated with voltage differential between the...
US20160154019 MEMS GYROSCOPE  
A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprises a movable portion capable of moving in response to angular velocity, a conducting wire attached to the movable portion...
US20070220973 Multi-axis micromachined accelerometer and rate sensor  
Multi-axis micromachined accelerometer and rate sensor having first and second generally planar masses disposed side-by-side and connected together along adjacent edge portions thereof for...
US20070062282 Combined sensor and its fabrication method  
A sensor structure using vibrating sensor elements which can detect an angular rate and accelerations in two axes at the same time is provided. 2 sets of vibration units which vibrate in...
US20050284223 Piezoelectric vibrating segment, supporting structure for piezoelectric vibrating segment, piezoelectric vibrator, and piezoelectric vibrating gyroscope  
Aspects of the invention can provide piezoelectric vibrating segment, a supporting structure for the piezoelectric vibrating segment, piezoelectric vibrator, and the piezoelectric vibrating...
US20160291050 Inertial Sensor  
An inertial sensor includes a first sensor element, which is damped against vibrations from an interface of the inertial sensor by a damping element. The first sensor element is configured to...
US20060243049 Angular velocity sensor  
An angular velocity sensor includes a vibrator sensing an angular velocity, and a package on which the vibrator is mounted. The vibrator is arranged in a diagonal direction of the package. The...
US20110179868 PHYSICAL QUANTITY SENSOR SYSTEM AND PHYSICAL QUANTITY SENSOR DEVICE  
A physical quantity sensor system drives a physical quantity sensor and detects a physical quantity signal from a sensor signal. An analog-to-digital conversion circuit respectively converts a...
US20140116134 MICROMECHANICAL STRUCTURE  
Micromechanical structure, in particular a yaw rate sensor having a substrate including a main plane of extent for detecting a first yaw rate about a first direction perpendicular to the main...
US20160362291 MICROMECHANICAL COMPONENT HAVING A SPLIT, GALVANICALLY ISOLATED ACTIVE STRUCTURE, AND METHOD FOR OPERATING SUCH A COMPONENT  
A micromechanical component comprises a substrate and an active structure which can be deflected in at least one direction relative to the substrate and which has at least a first region and a...
US20090282914 Acceleration sensor having a surrounding seismic mass  
A micromechanical acceleration sensor has a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, which seismic mass is suspended over the substrate with the aid of the...
US20170176186 ANGULAR VELOCITY SENSOR HAVING SUPPORT SUBSTRATES  
An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an...
US20050268716 BUILT IN TEST FOR MEMS VIBRATORY TYPE INERTIAL SENSORS  
The present invention provides a MEMS vibratory type inertial sensor that has some level of built in test to help improve the reliability by helping to identify erroneous or misleading data...
US20110146401 ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS  
Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about...
US20100126271 INERTIAL VELOCITY SENSOR SIGNAL PROCESSING CIRCUIT AND INERTIAL VELOCITY SENSOR DEVICE INCLUDING THE SAME  
An inertial velocity sensor signal processing circuit (12, 13, 14) used together with an inertial velocity sensor element (11) includes a first signal processing circuit (12, 13) which operates...
US20140144232 SPRING FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE  
A MEMS device (20) includes a substrate (28) and a drive mass (30) configured to undergo oscillatory motion within a plane (24) substantially parallel to a surface (50) of the substrate (28). The...
US20120318059 SENSOR DEVICE AND MANUFACTURING METHOD THEREOF  
A sensor device includes an IC chip as a semiconductor device having a first electrode and a second electrode on a first surface, a frame-like fixing member provided to surround the first...
US20100122577 EVALUATION ELECTRONICS SYSTEM FOR A ROTATION-RATE SENSOR  
An evaluation electronics system for a rotation-rate sensor, having a first and a second seismic mass, is developed for the purpose of ascertaining a rotation rate, acting on the rotation-rate...
US20120073370 MICROMECHANICAL STRUCTURE  
A micromechanical structure, in particular an acceleration sensor, is described, having a substrate, a seismic mass, which is movable relative to the substrate, and at least one anchoring element,...
US20060201248 Vibrating gyro element  
A vibrating gyro element that is formed of a piezoelectric material having a trigonal crystal structure and having a trigonal axis with respect to the Y-axis, includes a base portion, a detection...
US20060112764 Angular velocity detector having inertial mass oscillating in rotational direction  
An angular velocity detector includes a disk-shaped inertial mass supported on a substrate via driving beams and a second mass connected to the inertial mass via detecting beams. The inertial mass...
US20160146605 GYRO SENSOR, ELECTRONIC APPARATUS, AND MOVING BODY  
A gyro sensor includes a substrate, a first vibrating body and a second vibrating body, first suspension springs that support the first vibrating body, second suspension springs that support the...
US20150276404 PHYSICAL QUANTITY DETECTION CIRCUIT, PHYSICAL QUANTITY DETECTING DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT  
A physical quantity detection circuit includes a filter circuit, and a synchronous detection circuit that is provided at a downstream of the filter circuit and detects a signal in response to a...
US20140083189 Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain  
The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides...
US20100132464 MOTION ASSISTING DEVICE  
According to a motion assisting device 10 of the present invention, “second setting processing” is exceptionally performed in a situation where it is likely that the motion mode of an agent P gets...
US20100071467 INTEGRATED MULTIAXIS MOTION SENSOR  
A system and method describes an inertial sensor assembly, the assembly comprises a substrate parallel to the plane, at least one in-plane angular velocity sensor comprising a pair proof masses...
US20060032307 Solid-state rotational rate sensor device and method  
The present invention provides a solid-state rotational rate sensor device formed by a thin-film for generating an electrical voltage output proportional to the rate of rotational motion. The...
US20170153266 SYSTEMS AND METHODS FOR DETERMINING INERTIAL PARAMETERS USING INTEGRATION  
System and methods are disclosed herein for integrating to determine inertial parameters. A resonator produces an input pulse stream based on the inertial parameter. A window circuit selects a...
US20140298908 VIBRATION ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT  
A vibration element includes a base section, a support arm extending from the base section, a driving vibration arm extending from the support arm in a direction intersecting with the extending...
US20130291639 VIBRATING PIECE AND MANUFACTURING METHOD FOR THE VIBRATING PIECE, GYRO SENSOR, AND ELECTRONIC APPARATUS AND MOBILE BODY  
A vibrating piece includes a driving arm at least partially formed by a piezoelectric body, the driving arm including a first surface spreading along the direction of excited vibration, a second...
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