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US20050038550 Program product and data processing system  
In the present invention, an input and/or output interface of at least one of a plurality of processing units forming a data processing system is designated independently of timing of execution of...
US20100131093 FABRICATION SYSTEM AND FABRICATION METHOD  
A fabricating method for a system that includes a plurality of processing apparatuses connected to each other by an inter-apparatus transporter and a computer storing managing information of...
US20100125357 VERTICALLY SEPARATED PASS THROUGH CONVEYOR SYSTEM AND METHOD IN SURFACE MOUNT TECHNOLOGY PROCESS EQUIPMENT  
Disclosed herein is a modular system for manufacturing printed circuit boards. The system comprises a plurality of pieces of processing equipment including at least one assembly material...
US20050159911 Method and apparatus for automatic sensor installation  
Graphical User Interfaces (GUIs) are presented for configuring and setting-up sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing...
US20070027569 Semiconductor production system  
A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor...
US20050119843 Semiconductor production system  
A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor...
US20070116873 Apparatus for thermal and plasma enhanced vapor deposition and method of operating  
A method, computer readable medium, and system for vapor deposition on a substrate that maintain a first assembly of the vapor deposition system at a first temperature, maintain a second assembly...
US20160370797 System and Method for Monitoring Parameters of a Semiconductor Factory Automation System  
A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more...
US20120064717 METHOD FOR FORMING CVD-RU FILM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES  
In a CVD-Ru film forming method, an Ru-film is formed on a substrate by means of CVD using a ruthenium carbonyl as a film-forming material before forming a Cu film. Then the substrate on which the...
US20110029124 PROGRAM CONTROLLED DICING OF A SUBSTRATE USING A PULSED LASER BEAM  
A substrate is diced using a program-controlled pulsed laser beam apparatus having an associated memory for storing a laser cutting strategy file. The file contains selected combinations of pulse...
US20070116872 Apparatus for thermal and plasma enhanced vapor deposition and method of operating  
A method, computer readable medium, and system for vapor deposition on a substrate that disposes a substrate in a process space of a processing system that is vacuum isolated from a transfer space...
US20050240895 Method of emulation of lithographic projection tools  
Techniques for producing emulations of lithographic tools and processes using virtual wafers and lithographic libraries are described. Emulating a lithographic projection imaging machine includes...
US20070004186 Film forming method  
A film forming method is provided for forming a thin film including a metal on a substrate by alternately supplying the substrate with a film forming material including the metal and a reducing...
US20070116888 Method and system for performing different deposition processes within a single chamber  
A method, computer readable medium, and system for vapor deposition on a substrate that introduce a first process gas composition to a process space according to a first vapor deposition process,...
US20070111338 Method of controlling trimming of a gate electrode structure  
A method and processing tool are provided for controlling trimming of a gate electrode structure containing a gate electrode layer with a first dimension by determining the first dimension of the...
US20070224839 HEAT TREATING APPARATUS, HEAT TREATING METHOD AND STORAGE MEDIUM  
A heat treating apparatus, which performs a specified heat treatment on a target object, includes a processing chamber accommodating therein the target object; a mounting table for mounting...
US20090046921 PICK AND PLACE MACHINE WITH IMPROVED COMPONENT PICK UP INSPECTION  
Embodiments of the present invention improve upon component level inspection performed by pick and place machines. Such improvements include inspecting the pick operation in pick and place...
US20080073114 TECHNIQUE FOR PLATING SUBSTRATE DEVICES USING VOLTAGE SWITCHABLE DIELECTRIC MATERIAL AND LIGHT ASSISTANCE  
An electroplating process is performed using a substrate that includes a thickness of voltage switchable dielectric (VSD) material having photoactive components that are dispersed, mixed or...
US20070293974 Substrate Processing System Managing Apparatus Information of Substrate Processing Apparatus  
A substrate processing apparatus and an information storage server are connected with each other through a network. A storage part of the substrate processing apparatus stores set information and...
US20070169694 Feedback control of sub-atmospheric chemical vapor deposition processes  
A method of film deposition in a sub-atmospheric chemical vapor deposition (CVD) process includes (a) providing a model for sub-atmospheric CVD deposition of a film that identifies one or more...
US20060235563 METHOD AND APPARATUS FOR PROVIDING INTRA-TOOL MONITORING AND CONTROL  
An apparatus for performing intra-tool monitoring and control within a multi-step processing system. The apparatus provides a metrology station located between each of a plurality of semiconductor...
US20050084987 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece  
A facility for selecting and refining electrical parameters for processing a microelectronic workpiece in a processing chamber is described. The facility initially configures the electrical...
US20060246820 EXTENDED KALMAN FILTER INCORPORATING OFFLINE METROLOGY  
An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop...
US20070203607 Semiconductor manufacturing apparatus, remote control system therefor, and remote operation device  
A remote control system for one or more semiconductor manufacturing apparatuses is provided with a supervisory device that control one or more of the semiconductor manufacturing apparatuses and a...
US20050132962 Pipe structure, alignment apparatus, electron beam lithography apparatus, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor device manufacturing factory  
An exposure apparatus includes a movable stage which aligns a substrate in a vacuum chamber, and a pipe structure coupled to the stage. The pipe structure has a double pipe having a resin inner...
US20080124206 WAFER TRANSFER APPARATUS  
A wafer transfer apparatus capable of improving working efficiency by simultaneously and selectively transferring a desired amount of wafers to shorten a wafer transfer time. The wafer transfer...
US20090204252 SUBSTRATE PROCESSING METHOD AND APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND STORAGE MEDIUM  
A substrate processing method includes a first step of forming a metal complex by allowing a processing gas containing an organic compound to be adsorbed by a metal layer formed on a target...
US20090085172 Deposition Method, Deposition Apparatus, Computer Readable Medium, and Semiconductor Device  
A deposition method includes steps of placing a substrate on a susceptor in a process chamber; supplying to the process chamber a source gas including an organic compound and a plasma gas for...
US20080167890 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS  
Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical...
US20060231032 Film-forming method and apparatus using plasma CVD  
The object of the present invention is to provide a plasma chemical vapor deposition method and apparatus capable of preventing local electric discharge at the peripheral portion of the susceptor....
US20050010319 System and method for validating and visualizing APC assisted semiconductor manufacturing processes  
A system and/or methodology that facilitates verifying and/or validating an APC assisted process via simulation is provided. The system comprises a film stack representation and a canonical model....
US20060184266 Method for making thin film devices intended for solar cells or silicon-on-insulator (SOI) applications  
In one inventive aspect, a thin film device is manufactured by (a) forming a porous semiconductor layer in the form of a thin film on an original substrate, the formation being immediately...
US20170115657 Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ  
A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side,...
US20090191716 POLYSILICON LAYER REMOVING METHOD AND STORAGE MEDIUM  
A polysilicon layer removing method capable of substantially removing etching residue, while improving the shape of an etching boundary is disclosed. The method for removing the polysilicon layer...
US20070122920 Method for improved control of critical dimensions of etched structures on semiconductor wafers  
A system for real-time monitoring and control of critical dimensions during semiconductor wafer fabrication is provided. The system measures structures in situ, that is, as they are being etched...
US20160125757 OPERATOR SUPPORT SYSTEM, OPERATOR SUPPORT METHOD AND COMPONENT MOUNTING APPARATUS  
An operator support system includes a controller which controls a component mounting apparatus. The controller includes: an input unit which receives an operator ID; a display unit which displays...
US20070288116 METHOD, SYSTEM AND MEDIUM FOR CONTROLLING SEMICONDUCTOR WAFER PROCESSES USING CRITICAL DIMENSION MEASUREMENTS  
Methods, systems, and mediums of controlling a semiconductor manufacturing process are described. The method comprises the steps of measuring at least one critical dimension of at least one device...
US20050209720 Industrial machine management system, and method  
A system for quickly and easily optimizing the parameters of an industrial machine or solving any trouble in industrial machine is provided. A factory (100) and vendor (200) are connected through...
US20140046475 METHOD AND APPARATUS DEPOSITION PROCESS SYNCHRONIZATION  
Methods and apparatus for processing a substrate in a process chamber, include receiving process control parameters for one or more devices from a process controller to perform a first chamber...
US20120253499 COMPONENT MOUNTING DEVICE, INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND SUBSTRATE MANUFACTURING METHOD  
A component mounting device which is provided with a plurality of feeders which contain a component, are able to store component information which is information which includes information on the...
US20070012337 IN-LINE METROLOGY FOR SUPERCRITICAL FLUID PROCESSING  
The system includes a metrology module coupled to a supercritical processing chamber, and the method includes positioning a substrate on a substrate holder in a metrology chamber, measuring a...
US20050065630 Method and apparatus for simplified system configuration  
A GUI is presented for configuring and initializing a semiconductor processing system, which includes a number of processing tools, a number of processing modules, a number of sensors, a number of...
US20090105868 Method For Assembling A Customized Printed Circuit Board  
A system and a method are provided for assembling a customized printed circuit board having at least one electrical component. The system includes an input device for allowing a user to input...
US20150301524 METHODS AND APPARATUS FOR CLEANSPACE FABRICATORS  
The present disclosure provides various apparatus and methods for novel cleanspace fabricator designs. In some examples, a cleanspace fabricator may be comprised of vertically stacked tools...
US20130268106 REMOTE MONITORING SYSTEM FOR POLISHING END POINT DETECTION UNITS  
The present invention relates to a remote monitoring system for polishing end point detection units mounted to polishing apparatuses for polishing wafers, such as substrates. The remote monitoring...
US20110076789 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS  
To reduce the number of photomasks for forming an ion injection mask, then reduce a manufacturing cost of a semiconductor device, accurately control a shape and a position of an ion implantation...
US20100138016 EXTENDABLE MES FOR CROSS-AMHS TRANSPORTATION  
A cross-semiconductor fabrication (fab) facility transportation system and method for cross-fab transportation is provided. An exemplary method for cross-fab transportation includes providing a...
US20080208372 SCHEDULING WITH NEURAL NETWORKS AND STATE MACHINES  
Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical...
US20050137734 Method of operating a lithographic apparatus or lithographic processsing cell, lithographic apparatus and lithographic processing cell  
A method of generating a schedule for operation of a machine forming at least a part of a lithographic apparatus or a lithographic processing cell is disclosed. In the method, a plurality of...
US20090275202 SILICON STRUCTURE HAVING AN OPENING WHICH HAS A HIGH ASPECT RATIO, METHOD FOR MANUFACTURING THE SAME, SYSTEM FOR MANUFACTURING THE SAME, AND PROGRAM FOR MANUFACTURING THE SAME, AND METHOD FOR MANUFACTURING ETCHING MASK FOR THE SILICON STRUCTURE  
Provided are a silicon structure having an opening which has a high aspect ratio and an etching mask for forming the silicon structure. A step of performing hole etching or trench etching of...
Matches 1 - 50 out of 205 1 2 3 4 5 >