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US20050177267 Tank scheduling optimization for replicated chemical in a semiconductor manufacturing wet bench  
The present disclosure provides a system and method for identifying a tank containing a liquid from N number of tanks in a semiconductor manufacturing facility into which a batch of semiconductor...
US20090306807 MULTIDIMENSIONAL PROCESS WINDOW OPTIMIZATION IN SEMICONDUCTOR MANUFACTURING  
A method for optimizing multiple process windows in a semiconductor manufacturing process is disclosed. The message comprises performing dependent variable composition on a plurality of dependent...
US20150253765 TEACHING JIG, TEACHING SYSTEM, AND TEACHING METHOD  
A teaching jig includes a body portion and at least three light emitting units installed on the body portion. In the teaching jig, all the light emitting units are positioned, when the body...
US20090292388 SEMICONDUCTOR MANUFACTURING SYSTEM  
An object of the present invention is to provide a semiconductor manufacturing system used for manufacturing a semiconductor in a semiconductor manufacturing facility according to a flow shop...
US20130116814 FEEDFORWARD CONTROL ADJUSTED WITH ITERATIVE LEARNING  
A method for controlling a mover assembly (220C) includes the steps of: (i) providing a control system (224) that includes a feedback control (440), an iterative learning control (442), and a...
US20130120045 CENTRALIZED POWER GATING CONTROL FOR PARTITIONED POWER GATES  
Power gating control and related circuitry for integrated circuits is described herein. A centralized power gating control circuit uses trigger circuits to control the on/off switching of power...
US20070221125 SEMICONDUCTOR PROCESSING SYSTEM WITH WIRELESS SENSOR NETWORK MONITORING SYSTEM INCORPORATED THEREWITH  
A method and system for non-invasive sensing and monitoring of a processing system employed in semiconductor manufacturing. The method allows for detecting and diagnosing drift and failures in the...
US20050288815 Semiconductor device manufacturing information service system and server used in the same  
A semiconductor device manufacturing information service system comprises: step control servers, etc. that collect and store manufacturing data indicating the manufacturing result and/or quality...
US20110124193 CUSTOMIZED PATTERNING MODULATION AND OPTIMIZATION  
The present disclosure provides one embodiment of an integrated circuit (IC) design method. The method includes providing an IC design layout of a circuit; applying an electrical patterning...
US20100076580 Semiconductor integrated circuit design method for determining thickness of wiring based on plural factors contributing to thickness of wiring  
A semiconductor integrated circuit design method, includes modeling a layer thickness of a wiring by a function including as independent variables, a percentage of surface area of the wiring in a...
US20110054664 Spin Coating Modeling  
A method for setting processing parameters for fabricating an integrated circuit, by creating a mathematical model of a spin coated surface of a material over a non-flat substrate surface, where...
US20110054658 Method for Constant Power Density Scaling  
A method for constant power density scaling in MOSFETs is provided. A method for manufacturing an integrated circuit includes computing fixed scaling factors for a first fabrication process based...
US20150160649 ENDPOINT METHOD USING PEAK LOCATION OF SPECTRA CONTOUR PLOTS VERSUS TIME  
In one aspect, a method of polishing includes polishing a substrate, and receiving an identification of a selected spectral feature and a characteristic of the selected spectral feature to monitor...
US20080082190 Software architecture for engineering analysis framework for semiconductor manufacturing  
An engineering analysis system may provide an engineering analysis framework that operates both with an engineering analysis application and the databases that include the data to be analyzed. The...
US20090326697 SEMICONDUCTOR MANUFACTURING AUTOMATION SYSTEM AND METHOD FOR USING THE SAME  
A semiconductor manufacturing automation system for automatically manufacturing a plurality of semiconductor products by using a plurality of tools is provided. The system comprises a database, a...
US20080082197 Global predictive monitoring system for a manufacturing facility  
A global predictive monitoring system for a manufacturing facility. The system may be employed in an integrated circuit (IC) device fabrication facility to monitor processing of semiconductor...
US20110009999 PLASMA REACTOR WITH RF GENERATOR AND AUTOMATIC IMPEDANCE MATCH WITH MINIMUM REFLECTED POWER-SEEKING CONTROL  
An impedance match at an RF generator output of a plasma reactor includes plural minimum-seeking loop controllers having respective feedback input ports coupled to receive a reflected RF power...
US20150234379 Wafer and Lot Based Hierarchical Method Combining Customized Metrics with a Global Classification Methodology to Monitor Process Tool Condition at Extremely High Throughput  
Methods and systems for monitoring process tool conditions are disclosed. The method combines single wafer, multiple wafers within a single lot and multiple lot information together statistically...
US20120330453 AUTOMATED PLY LAYUP SYSTEM  
An automated ply layup system uses a robot and an end effector for selecting plies from a kit and placing the plies at predetermined locations on a tool.
US20140273293 Portable Wireless Sensor  
The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that...
US20140316550 Spectra Based Endpointing for Chemical Mechanical Polishing  
A computer implemented method of monitoring a polishing process includes, for each sweep of a plurality of sweeps of an optical sensor across a substrate undergoing polishing, obtaining a...
US20150162180 METHOD, STORAGE MEDIUM AND SYSTEM FOR CONTROLLING THE PROCESSING OF LOTS OF WORKPIECES  
A method includes processing each of a plurality of lots with at least one first equipment and moving some of the plurality of lots to a first storage. For each of a plurality of second...
US20130231769 Defect Management Systems and Methods  
Defect management systems and methods are disclosed. A system for managing defects on an object includes an automatic defect classification (ADC) module, a lithographic plane review (LPR) module,...
US20150073581 SYSTEM FOR REDUCING ENERGY CONSUMPTION AND FRACTION DEFECTIVE WHEN PRODUCING PCB BASED ON UBIQUITOUS SENSOR NETWORK  
Provided is a system for reducing energy consumption and fraction defective when producing a PCB based on a USN, which provides the optimal environment information in PCB production by acquiring,...
US20140058551 RECIPE MANAGEMENT APPARATUS AND RECIPE MANAGEMENT METHOD  
According to one embodiment, there is provided a recipe management apparatus for comparing recipes prescribing process conditions of processing apparatuses between a plurality of the processing...
US20150142161 METHOD AND APPARATUS FOR MOBILE CLEANSPACE FABRICATORS  
The present invention provides apparatus for a mobile cleanspace fabrication facility. Various methods relating to moving a mobile cleanspace fabrication facility and to the locations that a...
US20120065765 DETECTING DOSE AND FOCUS VARIATIONS DURING PHOTOLITHOGRAPHY  
A method, system, and computer usable program product for detecting dose and focus variations during photolithography are provided in the illustrative embodiments. A test shape is formed on a...
US20140195033 Control of Etch Rate Using Modeling, Feedback and Impedance Match  
A method for achieving an etch rate is described. The method includes receiving a calculated variable associated with processing a work piece in a plasma chamber. The method further includes...
US20090265028 Organic Substrate with Asymmetric Thickness for Warp Mitigation  
A process for large scale production of a laminated organic substrate having reduced thermal warp.
US20050273191 Small lot size lithography bays  
In a first aspect, a small lot size lithography bay is provided. The small lot size lithography bay includes (1) a plurality of lithography tools; and (2) a small lot size transport system adapted...
US20090062954 METHOD AND SYSTEM FOR AUTO-DISPATCHING LOTS IN PHOTOLITHOGRAPHY PROCESS  
A method and a system for auto-dispatching lots in a photolithography process are provided. According to the method, first, a prioritized lot list is established according to the working status of...
US20110198677 SYSTEMS AND METHODS FOR A CONTINUOUS-WELL DECOUPLING CAPACITOR  
A decoupling capacitor includes a pair of MOS capacitors formed in wells of opposite plurality. Each MOS capacitor has a set of well-ties and a high-dose implant, allowing high frequency...
US20110301736 APC Model Extension Using Existing APC Models  
A method of extending advanced process control (APC) models includes constructing an APC model table including APC model parameters of a plurality of products and a plurality of work stations. The...
US20090049680 COMPONENT MOUNTER CONTROL METHOD AND COMPONENT MOUNTER  
The present invention is a method of controlling a component mounter which includes a mobile unit for mounting a component onto a circuit board, and includes judging (S1) on which side of the...
US20130268106 REMOTE MONITORING SYSTEM FOR POLISHING END POINT DETECTION UNITS  
The present invention relates to a remote monitoring system for polishing end point detection units mounted to polishing apparatuses for polishing wafers, such as substrates. The remote monitoring...
US20070129839 System for controlling semiconductor device manufacturing process and method of controlling semiconductor device manufacturing process  
In a system for controlling a semiconductor device manufacturing process, a recipe indicating a control condition for controlling processing in a semiconductor manufacturing apparatus is...
US20080103623 FACILITY CONNECTION POSITIONING TEMPLATE  
One embodiment of an apparatus includes a flat, plate-shaped template adapted for facilities integration. The template defines a plurality of apertures arranged in a predetermined pattern of...
US20100114761 AREA TRIM SERVICE BUSINESS METHOD  
A method for manufacturing integrated circuits (“ICs”) is disclosed. The method pertains to providing third-party technology in the form of an IC design library to foundry customers for designing...
US20050182507 MSEC/SECS protocol converter and conversion method  
The present invention provides a Mitsubishi SEMI Equipment Communication (MSEC)/SEMI Equipment Communication Standard (SECS) protocol converter and conversion method thereof. The MSEC/SECS...
US20150195966 ALLOCATION OF PRINTED CIRCUIT BOARDS ON FITTING LINES  
A fitting system is provided that includes a plurality of fitting lines for fitting printed circuit boards with electronic components. A method for allocating printed circuit boards to the fitting...
US20120002334 ELECTROSTATIC DISCHARGE CIRCUIT  
An integrated circuit (IC) is disclosed. The IC includes a first global voltage node and a second global voltage node. The IC further includes two or more power domains each coupled to the first...
US20110009998 Near Non-Adaptive Virtual Metrology and Chamber Control  
Embodiments of the present invention relate to a method for a near non-adaptive virtual metrology for wafer processing control. In accordance with an embodiment of the present invention, a method...
US20050090923 Method for monitoring a batch system  
System and method for processing semiconductor wafers are provided. One embodiment provides a method for monitoring a batch system. For the purpose of monitoring batch systems, in accordance with...
US20080281438 Critical dimension estimation  
Estimating a state of a critical dimension system comprises inputting a critical dimension measurement and inferring the state of the system based on a model of the critical dimension system and...
US20100318209 FLEXIBLE JOB PREPARATION AND CONTROL  
Preparation of a wafer processing or measuring tool for a job can be initiated prior to assigning a wafer carrier to deliver wafers to the tool. The automated process may include transfer of...
US20090138119 Chip Handler with a Buffer Traveling between Roaming Areas for Two Non-Colliding Robotic Arms  
Two robotic arms roam in separate, non-overlapping areas of a test station, avoiding collisions. A traveling buffer moves along x-tracks between a front position and a back position. In the front...
US20130046404 Combinatorial process optimization methodology and system  
A method for obtaining an optimized process solution from a set of design of experiments in a cost effective manner is provided. An actual experiment is performed and data from the experiments is...
US20050192690 Chip probing equipment and test modeling for next generation MES (300MM)  
A new solution in 300 mm Chip Probing (CP) Manufacturing Execution System (MES) design based on a SiView infrastructure. It models actual behavior making it possible to specify exact test program...
US20110049656 Magnetic Tunnel Junction Device and Fabrication  
A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method of forming a magnetic tunnel junction (MTJ) device includes forming a top...
US20120216089 Integrated Circuit Testing with Power Collapsed  
In examples, apparatus and methods are provided for an integrated circuit. The integrated circuit includes a first integrated circuit portion having a main power domain and a second integrated...