Matches 1 - 28 out of 28


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US20050241338 Reduced striae extreme ultraviolet elements  
Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements...
US20080233355 Glass Ceramic Article with Diffusion Barrier and Method for Producing a Glass Ceramic Article with a Diffusion Barrier  
In order to avoid haloing when burning in a decoration on a glass ceramic substrate, the invention provides a method for producing a decorated glass ceramic substrate, in which a glass substrate...
US20070207911 PROCESS FOR PRODUCING SILICA GLASS CONTAINING TIO2, AND OPTICAL MATERIAL FOR EUV LITHOGRAPHY EMPLOYING SILICA GLASS CONTAINING TIO2  
Conventional TiO2—SiO2 glass contains hydrogen atoms substantially, and during deposition under ultrahigh vacuum condition, the hydrogen molecules will diffuse in the chamber, and H2 molecules...
US20110159413 TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD  
A titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours is suitable as the EUV...
US20060037362 Photolithography methods and systems  
Lithographic methods are disclosed. In one such method, a pulsed ultraviolet radiation source for producing ultraviolet lithography radiation having a wavelength shorter than about 300 nm at a...
US20070084244 PLASMA SPRAYING  
Plasma spraying, apparatus for plasma spraying, and methods of plasma spraying.
US20050132749 Burner and method for the manufacture of synthetic quartz glass  
A burner for use in the manufacture of synthetic quartz glass is provided, which comprises a main burner (7) comprising a multi-tube assembly (1) including a center tube (2) for feeding a...
US20080066496 Anisotropically shaped powder, related manufacturing method, and method of manufacturing crystal oriented ceramics  
An anisotropically shaped powder composed of oriented grains with a specific crystal plane {100} of each crystal grain being oriented, a related manufacturing method and a method of manufacturing...
US20060179879 Adjusting expansivity in doped silica glasses  
The invention is directed to ultra-low expansion glasses to which adjustments have been made to selected variables in order to improve the properties of the glasses, and particularly to lower the...
US20050284177 Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member  
An optical member made of silica glass manufactured by the direct method where a material gas comprising an organosilicon compound is allowed to react in an oxidizing flame, said optical member...
US20110207593 Expansivity in Low Expansion Silica-Titania Glasses  
This disclosure is directed to tailoring and improving the expansivity of low thermal expansion silica-titania glass through changes in the [OH] content and fictive temperature of the glasses. The...
US20130123092 TIO2-CONTAINING QUARTZ GLASS SUBSTRATE AND METHOD FOR PRODUCING SAME  
The present invention relates to a TiO2-containing quartz glass substrate, having a TiO2 concentration of from 3 to 8% by mass, an OH concentration of 50 ppm by mass or less, and an internal...
US20050056806 Suppressing monovalent metal ion migration using aluminum-containing barrier layer  
Disclosed is a process for suppressing monovalent metal ion migration between inorganic materials by placing a barrier layer containing Al2O3 and SiO2 between the inorganic materials. Also...
US20070209392 METHOD OF MAKING PARTICLES AND MATERIALS  
Methods of making particles and materials are disclosed.
US20070105703 Deuteroxyle-doped silica glass, optical member and lithographic system comprising same and method of making same  
What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have...
US20080006056 PROCESS FOR PRODUCING SYNTHETIC QUARTZ AND SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER  
The present invention provides a process for producing a synthetic quartz glass, comprising: (a) depositing fine quartz glass particles synthesized by flame hydrolysis of a glass-forming material...
US20080141717 Burner for the Manufacture of Synthetic Quartz Glass  
A burner for use in the manufacture of quartz glass is provided, which comprises a triple-tube assembly of a center tube for feeding a silane or siloxane compound, an intermediate tube for feeding...
US20060107693 Method for the production of synthetic silica glass  
The invention relates to a previously known method for producing synthetic silica glass, comprising the following steps: a gas stream containing a vaporizable initial substance, which can be...
US20130219963 METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS GRANULES  
The production of synthetic quartz glass granules by vitrifying a free-flowing SiO2 granulate from porous granulate particles is time-consuming and expensive. The aim of the invention is to...
US20050000250 Method for producing a tube consisting of quartz glass, tubular semi-finished product consisting of porous quartz glass, and the use of the same  
In a known method for producing a quartz glass tube by means of flame hydrolysis of a silicon-containing start component, SiO2-containing particles are produced, said particles are deposited on a...
US20130340671 SILICA GLASS CRUCIBLE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL  
A method for manufacturing a silica glass crucible, includes: preparing a crucible base material that is made of silica glass and has a crucible shape; fabricating a synthetic silica glass...
US20130316890 METHOD FOR PRODUCING SILICA GLASS BODY CONTAINING TITANIA, AND SILICA GLASS BODY CONTAINING TITANIA  
The present invention relates to a method for producing a silica glass body containing titania, containing: a flame hydrolysis step of feeding a silica (SiO2) precursor and a titania (TiO2)...
US20100154474 REDUCED STRIAE LOW EXPANSION GLASS AND ELEMENTS, AND A METHOD FOR MAKING SAME  
The invention is directed to a method for reducing striae in ultra-low expansion glass, for example, silica-titania glass, by heat-treating the glass at temperatures above 1600° C. for a time in...
US20090139265 Method and device for manufacturing silica glass  
Problem To provide a method for manufacturing silica glass and device for manufacturing silica glass that facilitates the simple manufacture of a highly pure, bubble-free large flat-plate silica...
US20060218971 Synthetic quartz glass and process for producing a quartz glass body  
The invention relates to a synthetic quartz glass that can be produced by direct precipitation by means of flame hydrolysis of a silicon precursor, especially a chlorine-containing silicon...
US20050016218 Method of producing glass-particle-deposited body and glass-particle-synthesizing burner  
A method can stably produce a high-quality glass-particle-deposited body by depositing glass particles in an intended state, and a burner synthesizes glass particles. The method uses a burner...
US20050247080 Method and device for production of a quartz glass blank  
A conventional method for the production of a quartz glass blank comprises a method step in which SiO2 particles are generated by means of a series of deposition burners and deposited on a...
US20060081004 Method for producing glass material  
A method of producing a glass blank with a high rate and high efficiency of deposition on a starting member is provided. A raw material powder including silica-glass-containing particles is...

Matches 1 - 28 out of 28