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US20140346620 MEMS MICROPHONE WITH REDUCED PARASITIC CAPACITANCE  
A MEMS microphone has reduced parasitic capacitance. The microphone includes a trench electrically separating an acoustically active section of the backplate from an acoustically inactive section...
US20150160089 PRESSURE SENSOR WITH BUILT-IN CALIBRATION CAPABILITY  
A MEMS pressure sensor (70) includes a sense cell (80), a test cell (82), and a seal structure (84). The test cell includes a test cavity (104), and the seal structure (84) is in communication...
US20130062710 Micro Electrical Mechanical System with Bending Deflection of Backplate Structure  
A micro electrical mechanical system includes a membrane structure and a backplate structure. The backplate structure includes a backplate material and at least one pre-tensioning element...
US20100308425 MEMS DEVICE AND PROCESS  
A MEMS device comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or...
US20140001581 MEMS MICROPHONE AND FORMING METHOD THEREFOR  
A micro-electro-mechanical system (MEMS) microphone may include a sensitive diaphragm and a fixed electrode corresponding to the sensitive diaphragm; at least one sensitive diaphragm support...
US20150021722 MEMS Device  
A MEMS device includes a membrane comprising a first plurality of fingers. A counter electrode arrangement includes a second plurality of fingers disposed in a interdigitated relationship with the...
US20110154905 CAPACITIVE SENSOR AND MANUFACTURING METHOD THEREOF  
A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of...
US20110089504 MEMS PROCESS AND DEVICE  
A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The...
US20140270271 MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer  
A MEMS acoustic transducer includes a substrate having a cavity therethrough, and a conductive back plate unit including a plurality of conductive perforated back plate portions which extend over...
US20140346621 MEMS BACKPLATE, MEMS MICROPHONE COMPRISING A MEMS BACKPLATE AND METHOD FOR MANUFACTURING A MEMS MICROPHONE  
A MEMS backplate enables MEMS microphones with reduced parasitic capacitance. A MEMS backplate includes a central area and a perforation in the central area. A suspension area surrounds the...
US20150217998 SHIELDING MEMS STRUCTURES DURING WAFER DICING  
A MEMS wafer (46) includes a front side (52) having a plurality of MEMS structure sites (60) at which MEMS structures (50) are located. A method (40) for protecting the MEMS structures (50)...
US20120175644 DISPLAYS WITH EMBEDDED MEMS SENSORS AND RELATED METHODS  
Embodiments of displays with embedded MEMS sensors and related methods are described herein. Other embodiments and related methods are also disclosed herein.
US20140084394 MICRO ELECTRO MECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION METHOD THEREOF  
Provided is a structure for improving performance of a micro electro mechanical system (MEMS) microphone by preventing deformation from occurring due to a residual stress and a package stress of a...
US20120264250 METHOD OF FORMING MEMBRANES WITH MODIFIED STRESS CHARACTERISTICS  
A method of modifying stress characteristics of a membrane in one embodiment includes providing a membrane layer, determining a desired stress modification, and forming at least one trough in the...
US20150256924 MEMS DEVICE AND PROCESS  
This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic...
US20140353773 METHOD FOR FORMING A SUSPENDED MEMBRANE  
The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a...
US20140210020 MEMS Device and Method of Manufacturing a MEMS Device  
MEMS devices with a rigid backplate and a method of making a MEMS device with a rigid backplate are disclosed. In one embodiment, a device includes a substrate and a backplate supported by the...
US20150076627 MEMS-MICROPHONE WITH REDUCED PARASITIC CAPACITANCE  
A MEMS microphone with reduced parasitic capacitance is provided. A microphone includes a protection film covering a rim-sided area of the backplate.
US20140361388 CAPACITIVE SENSING STRUCTURE WITH EMBEDDED ACOUSTIC CHANNELS  
A MEMS device includes a dual membrane, an electrode, and an interconnecting structure. The dual membrane has a top membrane and a bottom membrane. The bottom membrane is positioned between the...
US20110165720 Microphone with Irregular Diaphragm  
A microphone is formed to have a diaphragm that is configured to improve signal to noise ratio. To that end, the microphone has a backplate having a hole therethrough, and a diaphragm movably...
US20150147841 METHOD TO RELEASE DIAPHRAGM IN MEMS DEVICE  
A method for releasing a diaphragm of a micro-electro-mechanical systems (MEMS) device at a stage of semi-finished product. The method includes pre-wetting the MEMS device in a pre-wetting...
US20140038335 INTEGRATED ACOUSTIC TRANSDUCER IN MEMS TECHNOLOGY, AND MANUFACTURING PROCESS THEREOF  
A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a...
US20120087521 Microphone Package with Embedded ASIC  
A packaged microphone has a base, a lid coupled to the base forming an interior, a MEMS microphone secured to the base within the interior, and an integrated circuit embedded in the base....
US20150096374 ANGULAR VELOCITY SENSOR AND MANUFACTURING METHOD OF THE SAME  
Disclosed herein is an angular velocity sensor, including: a mass body part; an internal frame supporting the mass body part; a first flexible part each connecting the mass body part to the...
US20110062535 MEMS TRANSDUCERS  
A MEMS device comprises a substrate having at least a first transducer optimized for transmitting pressure waves, and at least a second transducer optimized for detecting pressure waves. The...
US20140084395 MEMS MICROPHONE  
Mechanical resonating structures, as well as related devices and methods of manufacture. The mechanical resonating structures can be microphones, each including a diaphragm and a piezoelectric...
US20150175409 METHOD FOR FABRICATING MULTI-TRENCH STRUCTURE  
Provided is a method for fabricating a multi-trench structure, including steps of: performing anisotropic etching on a semiconductor substrate so as to form a vertical trench; growing a first...
US20140197501 MEMS Device with Polymer Layer, System of a MEMS Device with a Polymer Layer, Method of Making a MEMS Device with a Polymer Layer  
A MEMS device, a method of making a MEMS device and a system of a MEMS device are shown. In one embodiment, a MEMS device includes a first polymer layer, a MEMS substrate disposed on the first...
US20150256915 MEMS DEVICE AND PROCESS  
This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic...
US20140220723 Methods and Structures for Using Diamond in the Production of MEMS  
A MEMS device with movable MEMS structure and electrodes is produced by fabricating electrodes and shielding the electrodes with diamond buttons during subsequent fabrication steps, such as the...
US20080251865 NANOELECTROMECHANICAL SYSTEMS AND METHODS FOR MAKING THE SAME  
Nanoelectromechanical systems are disclosed that utilize vertically grown or placed nanometer-scale beams. The beams may be configured and arranged for use in a variety of applications, such as...
US20140264662 MEMS Integrated Pressure Sensor and Microphone Devices and Methods of Forming Same  
A method embodiment for forming a micro-electromechanical (MEMS) device includes providing a MEMS wafer, wherein a portion of the MEMS wafer is patterned to provide a first membrane for a...
US20110189804 METHOD OF FABRICATING A MEMS MICROPHONE  
A method of fabricating a MEMS microphone includes: first providing a substrate having a first surface and a second surface. The substrate is divided into a logic region and a MEMS region. The...
US20140264653 MEMS Pressure Sensor and Microphone Devices Having Through-Vias and Methods of Forming Same  
A method embodiment includes providing a MEMS wafer. A portion of the MEMS wafer is patterned to provide a first membrane for a microphone device and a second membrane for a pressure sensor...
US20100317138 METHOD FOR FABRICATING MEMS STRUCTURE  
A method for fabricating a MEMS is described as follows. A substrate is provided, including a circuit region and an MEMS region separated from each other. A first metal interconnection structure...
US20130270657 MICROMACHINED MONOLITHIC 6-AXIS INERTIAL SENSOR  
The device layer of a 6-degrees-of-freedom (6-DOF) inertial measurement system can include a single proof-mass 6-axis inertial sensor formed in an x-y plane, the inertial sensor including a main...
US20140246740 IMPLANTATION OF GASEOUS CHEMICALS INTO CAVITIES FORMED IN INTERMEDIATE DIELECTRICS LAYERS FOR SUBSEQUENT THERMAL DIFFUSION RELEASE  
The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the landing velocity on switching by introducing gas into the cavity surrounding the...
US20140145276 MEMS MICROPHONE AND METHOD FOR MANUFACTURE  
An improved method for manufacturing an MEMS microphone with a double fixed electrode is specified which results in a microphone which likewise has improved properties.
US20120326249 MEMS MICROPHONE AND METHOD FOR MANUFACTURE  
An improved method for manufacturing an MEMS microphone with a double fixed electrode is specified which results in a microphone which likewise has improved properties.
US20120193684 Ultrananocrystalline Diamond Films with Optimized Dielectric Properties for Advanced RF MEMS Capacitive Switches  
An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging...
US20110198711 SYSTEM AND METHOD FOR AN INTEGRATED ELECTRONIC AND OPTICAL MEMS BASED SENSOR  
This patent discloses an integrated electronic and optical MEMS (micro-electro-mechanical systems) based sensor wherein the same embossed diaphragm is used as the sensing element of both...
US20140374858 CAPACITIVE PRESSURE SENSOR AND A METHOD OF FABRICATING THE SAME  
The invention discloses a capacitive pressure sensor and a method of fabricating the same. The capacitive pressure sensor includes a fixed plate configured as a back plate, a movable plate...
US20150192486 PRESSURE SENSOR HAVING A BOSSED DIAPHRAGM  
A pressure sensor having a diaphragm having a boss with a pattern. The diaphragm having a boss may be regarded as a bossed diaphragm. The bossed diaphragm may have higher sensitivity than a flat...
US20110115039 MEMS STRUCTURE AND METHOD FOR MAKING THE SAME  
A micro electro mechanical system (MEMS) structure is disclosed. The MEMS structure includes a backplate electrode and a 3D diaphragm electrode. The 3D diaphragm electrode has a composite...
US20090206422 Micromechanical diaphragm sensor having a double diaphragm  
A method for producing a micromechanical diaphragm sensor, and a micromechanical diaphragm sensor produced with the method. The micromechanical diaphragm sensor has at least one first diaphragm as...
US20150210539 METHOD OF MAKING A SUSPENDED MEMBRANE DEVICE  
The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a...
US20140084396 MEMS DEVICE AND PROCESS  
A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume,...
US20090041270 Mems Microphone And Method For Producing Said Microphone  
An MEMS microphone is bonded onto the surface of an IC component containing at least one integrated circuit suitable for the conditioning and processing of the electrical signal supplied by the...
US20150031160 CMOS COMPATIBLE MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME  
The present invention relates to a CMOS compatible MEMS microphone, comprising: an SOI substrate, wherein a CMOS circuitry is accommodated on its silicon device layer; a microphone diaphragm...
US20120319174 CMOS COMPATIBLE MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME  
The present invention relates to a CMOS compatible MEMS microphone, comprising: an SOI substrate, wherein a CMOS circuitry is accommodated on its silicon device layer; a microphone diaphragm...

Matches 1 - 50 out of 343 1 2 3 4 5 6 7 >