Matches 1 - 41 out of 41


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US20070020115 Integrated pump apparatus for semiconductor processing  
The invention relates to an integrated pump apparatus for use in semiconductor processing. The apparatus may include a turbomolecular pump and a dry pump positioned no more than about 20...
US20140294605 METHODS AND SYSTEMS FOR MAINTAINING A HIGH VACUUM IN A VACUUM ENCLOSURE  
A system for maintaining a high vacuum in a vacuum enclosure such as cryostat, for example, is described. The system includes a high-vacuum pump having an input that is connected to the cryostat...
US20100303650 CURRENT LEADTHROUGH FOR A VACUUM PUMP  
The vacuum pump comprises a casing (10) closed by a vacuum cover (20). Between an end wall (14) of the casing (10) and the vacuum cover (20), a circuit board (16) is arranged for current...
US20080101966 High efficient compact radial blower  
A radial blower comprising an impeller, an electric drive and a housing. The impeller comprises an impeller disk with the first and second sides, radial blades protruded from the first side, a...
US20100303640 VACUUM PUMP  
A vacuum pump (10) has a pump rotor (14) and a pump stator (12). The pump rotor (14) has an electrical measuring transducer (44), for example a temperature sensor. A transmitting antenna (40),...
US20060018772 Rotary vacuum pump, structure and method for the balancing thereof  
A rotary vacuum pump (101; 201) comprising displacement sensors (121A-121F; 221A-221F), variously coupled to the pump basement (103; 203) and arranged close to the pump rotor (113; 213) and/or to...
US20080304985 TURBO-MOLECULAR PUMP  
Disclosed is a turbo-molecular pump, which comprises: a blade pumping section having a plurality of rotor blades and a plurality of stator blades which are alternately arranged in plural stages...
US20060099094 Vacuum pumping arrangement and method of operating same  
A vacuum pumping arrangement (10) for controlling pressure in a chamber, the arrangement comprising a molecular pumping mechanism (12) and a backing pumping mechanism (14). The backing pumping...
US20060018773 Air-cooled dry vacuum pump  
According to the present invention, an air cooling dry vacuum pump has an excellent heat exchangeability and is capable of discharging clean exhaust gases, allowing an installation space to be...
US20050186099 Active vibration reduction  
In a system that includes an active magnetic bearing, a magnetic bearing may induce vibration in anti-phase with an unwanted vibration so that the total vibration in the system is reduced. A...
US20090028720 Vacuum pump  
A vacuum pump capable of accurately detecting a rotor temperature based on a change in permeability of a magnetic material. Two targets are fixed to a nut opposed to a gap sensor. The nut is made...
US20060210414 Turbomolecular vacuum pump  
A turbomolecular pump comprises a pumping mechanism and an electric motor (10) for driving the pumping mechanism. The electric motor comprises a rotor (14), a stator and stator windings (20). The...
US20060153715 Vacuum pumping system and method of operating a vacuum pumping arrangement  
A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising turbomolecular pumping...
US20050106043 Vacuum pump provided with vibration damper  
A vacuum pump assembly is provided with a vacuum pump and external unit coupled by a vibration damper. The vibration damper comprises a plurality of piezoelectric actuators and a plurality of...
US20150064033 VACUUM PUMP AND ARRANGEMENT WITH VACUUM PUMP  
A vacuum pump includes a housing having an axial inlet a pumping unit including a stator, a rotor rotatably supported in the stator, and a drive for driving the rotor. At least one housing part...
US20100196180 VACUUM PUMP  
A vacuum pump (10) has a pump rotor (16), an active magnetic bearing (20,21), a safety bearing (22,23) associated with the magnetic bearing (20,21), an electric drive motor (18) having a motor...
US20080240948 DEVICE FOR CONTAINING CATASTROPHIC FAILURE OF A TURBOMOLECULAR PUMP  
A device for containing the catastrophic failure of a vacuum pumping system is described. The vacuum pumping system includes a turbo-molecular pump (TMP) configured to be coupled to a vacuum...
US20100047095 VACUUM PUMP  
A vacuum pump (10) has a vacuum-tight housing (12) and having a gas-tight electrical leadthrough assembly (20) for producing an electrical connection between an electrical component (14,16,18)...
US20090136361 Vacuum turbomolecular pump  
A vacuum turbomolecular pump (10) is driven by a brushless direct-current drive motor (16) comprising stator coils and a permanent-magnetically excited motor rotor. When rotating, the motor rotor...
US20050031468 Controller of vacuum pump  
A vacuum pump has a pump mechanism section that performs evacuation to set a space to be evacuated to a predetermined degree of vacuum and an electric motor section for driving the pump mechanism...
US20050019183 Pump  
A pump including a plurality of spaced apart generally mutually parallel plates, which are mounted for rotation in a housing about an axis which extends generally normal to the plates, to effect...
US20100047096 TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING THE SAME  
A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump...
US20110014073 TURBO-MOLECULAR PUMP  
A turbo-molecular pump includes a base 3; a rotor 4 rotatably supported thereon; a stator 400 disposed around the rotor 4; and a tubular casing 2 configured to accommodate the stator 400. The...
US20080206079 Turbo-molecular pump and touchdown bearing device  
A touchdown bearing device includes an outer ring fixed to a housing, an inner ring radially opposed to the outer ring, an intermediate ring radially interposed between the outer ring and the...
US20090081056 Molecular Pump And Flange  
To form a shock absorbing structure more easily. A shock absorbing structure for consuming shock energy is provided on the flange of a molecular pump. An insertion hole is provided in the flange,...
US20060110271 Foil shield for a vacuum pump with a high-speed rotor  
A foil shield for covering at least one opening of a suction flange of a vacuum pump includes at least one member formed of a material having a relative permeability μr greater than 1,000.
US20080138202 Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement  
An arrangement for supporting a shaft of a vacuum pump includes a first bearing for supporting the shaft at one of its end, a second bearing for supporting the shaft at another of its ends and...
US20060024184 Rotary vacuum pump, vacuum device, and pump connection structure  
A rotary vacuum pump includes a pump casing on which an intake port flange is formed, a rotor which has a rotating side evacuating device and is driven to rotate at high speed inside the pump...
US20090208354 SUPPORT FOR ROLLING BEARING  
A support for a rolling bearing of the kind equipped with an outer rotating ring for a rotary vacuum pump, the support comprising an inner portion that can be associated with the rotating ring, a...
US20050058554 Connection element  
A connection element for connecting two parts, in particular, an external component with a vacuum pump, includes a first member engageable with the external component, and a second member...
US20080054741 MAGNETIC BEARING DEVICE, ROTATING MECHANISM, AND MODEL IDENTIFICATION METHOD OF ROTATING MACHINERY MAIN UNIT  
Problem of the present invention is to enable elimination or reduction of a signal wire in a dedicated cable for a magnetic bearing device for supplied an electric power from a control device to a...
US20100322798 RAPIDLY ROTATING VACUUM PUMP  
A rapidly rotating vacuum pump includes: a magnet-mounted rotor driven by an electric drive motor with a predetermined constant nominal rotational frequency (fnom). The rotor and a rotor bearing...
US20050201882 Vacuum pumping system  
A vacuum pumping system has at least two vacuum pumping devices with vacuum pumps, local electronic control units for monitoring and controlling the operating parameters of the pumps and a control...
US20110020142 Method of pumping gas  
A vacuum pumping arrangement is described for pumping a gas stream containing hydrogen or other hydrogen-containing gas. The arrangement comprises a pumping mechanism for receiving the gas stream...
US20070104598 FIXING DEVICE FOR A VACUUM PUMP  
The present invention relates to the field of high rotation speed vacuum pumps, which are fastened to and connected to a structure such as a vacuum enclosure or a pipe to generate a hard vacuum....
US20100303653 TURBOMOLECULAR PUMP  
A turbomolecular pump (10) includes a rotor (18) which is mounted on a housing (12) by at least one roller bearing (16). The roller bearing (16) comprises a non-rotating bearing shell (20) and a...
US20070258836 Vacuum pump  
A vacuum pump includes a housing, a rotor located in the housing and having a shaft and pump-active elements supported on the shaft, a stator having pump-active elements and located in a separate...
US20070148020 Apparatus and method for pumping in an ion optical device  
An apparatus and method for differential pumping of a mass spectrometer or other ion-optical device provides a transverse pressure drop introduced across a face of a primary rotor of a...
US20160290343 ROTOR DEVICE FOR A VACUUM PUMP, AND VACUUM PUMP  
A rotor device for a vacuum pump comprises a rotor shaft and at least one rotor element on the rotor shaft. The rotor element contains aluminum, titanium and/or CFRP, while the rotor shaft...
US20160172179 Vacuum System  
The invention concerns a vacuum system, comprising a first vacuum chamber and a second vacuum chamber, the first vacuum chamber being evacuated by a first vacuum pump, in particular a...
US20100322799 TURBOMOLECULAR PUMP  
A turbomolecular pump (10) includes a rotor (12) connected to a drive shaft (10). The rotor (12) has multiple rotor vanes (16). The rotor (12) is surrounded by stator rings (26) with one stator...

Matches 1 - 41 out of 41