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US20090067959 |
Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatus
The present invention relates to a substrate processing apparatus which can improve a tact time of substrate processing. A polishing apparatus as the substrate processing apparatus includes plural... |
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US20110248738 |
TESTING APPARATUS FOR ELECTRONIC DEVICES
A wafer processing apparatus used for the testing of electronic devices comprises first and second clampers movably mounted on a shaft, each clamper being configured for holding a wafer carrier on... |
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US20070134082 |
System and method for robot unit
The present invention relates to a method for rapid transfer of a work object in both the horizontal and vertical directions using a robot unit (10) having a gripping mechanism (12) preferably... |
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US20160325945 |
DEVICE FOR RECEIVING AND TRANSPORTING A SILICON ROD, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
A gripping device for the capturing, transporting, and placing of polysilicon rods has an electrically operated rod gripping mechanism actuated by a frame with a parallelogram structure, and two... |
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US20090092470 |
END EFFECTOR WITH SENSING CAPABILITIES
In one embodiment, an end effector having a first arm extending from an end effector support body, and a second arm extending from the end effector support body is provided. The first arm and the... |
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US20100080676 |
MANUFACTURING FACILITIES
Provided are manufacturing facilities capable of manufacturing many kinds of products efficiently in a small lot without increasing their cost. The manufacturing facilities comprise working cells... |
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US20110150610 |
Apparatus for transferring products
An apparatus for transferring products, e.g. food products, from a pick-up region into a placement region includes a conveying device to convey the products into the pick-up region after one... |
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US20080135381 |
Positioning Conveyor
An apparatus for taking over singulated objects, in particular at least slightly elongated objects, wherein the objects are supplied on an endless feed conveyor (1) which is formed by two endless... |