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US20110170157 MOVING STRUCTURE AND MICRO-MIRROR DEVICE USING THE SAME  
In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The...
US20090284816 Induced Resonance Comb Drive Scanner  
Briefly, in accordance with one or more embodiments, a MEMS based scanning platform is arranged to have increased efficiency by driving a first frame of the scanning platform directly by applying...
US20090021818 MEDICAL SCANNING ASSEMBLY WITH VARIABLE IMAGE CAPTURE AND DISPLAY  
A scanned beam imaging system including a housing suitable for insertion into a body and a radiation source configured to direct a beam of radiation into or through the housing and onto an area...
US20140016171 DIELECTRIC MICROSTRUCTURE FOR USE IN MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES AND METHOD OF FORMING SAME  
Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.
US20110181933 OPTICAL SCANNER  
An optical scanner capable of preventing breakage of a shaft section due to stress concentration is provided. A mirror frame 13 is shaped so as to enclose a mirror 11, and holds the mirror 11, via...
US20050078345 Scanning device with improved magnetic drive  
A magnetic drive for providing pivotal motion to a mirror device. The magnetic drive may be used to drive any torsional hinged mirror, but is particularly suitable for driving a high-speed,...
US20080043310 VIBRATING MIRROR, LIGHT WRITING DEVICE, AND IMAGE FORMING APPARATUS  
A vibrating mirror is disclosed that is able to stably adjust a resonating frequency. The vibrating mirror includes a frame, a torsional beam, and a mirror substrate supported by the torsional...
US20070053045 Two sided torsional hinged mirror and method of manufacturing  
A torsional hinged mirror structure having back-to-back reflective surfaces and suitable for use in a laser printer imaging system is disclosed. There is also disclosed an optical layer and a...
US20070268543 Mirror structure and optical scanner having the same  
A mirror structure and an optical scanner having the same which may achieve a high resolution since dynamic deformation is small while having a large driving angle. A plurality of vertical ribs...
US20070146857 TORSIONAL HINGE MIRROR ASSEMBLY WITH REDUCED FLEXING  
A torsional hinged mirror assembly having a hinge plate having a central portion and a pair of torsional hinges extending outwardly in opposite directions from the central portion along a first...
US20110286069 CONNECTING STRUCTURE FOR MICROMECHANICAL OSCILLATING DEVICES  
A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical...
US20090002796 Electrostatic snap-down prevention for membrane deformable mirrors  
Voltage-controlled electrostatically actuated membrane deformable mirrors suffer from the potential for excessive voltage to induce an electrostatic snap-down event in which the electrostatic...
US20060250675 Laser beam scanner  
A two dimensional scanning device, for use in a projecting display, comprising a surface (53) suspended by at least two torsion elements (55) defining a torsion axis (B), and a first actuator (60,...
US20080204844 PIEZOELECTRIC ADAPTATIVE MIRROR  
According to the invention, the adaptive mirror (20) comprises a plurality of adjacent combs (P) of piezoelectric material and two electrodes (23, 24) arranged on the longitudinal faces opposite...
US20100020379 GIMBALED SCANNING MICRO-MIRROR ACTUATION SCHEME AND ARCHITECTURE  
A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a...
US20070053044 Electrostatic drive type MEMS mirror scanner  
An object of the present invention is to provide an MEMS mirror scanner capable of achieving a scanning operation at a speed equivalent to or higher than a polygon mirror scanner and including a...
US20080001850 Beam scanner with reduced phase error  
According to embodiments, a beam scanning system such as a scanned beam display or scanned beam image capture system includes a controller having a PLL circuit that is operable to track systematic...
US20090310202 TILT MIRROR  
A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion,...
US20070153351 Micro optical scanner capable of measuring operating frequency of micro mirror  
A micro optical scanner, which is capable of measuring the operating frequency of a micro mirror, includes: a substrate; the micro mirror which is integrally formed with the substrate and rotates...
US20050162765 Micromirror with rib reinforcement  
The invention provides a micromirror for directing a beam of light. The micromirror includes a mirror plate movably coupled to a substrate and a lower reinforcement rib connected to a lower...
US20100073789 LOW COST MOVEABLE MIRROR  
It is an object of the present invention to provide a low cost moveable mirror with 2 axes of movement that is suitable for use in an optical application where a relatively large tip of tilt of a...
US20130141769 MICRO STRUCTURE, MICRO ACTUATORS, METHOD OF FABRICATING MICRO STRUCTURE AND MICRO ACTUATORS  
A method for fabricating a micro-structure is provided, which can simply and easily fabricate the micro-structure by a batch process of directly forming a highly aligned nano-material array on a...
US20110194082 MICROELECTROMECHANICAL SYSTEM WITH REDUCED SPECKLE CONTRAST  
The present disclosure describes, among other things, a reduced speckle contrast microelectromechanical system. One exemplary embodiment includes micromechanical structures configured to form a...
US20080049568 Aberration correction element, optical pickup and optical disc apparatus  
An aberration correction element includes a support substrate, a plurality of piezoelectric elements disposed on the support substrate, each of which is made up of a piezoelectric member and...
US20100296146 MEMS SCANNING MICROMIRROR  
A MEMS scanning micromirror including a mirror body 50, the mirror body 50 having a rotation axis 58 with a pair of extension bars 56 parallel to the rotation axis 58; a frame 60 forming a mirror...
US20080151345 MICRO-ELECTRO-MECHANICAL-SYSTEM MICROMIRRORS FOR HIGH FILL FACTOR ARRAYS AND METHOD THEREFORE  
A micro-electro-mechanical-system (MEMS) micromirror for use in high fill factor arrays which includes at least one stationary body and a movable body. The movable body has opposed ends and is...
US20120038963 MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE  
A protrusion formation hole is provided so as to pierce a support substrate. A polysilicon film as an electrical conducting material is embedded in the protrusion formation hole through an oxide...
US20100007936 DIELECTRIC MICROSTRUCTURE FOR USE IN MICROELECTROMECHANICAL SYSTEMS  
Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems.
US20120327495 TWO-DIMENSIONAL OPTICAL DEFLECTOR INCLUDING PIEZOELECTRIC SENSOR ON MOVABLE FRAME  
In a two-dimensional optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator connected between the movable frame and the mirror and adapted to...
US20100245966 ACTUATOR DEVICE FOR OPTICAL DEFLECTOR  
An actuator device for optical deflector includes a base for mounting an optical deflector deflecting a light beam from a light source, at least one piezoelectric actuator translating and...
US20080123169 Method and Apparatus for Two-Axis, High-Speed Beam Steering  
Dual axis, beam-steering devices are disclosed. An exemplary device includes a support platform having a top surface. A reflective surface is coupled to the top surface of the support platform....
US20060279826 MULTI-LASER SCANNING UNIT AND AN IMAGE FORMING APPARATUS  
A multi-beam deflector and a multi-laser scanning unit including the same are provided. The multi-beam deflector deflects N incident light beams which are spaced apart from each other by a beam...
US20080144154 Optical scan device, image display device, method of modifying resonance frequency of optical scanner, and method of correcting position of reflection mirror  
The present invention properly adjusts a resonance frequency of an optical scanner. A resonance-type optical scanner includes a reflection mirror which reflects incident light, a first beam...
US20070228869 Stable electro-mechanical actuators  
An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of...
US20130083381 OPTICAL DEFLECTOR APPARATUS INCLUDING OPTICAL DEFLECTOR CHIP SANDWICHED BY TWO SUBSTRATES  
In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and...
US20150109650 ACTUATOR FOR MOVING A MICRO MECHANICAL ELEMENT  
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as minor, the element being mechanically coupled to a frame with a bendable coupling, wherein...
US20090059340 Deformable mirror  
An optoelectric device including a deformable membrane with an outer reflecting surface and an inner surface whereon a plurality of permanent magnets are fixed, and having a bottom surface...
US20090067025 Method and System for Filling Voids in Electromechanical Systems  
In accordance with one embodiment of the present disclosure, a method for filling a void of an electromechanical system includes forming a void within a support layer. A conductive layer is formed...
US20080225370 Low-cost continuous phase sheet deformable mirror  
This continuous phase sheet deformable mirror leverages advances in polymer manufacturing to create a low-cost alternative to the existing microelectromechanical system (MEMS) and bulk...
US20080080035 ACTUATORS, PUMPS, AND OPTICAL SCANNERS  
An actuator includes a substrate including an insulating surface, a first electrode positioned on the insulating surface, and a flexible drive plate which opposes the insulating surface. Te...
US20070159025 Micro actuator and device having micro actuator  
A microactuator according to the present invention comprises a base 1, a movable section 7 which is capable of displacement relative to the base 1, an elastic supporting member 5 for supporting...
US20140268271 OPTICAL DEFLECTOR INCLUDING MEANDER-TYPE PIEZOELECTRIC ACTUATORS COUPLED BY CROSSING BARS THEREBETWEEN  
In an optical deflector including a mirror, a fixed frame surrounding the mirror, and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to the...
US20080137165 MICROMIRROR DEVICE WITH A HYBRID ACTUATOR  
A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the...
US20080018974 Scanner  
A scanner for removing a high frequency component from an external input using a mechanical structure of the scanner is provided. The scanner includes a mirror; an internal gimbal which is...
US20110181932 LOW COST LONG-LIFE COMPACT LOW WOBBLE WIDE SCAN ANGLE TAUT-BAND RESONANT SCANNERS WITH MATCHED COEFFICIENTS OF THERMAL EXPANSION AND INTERCHANGEABLE MIRRORS  
A taut-band resonant scanner is disclosed that includes an elongated band and a sub-assembly. The elongated band has a length in an elongated direction, a width in a width direction that is...
US20080231930 OSCILLATOR DEVICE, METHOD OF DRIVING THE SAME, OPTICAL DEFLECTOR AND IMAGE DISPLAY DEVICE USING THE SAME  
An oscillator device includes a first oscillator, a second oscillator configured to support the first oscillator for torsional rotation about a first rotational axis, through a first torsion...
US20150108872 Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same  
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as...
US20090219598 DEFORMABLE MIRROR SYSTEM AND DEFORMABLE MIRROR DRIVE DEVICE  
A deformable mirror system includes a deformable mirror, which comprises a deformation part with a reflection surface formed thereon, a fixing part configured to fix the deformation part, and a...
US20060050350 Driving of an array of micro-electro-mechanical-system (mems) elements  
Method for driving an array of micro-electro mechanical system (MEMS) devices, said array providing a plurality of logical or memory states at it output, wherein the MEMS devices are given a...
US20080100898 ELECTROMAGNETIC MICRO-ACTUATOR  
An electromagnetic micro-actuator is provided that includes a stage rotatably formed on a surface of a substrate; first and second torsion springs respectively connected to opposite sides of the...

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