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US20120008150 Autofocus system and method  
New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering...
US20150098094 MEASURING GRADUATION AND PHOTOELECTRIC POSITION MEASURING DEVICE HAVING THE SAME  
A measuring graduation includes a phase grating for a photoelectric position measuring device for measuring positions in a first direction and in a second direction extending orthogonally to the...
US20100328681 DISPLACEMENT ENCODER INCLUDING PHOSPHOR ILLUMINATION SOURCE  
A position sensing optical encoder includes an illumination source that operates by providing primary radiation having a first level of intensity uniformity to saturate at least a portion of a...
US20100026963 OPTICAL PROJECTION GRID, SCANNING CAMERA COMPRISING AN OPTICAL PROJECTION GRID AND METHOD FOR GENERATING AN OPTICAL PROJECTION GRID  
The present invention relates to an optical projection grid (1) for producing a light distribution, which projection grid (1) has a transmittance distribution, wherein the transmittance...
US20130278941 AUTOMATIC CALIBRATION OF A MICROSCOPE SCANNING SYSTEM  
The invention provides a method for automatic calibration of slides and a method for automatic calibration of slide frames and a slide for performing the method. To this end, slide frames (4; 210)...
US20090122323 Scanning unit of an optical position measuring arrangement and position measuring arrangement having this scanning unit  
A scanning unit, by which a scale, which is movable in relation to the scanning unit in a measuring direction, can be optically scanned. The scanning unit including a detector arrangement and a...
US20100039656 METHOD FOR DETERMINING AN INFLUENCING VARIABLE ACTING ON THE ECCENTRICITY IN A GONIOMETER  
The invention relates to a method for determining at least one influencing variable acting on the eccentricity in a goniometer, using a detector arrangement consisting of four optical detector...
US20140132964 OPTICAL POSITION MEASURING INSTRUMENT  
An optical position measuring instrument including a first scale having a first graduation, wherein the first scale is disposed movable in a first measuring direction, and at a first defined...
US20090180125 Rotary Encoder Apparatus  
Rotary encoder apparatus is described that comprises one or more readheads (114) and a radial scale (20). Each of the one or more readheads (114) includes a light emitting portion (30, 32) for...
US20090033948 Method of Measuring Shot Shape and Mask  
A method of measuring shot shape includes sequentially exposing a substrate with main scale marks (32) in compliance with a predetermined map, and forming a reference grid including a plurality of...
US20120140246 MEASUREMENT DEVICE AND METHOD  
A measurement device for determining an installation position for a fire sprinkler head is provided. The measurement device includes a body adapted for positioning across and proximate to the...
US20110068731 LINEAR ENCODER, LINEAR MOTOR SYSTEM, AND METHOD OF MANUFACTURING LINEAR ENCODER  
An encoder includes: a main scale having two or more band-shaped tracks in each of which an optical main grating is formed so that longitudinal direction of the main scale corresponds to a...
US20060050285 Position Encoder with Directional Output  
A method for measuring the position and direction of movement of an object having a simple alternating pattern of light and dark markings using radiant energy where the object is subject to...
US20080291470 SYSTEM ARCHITECTURE FOR SENSING AN ABSOLUTE POSITION USING A TARGET PATTERN  
A location system and a location system on a chip (LCoS) and method are described.
US20120038936 Measurement System Using Alignment Unit And Position Measuring Method  
In one example embodiment, position of the alignment unit is acquired using a fiducial mark formed on a moving table, and the moving table is moved such that an alignment mark formed on the...
US20080049268 TWO-DIMENSIONAL MEASUREMENT SYSTEM  
A system (100) and a method (500) are described for determining a two-dimensional position of a location in an image. The method (500) starts by imaging (510) a two-dimensional pattern (440). The...
US20130016363 POSITION DETECTING SENSOR AND POSITION DETECTOR  
A position detecting sensor includes a grid structure composed of plural electrodes extending in a first direction and plural electrodes extending in a second direction perpendicular to the first...
US20100188668 TOTAL INTERNAL REFLECTION DISPLACEMENT SCALE  
Methods and systems for determining the displacement of a substrate using a scale comprising TIR scale features are described. A scale that includes a number of total internal reflection (TIR)...
US20090135436 Optical position measuring arrangement  
A position measuring arrangement including a scale connected with a first object, wherein the scale includes a reference marking and a plurality of graduated areas, which are arranged a...
US20140146326 OPTICAL POSITION-MEASURING DEVICE  
An optical position-measuring device includes a measuring standard having a first grating in a form of a periodic incremental graduation and an absolute mark. A scanning unit is displaceable...
US20090097041 Method for determining the centrality of masks  
A method for determining the centrality of masks is disclosed. The mask is positioned in a coordinate measuring device on a measurement table displaceable in a direction perpendicular to the...
US20090180084 LITHOGRAPHIC APPARATUS WITH AN ENCODER ARRANGED FOR DEFINING A ZERO LEVEL  
A lithographic apparatus includes a position measuring system configured to measure a position of a moveable object with respect to a reference frame of the lithographic apparatus, in at least one...
US20070273894 METHOD AND APPARATUS FOR REMOTE SPATIAL CALIBRATION AND IMAGING  
Disclosed are remote spatial calibration apparatuses and spatial calibration methods. A first plurality of line-generating lasers is arranged for generating a first set of substantially parallel...
US20110204484 Sub-Wavelength Segmentation in Measurement Targets on Substrates  
Measurement targets for use on substrates, and overlay targets are presented. The targets include an array of first regions alternating with second regions, wherein the first regions include...
US20060279747 Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus  
A displacement detection apparatus includes a light source emitting a light; extinction ratio conversion means raising an extinction ratio of the light to 20 dB or more; a condenser lens...
US20120019837 POSITION DETECTING DEVICE, LIQUID EJECTING APPARATUS AND METHOD OF DETECTING SMEAR OF SCALE  
A position detecting device for detecting a position of an object, includes a light emitting portion that emits light, a light receiving portion that receives the light from the light emitting...
US20090161086 MOVABLE BODY SYSTEM, PATTERN FORMATION APPARATUS, EXPOSURE APPARATUS AND MEASUREMENT DEVICE, AND DEVICE MANUFACTURING METHOD  
A movable body system is equipped with a stage having a stage main section which moves along an XY plane and a stage which is finely movable in a direction (a Z-axis direction) orthogonal to the...
US20120262731 ENCODER  
An encoder includes a scale, a detector array that includes a plurality of detectors, and a signal processor configured to process and convert into positional information, an output signal from...
US20120274948 ABSOLUTE POSITION ENCODER  
In an absolute position encoder, a multi-spectral light source illuminates a position on a topographic surface at an angle of incidence determined from a vector normal to the surface. A target on,...
US20090135435 REFERENCE SIGNAL GENERATING CONFIGURATION FOR AN INTERFEROMETRIC MINIATURE GRATING ENCODER READHEAD USING FIBER OPTIC RECEIVER CHANNELS  
A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes “primary” fibers that provide...
US20110096161 Displacement sensing system  
A displacement sensing system is disclosed. Two image capturing devices are settled at to opposite ends of a coordinate axis of the planar area, respectively, for capturing images of the planar...
US20050259274 Method and apparatus for measuring displacement  
In a method and apparatus for measuring displacement, an optical modulator includes a magneto-optical recording layer recorded with a plurality of light-reflecting graduation regions. The...
US20110063622 OPTICAL ENCODER FOR OBTAINING DISPLACEMENT INFORMATION OF OBJECT  
An optical encoder includes a light source 10, a scale 20 disposed so as to face the light source, a light receiving element 31 configured to receive luminous flux from the light source through...
US20100220138 POSITION DETECTING DEVICE, LIQUID EJECTING APPARATUS AND METHOD OF DETECTING SMEAR OF SCALE  
A position detecting device for detecting a position of an object, includes a light emitting portion that emits light, a light receiving portion that receives the light from the light emitting...
US20080151265 Method for positioning a target portion of a substrate with respect to a focal plane of a projection system  
A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at...
US20110273725 OPTICAL ENCODER HAVING CONTAMINATION AND DEFECT RESISTANT SIGNAL PROCESSING  
An encoder configuration comprises an illumination portion, a scale comprising a scale track, and a signal processing electronics. The signal processing electronics may include a detector...
US20130155419 LOCATING AND RELOCATING DEVICE  
A relocating device for locating and relocating a first object relative to a second object is for use in association with a means for defining a location point on the second object. The relocating...
US20130293900 METHODS AND DEVICES FOR REDUCING ERRORS IN GOOS-HÄNCHEN CORRECTIONS OF DISPLACEMENT DATA  
An exemplary method involves, in a system comprising a tool that performs a task on a workpiece, a method for determining displacement of the workpiece relative to the tool. Respective...
US20140022562 METHOD AND DEVICE FOR DETECTING THE POSITION OF A CONVEYOR  
A method for detecting the position of a conveyor, comprising the steps of: providing on the conveyor belt an irregular marking, constituted by marks and the like that are detectable optically; by...
US20120176629 REMOTE DISPLACEMENT SENSOR, INCLUDING AN OPTICAL STRAIN GAUGE, AN ASSEMBLY AND SYSTEM THEREWITH  
The disclosure relates to a remote displacement sensor, such as an optical strain gauge, which uses an optical amplifier implemented by patterns, such as, but not limited to, moiré patterns, to...
US20120050709 STAGE APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD OF POSITIONING AN OBJECT TABLE  
A measurement system configured to measure a position dependent signal of an object table, the measurement system including at least one sensor mountable on the object table and a sensor target...
US20070195334 DISPLACEMENT DETECTION APPARATUS, POLARIZATION BEAM SPLITTER, AND DIFFRACTION GRATING  
A displacement detection apparatus, polarization beam splitter, and diffraction grating are provided. A displacement detection apparatus configured to detect a displacement includes a light...
US20110153265 METHOD OF MEASURING PROPERTIES OF DYNAMIC POSITIONING ERRORS IN A LITHOGRAPHIC APPARATUS, DATA PROCESSING APPARATUS, AND COMPUTER PROGRAM PRODUCT  
Movements of a lithographic apparatus include dynamic positioning errors on one or more axes which cause corresponding errors which can be measured in the applied pattern. A test method includes...
US20100237256 CHARGED PARTICLE BEAM WRITING METHOD, METHOD FOR DETECTING POSITION OF REFERENCE MARK FOR CHARGED PARTICLE BEAM WRITING, AND CHARGED PARTICLE BEAM WRITING APPARATUS  
The reference mark has steps and is formed on a sample. A stage moves in X and Y directions. The sample M is placed on the stage. An optical lever type height position sensor emits light to detect...
US20100227263 POSITION DETECTOR AND EXPOSURE APPARATUS  
A position detector includes a first planar encoder including a first encoder head unit mounted on a test object that is a movable member, and a first grating unit mounted on a fixed member, the...
US20100225930 BEAM IRRADIATION DEVICE AND POSITION DETECTING DEVICE  
In a beam irradiation device, laser light emitted from a laser light source is entered into a mirror. An actuator pivotally moves the mirror into which laser light is entered, whereby a targeted...
US20100195118 SCALE, DISPLACEMENT DETECTION APPARATUS PROVIDED WITH THE SAME, AND IMAGING APPARATUS PROVIDED WITH THE SAME  
A scale for a displacement detection apparatus includes a base, and reflection layers formed on the base in a lattice structure, wherein the scale is used as a member displaceable relative to a...
US20100188669 LASER BEAM CENTERING AND POINTING SYSTEM  
An optical instrument aligns an optical beam without the need for physical intervention of the instrument within the apparatus or platforms from which the trajectory of the beam to be ascertained....
US20100134779 POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT METHOD, LOADING METHOD, EXPOSURE METHOD AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD  
A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets...
US20150346000 SCALE AND OPTICAL ENCODER  
A scale and an optical encoder capable of maintaining an accuracy of a reference position irrespective of an error in attaching a detection head are provided. The scale according to the present...

Matches 1 - 50 out of 58 1 2 >