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US20120250031 DISPLACEMENT MEASUREMENT METHOD AND DISPLACEMENT MEASUREMENT DEVICE  
A displacement measurement device includes a first diffraction grating that generates first diffraction light of a prescribed order; a second diffraction grating movable relative to the first...
US20130169209 ENCODER, SERVOMOTOR, AND MOTOR UNIT  
This disclosure discloses an encoder. The encoder includes a disk including a first and a second track. A first and a second rotating grating are formed in the first and second tracks,...
US20090147265 DETECTION SYSTEM FOR DETECTING TRANSLATIONS OF A BODY  
The invention relates to a system (1) for detecting a translation (T) of a body (2) with a diffraction pattern (3) applied to said body. The system comprises means (4) for providing an incident...
US20080304045 Motion measurement and synchronication using a scanning interferometer with gratings  
Indicating relative speed is disclosed. A first grating coupled to a first moving object is illuminated using a coherent light source to generate a first diffracted beam and a diffracted order...
US20130076289 ROTARY ENCODER, ROTARY MOTOR, AND ROTARY MOTOR SYSTEM  
The encoder includes a disk in a disk shape that is arranged rotatably about a rotation axis and that includes one track in a ring shape on which a rotating grating is formed and one or more...
US20140092393 DISPLACEMENT MEASUREMENT APPARATUS AND DISPLACEMENT MEASUREMENT METHOD  
There is provided a displacement measurement apparatus including: a light source; a pair of diffraction gratings that light emitted from the light source enters, the pair of diffraction gratings...
US20120105862 Optical Angle-Measuring Device  
In an optical angle-measuring device for ascertaining the relative movement between at least one scanning grating and a graduated disk having at least one measuring graduation, the scanning...
US20080246941 Wavefront aberration measuring device, projection exposure apparatus, method for manufacturing projection optical system, and method for manufacturing device  
A wavefront aberration measuring device includes a mask which arranges a group of minute apertures for generating a group of point light sources at an object point as a measurement objective of an...
US20080273192 Vibration detection device  
A vibration detection device capable of improving detection sensitivity when optically performing vibration detection is provided. A vibration detection device includes: a light source emitting a...
US20100020330 Interferometer Calibration System and Method  
A metrology system is provided comprising a diffraction grating mounted on the object, and an interferometer head operable to direct at least one measurement light beam towards the grating at a...
US20090279100 SCALE AND READHEAD  
An optical element has a member having features which interact with incident light to produce two or more resultant beams. The configuration of the optical element is such that light which...
US20110310397 POSITION DETECTION DEVICE  
A position detection device in which 2nd-order or higher order diffracted light as well as stray light is suppressed from being generated to improve the S/N ratio of a position detection signal as...
US20100081095 MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD  
A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam...
US20090141285 Input device and method for making same  
A light guide has a first surface and a second surface with diffractive structures. A slanted facet is provided at one corner of the light guide. The diffractive structures have concentric fringes...
US20120257214 OPTICAL DISPLACEMENT MEASUREMENT DEVICE  
An optical displacement measurement device in which variations in interference light by stray light are suppressed to improve interpolation accuracy and detection accuracy. The surface of...
US20120249984 LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE  
The invention relates to a lithography system comprising an optical column, a moveable target carrier for displacing a target such as a wafer, and a differential interferometer module, wherein the...
US20080062430 Method and System for Determining the Position and Alignment of a Surface of an Object in Relation to a Laser Beam  
The present invention generally relates to a method and system for determining the position and alignment of a plane in relation to an intersecting axis and using that known position and alignment...
US20080285050 POSITION-MEASURING DEVICE  
A position-measuring device includes a light source, a first grating, a second grating and photodetectors, light from the light source, which is split into partial beams of different directions at...
US20130271773 DISPLACEMENT MEASUREMENT DEVICE, DISPLACEMENT MEASUREMENT METHOD, AND DISPLACEMENT MEASUREMENT PROGRAM  
A displacement measurement device includes a plurality of light receiving elements each of which outputs a signal corresponding to illuminance of interference fringe, the elements being arranged...
US20090033946 DISPLACEMENT MEASURING APPARATUS  
Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector...
US20120287441 Displacement Detecting Device  
A displacement detecting device includes: a diffraction grating having a relief shape; an irradiation optical system adapted to irradiate two beams onto the diffraction grating as p-polarized...
US20110304839 POSITION SENSOR AND LITHOGRAPHIC APPARATUS  
A position sensor is configured to measure a position data of a target. The position sensor includes a radiation source configured to irradiate a radiation beam, a first grating configured to...
US20100060899 DISPLACEMENT MEASUREMENT SYSTEM AND METHOD OF USE  
A measurement displacement system and method are described. The measurement displacement system comprises a sensor head configured to transmit input optical beams and to receive measurement beams....
US20100110445 SLIT APERTURE FOR DIFFRACTION RANGE FINDING SYSTEM AND METHOD FOR USING THE SLIT APERTURE TO FORM A FOCUSED IMAGE  
A method and system for forming a focused image on an image plane of a diffraction range finder with a variable pitch diffraction grating. The system includes the variable pitch diffraction...
US20120162663 OPTICAL ENCODER READHEAD CONFIGURATION  
A device for measuring relative displacement between two members includes a scale grating and an optical encoder readhead comprising a first wavelength light source illuminating the grating. The...
US20070076218 Lithographic apparatus temperature compensation  
A lithographic apparatus includes a position measurement system to determine along a measurement path a position of a first part of the lithographic apparatus with respect to a position of a...
US20090262321 POSITION MEASURING SYSTEM AND POSITION MEASURING METHOD, MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, PATTERN FORMING APPARATUS, AND DEVICE MAUFACTURING METHOD  
A mirror block on which moving gratings are arranged is fixed to the lower surface of a stage. Fixed gratings are placed on the upper surface of a stage platform that is opposed to the lower...
US20090027687 FIXED-POINT DETECTOR AND DISPLACEMENT-MEASURING APPARATUS  
A fixed-point detector is provided. The fixed-point detector includes a plurality of fixed-point detecting patterns, a fixed-point detecting light source, and a plurality of photoelectric...
US20110286004 Optical position measuring instrument  
A method an optical position measuring instrument for detecting a relative position of a scanning unit and a scale. The optical position measuring instrument includes a scale and a scanning unit,...
US20120050748 DISPLACEMENT DETECTING DEVICE  
A displacement detecting device includes an irradiation optical system, an interference optical system, a light-receiving section, and a displacement detecting section. The irradiation optical...
US20130114062 COMPACT ENCODER HEAD FOR INTERFEROMETRIC ENCODER SYSTEM  
An encoder system includes an encoder scale and an encoder head, in which the encoder head is configured to combine each twice-diffracted measurement beam of multiple twice-diffracted measurement...
US20110211198 LIGHTWAVE INTERFERENCE MEASUREMENT APPARATUS THAT CALCULATES ABSOLUTE DISTANCE USING LIGHTWAVE INTERFERENCE  
A lightwave interference measurement apparatus includes a wavelength-variable laser which periodically performs wavelength scanning between first and second reference wavelengths to emit light...
US20130010305 Method and Apparatus for Measuring Displacement  
A technique for measuring displacement involves passing parallel laser light from a laser light source through a first diffraction grating to a semi-transparent semi-reflective mirror. A portion...
US20130162966 Lithographic Apparatus and Method  
A displacement measurement system comprising at least one retro reflector and a diffraction grating. Said displacement measurement system is constructed and arranged to measure a displacement by...
US20110043819 LASER GAUGE INTERFEROMETER  
There is provided a laser gauge interferometer with high measurement precision, which uses laser beam interference, includes: a measurement interferometer which generates a measurement output...
US20150168131 Position-Measuring System and Method for Operating a Position-Measuring System  
A position-measuring system includes a plurality of scanning units for the optical scanning of at least one measuring standard, the scanning units being coupled optically to a plurality of light...
US20130100459 DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD  
A detector for detecting interfering light of diffracted light components diffracted by marks formed on first and second objects includes: an illumination optical system configured to form an...
US20110235051 Device for interferential distance measurement  
A device for interferential distance measurement that includes a light source that emits a light beam along a propagation direction and a scanning plate including a splitter that splits the light...
US20100284022 DISPLACEMENT MEASUREMENT SYSTEM AND METHOD THEREOF  
A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters...
US20100208271 ORIGIN DETECTION APPARATUS, DISPLACEMENT MEASUREMENT APPARATUS AND OPTICAL APPARATUS  
An apparatus includes a light source, a scale which is configured to have first and second diffraction grating portions which differ from each other in a grating pitch, a light receiving portion...
US20100103403 WAVELENGTH SHIFT MEASURING APPARATUS, OPTICAL SOURCE APPARATUS, INTERFERENCE MEASURING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD  
A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source,...
US20160245642 Optical Position-Measuring Device  
An optical position-measuring device for detecting the position of two objects movable relative to each other includes a measuring standard that is joined to one of the two objects and has a...
US20160116305 DISPLACEMENT MEASUREMENT DEVICE AND DISPLACEMENT MEASUREMENT METHOD  
A displacement measurement device includes: a light source; a first diffraction grating and a second diffraction grating arranged along a path of light from the light source and movable relative...
US20160109216 OPTICAL POSITION MEASURING DEVICE  
An optical position-measuring device includes a scanning unit and a material measure that is movable relative thereto in a measuring direction. The scanning unit includes a splitting device and an...
US20160084643 INTERFEROMETRIC APPARATUS WITH COMPUTER-GENERATED HOLOGRAM FOR MEASURING NON-SPHERICAL SURFACES  
Method and system of interferometrically measuring, in reflection, a non-spherical surface with two diffracted beams (of different diffraction orders) formed by a diffractive element positioned...
US20160011016 INTERFEROMETRIC ENCODERS USING SPECTRAL ANALYSIS  
Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an...
US20150354937 INTERFERENTIAL POSITION-MEASURING DEVICE AND METHOD FOR OPERATING AN INTERFERENTIAL POSITION-MEASURING DEVICE  
An interferential position-measuring device determines a position of an object which is disposed to be movable along a measurement direction. A light source is configured to emit a beam which is...
US20150292913 DOUBLE PASS INTERFEROMETRIC ENCODER SYSTEM  
An encoder head includes one or more components arranged to: i) direct a first incident beam to the diffractive encoder scale at a first incident angle with respect to the encoder scale; ii)...
US20130188197 INTERFEROMETRIC APPARATUS FOR DETECTING 3D POSITION OF A DIFFRACTING OBJECT  
A position detecting apparatus includes a light source, which supplies a detecting light; a light-collecting optical system which collects the detecting light onto a diffracted light generating...
US20130128255 ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD AND METHOD FOR PRODUCING DEVICE  
An encoder, which measures a relative moving amount of a second member relative to a first member, includes: a diffraction grating provided on the first member; a light-incident optical member...
Matches 1 - 50 out of 50