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US20120250031 |
DISPLACEMENT MEASUREMENT METHOD AND DISPLACEMENT MEASUREMENT DEVICE
A displacement measurement device includes a first diffraction grating that generates first diffraction light of a prescribed order; a second diffraction grating movable relative to the first... |
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US20130169209 |
ENCODER, SERVOMOTOR, AND MOTOR UNIT
This disclosure discloses an encoder. The encoder includes a disk including a first and a second track. A first and a second rotating grating are formed in the first and second tracks,... |
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US20090147265 |
DETECTION SYSTEM FOR DETECTING TRANSLATIONS OF A BODY
The invention relates to a system (1) for detecting a translation (T) of a body (2) with a diffraction pattern (3) applied to said body. The system comprises means (4) for providing an incident... |
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US20080304045 |
Motion measurement and synchronication using a scanning interferometer with gratings
Indicating relative speed is disclosed. A first grating coupled to a first moving object is illuminated using a coherent light source to generate a first diffracted beam and a diffracted order... |
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US20130076289 |
ROTARY ENCODER, ROTARY MOTOR, AND ROTARY MOTOR SYSTEM
The encoder includes a disk in a disk shape that is arranged rotatably about a rotation axis and that includes one track in a ring shape on which a rotating grating is formed and one or more... |
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US20140092393 |
DISPLACEMENT MEASUREMENT APPARATUS AND DISPLACEMENT MEASUREMENT METHOD
There is provided a displacement measurement apparatus including: a light source; a pair of diffraction gratings that light emitted from the light source enters, the pair of diffraction gratings... |
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US20120105862 |
Optical Angle-Measuring Device
In an optical angle-measuring device for ascertaining the relative movement between at least one scanning grating and a graduated disk having at least one measuring graduation, the scanning... |
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US20080246941 |
Wavefront aberration measuring device, projection exposure apparatus, method for manufacturing projection optical system, and method for manufacturing device
A wavefront aberration measuring device includes a mask which arranges a group of minute apertures for generating a group of point light sources at an object point as a measurement objective of an... |
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US20080273192 |
Vibration detection device
A vibration detection device capable of improving detection sensitivity when optically performing vibration detection is provided. A vibration detection device includes: a light source emitting a... |
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US20100020330 |
Interferometer Calibration System and Method
A metrology system is provided comprising a diffraction grating mounted on the object, and an interferometer head operable to direct at least one measurement light beam towards the grating at a... |
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US20090279100 |
SCALE AND READHEAD
An optical element has a member having features which interact with incident light to produce two or more resultant beams. The configuration of the optical element is such that light which... |
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US20110310397 |
POSITION DETECTION DEVICE
A position detection device in which 2nd-order or higher order diffracted light as well as stray light is suppressed from being generated to improve the S/N ratio of a position detection signal as... |
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US20100081095 |
MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam... |
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US20090141285 |
Input device and method for making same
A light guide has a first surface and a second surface with diffractive structures. A slanted facet is provided at one corner of the light guide. The diffractive structures have concentric fringes... |
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US20120257214 |
OPTICAL DISPLACEMENT MEASUREMENT DEVICE
An optical displacement measurement device in which variations in interference light by stray light are suppressed to improve interpolation accuracy and detection accuracy. The surface of... |
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US20120249984 |
LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE
The invention relates to a lithography system comprising an optical column, a moveable target carrier for displacing a target such as a wafer, and a differential interferometer module, wherein the... |
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US20080062430 |
Method and System for Determining the Position and Alignment of a Surface of an Object in Relation to a Laser Beam
The present invention generally relates to a method and system for determining the position and alignment of a plane in relation to an intersecting axis and using that known position and alignment... |
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US20080285050 |
POSITION-MEASURING DEVICE
A position-measuring device includes a light source, a first grating, a second grating and photodetectors, light from the light source, which is split into partial beams of different directions at... |
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US20130271773 |
DISPLACEMENT MEASUREMENT DEVICE, DISPLACEMENT MEASUREMENT METHOD, AND DISPLACEMENT MEASUREMENT PROGRAM
A displacement measurement device includes a plurality of light receiving elements each of which outputs a signal corresponding to illuminance of interference fringe, the elements being arranged... |
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US20090033946 |
DISPLACEMENT MEASURING APPARATUS
Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector... |
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US20120287441 |
Displacement Detecting Device
A displacement detecting device includes: a diffraction grating having a relief shape; an irradiation optical system adapted to irradiate two beams onto the diffraction grating as p-polarized... |
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US20110304839 |
POSITION SENSOR AND LITHOGRAPHIC APPARATUS
A position sensor is configured to measure a position data of a target. The position sensor includes a radiation source configured to irradiate a radiation beam, a first grating configured to... |
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US20100060899 |
DISPLACEMENT MEASUREMENT SYSTEM AND METHOD OF USE
A measurement displacement system and method are described. The measurement displacement system comprises a sensor head configured to transmit input optical beams and to receive measurement beams.... |
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US20100110445 |
SLIT APERTURE FOR DIFFRACTION RANGE FINDING SYSTEM AND METHOD FOR USING THE SLIT APERTURE TO FORM A FOCUSED IMAGE
A method and system for forming a focused image on an image plane of a diffraction range finder with a variable pitch diffraction grating. The system includes the variable pitch diffraction... |
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US20120162663 |
OPTICAL ENCODER READHEAD CONFIGURATION
A device for measuring relative displacement between two members includes a scale grating and an optical encoder readhead comprising a first wavelength light source illuminating the grating. The... |
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US20070076218 |
Lithographic apparatus temperature compensation
A lithographic apparatus includes a position measurement system to determine along a measurement path a position of a first part of the lithographic apparatus with respect to a position of a... |
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US20090262321 |
POSITION MEASURING SYSTEM AND POSITION MEASURING METHOD, MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, PATTERN FORMING APPARATUS, AND DEVICE MAUFACTURING METHOD
A mirror block on which moving gratings are arranged is fixed to the lower surface of a stage. Fixed gratings are placed on the upper surface of a stage platform that is opposed to the lower... |
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US20090027687 |
FIXED-POINT DETECTOR AND DISPLACEMENT-MEASURING APPARATUS
A fixed-point detector is provided. The fixed-point detector includes a plurality of fixed-point detecting patterns, a fixed-point detecting light source, and a plurality of photoelectric... |
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US20110286004 |
Optical position measuring instrument
A method an optical position measuring instrument for detecting a relative position of a scanning unit and a scale. The optical position measuring instrument includes a scale and a scanning unit,... |
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US20120050748 |
DISPLACEMENT DETECTING DEVICE
A displacement detecting device includes an irradiation optical system, an interference optical system, a light-receiving section, and a displacement detecting section. The irradiation optical... |
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US20130114062 |
COMPACT ENCODER HEAD FOR INTERFEROMETRIC ENCODER SYSTEM
An encoder system includes an encoder scale and an encoder head, in which the encoder head is configured to combine each twice-diffracted measurement beam of multiple twice-diffracted measurement... |
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US20110211198 |
LIGHTWAVE INTERFERENCE MEASUREMENT APPARATUS THAT CALCULATES ABSOLUTE DISTANCE USING LIGHTWAVE INTERFERENCE
A lightwave interference measurement apparatus includes a wavelength-variable laser which periodically performs wavelength scanning between first and second reference wavelengths to emit light... |
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US20130010305 |
Method and Apparatus for Measuring Displacement
A technique for measuring displacement involves passing parallel laser light from a laser light source through a first diffraction grating to a semi-transparent semi-reflective mirror. A portion... |
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US20130162966 |
Lithographic Apparatus and Method
A displacement measurement system comprising at least one retro reflector and a diffraction grating. Said displacement measurement system is constructed and arranged to measure a displacement by... |
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US20110043819 |
LASER GAUGE INTERFEROMETER
There is provided a laser gauge interferometer with high measurement precision, which uses laser beam interference, includes: a measurement interferometer which generates a measurement output... |
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US20150168131 |
Position-Measuring System and Method for Operating a Position-Measuring System
A position-measuring system includes a plurality of scanning units for the optical scanning of at least one measuring standard, the scanning units being coupled optically to a plurality of light... |
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US20130100459 |
DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
A detector for detecting interfering light of diffracted light components diffracted by marks formed on first and second objects includes: an illumination optical system configured to form an... |
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US20110235051 |
Device for interferential distance measurement
A device for interferential distance measurement that includes a light source that emits a light beam along a propagation direction and a scanning plate including a splitter that splits the light... |
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US20100284022 |
DISPLACEMENT MEASUREMENT SYSTEM AND METHOD THEREOF
A displacement measurement system including a coherent light source, a two-dimensional grating, a photo sensor, and a signal processing apparatus is provided. After the coherent light beam enters... |
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US20100208271 |
ORIGIN DETECTION APPARATUS, DISPLACEMENT MEASUREMENT APPARATUS AND OPTICAL APPARATUS
An apparatus includes a light source, a scale which is configured to have first and second diffraction grating portions which differ from each other in a grating pitch, a light receiving portion... |
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US20100103403 |
WAVELENGTH SHIFT MEASURING APPARATUS, OPTICAL SOURCE APPARATUS, INTERFERENCE MEASURING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source,... |
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US20160245642 |
Optical Position-Measuring Device
An optical position-measuring device for detecting the position of two objects movable relative to each other includes a measuring standard that is joined to one of the two objects and has a... |
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US20160116305 |
DISPLACEMENT MEASUREMENT DEVICE AND DISPLACEMENT MEASUREMENT METHOD
A displacement measurement device includes: a light source; a first diffraction grating and a second diffraction grating arranged along a path of light from the light source and movable relative... |
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US20160109216 |
OPTICAL POSITION MEASURING DEVICE
An optical position-measuring device includes a scanning unit and a material measure that is movable relative thereto in a measuring direction. The scanning unit includes a splitting device and an... |
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US20160084643 |
INTERFEROMETRIC APPARATUS WITH COMPUTER-GENERATED HOLOGRAM FOR MEASURING NON-SPHERICAL SURFACES
Method and system of interferometrically measuring, in reflection, a non-spherical surface with two diffracted beams (of different diffraction orders) formed by a diffractive element positioned... |
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US20160011016 |
INTERFEROMETRIC ENCODERS USING SPECTRAL ANALYSIS
Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an... |
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US20150354937 |
INTERFERENTIAL POSITION-MEASURING DEVICE AND METHOD FOR OPERATING AN INTERFERENTIAL POSITION-MEASURING DEVICE
An interferential position-measuring device determines a position of an object which is disposed to be movable along a measurement direction. A light source is configured to emit a beam which is... |
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US20150292913 |
DOUBLE PASS INTERFEROMETRIC ENCODER SYSTEM
An encoder head includes one or more components arranged to: i) direct a first incident beam to the diffractive encoder scale at a first incident angle with respect to the encoder scale; ii)... |
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US20130188197 |
INTERFEROMETRIC APPARATUS FOR DETECTING 3D POSITION OF A DIFFRACTING OBJECT
A position detecting apparatus includes a light source, which supplies a detecting light; a light-collecting optical system which collects the detecting light onto a diffracted light generating... |
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US20130128255 |
ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD AND METHOD FOR PRODUCING DEVICE
An encoder, which measures a relative moving amount of a second member relative to a first member, includes: a diffraction grating provided on the first member; a light-incident optical member... |