Matches 1 - 40 out of 40


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US20120281224 SYSTEMS AND METHODS FOR ENDOSCOPIC ANGLE-RESOLVED LOW COHERENCE INTERFEROMETRY  
Fourier domain a/LCI (faLCI) system and method which enables in vivo data acquisition at rapid rates using a single scan. Angle-resolved and depth resolved spectra information is obtained with one...
US20080278731 COMPOSITE SENSOR MEMBRANE  
A sensor may include a membrane to deflect in response to a change in surface stress, where a layer on the membrane is to couple one or more probe molecules with the membrane. The membrane may...
US20070223006 SYSTEMS AND METHODS FOR PERFORMING RAPID FLUORESCENCE LIFETIME, EXCITATION AND EMISSION SPECTRAL MEASUREMENTS  
Exemplary systems and methods for obtaining information associated with at least one portion of a sample can be provided. For example, a first radiation can be received and at least one second...
US20130114087 LOW COHERENCE INTERFEROMETRY USING ENCODER SYSTEMS  
A method for determining information about changes in a position of an encoder scale includes separating, in a first interferometry cavity, a low coherence beam into a first beam propagating along...
US20120127478 REFLECTOR, OPTICAL ELEMENT, INTERFEROMETER SYSTEM, STAGE DEVICE, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD  
A reflecting member has: a first reflecting surface, which extends in a second direction that includes a first direction component; a second reflecting surface, which extends in a third direction...
US20070030492 Apparatus and method for sizing nanoparticles based on optical forces and interferometric field detection  
Light from a laser source is split into a reference arm and a detection arm. The light in the detection arm is focused into a channel containing particles to be detected and is backscattered by...
US20080111994 AUTOFOCUS METHODS AND DEVICES FOR LITHOGRAPHY  
Improved autofocusing (“AF”) methods and devices for lithography are provided. Some embodiments of the invention provide an AF system that includes one or more interferometers for measuring a...
US20130221556 DETECTOR, IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE  
A detector, which detects a relative position between a first object and a second object in a first direction, includes: an illumination optical system configured to obliquely illuminate a first...
US20140168625 POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD  
Provided is a positioning apparatus including a holder configured to hold an original or a substrate and to be movable, and an interferometer for measuring a position of the holder, and...
US20120002214 OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND CONTROL METHOD THEREFOR  
There are provided an optical tomographic imaging apparatus which detects an amount of movement of an object during imaging to reduce a deformation or a displacement in a depth direction in an...
US20160161730 MEASUREMENT DEVICE USING OPTICAL INTERFEROMETRY AND MEASUREMENT METHOD USING OPTICAL INTERFEROMETRY  
Provided are a measurement device using optical interferometry and a measurement method using optical interferometry that accurately measure the depth of a recess having a high aspect ratio. The...
US20130021588 MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE  
A measurement apparatus includes a beam splitter that splits light from a light source into measurement light to be directed to an object to be measured and reference light to be directed to a...
US20130016338 SCANNER WITH PHASE AND PITCH ADJUSTMENT  
A method for determining three-dimensional coordinates of an object point on a surface of an object, including steps of providing a transparent plate having a first region and a second region, the...
US20120120485 INTERFERENCE MICROSCOPE AND MEASURING APPARATUS  
In an interference microscope and a measuring device for observing and inspecting the surface and inside of a specimen such as a wafer by applying laser light to the specimen and using an...
US20070103696 APPARATUS FOR MEASURING THE POSITION OF AN OBJECT WITH A LASER INTERFEROMETER SYSTEM  
The present invention relates to an apparatus for measuring the position of an object (30), comprising at least one laser interferometer system (29) for determining a position displacement of the...
US20150275566 REFLECTING MIRROR POSTURE ADJUSTMENT STRUCTURE, CEILING PLATE OPENING AND CLOSING MECHANISM, AND INSPECTION DEVICE  
Provided is a reflecting mirror holding mechanism including: a base that is obtained by integrally forming a fixed portion fixed onto an attachment table and a movable portion including a notched...
US20140268170 APPARATUS AND METHOD FOR ESTIMATING DEPTH OF BURIED DEFECT IN SUBSTRATE  
Provided are an apparatus and a method for estimating a depth of a buried defect in a substrate. The apparatus for estimating a depth of a buried defect in a substrate includes a light source...
US20090066928 ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD USING EXPOSURE APPARATUS  
An alignment apparatus includes driving means having a movable element and a stator, a measurement unit which measures a position of a moving member moved by the driving means using measurement...
US20140152998 MEASUREMENT METHOD AND MEASUREMENT APPARATUS  
A shape of a surface is measured using a measurement signal based on an interfering light of reference light of first light reflected by a reference surface and test light of second light...
US20120105861 DEVICE AND METHOD FOR DETERMINING OPTICAL PATH LENGTHS  
The present invention relates to a method for determining optical path length differences and for optical coherence tomography, having the steps of: generating spatially coherent light by a light...
US20130194582 MULTIWAVELENGTH INTERFEROMETER  
A multiwavelength interferometer (200,300) includes a light beam splitter (8) that separates each of a plurality of light beams having wave lengths different from each other into measuring light...
US20080130011 Transmissive disk, manufacturing method thereof, and levitation measurement apparatus using transmissive disk  
To provide a transmissive disk which is less subject to damage and whose levitation amount can be measured up to a smaller level with high accuracy, a manufacturing method thereof, and a...
US20070046949 Coordinate measuring device  
The present invention relates to a reference-beam interferometer for determining the position of a traversable stage, wherein an evacuated tube is inserted into the longer of the two...
US20090310105 Optical member, interferometer system, stage apparatus, exposure apparatus, and device manufacturing method  
An optical member is irradiated with light in order to measure position information in a first direction. The optical member has a first reflecting surface, onto which light propagating in a...
US20090257067 Dynamic Air Turbulence Compensation for Laser Measurement Apparatus  
Measurement apparatus comprising a laser measuring system an acoustic system is described. The apparatus provides a feedback control signal that can be used in the feedback control system of an...
US20130070256 MEASURING APPARATUS  
A measuring apparatus includes a light source unit configured to continuously scan wavelengths of a plurality of types of beams at different speeds in a plurality of discrete wavelength scanning...
US20100014097 ALGORITHM CORRECTING FOR CORRECTION OF INTERFEROMETER FLUCTUATION  
An exemplary interferometer system includes an interferometer producing data from at least one interferometer beam. A source of gently flowing gas or gas mixture (atmosphere) produces a gas flow...
US20070242277 Optical navigation in relation to transparent objects  
An optical navigation system includes an illumination system, an image sensor, and a processing system. The illumination system directs a beam of output light toward an object so that a first...
US20100182611 DISPLACEMENT MEASURING APPARATUS AND DISPLACEMENT MEASURING METHOD  
A displacement measuring apparatus 100 which measures a displacement of an object to be measured 1 comprises a ranging sensor 5 configured to detect a first origin position based on a distance to...
US20110032534 SYSTEM AND A METHOD FOR BROADBAND INTERFEROMETRY  
A method and a system for determining a depth of a space, the system includes: a scanner for scanning, by a single broadband light beam, the structural element and the area of the surface of the...
US20130016361 STAGE APPARATUS  
The stage apparatus includes a stage having a range of movement on a stage base, an interferometer and a fixed mirror that are installed outside the stage on the stage base, and a first movable...
US20090046297 Atmosphere-density-fluctuation monitors for interferometer beams, and atmosphere-supplying systems comprising same  
Systems are disclosed for providing a controlled atmosphere. In an exemplary system an atmosphere-release device delivers a flow of the atmosphere to a propagation pathway. A density-fluctuation...
US20100110400 SCANNING EXPOSURE APPARATUS, CONTROL METHOD THEREFOR, AND DEVICE MANUFACTURING METHOD  
An apparatus which includes a measurement device measuring a surface position of a substrate at each of a plurality of measurement points; which is configured to scan-expose the substrate using...
US20060256345 Interferometry measurement in disturbed environments  
In embodiments, techniques for interferometry measurements in disturbed environments are described. The disturbed environment may include one or more variations such as pressure variations and/or...
US20160025480 INTERFEROMETRIC LEVEL SENSOR  
Interferometer system and method for use in a level sensor of an exposure apparatus and autofocus system employing same. Operating either at a single or multiple wavelengths, the interferometric...
US20120212746 INTERFEROMETER AND MEASUREMENT METHOD  
The present invention provides an interferometer that measures a distance between a reference object and a measurement object, the interferometer including a light splitting element configured to...
US20090251670 OPTICAL FEEDBACK FOR HIGH SPEED SCAN MIRROR  
An image projection system (100) has a laser (102, 104, 106) providing at least one beam (103, 105, 107) to a scan mirror apparatus (130) for scanning the at least one beam (103, 105, 107) in two...
US20160334205 INTERFEROMETER  
An interferometer may include a tunable light source, a beam direction unit, a digital imager, and a processor system. The tunable light source may be configured to emit a beam. The beam direction...
US20080123102 Apparatus and method for measuring spacing  
An apparatus is provided for measuring a spacing between an object to be measured T and a transparent object 4. The transparent object 4 is disposed, facing a surface of the object to be measured...
US20140300904 MEASUREMENT APPARATUS  
The present invention provides a measurement apparatus including a first optical system configured to allow a first test light to pass, and a second optical system configured to allow a second...

Matches 1 - 40 out of 40