Matches 1 - 3 out of 3


Match Document Document Title
US20070132976 Exposure apparatus, exposure method, and method for producing device  
An exposure apparatus includes a first land surface which faces a surface of a substrate and which surrounds an optical path space for an exposure light beam, a second land surfaces which faces...
US20130038848 OPTICAL DEVICES HAVING KINEMATIC COMPONENTS  
Optical devices that have at least one optical element and a plurality of kinematic components are disclosed. The number m of the kinematic components of one type exceed the number n of degrees of...
US20080007810 Optical Scanning Module of a Scanner  
An optical scanning module includes a housing, four reflectors and a lens module. The housing has a right section and a left section. The four reflectors are positioned at the right section of the...
Matches 1 - 3 out of 3