Matches 1 - 12 out of 12


Match Document Document Title
US20100072938 Encoder Eccentricity Correction for Motion Control Systems  
Correction of rotary encoder eccentricity in an image forming device having a motor controller using period and position pulse train feedback signals. A motor includes an encoder disc rotating...
US20120038307 Measurement System Using Alignment Unit And Method Of Determining System Parameters Of Alignment Unit  
In one embodiment a method determines a system parameter of an alignment unit in a system that measures a position and posture of a workpiece, such as a substrate (or a semiconductor wafer), using...
US20090051895 MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, DEVICE MANUFACTURING METHOD, AND PROCESSING SYSTEM  
A position of a stage in a perpendicular direction with respect to a movement plane and a tilt direction is measured, using a surface position sensor and a Z interferometer. And, the stage is...
US20050174085 Micromanipulation system  
A micromanipulation system for applying a micro manipulation to an object within the view of a microscope, using a fine needle, comprising: a manipulator driving unit for transferring the fine...
US20150292918 ENCODER, ENCODER-EQUIPPED MOTOR, AND SERVO SYSTEM  
An encoder includes a disk on a rotor. First slit tracks each include slits in an incremental pattern in a measurement direction. A second slit track includes slits in an absolute pattern in the...
US20150354992 ENCODER, SERVO SYSTEM, AND POSITION DATA GENERATION METHOD OF ENCODER  
An encoder includes a disc coupled to a rotating body and having first tracks and one or more second tracks, a light source which emits light to the first and second tracks, first arrays...
US20150123587 ENCODER, MOTOR WITH ENCODER, AND SERVO SYSTEM  
An encoder includes a plurality of slit tracks, a point light source, a first light-receiving array, and a second light-receiving array. The plurality of slit tracks respectively comprises a...
US20060164030 Motor actuator  
A motor actuator for actuating a driven member includes a control unit and a brushless motor, which includes a coil, a magnet and a hall element. The coil generates a magnetic field when being...
US20050099151 Positioning/adjusting device for a shielding member  
A positioning/adjusting device includes a main unit and a controlling device. The main unit includes a motor unit and a circuit assembly. The motor unit includes a motor for moving the...
US20110210691 METHOD, MEASURING ARRANGEMENT AND APPARATUS FOR OPTICALLY MEASURING BY INTERFEROMETRY THE THICKNESS OF AN OBJECT  
Method, measuring arrangement (23;26;27) and apparatus (1) for optically measuring by interferometry the thickness of an object (2) having an external surface (16) and an internal surface (17)...
US20090033270 Position Feedback Device for a Motor  
A position feedback device for a motor comprises a driven member and a sensing device. The driven member is indirectly connected to the motor and driven by it. The sensing device detects the...
US20100072937 MOBILE POSITIONING STRUCTURE FOR AN AXIAL ROD MOTOR  
A mobile positioning structure for an axial rod motor comprises a base on which being disposed a stator, and on the stator is disposed a mover on which being mounted an optical signal reader. The...

Matches 1 - 12 out of 12