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US20100072938 |
Encoder Eccentricity Correction for Motion Control Systems
Correction of rotary encoder eccentricity in an image forming device having a motor controller using period and position pulse train feedback signals. A motor includes an encoder disc rotating... |
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US20120038307 |
Measurement System Using Alignment Unit And Method Of Determining System Parameters Of Alignment Unit
In one embodiment a method determines a system parameter of an alignment unit in a system that measures a position and posture of a workpiece, such as a substrate (or a semiconductor wafer), using... |
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US20090051895 |
MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, DEVICE MANUFACTURING METHOD, AND PROCESSING SYSTEM
A position of a stage in a perpendicular direction with respect to a movement plane and a tilt direction is measured, using a surface position sensor and a Z interferometer. And, the stage is... |
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US20050174085 |
Micromanipulation system
A micromanipulation system for applying a micro manipulation to an object within the view of a microscope, using a fine needle, comprising: a manipulator driving unit for transferring the fine... |
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US20150292918 |
ENCODER, ENCODER-EQUIPPED MOTOR, AND SERVO SYSTEM
An encoder includes a disk on a rotor. First slit tracks each include slits in an incremental pattern in a measurement direction. A second slit track includes slits in an absolute pattern in the... |
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US20150354992 |
ENCODER, SERVO SYSTEM, AND POSITION DATA GENERATION METHOD OF ENCODER
An encoder includes a disc coupled to a rotating body and having first tracks and one or more second tracks, a light source which emits light to the first and second tracks, first arrays... |
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US20150123587 |
ENCODER, MOTOR WITH ENCODER, AND SERVO SYSTEM
An encoder includes a plurality of slit tracks, a point light source, a first light-receiving array, and a second light-receiving array. The plurality of slit tracks respectively comprises a... |
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US20060164030 |
Motor actuator
A motor actuator for actuating a driven member includes a control unit and a brushless motor, which includes a coil, a magnet and a hall element. The coil generates a magnetic field when being... |
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US20050099151 |
Positioning/adjusting device for a shielding member
A positioning/adjusting device includes a main unit and a controlling device. The main unit includes a motor unit and a circuit assembly. The motor unit includes a motor for moving the... |
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US20110210691 |
METHOD, MEASURING ARRANGEMENT AND APPARATUS FOR OPTICALLY MEASURING BY INTERFEROMETRY THE THICKNESS OF AN OBJECT
Method, measuring arrangement (23;26;27) and apparatus (1) for optically measuring by interferometry the thickness of an object (2) having an external surface (16) and an internal surface (17)... |
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US20090033270 |
Position Feedback Device for a Motor
A position feedback device for a motor comprises a driven member and a sensing device. The driven member is indirectly connected to the motor and driven by it. The sensing device detects the... |
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US20100072937 |
MOBILE POSITIONING STRUCTURE FOR AN AXIAL ROD MOTOR
A mobile positioning structure for an axial rod motor comprises a base on which being disposed a stator, and on the stator is disposed a mover on which being mounted an optical signal reader. The... |