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US20140333176 |
Vibration limit switch
A vibration limit switch with a membrane, which can be set into oscillation, and a drive unit for setting the membrane into oscillation and/or for detecting an oscillation of the membrane, with... |
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US20090115288 |
PIEZOELECTRIC LOUDSPEAKER
A full range loudspeaker, comprising a frame with a membrane secured onto said frame and a piezoelectric actuator attached on said membrane and able to be driven over the full audible frequency range. |
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US20130002093 |
PIEZOELECTRIC VIBRATION MODULE
Disclosed herein is a piezoelectric vibration module including: a piezoelectric element repeatedly extended and compressed according to application of external power to generate vibration force; a... |
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US20070040478 |
Implants
A piezoelectric device is produced by providing a material having a hydroxyapatite (HA) component. The HA component is textured by, for example uniaxial pressing, to impart one of the limiting... |
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US20060232167 |
PIEZOELECTRIC DIAPHRAGM WITH APERTURE(S)
A piezoelectric diaphragm member (23) has an aperture (25). Preferably the piezoelectric diaphragm (23) is a multi-layer composite which includes a piezoelectric wafer layer. In some embodiments,... |
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US20070205696 |
Vibroswitch for flickering shoes
The present invention provides a vibro-switch for flickering shoes, which typically includes a plastic shell comprising of a hood and a hood pad enclosing a cylindrical cavity; disk cooper sheet... |
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US20150214466 |
VIBRATION GENERATING APPARATUS FOR PORTABLE TERMINAL
The vibration generating apparatus includes: a diaphragm formed of a metal; a piezoelectric plate mounted on at least one surface of the diaphragm; a fixed member coupled to the diaphragm along an... |
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US20150255703 |
CERAMIC POWDER, PIEZOELECTRIC CERAMIC, PIEZOELECTRIC ELEMENT, AND ELECTRONIC EQUIPMENT
A ceramic powder contains a metal oxide represented by the following general formula (1). The ceramic powder has a single perovskite-type crystal phase. The ceramic powder is composed of particles... |
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US20080199332 |
PIEZOELECTRIC PUMP AND PIEZOELECTRIC VIBRATOR
Embodiments of the present disclosure may include a piezoelectric pump having: a piezoelectric vibrator whose periphery may be fluid-tightly sealed; and a pump chamber and an air chamber that may... |
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US20120119617 |
PIEZOELECTRIC ACTUATOR AND AUDIO COMPONENTS
One object of the present invention is to an achieve increase of amplitude of vibrations and/or flattening of frequency dependence of the amplitude of a piezoelectric actuator. Piezoelectric... |
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US20060214540 |
Piezoelectric actuator and discharging device
A piezoelectric actuator is formed of a ceramic diaphragm made of a first piezoelectric ceramic and a number of displacement elements which are provided on the surface of the ceramic diaphragm,... |
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US20080111452 |
PIEZOELECTRIC/ELECTROSTRICTIVE MATERIAL, PIEZOELECTRIC/ELECTROSTRICTIVE BODY, AND PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT
A piezoelectric/electrostrictive material having a nonstoichiometric composition represented by a general formula (1): (1−x)(BiaNabTiO3+δ)−x(KcNbO3+ζ) (1) wherein 0.01≦x<0.08, a<0.5,... |
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US20090039737 |
METHOD OF FABRICATING CASE, PIEZOELECTRIC OSCILLATOR, OSCILLATOR, ELECTRONIC APPLIANCE, AND RADIO CLOCK
A method of fabricating a case accommodating a piezoelectric vibrating piece therein in a piezoelectric oscillator including the piezoelectric vibrating piece, including the steps of: applying... |
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US20110204749 |
SHORT RANGE ULTRASONIC DEVICE WITH BROADBEAM ULTRASONIC TRANSDUCERS
An apparatus comprises a first transducer support configured to receive a first transducer in a first opening. A face of the first face of the transducer is located in a first plane. The apparatus... |
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US20100066206 |
Bonding On Silicon Substrate Having A Groove
A method and apparatus for bonding on a silicon substrate are disclosed. An apparatus includes a membrane having a membrane surface, a groove in the membrane surface, a transducer having a... |
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US20090152999 |
PIEZOELECTRIC ACTUATOR AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
In a method for manufacturing a piezoelectric actuator, a ceramic sintered body is prepared and a size of the ceramic sintered body is adjusted in a thickness direction defined below by grinding... |
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US20140117812 |
MICROMACHINED ULTRASONIC TRANSDUCER ARRAYS WITH MULTIPLE HARMONIC MODES
Micromachined ultrasonic transducer (MUT) arrays capable of multiple resonant modes and techniques for operating them are described, for example to achieve both high frequency and low frequency... |
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US20080042520 |
METHODS AND SYSTEMS FOR MICRO BEARINGS
A micro drive assembly may comprise a substrate, a micro shall oriented in-plane with the substrate and at least one micro bearing to support rotation of the micro shaft. The micro shaft and micro... |
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US20100053891 |
SYSTEM AND METHOD FOR MINIATURIZATION OF SYNTHETIC JETS
A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the... |
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US20100072860 |
PIEZOELECTRIC MICROSPEAKER AND METHOD OF FABRICATING THE SAME
Provided is a method of fabricating a piezoelectric microspeaker. According to the method, drive units having a piezoelectric layer and an electrode are symmetrically formed so as to be disposed... |
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US20100109104 |
PRESSURE SENSOR AND WIRE GUIDE ASSEMBLY
A pressure sensor chip is described. The pressure sensor chip include a substrate, a polycrystalline silicon layer, at least one silicon layer, and a diaphragm movement element. The... |
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US20150207489 |
FILM BULK ACOUSTIC WAVE RESONATOR (FBAR) HAVING STRESS-RELIEF
An acoustic resonator structure comprises: a substrate having a cavity, which has a plurality of sides; a first electrode disposed over the cavity; a piezoelectric layer disposed over a portion of... |
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US20080225089 |
PIEZOELECTRIC ACTUATOR, LIQUID EJECTION HEAD, IMAGE FORMING APPARATUS, AND METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR
The piezoelectric actuator has: a diaphragm made of silicon; an insulating layer formed on a front surface of the diaphragm; a plurality of individual electrodes formed on a surface of the... |
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US20090231395 |
METHOD OF DRIVING PIEZOELECTRIC ACTUATOR AND METHOD OF DRIVING LIQUID EJECTION HEAD
A method of driving a piezoelectric actuator has the step of driving a piezoelectric actuator including a diaphragm, a lower electrode formed on one surface of the diaphragm, a piezoelectric film... |
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US20080001501 |
Apparatus for Determining and/or Monitoring a Process Variable
An apparatus for determining and/or monitoring a process variable of a medium. The apparatus includes: An oscillatable unit secured on a membrane; a sending/receiving unit, which excites the... |
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US20080061655 |
METHODS AND SYSTEMS FOR POSITIONING MICRO ELEMENTS
A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first... |
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US20050269904 |
Thin film bulk acoustic resonator and method of manufacturing the same
A thin film bulk acoustic resonator is provided in which the spurious caused by a lateral vibration mode is reduced. The thin film bulk acoustic resonator includes a laminated body having a first... |
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US20060091764 |
Piezoelectric thin-film resonator and filter using the same
A piezoelectric thin-film resonator includes: a substrate; a lower electrode that is formed on the substrate; a piezoelectric film that is formed on the lower electrode and the substrate; and an... |
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US20060017352 |
Thin device and method of fabrication
A method of fabricating air-bridge type FBAR devices provides for a piezoelectric material sandwiched between two electrodes with an air/crystal interface on each electrode to trap sound waves... |
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US20070057599 |
Film bulk acoustic resonator and method for manufacturing the same
A film bulk acoustic resonator includes a substrate having a through hole which is defined by an opening on a bottom surface of the substrate opposed to a top surface thereof. A width of the... |
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US20070044296 |
METHOD OF MANUFACTURING FILM BULK ACOUSTIC WAVE RESONATOR
The invention relates to a method of manufacturing an FBAR having a cap made of solid metal. The method includes preparing a substrate and stacking a lower electrode, a piezoelectric film and an... |
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US20130250009 |
ELECTROMECHANICAL CONVERSION ELEMENT, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC TYPE ACTUATOR, LIQUID DROPLET JETTING HEAD, AND INKJET RECORDING APPARATUS
An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, includes a bottom electrode in... |
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US20130250007 |
PIEZOELECTRIC THIN FILM ELEMENT AND METHOD OF MANUFACTURING THE SAME, DROPLET DISCHARGE HEAD AND INKJET RECORDING DEVICE USING THE PIEZOELECTRIC THIN FILM ELEMENT
A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower... |
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US20090079300 |
ULTRASONIC DEVICE WITH A DISK-SHAPED RESONATOR
The present invention refers to an ultrasonic device comprising an ultrasound transducer; and a disk-shaped metallic low-frequency ultrasound (NFLUS) resonator being mechanically connected with... |
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US20150130560 |
PIEZOELECTRIC THIN-FILM RESONATOR, FILTER AND DUPLEXER
A piezoelectric thin-film resonator includes, a substrate, a piezoelectric film provided on the substrate, and a lower electrode and an upper electrode that face each other through the... |
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US20090146531 |
Manufacturing Process For Thin Film Bulk Acoustic Resonator (FBAR) Filters
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial... |
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US20070200459 |
PIEZOELECTRIC THIN FILM DEVICE
The present invention is directed to preventing characteristic variations and damage caused by a difference in thermal expansion coefficient. A piezoelectric thin film filter, including four film... |
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US20140368582 |
PIEZOELECTRIC UNIT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS AND METHOD OF MANUFACTURING PIEZOELECTRIC UNIT
A piezoelectric unit includes a diaphragm made of ceramics, a base portion having a pressure chamber in which the diaphragm is set to a wall and a piezoelectric element having a dielectric layer... |
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US20100277040 |
THIN FILM DETECTOR FOR PRESENCE DETECTION
A transducer (800) is provided where a membrane (830) is formed over a front substrate (615); and a piezoelectric layer (820) is formed over the membrane (830) at an active portion (821) and... |
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US20100238216 |
Piezoelectric Actuator, Method Of Manufacturing Piezoelectric Actuator, Liquid Ejection Head, Method Of Manufacturing Liquid Ejection Head And Image Forming Apparatus
A piezoelectric actuator includes: a piezoelectric layer formed by a film formation method so as to have orientation in a prescribed orientation direction; and a pair of electrodes, disposed on a... |
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US20070228880 |
PIEZOELECTRIC THIN FILM RESONATOR
A piezoelectric thin film resonator includes a substrate, and a resonator section formed above the substrate and having a first electrode layer, a piezoelectric layer and a second electrode layer... |
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US20070226974 |
METHOD FOR MANUFACTURING ACTUATOR DEVICE AND LIQUID EJECTING HEAD INCLUDING ACTUATOR DEVICE PREPARED BY THE METHOD
A method is provided for manufacturing an actuator device including a substrate, a vibration plate, lower electrode, and a piezoelectric element having a piezoelectric layer, and an upper... |
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US20070176513 |
Thin-film piezoelectric resonator and filter circuit
It is possible to provide a resonator structure that does not cause a variation in anti-resonant frequency can be achieved, even if the cavity and the upper and lower electrode shift. A thin-film... |
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US20160211828 |
RETICULATED RESONATOR, PROCESS FOR MAKING AND USE OF SAME
A reticulated resonator includes: a reticulated substrate that includes: a substrate frame; and a phononic structure in mechanical communication with the substrate frame and including a plurality... |
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US20160027989 |
ROBUST PIEZOELECTRIC FLUID MOVING DEVICES AND METHODS
A method of making a piezoelectric fluid moving device, (e.g., a fan or synthetic jet actuator) includes forming at least a first electrode on a base substrate and disposing a spacer frame about... |