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US20100096935 AIR BUSHING LINEAR STAGE SYSTEM  
A linear stage system is provided. The linear stage system includes a base, a carriage plate, a first shaft, a first air bushing coupled to the base, a first motor coupled to the base and the...
US20140077831 LINEAR MOTOR FOR A DEVICE FOR TESTING PRINTED CIRCUIT BOARDS AND DEVICE FOR TESTING PRINTED CIRCUIT BOARDS  
The invention relates to a linear motor for a device for testing a printed circuit board. The linear motor comprises a stator and a rotor, wherein the stator comprises a row of permanent magnets...
US20110181151 RIGID DUAL-SERVO NANO STAGE  
The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object...
US20090140582 PLANAR MOTOR AND STAGE USING THE SAME  
A planar motor includes a movable body and a stator configured to drive the movable body in a plane. The stator includes a first stator unit and a second stator unit. The movable body is moved in...
US20150234297 Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator  
A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the...
US20080265688 Linear Motor, Stage Apparatus and Exposure Apparatus  
A linear motor is equipped with a coil body (62), and a yoke (71) that supports a magnetism generating body (72) and that moves relative to the coil body (62). The yoke (71) has a first portion...
US20140204358 MAGNETIC SENSOR CALIBRATION AND SERVO FOR PLANAR MOTOR STAGE  
A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along...
US20130135603 C-CORE ACTUATOR FOR MOVING A STAGE  
A mover assembly (46) for moving a stage (14) includes an actuator (30) that is coupled to the stage (14). The actuator (30) includes (i) a C-Core (52) having a generally ā€œCā€ shape and including a...
US20130038853 NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF  
A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a...
US20050174551 Position control and heat dissipation for photolithography systems  
A photolithography system that uses a variable reluctance linear motor (VRLM) to move a reticle or wafer stage is described. In addition to moving the stage, one or more of the surfaces of the...
US20070091292 System, medium, and method controlling operation according to instructional movement  
A system, medium, and method for controlling an operation according to movement. A movement model can be generated based on at least one movement and stored corresponding to a predetermined...
US20080290741 PLANAR MOTOR  
A planar motor includes a flat base element arranged in a plane, and substantially cuboidal first magnets arranged on the base element whose magnetization is perpendicular to the plane and which...
US20150022029 PLANAR MOTOR AND PROCESSING APPARATUS AND USING THE SAME  
A planar motor includes a base provided with at least one stator, a mover provided on a top portion of a planar object to be placed on a top portion of the base, and moving according to a magnetic...
US20080225253 Damper for a stage assembly  
A stage assembly (220) that moves a work piece (200) along a first axis includes a stage base (236), a guide bar (238), a device table (240) that retains the work piece (200), a mover assembly...
US20110226950 LINEAR MOTOR PAIR, MOVING STAGE AND ELECTRON MICROSCOPE  
When using a moving magnet type linear motor pair for a moving stage, the magnetic field in a space defined by the linear motor pair varies greatly in association with the movement of movable...
US20070008513 Exposing apparatus having substrate chuck of good flatness  
An exposing apparatus comprises a mask stage, a supporter that supports the mask stage, a substrate below the mask stage, and a substrate chuck that supports the substrate. The exposing apparatus...
US20080252151 TWO DEGREE OF FREEDOM MOVERS WITH OVERLAPPING COILS  
A mover (344) that moves a stage (238) along a first axis and along a second axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic...
US20080143994 Drive Method of Moving Body, Stage Unit, and Exposure Apparatus  
An exposure apparatus that comprises a stage (28) that moves in the X-axis direction, an X-axis linear motor (80) that drives the stage, a counter mass (30) that moves in a direction opposite to...
US20060061218 Dual force wafer table  
Methods and apparatus for actuating a tubeless fine stage using E-I core actuators and voice coil motors (VCMs) are described. According to one aspect of the present invention, a stage device...
US20110291494 THREE-DIMENSIONAL SLIDING SYSTEM WITH ONBOARD LINEAR MOTOR  
A three-dimensional sliding system has an X-table and a Z-table, which are actuated to travel independently of each other. The sliding system is simple in construction and adapted to actuate a...
US20120249991 PLANAR MOTOR AND LITHOGRAPHIC APPARATUS COMPRISING SUCH PLANAR MOTOR  
A motor includes a stator including a plurality of stator poles arranged in a repetitive arrangement with a first pitch, the stator poles facing a first side of a plane of movement, and a mover...
US20080024749 Low mass six degree of freedom stage for lithography tools  
A reticle or wafer stage mover with six degrees of freedom, a low mass coarse stage, and the ability to move an object in a scanning direction in a lithography tool. The mover includes a coarse...
US20050162634 Cable tray assembly for precision drive stage  
A cable tray assembly includes a wafer table placed on a precision drive stage of which motions along specified mutually perpendicular X- and Y-directions are independently controlled. A plurality...
US20110260558 STAGE DRIVE DEVICE  
A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven...
US20080012431 Monolithic stage devices providing motion in six degrees of freedom  
Stage devices are disclosed for various uses including use as a reticle stage or substrate stage in a microlithography system. An exemplary device includes a carrier and multiple linear EM...
US20070273861 STAGE DEVICE, EXPOSURE APPARATUS, AND MICRODEVICE MANUFACTURING METHOD  
A stage device including a base, a stage movable portion being movable along said base without contact thereto, an interferometer configured to measure a position of the stage movable portion, at...
US20050280314 Positioning mechanism for specimen inspection and processing  
A specimen positioning mechanism includes a movable stage movable along multiple axes, a plate connected to and supporting a specimen mounting chuck, multiple linear displacement mechanisms...
US20100148631 DRIVER  
A driver (100f) comprises a base section (110), a movable stage section (130) for mounting a driven article (12), a resilient section (12) for connecting the base section and the stage section and...
US20060170382 Linear motor force ripple identification and compensation with iterative learning control  
Embodiments of the present invention are directed to compensating for force ripple of an apparatus driven by a force produced by a linear motor. In one embodiment, a method of compensating for...
US20100187917 MICRO STAGE WITH 6 DEGREES OF FREEDOM  
A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment filed is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a...
US20090251012 PLANAR PULSE MOTOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD  
A planar pulse motor includes a movable element and a stator, wherein the movable element contains a magnetic material, and has a plurality of convex portions on a surface thereof facing the...
US20130033122 METHOD AND APPARATUS FOR DRIVING A STAGE USING ANGLED ACTUATORS FOR PUSHPOINT MATCHING  
According to one aspect, an apparatus includes a stage and a first actuator. The stage has a stage center of gravity, and a first axis passes, e.g., horizontally, though the stage center of...
US20100253275 PARALLEL KINEMATICS MICRO-POSITIONING SYSTEM  
The present invention is a parallel kinematic linkage based micro-positioning system that can provide precise movement at the micron and sub-micron level of a payload that is compatible with an...
US20100045961 DUAL STAGE POSITIONING AND SWITCHING SYSTEM  
The present invention has disclosed a dual stage positioning and switching system, which comprises at least a base, a first object stage positioning unit disposed on the base for a first...
US20080212042 Circuit Breaker Arrangement in an Indicating Arrangement in an Electrically Powered Stapler  
A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage...
US20150162813 MULTIFUNCTIONAL VOICE COIL MOTOR  
A multifunctional voice coil motor is disclosed, the motor including a rotor including a bobbin and a plurality of magnets arranged at a periphery of the bobbin, a stator including a housing...
US20080073982 Magnetic Guide Apparatus, Stage Apparatus, Exposure Apparatus, and Device Manufacturing Method  
A magnetic guide apparatus includes a guide member that has a guide plane provided along a first direction, and a moving body that has a facing plane facing the guide plane to be spaced apart from...
US20120170016 System and Method for Design of Linear Motor for Vacuum Environment  
A linear motor for vacuum environment includes a core and a housing. The core includes a plurality of cooling plates and a plurality of electrical coils sandwiched between the plurality of cooling...
US20120328836 Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity  
According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width....
US20070284950 STAGE APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE  
At least one exemplary embodiment is directed to a stage apparatus which comprises a first stage that is movable with respect to a horizontal plane that is defined by a first axis and a second...
US20140375975 Stage System and a Lithographic Apparatus  
A movable stage system is configured to support an object subjected to a lithography process. A short stroke part (SS) is configured to support the object (W) and a long stroke part (LS) is...
US20120235540 DRIVING APPARATUS  
A driving apparatus (100) is provided with: a base part (110); a stage part (130) on which a driven object (150) is mounted and which can be displaced; an elastic part (120) which has elasticity...
US20090263747 THREE AXIS LINEAR ACTUATOR  
A mover (344) moving a stage (238) along a first axis, along a second axis and along a third axis includes a magnetic component (354), a conductor component (356), and a control system (324). The...
US20060175910 Positioning apparatus  
A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The...
US20080309911 Stage system and lithographic apparatus comprising such a stage system  
A stage system for a lithographic apparatus includes a stage, an over-determined number of actuators arranged to act on the stage, and an electric power supply configured to provide a current to...
US20120147354 LITHOGRAPHIC APPARATUS HAVING A LORENTZ ACTUATOR WITH A COMPOSITE CARRIER  
An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet...
US20100085552 LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR  
A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each...
US20090251678 STAGE UNIT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD  
A stage unit includes the following elements. A stator includes a first coil array in which first coils extending in the x direction are arranged in the y direction, a second coil array in which...
US20150153661 SUBSTRATE TABLE SYSTEM, LITHOGRAPHIC APPARATUS AND SUBSTRATE TABLE SWAPPING METHOD  
A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction....
US20100127578 X-Y TABLE ACTUATOR  
Provided is an X-Y table actuator, which is capable of moving and positioning a movable table (5) freely in an X-Y plane with a sufficient thrust, and can be simply manufactured at a low cost. The...

Matches 1 - 50 out of 96 1 2 >