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US20110196223 PROTON TOMOGRAPHY APPARATUS AND METHOD OF OPERATION THEREFOR  
The invention relates to a method and apparatus for charged particle tomographic imaging using a tomography system. The tomography imaging system is optionally simultaneously operational with a...
US20120126115 SPECIMEN HOLDER HAVING ALIGNMENT MARKS  
For the microscopy of an object or a specimen with a combination of optical microscopy and particle beam microscopy, an electrically conducting specimen carrier (1) is used which is configured for...
US20120119109 SPECIMEN HOLDER WITH 3-AXIS MOVEMENT FOR TEM 3D ANALYSIS  
Provided is a holder capable of a precise observation from 3 or more directions to analyze complicated internal structures of a specimen thereof, and more particularly, a specimen holder capable...
US20140231670 TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE  
A multiple degree of freedom sample stage or testing assembly including a multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes a plurality of stages...
US20110127427 SPECIMEN HOLDER USED FOR MOUNTING  
A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and...
US20090230319 Specimen Stage-Moving Device for Charged-Particle Beam System  
A charged-particle beam system is offered which is equipped with a Z-motion mechanism to enable tomography. The Z-motion mechanism includes a rotary disk having three tapering surfaces on which...
US20150170873 SPECIMEN HOLDER TIP PART, SPECIMEN HOLDER HAVING SAID SPECIMEN HOLDER TIP PART, GONIO STAGE, AND ELECTRON MICROSCOPE HAVING SAID GONIO STAGE  
In at least one embodiment, a specimen holder tip part comprises a specimen setting seat, a specimen mesh for mounting a specimen, a specimen holding part for holding the specimen mesh and a...
US20090146075 Motorized Manipulator for Positioning a TEM Specimen  
The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the...
US20090242796 SPECIMEN PRE-TREATMENT APPARATUS AND SPECIMEN HOLDER  
In a specimen pre-treatment apparatus, a specimen support part is screwed in a hollow column casing part while facing a specimen support end toward the same direction as an open end of the hollow...
US20100006771 SPECIMAN HOLDER AND SPECIMAN HOLDER MOVEMENT DEVICE  
It is an object of the present invention to provide a significantly beneficial specimen holder which allows mounting one or more specimens, for example, a specimen to be examined and a standard...
US20140084153 Nanoparticulate Assisted Nanoscale Molecular Imaging by Mass Spectrometery  
Methods and devices for mass spectrometry are described, specifically the use of nanoparticulate implantation as a matrix for secondary ion and more generally secondary particles. A photon beam...
US20110017922 VARIABLE-TILT TEM SPECIMEN HOLDER FOR CHARGED-PARTICLE BEAM INSTRUMENTS  
A variable-tilt specimen holder for a charged particle instrument having a tilt stage, where the tilt stage has a maximum range of tilt, a sample plate affixed to the tilt stage, and an ion-beam...
US20060033043 Stacked six degree-of-freedom table  
A table with six degrees of freedom, such as a wafer table for a lithography system, has an upper table stacked on top of a lower table. Each of these two stacked tables has three degrees of...
US20090078885 SAMPLE MANIPULATION DEVICE  
The invention relates to a sample manipulation device comprising an observation unit, which is used to observe a sample and to select a target position at which a portion to be removed from the...
US20120305766 LINEAR MOTOR, MOVABLE STAGE AND ELECTRON MICROSCOPE  
It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of...
US20090114842 Sample preparing device and sample posture shifting method  
After a certain direction of a sample piece is allowed to coincide with an intersection line made by two planes of a surface of the sample and a conical side plane obtained by rotating, around a...
US20130119267 IN SITU HOLDER ASSEMBLY  
An in situ optical specimen holder is disclosed which allows imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with...
US20090127474 ELECTRIC CHARGED PARTICLE BEAM MICROSCOPE AND MICROSCOPY  
An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of...
US20080283768 Transfer mechanism for transferring a specimen  
The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each...
US20110253905 SPECIMEN HOLDER ASSEMBLY  
A specimen holder assembly (500) suitable for tomographic inspection of a specimen in a transmission electron microscope comprising: a body portion (501) in the form of an elongate member arranged...
US20110240881 SPECIMEN HOLDER AND SPECIMEN HOLDER MOVEMENT DEVICE  
The present disclosure significantly reduces the waiting time from inserting a specimen holder into an electron microscope until high quality data acquisition is possible. Characterizing the...
US20100032581 MICRO-GRIPPER  
A method is described for producing a micro-gripper, which comprises a base body and a gripping body connected integrally to the base body, which projects beyond the base body and provides a...
US20050035306 Focused charged particle beam apparatus  
In order to enable perpendicular processing of a slice in all directions about a lens optical axis, a focused charged particle beam of the present invention is provided with a tilt mechanism...
US20090250625 SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD  
A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen...
US20090014664 Specimen Holder for Electron Microscope  
The present invention provides a specimen holder for use with an electron microscope. The specimen holder has a retainer mounted at the front end of the body of the specimen holder. The retainer...
US20100090107 METHOD AND HANDLING APPARATUS FOR PLACING PATTERNING DEVICE ON SUPPORT MEMBER FOR CHARGED PARTICLE BEAM IMAGING  
A patterning device handling apparatus for use in charged particle beam imaging is disclosed. The disclosed patterning device handling apparatus comprises a first gripping member and a second...
US20090309043 CHARGED PARTICLE BEAM APPARATUS AND SAMPLE HOLDING SYSTEM  
An object of the present invention is to obtain a charged particle beam apparatus that includes a simplified sample positioning mechanism used with an electrostatic chuck, allow the sample to be...
US20090283696 Pre-Cryogenic Electron Microscope Specimen Holder  
A pre-cryogenic electron microscope specimen holder is disclosed. The pre-cryogenic electron microscope specimen holder includes a specimen holding member and a cryogenic energy storing member....
US20130126750 CHARGED PARTICLE DEVICE  
A charged particle device that can prevent an effect of a vibration and suppress relative displacement between a charged particle generator and a specimen stage without reducing a movement range...
US20130105706 Double Tilt Transmission Electron Microscope Sample Holder for In-Situ Measurement of Microstructures  
A double tilt sample holder for in-situ measuring mechanical and electrical properties of microstructures in transmission electron microscope (TEM) is provided. The sample holder includes a...
US20070069152 Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask  
Disclosed is an electrostatic chuck with a temperature sensing unit, exposure equipment having the electrostatic chuck, and a method of detecting temperature on photomask surfaces. The temperature...
US20120138792 OPTICAL PROBING IN ELECTRON MICROSCOPES  
The present invention relates to an optical arrangement and in particular to an optical arrangement for use in electron microscopy applications. This is used for sample characterization with...
US20100025580 GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT  
A grid holder for STEM analysis in a charged-particle instrument has a base jaw and a pivoting jaw. Both jaws have a substantially congruent inclined portion. The base jaw has a flat portion for...
US20090039285 Method and device for controlling and monitoring a position of a holding element  
A system for controlling and monitoring a position of a holding element, which is provided to hold a sample to be examined, is disclosed. The system may use a beam device, such as an electron...
US20070278421 Sample preparation technique  
A method of testing a substrate includes separating the substrate from a larger substrate using a separating device and repositioning the substrate to be tested to a processing station apart from...
US20100320396 SAMPLE HOLDER FOR ELECTRON MICROSCOPE  
A sample holder capable of holding samples is provided which comprises a plurality of probes in contact with a sample, fine movement mechanisms for moving the plural probes, and a driver connected...
US20130140458 Specimen Holder for Charged-Particle Beam Apparatus  
The present invention realizes a specimen holder for a charged-particle beam apparatus capable for moving at least one specimen support, and for obtaining the image of the transmission electron...
US20090236540 STAGE AND ELECTRON MICROSCOPE APPARATUS  
A sample stage for electron microscope according to an embodiment of the invention includes at least two actuators capable of expanding and contracting or capable of swinging for moving a target...
US20110309245 SPECIMEN PREPARATION DEVICE, AND CONTROL METHOD IN SPECIMEN PREPARATION DEVICE  
Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen...
US20090166558 Phase Contrast Electron Microscope Device  
A confocal method in which a sample is disposed in the center, a collective lens and a front objective lens are disposed on the incident side, and a back objective lens and a projection lens are...
US20080121813 METHOD AND APPARATUS OF COMPENSATING FOR POSITION SHIFT  
A levitated XY stage with a mechanism to disable the bearing element to allow the physical elements of the stage to come into contact with one another and “Coulomb weld” together, thereby...
US20100230608 SAFE MOTION  
The present invention relates to an inertial slider (10) and a method for safely and controllably approach an object (2) towards a fixed object (3) for instance inside a transmission electron...
US20100140498 OPERATION STAGE FOR WAFER EDGE INSPECTION AND REVIEW  
The present invention relates to an operation stage of a charged particle beam apparatus which is employed in a scanning electron microscope for substrate (wafer) edge and backside defect...
US20150137002 Holder and Method for Fixing Observation Sample  
A sample holder is provided allowing for favorable observation of a cross-sectional sample using a retarding method. The sample holder includes: a sample placement member on which a first fixing...
US20080203299 Charged Particle Beam Apparatus  
It is an object of this invention to improve contact precision and probe operability. This invention controls sample stage movement and probe movement on an observation image using a single...
US20150243473 WORKPIECE TRANSPORT AND POSITIONING APPARATUS  
An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a...
US20140158907 Specimen Positioning Device, Charged Particle Beam System, and Specimen Holder  
A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication...
US20080302974 OPTICAL AUTO FOCUSING SYSTEM AND METHOD FOR ELECTRON BEAM INSPECTION TOOL  
A method and system for inspecting a semiconductor wafer. The method includes providing an illumination flux through a pattern plate and a lens to a surface of a specimen to project a pattern onto...
US20130112893 CHARGED PARTICLE BEAM DEVICE, DEFECT OBSERVATION DEVICE, AND MANAGEMENT SERVER  
Provided is a charged particle beam device that prevents the increase in processing trouble caused by deterioration in the reviewing performance (e.g., overlooking of defects) by detecting an...
US20150200071 INSPECTION OF REGIONS OF INTEREST USING AN ELECTRON BEAM SYSTEM  
A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system may include: an irradiation module having charged particle optics; a...

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