Matches 1 - 34 out of 34


Match Document Document Title
US20070138405 Corona etching  
Provided is a method for removing organic residue from an electronic device substrate by exposure to a corona discharge.
US20150179385 SUPPORTING STRUCTURE AND ION GENERATOR USING THE SAME  
An ion generator includes: an arc chamber; a repeller that includes a repeller plate provided within the arc chamber and a repeller extension portion inserted through a through hole communicating...
US20110220812 CLEANING OF AN EXTRACTION APERTURE OF AN ION SOURCE  
An ion source includes an arc chamber housing defining an arc chamber having an extraction aperture, and a wiper assembly comprising a wiper positioned outside the arc chamber in a parked position...
US20120013249 Ion source  
A cathode sub-assembly is comprised of a retainer, a cathode and a collar, each of which has smooth unthreaded surfaces that slidably engage each other. A shield serves to hold the sub-assembly in...
US20100019141 ENERGY CONTAMINATION MONITOR WITH NEUTRAL CURRENT DETECTION  
This energy contamination monitor has an ionization apparatus configured to ionize the neutral particles in an ion beam. Neutral particles are ionized, separated based at least in part upon...
US20100288940 FRONT PLATE FOR AN ION SOURCE  
The present invention relates to a front plate for an ion source that is suitable for an ion implanter. The front plate according to the invention comprises obverse and reverse sides, an exit...
US20110220144 CLEANING OF AN EXTRACTION APERTURE OF AN ION SOURCE  
An ion source includes an arc chamber housing defining an arc chamber having an extraction aperture, and a wiper. The wiper is positioned within the arc chamber in a parked position and configured...
US20150206690 SYSTEM AND METHOD FOR GENERATING IONS IN AN ION SOURCE  
Embodiments of a method for generating ions in an ion source are provided. The method for generating ions in an ion source includes introducing a dopant gas and a diluent gas into an ion source...
US20110240877 TEMPERATURE CONTROLLED ION SOURCE  
An ion source is provided that utilizes a cooling plate and a gap interface to control the temperature of an ion source chamber. The gap interface is defined between the cooling plate and a wall...
US20090289197 GAS DELIVERY SYSTEM FOR AN ION SOURCE  
An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas...
US20110133098 ION DIFFUSING APPARATUS AND ION GENERATING CARTRIDGE  
Disclosed is an ion diffusing apparatus that can realize easy replacement of an ion generator and can maintain a stable ion supplying capability. Also disclosed is an ion generating cartridge. In...
US20130112892 IN-LINE CORONA-BASED GAS FLOW IONIZER  
Self-balancing, corona discharge for the stable production of electrically balanced and ultra-clean ionized gas streams is disclosed. This result is achieved by promoting the electronic conversion...
US20100044581 Ionizer and Static Elimination Method  
The ionizer includes a nozzle having a discharge electrode for inducing corona discharge by application of high voltage to eject ions, an emission port for emitting supplied gas together with the...
US20130299717 ION GENERATOR  
In an ion generator, a flexible discharge electrode 44 composed of one wire is provided to a base 43, and a turning motion of a free end 44b of the discharge electrode 44 about a fixed end 44a of...
US20110018423 INDIRECT HEATED CATHODE OF ION IMPLANTER  
A proposed indirect heated cathode has an inner tubular shell inserted into an arc chamber for creating plasma by a filament, which is disposed in the inner tubular shell and then covered by an...
US20070170371 Microplasma-based sample ionizing device and methods of use thereof  
Aspects of the invention include sample ionizing devices and methods of use thereof. Embodiments of the sample ionizing devices include a microplasma generation source with a plasma generation...
US20150129775 ION GENERATOR AND ION GENERATING METHOD  
An ion generator is provided with: an arc chamber that is at least partially made up of a material containing carbon; a thermal electron emitter that emits thermal electrons into the arc chamber;...
US20140166870 Ion Source Having Increased Electron Path Length  
An ion source includes a cathode to emit electrons, a cathode grid downstream of the cathode, a reflector electrode downstream of the cathode grid, reflector grid radially inward of the reflector...
US20110186749 ION SOURCE  
An ion source includes an arc chamber having an extraction aperture, and a plasma sheath modulator positioned in the arc chamber. The plasma sheath modulator is configured to control a shape of a...
US20090283695 MULTI MODE ION SOURCE  
A multi mode ion implantation system, which operates in both an arc discharge mode of operation and a non arc discharge mode of operation, is described. The multi mode ion implantation system may...
US20150083931 ION GENERATING APPARATUS  
A discharge electrode 5 for generating ions and a high-voltage generating circuit unit 2 that supplies the discharge electrode 5 with a high voltage are housed in a housing 3. A discharge opening...
US20080105828 TECHNIQUES FOR REMOVING MOLECULAR FRAGMENTS FROM AN ION IMPLANTER  
Techniques for removing molecular fragments from an ion implanter are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for removing molecular...
US20100320395 EXTERNAL CATHODE ION SOURCE  
An ion source is disclosed for use in fabrication of semiconductors. The ion source includes an electron emitter that includes a cathode mounted external to the ionization chamber for use in...
US20050173651 Cathode and counter-cathode arrangement in an ion source  
The present invention relates to ion sources comprising a cathode and a counter-cathode that are suitable for ion implanters. The present invention provides an ion source comprising a vacuum...
US20150192508 Apparatus and Process for Producing Acknowledged Air Flow and The Use of Such Apparatus in Measuring Particle Concentration in Acknowledged Air Flow  
Apparatus (1) for generating acknowledged flow (Q), comprising a first passage (2) with ends (3,4) for acknowledged flow (Q) inlet and outlet, a discharge electrode (5) for generating airborne...
US20110253903 DEVICE FOR DESORPTION IONIZATION  
The current invention involves a desorption corona beam ionization source/device for analyzing samples under atmospheric pressure without sample pretreatment. It includes a gas source, a gas flow...
US20170149216 CORONA IGNITION DEVICE AND METHOD FOR THE PRODUCTION THEREOF  
This disclosure relates to a corona ignition device having: an insulator, which bears an electrically conductive coating, which forms a tubular face; a central electrode, which sits in the...
US20170133193 ION SOURCE LINER HAVING A LIP FOR ION IMPLANTATION SYSTEMS  
An ion source has an arc chamber having a body defining and interior region. A liner defined an exposure surface of the interior region that is exposed to a plasma generated within the arc...
US20170110282 A RIBON BEAM ION SOURCE OF ARBITRARY LENGTH  
The invention is a unique and substantive improvement in ion source assemblies which is able to produce a ribbon-shaped ion beam having an arbitrarily chosen breadth dimension which is at least...
US20160203968 PROBE DISPLACEMENT MEASURING APPARATUS, IONIZATION APPARATUS INCLUDING THE SAME, AND MASS SPECTROMETRY APPARATUS  
A probe displacement measuring apparatus includes a cantilever probe, a light irradiation unit configured to irradiate the probe with light, a light receiving element configured to receive...
US20160126079 Method and Device for Ionizing Particles of a Sample Gas Flow  
A device for ionizing sample particles of a sample gas flow comprises a first flow tube for providing the sample gas flow, and an introducing means for providing H2SO4 molecules to an interaction...
US20160086788 ELLIPTICAL AND DUAL PARABOLIC LASER DRIVEN SEALED BEAM LAMPS  
The invention is directed to a sealed high intensity illumination device configured to receive a laser beam from a laser light source. A sealed chamber is configured to contain an ionizable...
US20150340194 ION GENERATOR AND THERMAL ELECTRON EMITTER  
An ion generator includes an arc chamber, a cathode that extends outward from the inside of the arc chamber in an axial direction and that emits a thermal electron into the arc chamber, a thermal...
US20140099782 METHOD AND APPARATUS FOR THERMAL CONTROL OF ION SOURCES AND SPUTTERING TARGETS  
A method and apparatus are disclosed for controlling a semiconductor process temperature. In one embodiment a thermal control device includes a heat source and a housing comprising a vapor chamber...

Matches 1 - 34 out of 34