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US20100051803 Particle Beam System  
A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam...
US20120217394 OBJECT AUTHENTICATION METHOD AND USE THEROF  
An identification and verification system and a process for said identification and verification of documents is disclosed, which is based on the use of nanoparticles embedded or adsorbed in the...
US20110272578 CHARGED PARTICLE RADIATION DEVICE PROVIDED WITH ABERRATION CORRECTOR  
There is provided a charged particle radiation device provided with an aberration corrector capable of correcting aberration with high precision in a short time by automatically setting an...
US20120197526 PROCEDURE FOR THE DETERMINATION OF EFFECTIVE AND TOTAL POROSITY OF CARBONATED SEDIMENTARY ROCKS, AND MORPHOLOGY CHARACTERIZATION OF THEIR MICRO AND NANOPORES  
The present invention is concerned with a procedure to quantitatively determine both, total and effective porosity of carbonated sedimentary rocks, and is based on the elaboration of molds of the...
US20090032709 Aberration Correction System  
An aberration correction system for use in an electron microscope and which produces a negative spherical aberration and corrects a higher-order aberration. The aberration correction system has...
US20080296498 In-situ STEM sample preparation  
A method for STEM sample preparation and analysis that can be used in a FIB-STEM system without a flip stage. The method allows a dual beam FIB/STEM system with a typical tilt stage having a...
US20090039281 ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME  
The present invention provides an aberration corrector giving excellent assembly accuracy but having fewer parts and fewer adjustment locations in number. In order to achieve it, a multistage...
US20090077696 Methods, Systems and Computer Program Products for Measuring Critical Dimensions of Fine Patterns Using Scanning Electron Microscope Pictures and Secondary Electron Signal Profiles  
A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the...
US20130099115 MICROFABRICATED HIGH-BANDPASS FOUCAULT APERTURE FOR ELECTRON MICROSCOPY  
A variant of the Foucault (knife-edge) aperture is disclosed that is designed to provide single-sideband (SSB) contrast at low spatial frequencies but retain conventional double-sideband (DSB)...
US20130180326 METHOD FOR PREPARING A SURFACE WITH A CONTROLLED COVERAGE OF NANOGRADE PARTICLES  
The present invention regards nano surfaces and particularly a gradient based nano surface. According to embodiments of the invention a surface bound gradient is created by distributed...
US20100314540 Electron microscope with an emitter operating in medium vacuum  
An electron microscope is described. This electron microscope includes an electron emitter that has an evaporation or sublimation rate that is significantly less than that of tungsten at the...
US20090146075 Motorized Manipulator for Positioning a TEM Specimen  
The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the...
US20080237462 Semiconductor Testing Method and Semiconductor Tester  
A semiconductor testing method capable of quickly counting semiconductor cells with accuracy is achieved. Since an SEM is adjusted in a specific condition, the rotation axis of a stage and the...
US20050173634 Optical metrology target design for simultaneous measurement of multiple periodic structures  
An optical metrology target is provided and has a first periodic structure and a second periodic structure. The first periodic structure has at least two features and a first pitch, and the second...
US20130193322 PHASE PLATE  
A phase plate for a charged particle beam system, such as a transmission electron microscope (TEM), is described. The phase plate comprises a support having a through-hole and an elongate member...
US20090166536 Sample Holder, Method for Observation and Inspection, and Apparatus for Observation and Inspection  
A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member...
US20090212212 Scanning Electron Microscope system and Method for Measuring Dimensions of Patterns Formed on Semiconductor Device By Using the System  
The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to...
US20080203302 SAMPLE TRANSFER UNIT AND SAMPLE TRANSFERRING METHOD  
There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod...
US20130062520 Distortion Free Stigmation of a TEM  
A charged particle apparatus is equipped with a third stigmator positioned between the objective lens and a detector system, as a result of which a third degree of freedom is created for reducing...
US20100294927 High throughput inspecting  
The various embodiments provide methods and apparatus high-throughput reading and decoding of information-encoding features (especially identification features) on pharmaceutical compositions for...
US20080290264 Corrector for the correction of chromatic aberrations in a particle-optical apparatus  
The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of...
US20120012747 Contrast for Scanning Confocal Electron Microscope  
A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the...
US20090206259 REVIEW METHOD AND REVIEW DEVICE  
A defect review method and a defect review device using an electron microscope, reduce the number of user processes necessary to set automatic focal adjustment of an electron beam to provide...
US20150021475 AUTOMATED SLICE MILLING FOR VIEWING A FEATURE  
A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled...
US20080265160 Observation Method With Electron Beam  
For the purpose of repeatedly observing the bottom of a contact hole with a high aspect ratio, the potential of an electrostatic charge in each of a pattern to be observed and a vicinity of a...
US20150076345 SPECIMEN HOLDER FOR OBSERVING TOP SECTION OF SPECIMEN AND METHOD FOR CONTROLLING THE SAME  
A specimen holder and method for controlling the same, which can mount and fasten a specimen to allow observation thereof by joining a body and a stand of the specimen holder together. The...
US20110084209 REPRODUCIBLE LATTICE STRAIN MEASUREMENT METHOD  
Lattice strain is reproducibly measured using geometric phase analysis (GPA) of a high angle annular dark field mode scanning transmission electron microscope (HAADF-STEM). Errors caused by beam...
US20130221218 ELECTRON MICROSCOPE SYSTEM USING AUGMENTED REALITY  
Provided is an electron microscope system using an augmented reality in that it recognizes a sample identification information by using an observation image generated through an electron...
US20080230696 SURFACE TREATMENT AND SURFACE SCANNING  
Provides surface treatment devices, surface scanning devices, methods of operating a surface treatment device and methods of operating a surface scanning device. An area within a medium comprises...
US20100038537 Particle beam apparatus having an annularly-shaped illumination aperture  
A particle beam apparatus has an optical axis (OA), an illuminating system (1, 2, 3, 4) for illuminating an object, which is positioned in an object plane (7), with a beam of charged particles and...
US20080173813 MANIPULATOR FOR ROTATING AND TRANSLATING A SAMPLE HOLDER  
A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (4). The manipulator clasps the round...
US20080283749 Corrective For Eliminating the Third-Order Aperture Aberration and the First-Order, First-Degree Axial, Chromatic Aberration  
A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the...
US20110058652 SHORT WORKING DISTANCE SPECTROMETER AND ASSOCIATED DEVICES, SYSTEMS, AND METHODS  
A spectrometer includes a rigid body having a first planar face with an orientation and a second planar face with a different orientation than the first planar face. The first and second planar...
US20070090289 Method of observing live unit under electron microscope  
A method of observing a live unit under an electron microscope includes the steps of (A) preparing a live environment inside the electron microscope, wherein the live environment is provided with...
US20110062328 Defect Review Apparatus and Method of Reviewing Defects  
The present invention aims to provide a defect review apparatus capable of suppressing a reduction in throughput with a minimized deviation-amount measurement, and capable of optimizing an FOV of...
US20070023659 Method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor  
A device and method which enable a transmission electron microscope to measure electron diffraction patterns of a sample very precisely are disclosed. The patterns are suitable for structure...
US20130193321 Systems and Methods for Investigating a Characteristic of a Material Using Electron Microscopy  
Various embodiments of the present invention provide systems and methods for determining an characteristic of a material. The characteristics may include, but are not limited to, crystallographic...
US20120167692 ENERGY INTENSITY TRANSFORMATION  
Apparatus, systems, and methods may operate to receive incident energy within a chamber defining a first part of an interaction volume that attenuates the incident energy as a function of path...
US20090127474 ELECTRIC CHARGED PARTICLE BEAM MICROSCOPE AND MICROSCOPY  
An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of...
US20090309025 PARTICLE OPTICAL ARRANGEMENT  
A particle optical arrangement providing an electron microscopy system 3 and an ion beam processing system 7 comprises an objective lens 43 of the electron microscopy system having an annular...
US20080149832 Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application  
This invention has applications as a scanning probe microscope/nanomanipulator with consumer gaming applications. An integrated compound lever cantilever which can function simultaneously as both...
US20110226950 LINEAR MOTOR PAIR, MOVING STAGE AND ELECTRON MICROSCOPE  
When using a moving magnet type linear motor pair for a moving stage, the magnetic field in a space defined by the linear motor pair varies greatly in association with the movement of movable...
US20080308727 Sample Preparation for Micro-Analysis  
System and method for preparing a sample for micro-analysis, comprising: (a) sample precursor holding unit, for supporting and holding a sample precursor; (b) transporting and positioning unit,...
US20140319347 Mounting structures for multi-detector electron microscopes  
A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and...
US20070210261 Specimen holding device and charged particle beam device  
A specimen holding device has a plurality of electrodes, and a moving mechanism for moving upward and downward a part of the plurality of electrodes. Further, the moving mechanism moves the part...
US20080215276 IN-LINE OVERLAY MEASUREMENT USING CHARGED PARTICLE BEAM SYSTEM  
A method and system for controlling an overlay shift on an integrated circuit is disclosed. The method and system comprises utilizing a scanning electron microscope (SEM) to measure the overlay...
US20090212215 SCANNING ELECTRON MICROSCOPE AND METHOD OF MEASURING PATTERN DIMENSION USING THE SAME  
In dimension measurement of semiconductor pattern by CD-SEM, the error value between dimensional measurement value and actual dimension on the pattern is much variational as it is dependent on the...
US20110101222 Z-STAGE CONFIGURATION AND APPLICATION THEREOF  
A stage configuration is provided, wherein a ceramic plate is used as the z-stage body to decrease the use of the metal plates in the conventional configuration, so that the compact structure of...
US20140346355 ELECTRON MICROSCOPE  
An electron microscope is provided. In another aspect, an electron microscope employs a radio frequency which acts upon electrons used to assist in imaging a specimen. Furthermore, another aspect...
US20080283748 Electron microscope  
An electron microscope for simultaneously adjusting the tilt, rotation and temperature of the specimen, and rapidly heating a desired localized section of the specimen. Specimen holders support...

Matches 1 - 50 out of 413 1 2 3 4 5 6 7 8 9 >