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US20120187291 |
Method of Depositing Protective Structures
A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein... |
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US20160155606 |
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is... |
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US20130087704 |
GAS FIELD IONIZATION ION SOURCE, SCANNING CHARGED PARTICLE MICROSCOPE, OPTICAL AXIS ADJUSTMENT METHOD AND SPECIMEN OBSERVATION METHOD
A gas field ionization ion source (GFIS) is characterized in that the aperture diameter of the extraction electrode can be set to any of at least two different values or the distance from the apex... |
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US20090152462 |
Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method
It is an object of the present invention to improve the stability of a gas field ionization ion source. A GFIS according to the present invention is characterized in that the aperture diameter of... |
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US20120273677 |
IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN
The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged... |
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US20090194690 |
Inspection Method And Inspection System Using Charged Particle Beam
An electron beam system includes a sample holder to hold a sample, electron optics to obtain an image of the sample, an electrode to control a charged state of the sample, a monitor to determine a... |
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US20100294927 |
High throughput inspecting
The various embodiments provide methods and apparatus high-throughput reading and decoding of information-encoding features (especially identification features) on pharmaceutical compositions for... |
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US20060226358 |
Detection method and detection device of special drugs
Firstly, the following check chip is set up into a heater: A check chip onto which a sample has been picked up by wiping out the surface of a check target, or a check chip formed by absorbing and... |
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US20130320209 |
ION BEAM PROCESSING APPARATUS
An ion beam processing apparatus includes an ion beam irradiation optical system that irradiates a rectangular ion beam to a sample on a first sample stage, an electron beam irradiation optical... |
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US20080315092 |
Scanning probe microscopy inspection and modification system
A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection... |
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US20050194534 |
Method of operating a probe microscope
A method of improving the precision and speed of probe microscopy. Direct geometric measurement of relevant date points allows more rapid determination of critical dimensions while improving... |
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US20160211112 |
Method and Apparatus for Reviewing Defects
A defect reviewing apparatus includes an illumination optical system that irradiates a sample with laser, a detection optical system that detects reflected light or scattered light from the... |
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US20140367570 |
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
There is provided a substrate inspection method. The method includes: maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; positioning the substrate... |
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US20120199738 |
IN-CHAMBER ELECTRON DETECTOR
A secondary particle detector 302 for a charged particle beam system 300 includes a scintillator 304 and a transducer 312, such as a photomultiplier tube, positioned within a vacuum chamber 107.... |
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US20140001359 |
METHOD FOR INSPECTING AND MEASURING SAMPLE AND SCANNING ELECTRON MICROSCOPE
As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first... |
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US20100243888 |
Apparatus and Method for Inspecting Samples
An inspection apparatus and method capable of well observing or inspecting a specimen contained in a liquid. The inspection apparatus has a film including first and second surfaces. Furthermore,... |
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US20090256075 |
Charged Particle Inspection Method and Charged Particle System
The present invention relates to a charged particle system comprising: a charged particle source; a first multi aperture plate; a second multi aperture plate disposed downstream of the first multi... |
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US20080277581 |
In-situ BWR and PWR CRUD flake analysis method and tool
The invention provides a method and tool to perform an analysis of CRUD on a nuclear fuel rod. The method recites providing a nuclear fuel rod with a layer of CRUD on an exterior of the fuel rod,... |
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US20110284745 |
Sample Holder, Inspection Apparatus, and Inspection Method
A sample holder, inspection apparatus, and an inspection method using the sample holder having a film including a first surface and a second surface. A liquid sample may be held on the first... |
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US20100294928 |
LASER ATOM PROBES
An atom probe includes a specimen mount that can hold a specimen to be analyzed. A detector is spaced apart from the specimen mount. Between the detector and specimen mount Is a local electrode... |
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US20080283745 |
EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATING SAME
An emitter chamber for a charged particle beam apparatus with a wall defining a vacuum enclosure is provided, the emitter chamber comprising a housing enclosing an emitter (and at least one pump... |
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US20140175277 |
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam... |
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US20090189075 |
INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM
Secondary electrons and back scattered electrons generated by irradiating a wafer to be inspected such as a semiconductor wafer with a charged particle beam are detected by a detector. A signal... |
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US20130051656 |
METHOD FOR ANALYZING RUBBER COMPOUND WITH FILLER PARTICLES
A method for analyzing rubber compound including a rubber component and filler particles, comprises: a STEM image acquiring step in which, by the use of a scanning transmission electron microscope... |
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US20120080596 |
Laser Atom Probe and Laser Atom Probe Analysis Methods
A laser atom probe system and a method for analysing a specimen by laser atom probe tomography are disclosed. The system includes a specimen holder whereon a specimen to be analyzed may be... |
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US20050087686 |
Method of observing defects
This invention provides a technique for observing defects, which can automatically decide a direction from inclined observation and take an inclined review image. In a defect observing system for... |
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US20100290992 |
NANOPARTICLE NUCLEIC ACID BINDING COMPOUND CONJUGATES FORMING I-MOTIFS
The present invention concerns the field of nanoparticle bioconjugates which form an i-motif or an i-motif related structure (compositions) without or with at least one further nucleic acid... |
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US20150279615 |
Imaging a Sample with Multiple Beams and Multiple Detectors
A multi-beam apparatus for inspecting or processing a sample with a multitude of focused beams uses a multitude of detectors for detecting secondary radiation emitted by the sample when is... |
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US20100181478 |
CHARGED PARTICLE BEAM ADJUSTING METHOD AND CHARGED PARTICLE BEAM APPARATUS
In an apparatus for obtaining an image by irradiating a charged particle beam on a specimen, a condition of the beam conditioned differently from vertical incidence as in the case of the beam... |
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US20090050802 |
METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE
Provided is a method and an apparatus for inspecting a sample surface with high accuracy. Provided is a method for inspecting a sample surface by using an electron beam method sample surface... |
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US20120104253 |
CHARGED PARTICLE BEAM MICROSCOPE AND MEASURING METHOD USING SAME
A charged particle beam device is equipped with a function of: obtaining an approximation function of a sample drift from a visual field shift amount among plural images (S1); capturing a save... |
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US20090309022 |
APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBSTRATE, A SCANNING ELECTRON MICROSCOPE, AND A METHOD OF PRODUCING AN IMAGE USING A SCANNING ELECTRON MICROSCOPE
An object of the present invention provides an inspection apparatus and an inspection method which use an electron beam image to accurately detect a defect that is difficult to detect in an... |
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US20130277552 |
CHARGED PARTICLE BEAM DEVICE AND METHOD OF MANUFACTURE OF SAMPLE
A precision of removal of a damaged layer of a sample created by machining with an FIB machining device depends on a skill of an operator. During removal machining of the damaged layer generated... |
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US20120223227 |
APPARATUS AND METHODS FOR REAL-TIME THREE-DIMENSIONAL SEM IMAGING AND VIEWING OF SEMICONDUCTOR WAFERS
One embodiment relates to a method of real-time three-dimensional electron beam imaging of a substrate surface. A primary electron beam is scanned over the substrate surface causing electrons to... |
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US20110215242 |
Particle beam device and method for operation of a particle beam device
A particle beam device and a method for operation of a particle beam device are disclosed. The particle beam device has a sample chamber, a sample arranged in the sample chamber, a first particle... |
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US20150228452 |
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam... |
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US20130119251 |
METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION
A charged particle beam inspection apparatus comprises: an electron gun for irradiating an electron beam onto a sample; a detector for detecting a signal obtained from the sample; an image... |
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US20110266437 |
Method for chemical analysis and apparatus for chemical analysis
There are provided a method for chemical analysis and an apparatus for chemical analysis. The method for chemical analysis includes: dosing a targeted sample with ionizing gas; irradiating ion... |
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US20100006755 |
CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM APPARATUS
An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis... |
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US20090068757 |
APPARATUS, PROCESS AND KIT FOR DETECTING ANALYTES IN A SAMPLE
The invention relates to an apparatus (100) for detecting analytes (26) in a sample comprising—a base carrier (10); —a multitude of sensor carriers (18) which are arranged on the base carrier (10)... |
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US20170162363 |
STRUCTURE ANALYSIS METHOD USING A SCANNING ELECTRON MICROSCOPE
A structure analysis method using a scanning electron microscope includes irradiating a sample with an electron beam having a first landing energy to obtain a first image at a first depth of the... |
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US20130214155 |
CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF
A retarding field scanning electron microscope is described. The microscope includes a scanning deflection assembly configured for scanning an electron beam over a specimen, one or more... |
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US20120318976 |
PATTERN MEASUREMENT APPARATUS AND PATTERN MEASUREMENT METHOD
A pattern measurement apparatus scans an observation region of a sample surface with an electron beam and detects secondary electrons emitted from the sample surface with the irradiation of the... |
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US20120112065 |
APPARATUS AND METHOD FOR ESTIMATING CHANGE OF STATUS OF PARTICLE BEAMS
This invention provides an apparatus for estimating change of status of a plurality of particle beams, the apparatus includes a plurality of particle detectors and an estimating unit, wherein the... |
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US20090101815 |
CANTILEVER FOR NEAR FIELD OPTICAL MICROSCOPES, PLASMON ENHANCED FLUORESCENCE MICROSCOPE EMPLOYING THE CANTILEVER, AND FLUORESCENCE DETECTING METHOD
A cantilever for near field optical microscopes is equipped with a probe in the vicinity of a free end thereof. The probe includes a thin film portion constituted by at least one layer of thin... |
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US20090086903 |
Selective elemental color providing for X-ray fluorescence visualization, imaging, or information providing
One aspect relates to selective X-ray fluorescence visualization, imaging, or information providing of an at least some matter of an at least a portion of an individual that at least partially... |
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US20130292568 |
SCANNING ELECTRON MICROSCOPE AND LENGTH MEASURING METHOD USING THE SAME
This electron scanning microscope comprises an electron source (102), electron optical systems (109, 110, 111) for exposing a sample (113) to primary electron beams (138), an electron detector... |
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US20090065354 |
SPUTTERING TARGETS COMPRISING A NOVEL MANUFACTURING DESIGN, METHODS OF PRODUCTION AND USES THEREOF
A sputtering target is described herein, which includes: a) a surface material, and b) a core material coupled to the surface material, wherein at least one of the surface material or the core... |
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US20080308727 |
Sample Preparation for Micro-Analysis
System and method for preparing a sample for micro-analysis, comprising: (a) sample precursor holding unit, for supporting and holding a sample precursor; (b) transporting and positioning unit,... |
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US20130234011 |
METHOD FOR SETTING AN OPERATING PARAMETER OF A PARTICLE BEAM DEVICE AND A SAMPLE HOLDER FOR PERFORMING THE METHOD
A method for adjusting an operating parameter of a particle beam device and a sample holder, which is suitable in particular for performing the method are provided. An adjustment of an operating... |