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US20110229667 |
NANOSTRUCTURED SUPERHYDROPHOBIC, SUPEROLEOPHOBIC AND/OR SUPEROMNIPHOBIC COATINGS, METHODS FOR FABRICATION, AND APPLICATIONS THEREOF
Systems, techniques and applications for nanoscale coating structures and materials that are superhydrophobic with a water contact angle greater than about 140° or 160° and/or superoleophobic with... |
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US20150139885 |
SLURRY, POLISHING-SOLUTION SET, POLISHING SOLUTION, SUBSTRATE POLISHING METHOD, AND SUBSTRATE
A polishing liquid comprising an abrasive grain, an additive, and water, wherein the abrasive grain includes a hydroxide of a tetravalent metal element, and produces absorbance of 1.00 or more and... |
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US20130263847 |
METHOD FOR PRODUCING TRENCH-LIKE DEPRESSIONS IN THE SURFACE OF A WAFER
In a method of producing trench-like depressions (24) in the surface of a wafer (27), particularly a silicon wafer, by plasma etching, in which the depressions (24) are produced by alternate... |
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US20070295686 |
Methods of forming semiconductor constructions, light-conducting conduits, and optical signal progapation assemblies
The invention includes optical signal conduits having rare earth elements incorporated therein. The optical signal conduits can, for example, contain rare earth elements incorporated within a... |
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US20050029221 |
Deep trench etching using HDP chamber
A process for etching deep trenches in a substrate for purposes such as the fabrication of microelectromechanical systems (MEMS), for example, on the substrate. The two-step process includes first... |
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US20140352759 |
REFLECTOR FOR A PHOTOVOLTAIC POWER MODULE
A photovoltaic power module including a reflector, and methods for manufacturing the reflector. The photovoltaic power module includes a plurality of photovoltaic cells arranged in an array,... |
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US20100007935 |
Optical scanning device, retinal scanning display and manufacturing method of optical scanning device
An optical scanning device includes an oscillating mirror portion having a reflection surface, and a frame portion holding the oscillating mirror portion. The optical scanning device reflects an... |
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US20150015948 |
POLARIZING PLATE AND METHOD OF MANUFACTURING THE SAME
A polarizing plate having an excellent optical property and a method of manufacturing the same are disclosed. The polarizing plate includes: a transparent substrate 11 transmitting light in a used... |
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US20070108159 |
Probe for scanning probe microscope and method of producing the same
A probe for a scanning probe microscope and a method for fabricating the probe is provided that can perform accurate measurement without a base of a cantilever having contact with an object to be... |
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US20130306590 |
Stable Cavity-Induced Two-Phase Heat Transfer in Silicon Microchannels
The stable cavity-induced two-phase heat transfer in silicon microchannels mitigates the flow of instabilities associated with two-phase (liquid/vapor) flow in microchannels. This is accomplished... |
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US20120002912 |
FABRICATION TOLERANT POLARIZATION CONVERTER
The present invention provides a polarization converter, and a method for fabricating the same. The polarization converter includes a geometric shape which induces rotation of a polarization of an... |
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US20130299448 |
FABRICATE SELF-FORMED NANOMETER PORE ARRAY AT WAFER SCALE FOR DNA SEQUENCING
A technique is provided for a structure. A substrate has a nanopillar vertically positioned on the substrate. A bottom layer is formed beneath the substrate. A top layer is formed on top of the... |
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US20140199015 |
SLOTTED Y-COUPLING WAVEGUIDE FOR SLOTTED WAVEGUIDE MODULATOR DEVICE
Embodiments of the present disclosure describe techniques and configurations for decreasing optical loss in a wave-guide of a modulator device. In one embodiment, an apparatus includes a... |
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US20050061769 |
Post stabilizer
A post stabilizing device including a plurality of interconnectable plates is provided. Each of the plates has one or more series of slots that can be mated with slots in one or more of the... |
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US20100296986 |
Microscreen for filtering particles in microfluidics applications and production thereof
A microscreen and its production method for filtering particles in microfluidics applications. The microscreen includes an at least regionally p-doped Si substrate having a recess, a macroporous... |
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US20120155820 |
METHOD AND STRUCTURE COMBINING VERTICAL AND ANGLED FACETS IN SILICON PHOTONIC WAVEGUIDES
Embodiments of the invention use crystallographic etching of SOI wafers with a (110)-oriented epi layer to form both the vertical input facet and the re-entrant mirror. Proposed layout design... |
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US20150009586 |
LIGHT GUIDES HAVING ENHANCED LIGHT EXTRACTION
Lightguides, devices incorporating lightguides, processes for making lightguides, and tools used to make lightguides are described. A lightguide includes light extractors arranged in a plurality... |
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US20150185377 |
ON-CHIP DIFFRACTION GRATING PREPARED BY CRYSTALLOGRAPHIC WET-ETCH
Methods of forming microelectronic structures are described. Embodiments of those methods may include forming a photomask on a (110) silicon wafer substrate, wherein the photomask comprises a... |
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US20120250157 |
ON-CHIP DIFFRACTION GRATING PREPARED BY CRYSTALLOGRAPHIC WET-ETCH
Methods of forming microelectronic structures are described. Embodiments of those methods may include forming a photomask on a (110) silicon wafer substrate, wherein the photomask comprises a... |
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US20110135265 |
METHOD OF FORMING WAVEGUIDE FACET AND PHOTONICS DEVICE USING THE METHOD
Provided are a method of forming a waveguide facet and a photonics device using the method. The method includes forming at least one optical device die including waveguides on a substrate, forming... |
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US20060191861 |
Embossing plate with a three-dimensional structure for the production of documents by a hot-cold laminating press
The invention concerns an embossing plate for a hot-cold-laminating press with a three-dimensional structure based on an essentially flawless metal plate with a hardened surface of appropriate... |
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US20070035200 |
Microelectromechanical system comprising a beam that undergoes flexural deformation
A microelectromechanical system comprises a beam and an electrode coupled to the beam via electrostatic interaction. The beam is designed to undergo elastic flexural deformation and has an... |
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US20070108160 |
Plasma etching of tapered structures
The invention relates to a method of plasma etching substrates, in particular of etching tapered passages through substrates, using a process gas comprising at least one halogenide and oxygen. |
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US20130176621 |
DIFFRACTIVE MEMS DEVICE
A diffractive MEMS device has an in-plane binary reflective diffraction pattern formed in an outer surface of a tiltable platform. The binary reflective diffraction pattern includes rectangular or... |
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US20070145002 |
Multi-printed etch mask process to pattern features
A method for patterning fine features using multiple jet-printed etch masks includes forming an initial feature through a first jet-printed etch mask and re-shaping the initial feature through at... |
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US20150252414 |
NANOCHANNEL DEVICE WITH THREE DIMENSIONAL GRADIENT BY SINGLE STEP ETCHING FOR MOLECULAR DETECTION
A technique includes forming a gradient channel with width and depth gradients. A mask is disposed on top of a substrate. The mask is patterned with at least one elongated channel pattern having... |
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US20130047738 |
PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE
A method for the manufacture of a platform having a membrane bed includes providing a platform body, which comprises silicon; and removing silicon material from a surface of the platform body by... |
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US20110027407 |
PROFILE CONTROL UTILIZING A RECESSED IMPRINT TEMPLATE
An imprint template is provided with a shallower field bordering the patterned region. The shallower field can be formed with additional lithography/etch steps after (or before) the formation of... |
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US20070068865 |
Manufacture of a microsieve, and apparatus comprising a microsieve
A filtering apparatus includes a microsieve with a membrane. The microsieve is coupled between a supply and drain channel. The membrane contains pores between the upstream surface and the... |
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US20110279188 |
RESONATOR USING CARBON NANO SUBSTANCE AND METHOD OF MANUFACTURING RESONATOR
A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the... |
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US20060219654 |
Silicon substrate comprising positive etching profiles with a defined slope angle, and production method
The invention relates to a silicon substrate comprising positive etching profiles with defined slope angle. Said silicon substrate is obtained by etching the silicon substrate that is covered with... |
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US20120256027 |
CELL LYSIS APPARATUS AND MANUFACTURING METHOD THEREOF
The present invention relates to a cell lysis apparatus and a manufacturing method thereof, and more particularly, to a cell lysis apparatus, which mechanically performs cell lysis, and a... |
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US20080179613 |
Silicon Deflector on a Silicon Submount For Light Emitting Diodes
The present invention deals with a process for the manufacturing of reflecting optical barriers comprising silicon and useful in combination with light emitting devices, wherein the process... |
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US20140291282 |
WAFER SCALE EPITAXIAL GRAPHENE TRANSFER
A method for transfer of a two-dimensional material includes forming a spreading layer of a two-dimensional material on a substrate, the spreading layer having a monolayer. A stressor layer is... |
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US20050008314 |
Fabrication of integrated circuit
A method of fabricating an integrated device on a chip comprising first and second features (A, B), the second feature, B, having greater dimension and/or being of coarser design than the first... |
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US20050103743 |
SLURRY AND USE THEREOF FOR POLISHING
A slurry containing abrasive particles, an oxidizing agent having a low static etch rate on at least one acid or salt metal, and having a pH of about 5 to about 11 is especially useful for... |
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US20060037933 |
Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature
A mirror process uses a tungsten passivation layer to prevent metal-spiking induced mirror bridging and improve mirror curvature. A mirror structure is patterned on a first sacrificial layer... |
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US20150090661 |
LOW RESISTANCE MICROFABRICATED FILTER
The present technology provides microfabricated filtration devices, methods of making such devices, and uses for microfabricated filtration devices. The devices may allow diffusion to occur... |
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US20120174860 |
TEMPLATE FOR THREE-DIMENSIONAL THIN-FILM SOLAR CELL MANUFACTURING AND METHODS OF USE
A template 100 for three-dimensional thin-film solar cell substrate formation for use in three-dimensional thin-film solar cells. The template 100 comprises a substrate which comprises a plurality... |
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US20070131647 |
Semiconductor device and support method for designing the same
A semiconductor device includes a bundle of wiring lines arranged in parallel and connected to a macro cell to transfer a same signal; and a bridge wiring line configured to bridge adjacent ones... |
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US20110116347 |
SPRUNG BALANCE RESONATOR FOR A TIMEPIECE
The invention relates to a resonator (11) with a balance (13) and balance spring (15) including a balance (13) mounted on a staff (17), a balance spring (15) integral with a collet (14) and... |
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US20140134711 |
MICROSTRUCTURED MEASURING CHIP FOR OPTICALLY MEASURING PROPERTIES OF ARTIFICIAL OR BIOLOGICAL MEMBRANES, AND METHOD FOR ITS PRODUCTION THEREOF
A microstructured measurement chip (1) for optical measurement of properties of artificial or biological membranes (40), having a lower, translucent support layer (10) and at least one... |
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US20070023386 |
Hollow microneedle array
An inexpensive and rapid method for fabricating arrays of hollow microneedles uses a photoetchable glass. Furthermore, the glass hollow microneedle array can be used to form a negative mold for... |
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US20090232449 |
Erbium-Doped Silicon Nanocrystalline Embedded Silicon Oxide Waveguide
An erbium (Er)-doped silicon (Si) nanocrystalline embedded silicon oxide (SiOx) waveguide and associated fabrication method are presented. The method provides a bottom layer, and forms an Er-doped... |
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US20060054591 |
Micro-fluid ejection assemblies
A micro-fluid ejection assembly and method therefor. The micro-fluid ejection assembly includes a silicon substrate having a fluid supply slot therein. The fluid supply slot is formed by an etch... |
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US20060243655 |
Ultrathin nanoscale membranes, methods of making, and uses thereof
A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, and a lateral length to thickness aspect ratio that is more than 10,000 to 1 is... |
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US20070125745 |
Method of making an ignition device
A method of manufacturing an ignition device is provided. The method includes patterning a plurality of resistors on a membrane to form heating elements and thermally isolating the heating... |
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US20050269286 |
Method of fabricating a nano-wire
The present invention provides a method of fabricating a nano-wire from a substrate. The method includes the step of etching the substrate to form a wire that projects from a surface of the etched... |
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US20120135237 |
SELF-ASSEMBLY OF LITHOGRAPHICALLY PATTERNED POLYHEDRAL NANOSTRUCTURES AND FORMATION OF CURVING NANOSTRUCTURES
The self-assembly of polyhedral nanostructures having at least one dimension of about 100 nm to about 900 nm with electron-beam lithographically patterned surfaces is provided. The presently... |
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US20110164237 |
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation. The spectral purity filter includes a filter part having a plurality of apertures configured to... |