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US20080047926 |
Method for Making Microchip Reservoir Device
Methods are provide for fabricating a microchip device having containment reservoirs. In one embodiment, the method includes providing a substrate; forming a plurality of reservoirs in the... |
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US20110045582 |
METHODS AND APPARATUS FOR INTEGRATED CELL HANDLING AND MEASUREMENTS
Method and systems that provide improved cell handling and assays in microfluidic systems and devices particularly using lateral cell trapping and methods of fabrication of the same. |
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US20120174860 |
TEMPLATE FOR THREE-DIMENSIONAL THIN-FILM SOLAR CELL MANUFACTURING AND METHODS OF USE
A template 100 for three-dimensional thin-film solar cell substrate formation for use in three-dimensional thin-film solar cells. The template 100 comprises a substrate which comprises a plurality... |
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US20120156886 |
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Production efficiency of a substrate (in particular, a substrate on which a SiC epitaxial film is formed) is improved and formation of the film inside a gas supply port is suppressed. This is... |
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US20070175856 |
Notch-Free Etching of High Aspect SOI Structures Using A Time Division Multiplex Process and RF Bias Modulation
The present invention provides a method and an apparatus for reducing, or eliminating, the notching observed in the creation of SOI structures on a substrate when plasma etching through an... |
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US20070023386 |
Hollow microneedle array
An inexpensive and rapid method for fabricating arrays of hollow microneedles uses a photoetchable glass. Furthermore, the glass hollow microneedle array can be used to form a negative mold for... |
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US20060261033 |
Alignment of multicomponent microfabricated structures
Multilayered microfluidic devices include structures that are used to align elements that make up the devices. Such elements include additional substrate layers, external sampling elements, and... |
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US20120263626 |
Miniature Chemical Analysis System
An apparatus, according to one aspect, may include a chromatograph and a bulk acoustic resonator. The chromatograph may include a channel that is defined at least partially in a monolithic... |
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US20050035046 |
Wet chemical processing chambers for processing microfeature workpieces
A wet chemical processing chamber comprising a fixed unit, a detachable unit releasably coupled to the fixed unit, a seal contacting the fixed unit and the detachable unit, and a processing... |
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US20060266692 |
Microfabricated cross flow filter and method of manufacture
A microfabricated cross flow filter may have multiple filtration stages. The filtration stages may include microfabricated filter barriers and gaps created in a substrate, thereby allowing very... |
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US20060065622 |
Method and system for xenon fluoride etching with enhanced efficiency
Provided herein is an apparatus and a method useful for manufacturing MEMS devices. An aspect of the disclosed apparatus provides a substrate comprising an etchable material exposed to a... |
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US20050103743 |
SLURRY AND USE THEREOF FOR POLISHING
A slurry containing abrasive particles, an oxidizing agent having a low static etch rate on at least one acid or salt metal, and having a pH of about 5 to about 11 is especially useful for... |
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US20080083697 |
POROUS SILICON COMPOSITE STRUCTURE AS LARGE FILTRATION ARRAY
A novel asymmetric filter membrane, and process for making is disclosed in several exemplary versions. The membrane structure is physically robust and suitable for use in a wide variety of... |
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US20050212531 |
Fluid sensor and methods
A fluid sensor for use in an environment having an ambient temperature has a field-effect transistor (FET) comprising a functionalized semiconductor nano-wire, an integral heater disposed... |
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US20140256028 |
SEMICONDUCTOR MICRO-ANALYSIS CHIP AND MANUFACTURING METHOD THEREOF
According to one embodiment, a semiconductor micro-analysis chip for detecting fine particles in sample liquid includes a semiconductor substrate, a first flow channel that is formed in the... |
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US20050236358 |
Micromachining methods and systems
A method of forming fluid handling slots in a semiconductor substrate having a thickness defined by a first side and a second side is provided. The method comprises ultrasonic grinding, utilizing... |
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US20060207972 |
Method for realizing microchannels in an integrated structure
A process is presented for realizing buried microchannels in an integrated structure comprising a monocrystalline silicon substrate. The process forms in the substrate at least one trench. A... |
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US20080245764 |
Method for producing a device including an array of microneedles on a support, and device producible according to this method
A method for producing a device which is suitable for delivering a substance into or through the skin and includes an array of microneedles developed out of an Si semiconductor substrate, the... |
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US20080011982 |
A Method And Composition For Selectively Stripping Nickel From A Substrate
A method of stripping nickel from a stainless steel substrate comprises providing a stainless steel substrate with a nickel deposit on a surface and contacting the nickel deposit with phosphate... |
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US20090003770 |
VERTICAL OPTICAL COUPLING STRUCTURE
The present disclosure provides an apparatus, method of manufacturing an apparatus, and method for operation of the same. The apparatus, in one embodiment, includes an optical coupling structure... |
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US20070298551 |
Fabrication of silicon nano wires and gate-all-around MOS devices
The invention relates to methods for manufacturing semiconductor devices. Processes are disclosed for implementing suspended single crystal silicon nano wires (NWs) using a combination of... |
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US20060027524 |
Microfabricated two-pin liquid sample dispensing system
A two-pin liquid sample dispensing system is provided. The two-pin dispensing system comprises a pair of separately movable pins for holding a droplet of liquid therebetween. Each pin includes a... |
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US20050167281 |
Production method of suspension board with circuit
A production method of a suspension board with circuit that can reduce variations in diameter of the location holes or like holes formed in the suspension board and can produce a trim contour of... |
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US20070108160 |
Plasma etching of tapered structures
The invention relates to a method of plasma etching substrates, in particular of etching tapered passages through substrates, using a process gas comprising at least one halogenide and oxygen. |
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US20120135237 |
SELF-ASSEMBLY OF LITHOGRAPHICALLY PATTERNED POLYHEDRAL NANOSTRUCTURES AND FORMATION OF CURVING NANOSTRUCTURES
The self-assembly of polyhedral nanostructures having at least one dimension of about 100 nm to about 900 nm with electron-beam lithographically patterned surfaces is provided. The presently... |
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US20110135265 |
METHOD OF FORMING WAVEGUIDE FACET AND PHOTONICS DEVICE USING THE METHOD
Provided are a method of forming a waveguide facet and a photonics device using the method. The method includes forming at least one optical device die including waveguides on a substrate, forming... |
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US20070035200 |
Microelectromechanical system comprising a beam that undergoes flexural deformation
A microelectromechanical system comprises a beam and an electrode coupled to the beam via electrostatic interaction. The beam is designed to undergo elastic flexural deformation and has an... |
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US20060196843 |
Process for fabricating monolithic membrane substrate structures with well-controlled air gaps
A process for fabricating monolithic membrane structures having air gaps is disclosed, comprising the steps of: providing a wafer; depositing and patterning a protective layer on the wafer;... |
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US20140352759 |
REFLECTOR FOR A PHOTOVOLTAIC POWER MODULE
A photovoltaic power module including a reflector, and methods for manufacturing the reflector. The photovoltaic power module includes a plurality of photovoltaic cells arranged in an array,... |
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US20060273065 |
METHOD FOR FORMING FREE STANDING MICROSTRUCTURES
A method of forming free standing microstructures includes providing a substrate and forming a sacrificial layer on the substrate. A thin-film structural layer is then formed around and over the... |
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US20060144778 |
Low stress, ultra-thin, uniform membrane, methods of fabricating same and incorporation into detection devices
The present disclosure is directed, in part, to a method for fabricating a low-stress, ultra-thin membrane as well as the low-stress, ultra-thin membrane formed by this method. The method... |
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US20060037933 |
Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature
A mirror process uses a tungsten passivation layer to prevent metal-spiking induced mirror bridging and improve mirror curvature. A mirror structure is patterned on a first sacrificial layer... |
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US20050103713 |
Devices with small-scale channels and the fabrication thereof by etching
A method of producing a novel small-scale flow channel in a mesoscale analytic device from a solid multi-layered heterostructure with one or more channel layers sandwiched between adjoining... |
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US20100296986 |
Microscreen for filtering particles in microfluidics applications and production thereof
A microscreen and its production method for filtering particles in microfluidics applications. The microscreen includes an at least regionally p-doped Si substrate having a recess, a macroporous... |
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US20070039920 |
Method of fabricating nanochannels and nanochannels thus fabricated
A method of fabricating at least one nanochannel in a semiconductor material applied on a substrate, comprising the semiconductor material being subjected to an etching treatment and the substrate... |
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US20050189315 |
Method for manufacturing gratings in semiconductor materials
The present invention is a combination of in-situ etching using a grating mask that is formed in semiconductor material only and the subsequent overgrowth of additional semiconductor material to... |
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US20050029221 |
Deep trench etching using HDP chamber
A process for etching deep trenches in a substrate for purposes such as the fabrication of microelectromechanical systems (MEMS), for example, on the substrate. The two-step process includes first... |
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US20050269286 |
Method of fabricating a nano-wire
The present invention provides a method of fabricating a nano-wire from a substrate. The method includes the step of etching the substrate to form a wire that projects from a surface of the etched... |
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US20050008314 |
Fabrication of integrated circuit
A method of fabricating an integrated device on a chip comprising first and second features (A, B), the second feature, B, having greater dimension and/or being of coarser design than the first... |
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US20140134711 |
MICROSTRUCTURED MEASURING CHIP FOR OPTICALLY MEASURING PROPERTIES OF ARTIFICIAL OR BIOLOGICAL MEMBRANES, AND METHOD FOR ITS PRODUCTION THEREOF
A microstructured measurement chip (1) for optical measurement of properties of artificial or biological membranes (40), having a lower, translucent support layer (10) and at least one... |
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US20070068865 |
Manufacture of a microsieve, and apparatus comprising a microsieve
A filtering apparatus includes a microsieve with a membrane. The microsieve is coupled between a supply and drain channel. The membrane contains pores between the upstream surface and the... |
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US20080179613 |
Silicon Deflector on a Silicon Submount For Light Emitting Diodes
The present invention deals with a process for the manufacturing of reflecting optical barriers comprising silicon and useful in combination with light emitting devices, wherein the process... |
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US20050205514 |
Optical microelectromechanical component and fabrication method thereof
The optical microelectromechanical components and the fabrication method thereof are provided. The method for fabricating an optical microelectromechanical component includes steps of (a)... |
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US20060002815 |
Corrosion sensing microsensors
A microsensor for detecting corrosive media acting on a bulk metallic material when mounted in situ adjacent a location in the bulk metallic material. The microsensor includes a plurality of... |
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US20060226114 |
Method for producing a micromechanical device and a micromechanical device
A method for manufacturing a micromechanical device and a resulting micromechanical device are provided, the device having a substrate material, a membrane, and a cavity situated between the... |
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US20060073627 |
Probe for a scanning probe microscope and method for fabricating same
A method for fabricating a probe for a scanning probe microscope, wherein the probe includes a mounting block, a cantilever and a tip, includes the steps of: forming a first mask to define a... |
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US20140238952 |
METHOD FOR MANUFACTURING THIN SUBSTRATE
A method for manufacturing a thin substrate includes the following steps: a first etching step in which the thickness of a glass substrate (110a) is reduced by etching one surface of the glass... |
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US20130306590 |
Stable Cavity-Induced Two-Phase Heat Transfer in Silicon Microchannels
The stable cavity-induced two-phase heat transfer in silicon microchannels mitigates the flow of instabilities associated with two-phase (liquid/vapor) flow in microchannels. This is accomplished... |
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US20130047738 |
PLATFORM WITH ASPHERICAL MEMBRANE BED, PRESSURE SENSOR WITH SUCH A PLATFORM AND METHOD FOR THEIR MANUFACTURE
A method for the manufacture of a platform having a membrane bed includes providing a platform body, which comprises silicon; and removing silicon material from a surface of the platform body by... |
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US20070007237 |
Method for self-assembling microstructures
A method for self-assembling microstructures onto a substrate includes using a bonding material to make the microstructure assembled onto the substrate by a physical attraction force. The... |