Matches 1 - 50 out of 56 1 2 >


Match Document Document Title
US20130082015 ELASTIC RETENTION WHEELS AND WAFER ADAPTER CONTAINING THE SAME WHEELS  
An elastic retention wheel and a wafer adapter containing this wheel are disclosed. The elastic retention wheel comprises: a rim; a retention main body positioned within the rim; and a plurality...
US20150128863 MECHANISMS FOR FURNACE APPARATUS AND WAFER BOAT  
Embodiments of mechanisms of a furnace apparatus having a wafer boat are provided. The wafer boat includes a base plate and a support rod extended from the base plate. The wafer boat also includes...
US20130284683 WAFER BOAT  
A wafer boat for accommodating semiconductor wafers comprises two side rods and at least one back rod, the rods being vertically oriented and extending between a top member and a bottom member....
US20080023417 CLEAN STOCKER AND METHOD OF STORING ARTICLES  
A reticle rotatable rack is provided at an upper position, and a pod rotatable rack is provided at a lower position in a clean stocker. A clean gas is supplied downwardly. In the stocker, a pod...
US20120090665 SOLAR ARRAY SUPPORT STRUCTURE WITH A TELESCOPIC WIND BRACE  
Disclosed herein is a solar array structure that includes a first vertical column having a first height and a second vertical column having a second height, the second height being taller than the...
US20070062889 Universal cassette  
A cassette assembly for holding circular and non-circular disks is provided. A cassette body has a top wall, a bottom wall, opposite side walls, and an open front, creating an inside and outside...
US20060226094 Glass cassette for loading glass substrates of display panels  
A glass cassette for loading glass substrates for display panels includes an upper plate, a lower plate, side plates, a stopper and stepped support members. The lower plate is disposed...
US20060006095 Universal storage tray for electronic components  
A universal storage tray for holding a plurality of electronic components during storage, processing and transport. The tray includes an adjustable sidewall, a stationary sidewall, and opposing...
US20050205501 Reformed wafer boat  
The present invention discloses a reformed wafer boat. The reformed wafer boat has a plurality of trenches. A first interval is formed between each trench and one adjacent trench, and a second...
US20150022821 CARRIER ADAPTER INSERT APPARATUS AND CARRIER ADAPTER INSERT DETECTION METHODS  
Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame...
US20050224429 Support jig of quartz glass for receiving wafer-like substrates of semiconductor material  
A support jig of quartz glass for receiving wafer-like substrates of semiconductor material in a vertical orientation comprises two spaced-apart circular end plates (10) which are interconnected...
US20060021896 Disk cartridge  
A cartridge assembly (10) for holding disks or similar substrates includes a cassette (12) provided with a plurality of curved grooved channels (20) of substantially even channel width and at...
US20090071918 VERTICAL SEMICONDUCTOR WAFER CARRIER  
A vertical semiconductor wafer carrier comprises a circular base, a first wafer support rod mounted at a first position proximate a perimeter of the circular base, a second wafer support rod...
US20080217268 Frame system for an article storage apparatus  
A frame system for an article storage apparatus which defines an article storage space therein, includes a first upper frame extending horizontally, a first lower frame extending horizontally, and...
US20150155191 SUBSTRATE STORAGE RACK  
The present disclosure relates to a substrate storage rack, including a hollow rack body with a first, a second, a third, and a fourth lateral surfaces, wherein at least one substrate laying layer...
US20090200251 CLAMPING MECHANISM FOR SEMICONDUCTOR DEVICE  
A clamping mechanism for a semiconductor substrate includes: a C-shaped pickup plate; a susceptor top plate having a periphery adapted to receive and support an inner periphery portion of the...
US20090188874 Wafer boat  
Wafer boat for holding semiconductor wafers in a spaced vertical arrangement during processing, said wafer boat comprising a plurality of vertically spaced holding positions for receiving and...
US20060016770 Support device of a cassette  
A support device of a cassette includes a plurality of spacers and a support. The spacers extend from the side boards of the cassette into the substrate retaining space. The support is disposed on...
US20080000851 Apparatus with fillet radius joints  
A wafer holding apparatus including a plurality of rods joined at opposite ends to endplates by joints having flanges with a fillet radius. The joints which join the component parts of the...
US20080251473 APPARATUS FOR STORING CONTAMINATION-SENSITIVE FLAT ARTICLES, IN PARTICULAR FOR STORING SEMICONDUCTOR WAFERS  
An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed...
US20140261642 RETAINING SYSTEM FOR INSTALLING A PHOTOVOLTAIC MODULE  
The invention relates to a holding system (1) for mounting a photovoltaic module (6) to a base (8) by means of ground supports (2, 2a, 44, 44a) which comprise a bearing head (4, 4a, 50, 50a), a...
US20060231515 Adjustable cassette for substrates  
A cassette (100) for accommodating substrates includes a frame (110) and supporting members (120). The frame includes a top shelf (111) and a bottom shelf (112), which cooperatively defines a...
US20070068882 Substrate carrying tray  
A stackable substrate carrying tray on which a substrate (2) is placed horizontally, includes an upper contact section; and a lower contact section, the upper contact section contacting a first...
US20090169346 SEMICONDUCTOR WAFER CARRIER BLADE  
A carrier blade for transferring a semiconductor wafers into and out of a deposition chamber may include transition surfaces sloping downward from ledge surfaces. The transition surfaces slope...
US20130213910 BOAT FOR LOADING SEMICONDUCTOR SUBSTRATES  
Provided is a boat for loading semiconductor substrates that includes a top plate and a bottom plate separated from each other, a rod extending from the bottom plate to the top plate and disposed...
US20070125726 Wafer guide in wafer cleaning apparatus  
A wafer guide in a wafer cleaning apparatus comprises of a lower panel portion. The wafer guide also comprises of a plurality of wafer supporting panel portions, the plurality of wafer supporting...
US20120217210 SUPPORT METHOD, HIGH-TEMPERATURE TREATMENT METHOD USING SAME, AND SUPPORT JIG  
A method for supporting a support to which a wafer is attached, by supporting the support against gravitational force by supporting three or more support points of an inner circumference section...
US20080041798 Wafer Platform  
A platform for supporting a semiconductor wafer includes a body with channel having spaced apart first and second edge margins in contiguous relationship with a top surface of the body. At least...
US20080093315 Support for Semiconductor Substrate  
It is an object of the present invention to provide a support for a semiconductor substrate capable of correctly measuring a temperature in the vicinity of a semiconductor substrate. A first...
US20080237157 WAFER TRANSPORT SYSTEM  
A wafer transport system is provided including providing a wafer cassette having a slot, and placing a protection insert into the slot.
US20090038984 SUBSTRATE STORAGE CONTAINER AND METHOD OF PRODUCING THE SAME  
A substrate storage container that can be highly accurately positioned and produced at increased productivity, and a method of producing the substrate storage container are provided. The substrate...
US20050205502 Rails for semiconductor wafer carriers  
A rail is provided for use as a support in an apparatus for holding a plurality of semiconductor wafers. The rail has a plurality of teeth arranged in a vertical column, such that the space...
US20050145584 Wafer boat with interference fit wafer supports  
A wafer boat including a base plate, a top plate, a plurality of support rods, and a plurality of wafer supports. The support rods are disposed about a perimeter of the base plate and extend...
US20060162748 Wafer guide and semiconductor wafer drying apparatus using the same  
A wafer guide and a semiconductor wafer drying apparatus using the same are disclosed. The wafer guide includes a body and supporters formed on the body. The supporters present a plurality of...
US20090008346 Vertical Boat for Heat Treatment and a Method for Heat Treatment  
The present invention is a vertical boat 8 for heat treatment by which a plurality of wafer-like objects to be treated are supported with an interval in a vertical direction by a column having...
US20090321372 LOW THERMAL MASS SEMICONDUCTOR WAFER SUPPORT  
A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality...
US20130050468 INSPECTION SYSTEM AND A METHOD FOR INSPECTING MULTIPLE WAFERS  
A method and an inspection system that includes: a multi wafer support device arranged to concurrently support multiple wafers; optics arranged to acquire images of the multiple wafers supported...
US20070029268 Wafer cassette used in high temperature baking process  
A wafer cassette for consolidation in process of high temperature baking is provided. The wafer cassette includes one front end member, two sidewall plates, one back end member, a plurality of...
US20120074081 Low Thermal Mass Semiconductor Wafer Plate  
A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality...
US20070175838 MINI-ENVIRONMENT POD DEVICE, AN EXPOSURE APPARATUS AND A DEVICE MANUFACTURING METHOD USING THE SAME  
A pod attachable to an outside surface of a grounded electromagnetic-shielded chamber. The chamber has a door and a flange portion, around the door, on the outside surface and contains a...
US20140077667 WAFER HANDLING STATION INCLUDING CASSETTE MEMBERS WITH LATERAL WAFER CONFINING BRACKETS AND ASSOCIATED METHODS  
A wafer handling station includes a housing defining a chamber, and a wafer cassette assembly positionable in the chamber. The wafer cassette assembly includes a vertical support, and cassette...
US20130089952 Packaging Process Tools and Packaging Methods for Semiconductor Devices  
Packaging process tools and packaging methods for semiconductor devices are disclosed. In one embodiment, a packaging process tool for semiconductor devices includes a mechanical structure...
US20090001032 HIGHER PERFORMANCE BARRIER MATERIALS FOR CONTAINERS OF ENVIRONMENTALLY SENSITIVE SEMICONDUCTOR FABRICATION DEVICES  
Techniques associated with higher performance barrier materials for containers to contain one or more environmentally sensitive devices associated with semiconductor manufacture are generally...
US20090175707 Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers  
A substrate container for storing at least one substrate is provided. The substrate container includes a housing assembly encompassing the at least one substrate, the housing assembly having a...
US20080056857 SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD  
To correct any positional misalignment of a substrate manifesting along the horizontal direction by utilizing a substrate transfer device alone without engaging a transfer arm in operation. A...
US20130200018 BALLASTED ROOF AND GROUND MOUNTED SOLAR PANEL RACKING SYSTEM  
A light weight ballasted solar racking system has light ballasted weight loads and is easy and fast to install. The racking system may be used in roof or ground mount applications to mount thin...
US20110100937 Adjustable Width Cassette for Wafer Film Frames  
An expandable width cassette for storing and transporting thin planar objects of different widths is provided. The cassette 10 includes two side panels 12 of fixed height opposite and parallel to...
US20050056601 Semiconductor component handling device having an electrostatic dissipating film  
The present invention relates generally to a system and method for including a thin conductive polymer film, such carbon-filled PEEK, in the molding process for handlers, transporters, carriers,...
US20110259840 SEMICONDUCTOR PACKAGE MAGAZINE  
A magazine rack suitable for holding, carrying, shipping or storing the semiconductor packages is provided. The magazine rack is designed with tiered support bars, so as to help secure the...
US20100179681 DEVICE FOR STORING SUBSTRATES  
The invention relates to a device for storing platelike substrates, particularly wafers or test wafers, like those, in particular, used for manufacturing electronic components. The aim of the...

Matches 1 - 50 out of 56 1 2 >