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US20130146503 |
FRONT OPENING UNIFIED POD WITH LATCH STRUCTURE
A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of... |
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US20140116920 |
Reticle Pod
A reticle pod includes an outer pod shell and an outer pod door disposed under the outer pod shell. The outer pod door has at least one gas control hole. A seal ring is disposed between the outer... |
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US20130174640 |
POD HAVING TOP COVER APERTURE FOR DETECTING SURROUNDING GAS WITHIN THE POD
A storage Pod for semiconductor substrates includes a top cover formed from a non-air permeable (NAP) material having faces including a top and a plurality of sides. A bottom base plate has a... |
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US20130068656 |
Large-sized Front Opening Unified wafer POD
A FOUP (front opening unified pod) is disposed with a plurality of supporting pieces, the positions of which are calibrated to be symmetrical for the supporting pieces to horizontally support... |
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US20140166533 |
PACKAGING FOR SUBSTRATES AND PACKAGING UNIT HAVING SUCH PACKAGING
Packaging for substrates, particularly for metal/ceramic substrates, having a tray-like packaging portion, produced from a flat material, for example from a plastic flat material, by deep-drawing,... |
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US20120018347 |
Reticle POD with Sensor
An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the... |
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US20090127160 |
STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE
The present invention provides a storage apparatus for storing a semiconductor element or a reticle. The storage apparatus comprises a first cover, a second cover and a flange. The first cover has... |
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US20110253591 |
Reticle Pod Having Function of Gas Exchange
A reticle pod for storing reticles, into the gas channel of partition of which gas is filled through a gas inlet, wherein strong gas flow is formed around the pellicle film and the pellicle film... |
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US20090038988 |
CONTAINER AND LINER THEREOF
A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is... |
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US20110024325 |
WAFER BOX FOR THE TRANSPORT OF SOLAR CELL WAFERS
A wafer box for transporting solar cell wafers includes a bottom and guide elements for positioning the solar cell wafers. Four guide angles having centering ridges are provided coaxially with a... |
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US20130269615 |
VERTICAL WAFER BOAT
A wafer boat for holding a plurality of semiconductor wafers in a spaced apart relationship during processing, comprising at least one support member defining a plurality of sets of at least two... |
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US20150170948 |
COUPLING TRANSFER SYSTEM
A transfer box has a sealing structure hermetically sealable by means of tight coupling of a transfer box body and a transfer box door. The transfer box is structured in such a way that magnets on... |
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US20110215028 |
SUBSTRATE STORAGE POD AND LID OPENING/CLOSING SYSTEM FOR THE SAME
The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external... |
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US20070284217 |
Transportation system and transportation method
A conveyor 4 for transporting a reticle cassette 18 is provided. A lifter 16 of a rail vehicle 14 lifts the reticle cassette 18 for transferring the reticle cassette 18 between the inside of a... |
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US20150101959 |
ULTRA-LOW OXYGEN AND HUMILITY LOADPORT AND STOCKER SYSTEM
One or more pods for adjusting at least one of an oxygen content or a water content therein and methods of their use are provided, where one or more semiconductor wafer are selectively stored... |
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US20110210041 |
SUBSTRATE STORAGE POD WITH REPLACEMENT FUNCTION OF CLEAN GAS
The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for... |
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US20110284423 |
METHOD AND STORAGE SYSTEM FOR REDUCING CONTAMINATION OF A PHOTOMASK
A method for reducing contamination of a photomask that has a pellicle frame holding a pellicle film to cover the photomask, and a sealed space defined by the pellicle frame, the pellicle film and... |
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US20090114563 |
RETICLE STORAGE APPARATUS AND SEMICONDUCTOR ELEMENT STORAGE APPARATUS
The present invention provides a reticle storage apparatus and a semiconductor element storage apparatus each equipped with a filtering device. The reticle storage apparatus or the semiconductor... |
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US20090289050 |
PROBE CARD THERMAL CONDITIONING SYSTEM
Embodiments of apparatus for thermally conditioning probe cards prior to use in a testing system are provided herein. In some embodiments, a probe card thermal conditioning system may include an... |
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US20090260329 |
PACKING INSERT FOR DISC-SHAPED OBJECTS
A packing insert for disc-shaped objects comprising a ring and a deformable contacting portion supported by the ring and extending from a circumference of the ring. The contacting portion can... |
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US20070181453 |
Cartridge accommodating case
A cartridge accommodating case including: a cartridge accommodating upper case as defined herein; and a cartridge accommodating lower case as defined herein, a partitioned chamber of an expanse... |
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US20140319020 |
WAFER CONTAINER WITH LATCHING MECHANISM FOR LARGE DIAMETER WAFERS
A wafer container with a latch mechanism that provides sealing for large wafer containers, such as for 450 mm wafers, accomplishes secure door closing and latching with reduced torque requirements... |
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US20110042266 |
WAFER CONTAINER WITH CUSHION SHEETS
An elastic wafer-retaining cushion sheet is disposed at a wafer retaining position on the top of a wafer tray. The wafer-retaining cushion sheet has a releasably suction-adhering surface that... |
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US20140076774 |
Automated Wafer Container with Equipment Interface
An improved wafer container is provided for use with automated equipment. The container includes a top lid that engages with a bottom base to form a housing having an inner cavity for storing... |
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US20130277268 |
FRONT OPENING WAFER CONTAINER WITH DOOR DEFLECTION MINIMIZATION
A front opening wafer container suitable for 450 mm diameter wafers. The front door has a pair of latch mechanism externally operable on the sides of the door, each latching mechanism having a... |
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US20050103669 |
Hermetically sealed container for large-sized precision sheet (semi-) product
A relatively light and generally resinous hermetically sealed container is provided for accommodating, supporting and transporting a precision sheet (semi-)product, such as a photomask, safely and... |
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US20120109364 |
Mask Conveying System And Mask Conveying Adapter
According to one embodiment, a mask conveying system includes a stocker, a conveyance path, a storage container, a conveying apparatus, and a control device. The storage container for wafer... |
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US20090038985 |
PHOTOMASK POD, PHOTOMASK TRANSPORT POD AND SUPPORTER THEREOF
A photomask pod and a photomask transport pod are provided for preventing particles in the environment from defiling a photomask as well as charge accumulation on the photomask from causing ESD... |
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US20070227940 |
Pod with guiding-locking piece therein
The present invention discloses a guiding locking piece deployed on one side of the body of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a... |
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US20090272461 |
Transfer container
A transfer container for transferring an object between environments is described. The transfer container comprises an enclosure; a purifier comprising a purification material, the purifier... |
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US20070161494 |
Non-oxide ceramic having oxide layer on the surface thereof, method for production thereof and use thereof
A non-oxide ceramics having improved performances and functions by forming a high-quality oxide film on the surface of a non-oxide ceramics such as aluminum nitride. The method for the formation... |
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US20060283770 |
Transportation fixture and package for substrate rack
A transportation fixture for holding a substrate rack comprises top and bottom endplates that are attached by a plurality of posts. The posts are spaced apart a sufficient distance to confine a... |
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US20090272743 |
SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS
A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the... |
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US20060000747 |
Shipping container for integrated circuit wafers
A shipping container for integrated circuit wafers has a lower section and an upper section releasably connected to the lower section, and a seal is received on a shoulder of the lower section.... |
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US20140291198 |
RETICLE POD HAVING GAS GUIDING APPARATUS
The present invention relates to a reticle pod having gas guiding apparatus. The gas guiding apparatus communicates with at least an inlet of the reticle pod and comprises a first outlet... |
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US20070151896 |
Packing member for packing wafer container
A packing member for packing a wafer container in a carton for transportation includes a rectangular frame which has a receiving space, at least one recess disposed at an outer side thereof... |
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US20060201848 |
Method for reducing mask precipitation defects
In a container for transporting a reticle during a semiconductor manufacturing process, the reticle including a base made of isolating material and a metallic layer deposited onto a surface of the... |
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US20050077205 |
Tray with flat bottom reference surface
A molded component tray includes a component housing portion having a plurality of component pockets. The tray has a flange around the component housing portion defining a perimeter of the tray. A... |
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US20100038282 |
Front Opening Unified Pod with latch structure
A wafer container includes a container body, which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and... |
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US20050150813 |
Foldover packages and manufacturing and test methods therefor
A microelectronic fold package is formed from an in-process unit including an internal unit such as a chip and a tape defining a bottom run extending beneath the internal unit, a top run extending... |
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US20090277816 |
Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith
A package of a thin plate container 1 is prevented from being broken when vacuum packed. A top flange protective cover for a thin plate container detachable to the top flange which is provided on... |
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US20140034548 |
WAFER CONTAINER
Improvements in a semiconductor wafer container for reducing movement of semiconductor wafers within a wafer carrier using flexible wall segments, panels or flexible inserts in the base member's... |
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US20050236298 |
Ready-for-dispatch package for semiconductor wafers, and method for the ready-for-dispatch packaging of semiconductor wafers
The invention relates to a ready-for-dispatch package for semiconductor wafers, comprising a) a closeable plastic container which is loaded with the semiconductor wafers and has a lid and a body,... |
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US20050269240 |
SEMICONDUCTOR INSPECTION APPARATUS AND TRAY FOR INSPECTION PARTS USED THEREOF
A tray of parts for inspection has a simple structure having only a tray holder that has a plurality of groove sections that store a plurality of parts for inspection on the surface, and contact... |
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US20070006803 |
Detachable edge ring for thermal processing support towers
An edge ring for use in batch thermal processing of wafers supported on a vertical tower within a furnace. The edge rings are have a width approximately overlapping the periphery of the wafers and... |
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US20100059408 |
CLOSED CONTAINER AND LID OPENING/CLOSING SYSTEM THEREFOR
In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer... |
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US20070023321 |
Container, a packaging body, manufacturing method of a container, manufacturing method of a packaging body, and a compound semiconductor substrate
The invention relates to a container used to store a compound semiconductor substrate where the content of tin in the container is 1 ppm or less. Further, it relates to a container used to store a... |
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US20060032784 |
Foam laminate system for semiconductor wafers
A cushion-like device is provided for the transportation of semiconductor wafers. The device includes an interior formed from polyethylene closed cell foam that utilizes a foaming agent that... |
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US20100065467 |
ANTIVIBRATION MECHANISM FOR ARTICLE RECEIVING CONTAINER
An object is to restrict vibration from being transmitted to a shelf member and thus to prevent a substrate supported on the shelf member from being damaged. An FOUP main body 3a is formed into a... |
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US20080217268 |
Frame system for an article storage apparatus
A frame system for an article storage apparatus which defines an article storage space therein, includes a first upper frame extending horizontally, a first lower frame extending horizontally, and... |