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US20060201847 |
Protective shipper
A protective shipper comprises a cover and a base that are held together by a latching member. The base is configurable to retain and protect semiconductor wafers or film frames with wafers within... |
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US20120168346 |
WAFER CONTAINER WITH STAGGERED WALL STRUCTURE
A wafer container comprising a base and a cover that nest together. The base includes a staggered wall structure composed of inner and outer walls. The staggered wall structure is arranged so that... |
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US20120220107 |
SUBSTRATE PROCESSING APPARATUS, WAFER HOLDER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Provided is a substrate processing apparatus having a stack structure of wafers that can endure a high temperature without bad influence on film-forming precision. The stack structure includes a... |
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US20120083918 |
SEALED CONTAINER AND SEMICONDUCTOR MANUFACTURING APPARATUS
A semiconductor manufacturing apparatus 1 includes a wafer 10, a FOUP 20 that is a sealed container retaining the wafer 10 therein, an etching apparatus 30 that is a semiconductor processing... |
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US20050218034 |
Lid unit for thin plate supporting container
A lid unit seals a container main body of a thin-plate supporting container which is conveyed while plural 300 mm-diameter semiconductor wafers are stored in the container. In a wafer retainer... |
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US20050103669 |
Hermetically sealed container for large-sized precision sheet (semi-) product
A relatively light and generally resinous hermetically sealed container is provided for accommodating, supporting and transporting a precision sheet (semi-)product, such as a photomask, safely and... |
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US20130270152 |
FRONT OPENING WAFER CONTAINER WITH ROBOTIC FLANGE
A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents... |
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US20050057011 |
Carrier for wafer boxes
A carrier for wafer boxes is provided. The carrier includes a carrier main body, a cover device and a shock absorbing device. The carrier main body carries at least one wafer box, and the shock... |
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US20070023320 |
Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit
A wafer holder hardly deformable under high load and capable of effectively preventing a contact failure with a wafer and further capable of preventing temperature increase of a driving system of... |
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US20110114129 |
METHODS AND APPARATUSES FOR CONTROLLING CONTAMINATION OF SUBSTRATES
Components, systems, and methods for maintaining an extremely dry environment within substrate containers formed of polymers provides supplemental exterior gas washing of the substrate container... |
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US20160049319 |
PACKAGING INSERT
A packaging insert includes a frame that is configured to occupy a selected amount of space within a container at least in an area corresponding to a periphery of the container contents, such as... |
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US20050236298 |
Ready-for-dispatch package for semiconductor wafers, and method for the ready-for-dispatch packaging of semiconductor wafers
The invention relates to a ready-for-dispatch package for semiconductor wafers, comprising a) a closeable plastic container which is loaded with the semiconductor wafers and has a lid and a body,... |
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US20140360915 |
WAFER CONTAINER WITH RECESSED LATCH
Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism... |
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US20090272461 |
Transfer container
A transfer container for transferring an object between environments is described. The transfer container comprises an enclosure; a purifier comprising a purification material, the purifier... |
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US20060283770 |
Transportation fixture and package for substrate rack
A transportation fixture for holding a substrate rack comprises top and bottom endplates that are attached by a plurality of posts. The posts are spaced apart a sufficient distance to confine a... |
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US20050098473 |
Container for containing semiconductor wafers
A container for containing semiconductor wafers. A preferred embodiment of the invention provides a container for containing semiconductor wafers that includes a first container body including a... |
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US20140076774 |
Automated Wafer Container with Equipment Interface
An improved wafer container is provided for use with automated equipment. The container includes a top lid that engages with a bottom base to form a housing having an inner cavity for storing... |
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US20150098788 |
SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM
A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are... |
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US20080110795 |
Packing case for substrates of flat display device
An exemplary packing case (20) includes a main body (21) and a plurality of protrusions (213). The main body includes four side walls configured for receiving substrates. The protrusions are... |
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US20080273959 |
Sealed Enclosure for Transporting and Storing Semiconductor Substrates
The present invention relates to a sealed enclosure for transporting and storing semiconductor substrates, the enclosure comprising a sealed container and support means placed inside the container... |
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US20050269240 |
SEMICONDUCTOR INSPECTION APPARATUS AND TRAY FOR INSPECTION PARTS USED THEREOF
A tray of parts for inspection has a simple structure having only a tray holder that has a plurality of groove sections that store a plurality of parts for inspection on the surface, and contact... |
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US20120109364 |
Mask Conveying System And Mask Conveying Adapter
According to one embodiment, a mask conveying system includes a stocker, a conveyance path, a storage container, a conveying apparatus, and a control device. The storage container for wafer... |
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US20070256957 |
Sub-rack with housing for receiving plug-in modules
A sub-rack (1) for plugging and unplugging electronic plug-in modules (3) includes a housing (2) which has a front cover plate (5). Each plug-in module includes a cooling device including a heat... |
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US20140083902 |
PACKAGE STRUCTURE FOR SUBSTRATE STORAGE CONTAINER
A package structure used to load substrate storage containers for convenience of transportation is revealed. The package structure includes a package box and at least one buffer pad. The buffer... |
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US20170186637 |
WAFER CONTAINER FOR RECEIVING HORIZONTALLY ARRANGED WAFERS
A wafer container includes a base, a guide, a cover, a locking member and a sealing member. The base includes an installing surface thereon. The guide is disposed on the installing surface of the... |
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US20100108564 |
CLEAN DEVICE WITH CLEAN BOX-OPENING/CLOSING DEVICE
In a load port portion of a conventional clean device, it can happen that cleanliness is reduced by dust caused by wear of bellows and a lid is not separated by its weight from a main body. In... |
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US20090152162 |
CARRIER APPARATUS AND METHOD FOR SHAPED SHEET MATERIALS
A carrier apparatus for holding a shaped sheet material includes a first frame structure with a first front surface including a first outer peripheral region and a first inner peripheral region... |
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US20130193033 |
WAFER BOX AND PHOTO MASK BOX
A check valve disposed inside a semiconductor device container. The check valve includes a cylinder and a check component. With opening and closing of the check component that is elastic,... |
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US20130174640 |
POD HAVING TOP COVER APERTURE FOR DETECTING SURROUNDING GAS WITHIN THE POD
A storage Pod for semiconductor substrates includes a top cover formed from a non-air permeable (NAP) material having faces including a top and a plurality of sides. A bottom base plate has a... |
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US20100051502 |
CARRIER HAVING INTEGRAL DETECTION AND MEASUREMENT OF ENVIRONMENTAL PARAMETERS
A carrier includes an enclosure for storing articles sensitive to electrostatic discharge (ESD) and a replacement component that is affixed to the enclosure as an integral component of the... |
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US20060201848 |
Method for reducing mask precipitation defects
In a container for transporting a reticle during a semiconductor manufacturing process, the reticle including a base made of isolating material and a metallic layer deposited onto a surface of the... |
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US20070187286 |
Wafer storage container and apparatus
An injection molded container for storing and transporting wafers includes a base having a wafer area upon which to place a stack of a plurality of wafer assemblies, wherein each wafer assembly... |
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US20070140828 |
Silicon wafer and method for production of silicon wafer
A silicon wafer, which has been doped with nitrogen and has been subjected to an extrinsic gettering (EG) treatment, for example, the formation of a polysilicon layer. In the silicon wafer, when... |
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US20080004746 |
Live tape position sensor
A real-time tape position sensor to accurately determine the location of several consecutive carrier tape pockets in order to pick or place electronic semiconductor devices into or out of a tape... |
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US20050077205 |
Tray with flat bottom reference surface
A molded component tray includes a component housing portion having a plurality of component pockets. The tray has a flange around the component housing portion defining a perimeter of the tray. A... |
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US20090114563 |
RETICLE STORAGE APPARATUS AND SEMICONDUCTOR ELEMENT STORAGE APPARATUS
The present invention provides a reticle storage apparatus and a semiconductor element storage apparatus each equipped with a filtering device. The reticle storage apparatus or the semiconductor... |
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US20120273389 |
SEMICONDUCTOR TRAY CARRIER
A semiconductor tray carrier has a base part and first and second side parts. The first and second side parts are movable between a stowed position and a deployed position in which the side parts... |
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US20060000747 |
Shipping container for integrated circuit wafers
A shipping container for integrated circuit wafers has a lower section and an upper section releasably connected to the lower section, and a seal is received on a shoulder of the lower section.... |
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US20100065467 |
ANTIVIBRATION MECHANISM FOR ARTICLE RECEIVING CONTAINER
An object is to restrict vibration from being transmitted to a shelf member and thus to prevent a substrate supported on the shelf member from being damaged. An FOUP main body 3a is formed into a... |
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US20140034548 |
WAFER CONTAINER
Improvements in a semiconductor wafer container for reducing movement of semiconductor wafers within a wafer carrier using flexible wall segments, panels or flexible inserts in the base member's... |
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US20090277816 |
Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith
A package of a thin plate container 1 is prevented from being broken when vacuum packed. A top flange protective cover for a thin plate container detachable to the top flange which is provided on... |
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US20060032785 |
Storage box for wafer shipping box
A storage box for a wafer shipping box is provided. The storage box includes a first housing member, a first fastening element, a second housing member and a second fastening element. The first... |
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US20100038281 |
Front Opening Unified Pod with latch component
A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting wafers and an open front is formed on one sidewall of which for importing... |
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US20090236261 |
ELECTRONIC COMPONENT ACCOMMODATING DEVICE
An electronic component accommodating device which can be stacked in plural, the electronic component accommodating device includes an upper surface side wall part extending from an upper surface... |
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US20060163112 |
Reinforced structural member for high temperature operations and fabrication method
A structural member for use in high temperature environments is disclosed. The structural member has a core encased within a shell material. The core material is formed of a strong material having... |
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US20050077206 |
Bare die tray with flat datum surface
In one embodiment of the present invention, a component tray includes a component housing portion having a plurality of component pockets, with each pocket opening to a component housing top... |
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US20130032508 |
TRAY FOR SEMICONDUCTOR INTEGRATED CIRCUITS
The present invention is directed to a tray for semiconductor integrated circuits that enables a BGA semiconductor integrated circuit to be repositioned appropriately in a pocket even if a corner... |
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US20100126905 |
STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE
The present invention provides a storage apparatus for storing a semiconductor element or a reticle. The storage apparatus comprises a first cover, a second cover and a flange. The first cover has... |
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US20090090653 |
Low cost wafer box improvements
The wafer box includes a tray (10) and a cover (62). The tray (10) includes an inner (34, 36, 38, 40) and outer (24, 26, 28, 30) wall configuration with horizontal semicircular channels (48, 50,... |
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US20060042997 |
Thin plate supporting container
Particle adhesion to a gap between a container main body and a lid unit is reduced to prevent the particle intrusion into the container main body. The inside of a thin plate supporting container... |