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US20120325630 Nano/Micro Electro-Mechanical Relay  
A nano/micro electro-mechanical relay, comprising an at least one normally open (NO) nano/micro relay switch and an at least one normally closed (NC) nano/micro relay switch. Both the NC...
US20140124340 ELECTRICALLY-CONDUCTIVE MEMBRANE SWITCH  
An improved electrically conductive membrane switch, such as, for example, an improved graphene membrane switch. The improved electrically conductive membrane switch can be used in applications...
US20120169266 POWER SWITCHING SYSTEM INCLUDING A MICRO-ELECTROMECHANICAL SYSTEM (MEMS) ARRAY  
A switching system includes a plurality of diodes forming a diode bridge, and a micro-mechanical system (MEMS) switch array closely coupled to the plurality of diodes. The MEMS switch array is...
US20110315529 MEMS STRUCTURE WITH A FLEXIBLE MEMBRANE AND IMPROVED ELECTRIC ACTUATION MEANS  
The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3′) under the flexible membrane (6),...
US20110067982 MEMS-BASED SWITCHING  
A MEMS-based switching device may be used to implement an interconnect switch in a programmable integrated circuit device. Such a MEMS-based device may include a deformable cantilever that may...
US20150200069 MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE  
MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to...
US20130192964 MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE  
MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to...
US20110315527 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES  
Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System...
US20140238828 MERGED LEGS AND SEMI-FLEXIBLE ANCHORING FOR MEMS DEVICE  
The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the...
US20150170863 ELECTROSTATIC RELAY  
In an electrostatic relay in which a moving contact and a movable electrode are displaced in parallel with a base substrate, an opening force is increased when the movable electrode is separated...
US20110220472 ELECTROSTATIC RELAY  
In an electrostatic relay in which a moving contact and a movable electrode are displaced in parallel with a base substrate, an opening force is increased when the movable electrode is separated...
US20110297519 MEMS SWITCH  
A micro electro-mechanical system (MEMS) switch includes an active device, an immovable metal layer and a movable metal layer is provided. The immovable metal layer is disposed on the active...
US20140076699 MEMS SWITCHES AND OTHER MINIATURIZED DEVICES HAVING ENCAPSULATING ENCLOSURES, AND PROCESSES FOR FABRICATING SAME  
Miniaturized devices such as MEMS switches (10) have encapsulating enclosures (100). The enclosure (100) and the remainder of the switch (10) are fabricated on a concurrent basis by depositing...
US20110198202 MEMS-BASED ULTRA-LOW POWER DEVICES  
A gap closing actuator (GCA) device (200) is provided. The GCA device includes at least one device drive comb structure (202a, 202b), at least one input/output (I/O) comb structure (216a, 216b)...
US20140076697 MEMS ELECTROSTATIC ACTUATOR  
A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating...
US20120305373 CONTACT STRUCTURE FOR ELECTROMECHANICAL SWITCH  
A contact structure for electromechanical switch includes a static contact and a moving contact to allow many kinds of actuations and provide great switch characteristics, such as high isolation...
US20150035387 MEMS SWITCH DEVICE AND METHOD OF FABRICATION  
A MEMS switch device including: a substrate layer; an insulating layer formed over the substrate layer; and a MEMS switch module having a plurality of contacts formed on the surface of the...
US20130284571 RF MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) CAPACITIVE SWITCH  
An RF MEMS capacitive switch aligns holes in one of its electrodes to dielectric posts to reduce trapped charge without affecting the capacitance ratio of the switch. When actuated, the electrode...
US20120262192 HIGH-IMPEDANCE MEMS SWITCH  
A MEMS switch. The MEMS switch has a high-impedance state and a low-impedance state for biasing a capacitive sensor, and includes an actuation bias terminal, a sense bias terminal, a switch...
US20110056812 NANO-ELECTRO-MECHANICAL SWITCHES USING THREE-DIMENSIONAL SIDEWALL-CONDUCTIVE CARBON NANOFIBERS AND METHOD FOR MAKING THE SAME  
The present disclosure describes a method for fabricating three-dimensional sidewall-conductive carbon nanofibers (CNFs) on selective substrates. In particular, fabrication of three-dimensional...
US20130240336 HYBRID MEMS RF SWITCH AND METHOD OF FABRICATING SAME  
Structures having a hybrid MEMS RF switch and method of fabricating such structures using existing wiring layers of a device is provided. The method of manufacturing a MEMS switch includes forming...
US20070272529 Integrated Circuit With Analog Connection Matrix  
Integrated circuit with analog connection matrix. The integrated circuit includes an analog connection matrix having a plurality of analog i/o contacts. The analog i/o contacts have a plurality of...
US20080142347 MEMS switches with deforming membranes  
MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce...
US20090033445 MEMS actuators with stress releasing design  
The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also...
US20140183014 ELECTRIC EQUIPMENT HAVING MOVABLE PORTION, AND ITS MANUFACTURE  
On seed metal layer of first metal, pedestal and counter electrode are formed of second metal by plating, adjacent to free space region. The free space region is filled with first sacrificial...
US20140158506 MECHANICAL SWITCH  
Disclosed is a mechanical switch that may include a first electrode; a second electrode spaced apart from the first electrode; a first material electrically connected to the first electrode; and a...
US20110079495 MICROMECHANICAL DIGITAL CAPACITOR WITH IMPROVED RF HOT SWITCHING PERFORMANCE AND RELIABILITY  
The present invention generally relates to RF MEMS devices that are capable of hot switching. The RF MEMS devices, by utilizing one or more spring mechanisms, are capable of hot switching. In...
US20090020399 Electromechanical switch and method of manufacturing the same  
Provided is an electromechanical switch and a method of manufacturing the same. The electromechanical switch includes an elastic conductive layer that moves by the application of an electric...
US20110188174 BUS BAR ASSEMBLY  
A solid state contactor assembly includes at least one solid state switch electrically connected to a first bus bar via at least one conductive plate. The solid state switch controls a flow of...
US20140262707 NANOWIRE-BASED MECHANICAL SWITCHING DEVICE  
Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and...
US20110073447 Radiant Energy Imager Using Null Switching  
In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array...
US20090085699 MEMS ACTUATOR  
Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are...
US20140284189 LAMINATE-TYPE ACTUATOR  
A laminate-type actuator including a laminate wherein an electrostrictive material layer is wound and laminated in a form of a tube together with first and second electrodes sandwiching the...
US20090114513 MICRO ELECTROMECHANICAL SYSTEM (MEMS) SWITCH  
A Micro ElectroMechanical System (MEMS) switch is provided. The MEMS switch includes a ground, a moving unit moveable according to a driving signal, for connecting the input to the output or...
US20110067984 MICROELECTROMECHANICAL SYSTEM (MEMS) RESONANT SWITCHES AND APPLICATIONS FOR POWER CONVERTERS AND AMPLIFIERS  
A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or “resoswitch”, with very high Q's,...
US20110220470 Electromechanical Actuator with Interdigitated Electrodes  
A micromachined electromechanical (MEMS) actuator including, for example, an electrostatically actuated electrical switch, is provided, including a first set of conducting plates forming part of...
US20080230357 GOLD-METAL OXIDE THIN FILMS FOR WEAR-RESISTANT MICROELECTROMECHANICAL SYSTEMS ("MEMS")  
Provided herein are new methods for the fabrication of gold (Au) alloys and films containing metal or semimetal oxides such as oxides of vanadium (V), for example, Au—V2O5 for use in electrical,...
US20110147177 STRUCTURE, ELECTRONIC DEVICE, AND METHOD FOR FABRICATING A STRUCTURE  
A structure includes a conductive film (12) provided in an underlying layer (10); and a carbon nanotube bundle (20) including a plurality of carbon nanotubes each having one end connected to the...
US20150021149 CONTACT STRUCTURE FOR ELECTROMECHANICAL SWITCH  
The present disclosure discloses a contact structure for electromechanical switch. The contact structure is using the design including a PCB and a moving contact to allow the actuations and have...
US20120125747 MEMS SWITCH WITH REDUCED DIELECTRIC CHARGING EFFECT  
The present disclosure provides in one embodiment, a semiconductor device that includes a MEMS switch having a substrate, a first dielectric layer disposed above the substrate, and a bottom signal...
US20070035200 Microelectromechanical system comprising a beam that undergoes flexural deformation  
A microelectromechanical system comprises a beam and an electrode coupled to the beam via electrostatic interaction. The beam is designed to undergo elastic flexural deformation and has an...
US20120279838 CMOS-MEMS SWITCH STRUCTURE  
A CMOS-MEMS switch structure is disclosed. The CMOS-MEMS switch structure includes a first substrate, a second substrate, a first cantilever beam, and a second cantilever beam. The first and...
US20130075237 MEMS ACTUATOR/SENSOR  
A device can have an electrostatic MEMS actuator and a capacitive sensor in electrical communication with the electrostatic MEMS actuator. The capacitive sensor can be configured to determine a...
US20130277186 TOUCH PANEL  
A touch panel includes a first conductive film including conductive patterns each extending in one direction, and a second conductive film facing the first conductive film. Each of the conductive...
US20070181411 SEMICONDUCTOR INTEGRATED CIRCUIT INCLUDING CIRCUIT FOR DRIVING ELECTROSTATIC ACTUATOR, MICRO-ELECTRO-MECHANICAL SYSTEMS, AND DRIVING METHOD OF ELECTROSTATIC ACTUATOR  
A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom...
US20090260960 SWITCH FOR USE IN MICROELECTROMECHANICAL SYSTEMS (MEMS) AND MEMS DEVICES INCORPORATING SAME  
Embodiments of the present invention provide microelectromechanical systems (MEMS) switching methods and apparatus having improved performance and lifetime as compared to conventional MEMS...
US20110051312 MEMS DEVICES  
A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the...
US20060238279 MEMS ACTUATORS AND SWITCHES  
MEMS structures employing movable conductive member and a number of current-carrying stationary contact terminals which advantageously permit higher current carrying capability that prior art...
US20140090964 Nanoelectromechanical Switch With Localized Nanoscale Conductive Pathway  
The present invention is directed to a nanoelectromechanical (NEM) switch comprising two electrodes (12, 18), wherein: at least one (18) of the electrodes comprises an active layer (10) thereon;...
US20110315526 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES  
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper...

Matches 1 - 50 out of 276 1 2 3 4 5 6 >