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US20120067287 EVAPORATION BOAT FOR VACUUM VAPOR DEPOSITION AND VACUUM VAPOR DEPOSITION SYSTEM  
The present invention provides an evaporation boat, comprising: a source material container configured to contain source material and provided with an opening; a cover plate disposed, with a...
US20120167825 HALOGEN ASSISTED PHYSICAL VAPOR TRANSPORT METHOD FOR SILICON CARBIDE GROWTH  
A physical vapor transport growth technique for silicon carbide is disclosed. The method includes the steps of introducing a silicon carbide powder and a silicon carbide seed crystal into a...
US20130160712 EVAPORATION CELL AND VACUUM DEPOSITION SYSTEM THE SAME  
An evaporation cell includes a crucible (21) containing a deposition material (M), an electric heater (22) which heats the crucible (21) and thereby preliminarily heats the deposition material (M)...
US20130019805 DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME  
A deposition source including: a dopant vaporization source; a first host vaporization source including a first vaporization source unit on a side of the dopant vaporization source and a second...
US20130305983 Physical Vapor Transport Growth System For Simultaneously Growing More Than One SIC Single Crystal and Method of Growing  
The present invention relates to a configuration and in particular a physical vapor transport growth system for simultaneously growing more than one silicon carbide (SiC) bulk crystal....
US20130163967 DEVICE AND METHOD OF EVAPORATING A MATERIAL FROM A METAL MELT  
A device for evaporating a metal melt, the device comprising a first crucible or crucible portion operative to receive the metal melt comprising at least one aperture, from which the evaporated...
US20130118409 ELECTRICAL CONTACTS FOR USE WITH VACUUM DEPOSITION SOURCES  
The present invention provides electrical contact assemblies can be used with vacuum deposition sources. In one exemplary application, the electrical contact assemblies of the present invention...
US20150211115 MULTI-CHANNEL PYROLYSIS TUBES, MATERIAL DEPOSITION EQUIPMENT INCLUDING THE SAME AND ASSOCIATED METHODS  
A pyrolysis tube for use with a material deposition system includes a plurality of channels. The channels may be defined by internal elements of the pyrolysis tube, or by internal elements that...
US20140220296 SIC CRYSTAL AND WAFER CUT FROM CRYSTAL WITH LOW DISLOCATION DENSITY  
A method of forming an SiC crystal including placing in an insulated graphite container a seed crystal of SiC, and supporting the seed crystal on a shelf, wherein cushion rings contact the seed...
US20150245790 LATENT FINGERPRINT DETECTION METHOD, HEATING EVAPORATION DEVICE FOR DETECTING LATENT FINGERPRINT, LATENT FINGERPRINT DETECTION APPARATUS, AND COMPOSITION FOR DETECTING LATENT FINGERPRINT  
The present invention provides a latent fingerprint detection, method that is to handle and is capable of clearly detecting a latent fingerprint, and a heating evaporation device for detecting a...
US20110315078 COATING SYSTEM  
A coating system includes a housing, a coating umbrella, a lift driver, a target material source, and a control device. The housing includes a ceiling and a floor. The coating umbrella is...
US20050208205 Mask and method for making full color display  
Pixels for organic light emitting full color display panels are made by simultaneously depositing red, green, and blue dopants such that the blue dopant is dispersed in at least one non-blue...
US20150211126 DIRECT LIQUID INJECTION OF SOLUTION BASED PRECURSORS FOR ATOMIC LAYER DEPOSITION  
Systems and methods for the precise control of the delivery of solution-based precursors for use in ALD processes. By using direct liquid injection of the precursor solution to a local vaporizer,...
US20130302520 CO-EVAPORATION SYSTEM COMPRISING VAPOR PRE-MIXER  
A processing system for depositing a plurality of source materials on a substrate, includes a first thermal evaporation source that can evaporate a first source material to produce a first vapor,...
US20070281081 Vacuum Deposition Method and Sealed-Type Evaporation Source Apparatus for Vacuum Deposition  
A vacuum deposition method is provided. In the vacuum deposition for evaporating a sublimation evaporation material, the gas sealed-type heating container 11 has the blast aperture 14 and an area...
US20140220298 SIC CRYSTAL WITH LOW DISLOCATION DENSITY  
A method of forming an SiC crystal, the method including: placing a SiC seed in a growth vessel, heating the growth vessel, and evacuating the growth vessel, wherein the seed is levitated as a...
US20120251722 DEVICE AND METHOD FOR THERMAL EVAPORATION OF SILICON  
An evaporator cell (100), in particular for evaporating a high-melting material like Si, comprises a first crucible (10) being adapted for receiving the material to be evaporated and providing a...
US20110076398 EVAPORATION SOURCE AND VAPOR DEPOSITION APPARATUS USING THE SAME  
An evaporation source that causes the evaporation bars to vaporize and emit small particles. The small particles of the evaporation bars are evenly dispersed all around the evaporation source....
US20110000431 INDUSTRIAL VAPOUR GENERATOR FOR THE DEPOSITION OF AN ALLOY COATING ONTO A METAL STRIP  
The invention relates to a vapour generator for the deposition of a metal coating onto a substrate (7), preferably a steel strip, that comprises a vacuum chamber (6) in the form of a housing...
US20140234194 Vanadium Doped SiC Single Crystals and Method Thereof  
A sublimation grown SiC single crystal includes vanadium dopant incorporated into the SiC single crystal structure via introduction of a gaseous vanadium compound into a growth environment of the...
US20120028408 DISTRIBUTOR HEATER  
A vapor distributor assembly may include a carbon fiber heating element.
US20130276706 DEPOSITION APPARATUS  
A deposition apparatus includes a crucible having an inlet, a first heater heating the crucible, a tank supplying an object to be deposited to the crucible and having an outlet, a second heater...
US20050103273 Vacuum evaporation crucible and phosphor sheet manufacturing apparatus using the same  
A crucible for vacuum evaporation includes a crucible main body accommodating a film forming material and generating heat through energization and a convection member secured in position inside...
US20140161966 MONOMER VAPORIZING DEVICE AND METHOD OF CONTROLLING THE SAME  
A monomer vaporizing device and a method of controlling the same are disclosed. The monomer vaporizing device includes: a first vaporizer and a second vaporizer that receive a purge gas and...
US20110151590 APPARATUS AND METHOD FOR LOW-K DIELECTRIC REPAIR  
A method, a system and a computer readable medium for integrated in-vacuo repair of low-k dielectric thin films damaged by etch and/or strip processing. A repair chamber is integrated onto a same...
US20130280441 DEPOSITION SOURCE  
A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition...
US20110076399 DEPOSITION SOURCE  
A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition...
US20120285381 HEATING SYSTEM FOR A VAPOR-PHASE DEPOSITION SOURCE  
A vapor-phase deposition source includes a vessel equipped with two zones. The first zone is for the production of vapor. It is equipped with a receptacle for the material and elements for heating...
US20120285370 SUBLIMATION GROWTH OF SIC SINGLE CRYSTALS  
In SiC sublimation crystal growth, a crucible is charged with SiC source material and SiC seed crystal in spaced relation and a baffle is disposed in the growth crucible around the seed crystal. A...
US20130130475 VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM FOR MATERIAL CO-DEPOSITION  
An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately...
US20070134426 Vacuum evaporation deposition method of the winding type and vacuum evaporation deposition apparatus of the same  
The invention provides a vacuum evaporation deposition method of the winding type and a vacuum evaporation deposition apparatus of the winding type which can form a metal film on a base film made...
US20130095243 METAL TITANIUM PRODUCTION DEVICE AND METAL TITANIUM PRODUCTION METHOD  
A metal titanium production device comprising: (a) a magnesium evaporation unit in which solid magnesium is evaporated and a first flow path which is communicated with the evaporation unit and...
US20130263785 Crucible for Growing Crystals  
A crucible is used for allowing a seed crystal to grow via the source of materials. The crucible includes a growth chamber, a holder, a reflecting device, and a plurality of gas guiding devices....
US20130337174 VAPORIZATION SOURCE, VAPORIZATION CHAMBER, COATING METHOD AND NOZZLE PLATE  
The invention relates to vaporization source, an evaporation chamber, a coating method and a nozzle plate. The vaporization source according to the invention makes it possible to generate a high,...
US20120021126 Vacuum Vapor Coating Device for Coating a Substrate  
A vacuum vapor coating device for coating a substrate with a coating material, the vacuum vapor coating device comprising a chamber (1) into which vacuum can be created, the chamber (1) comprises:...
US20070266943 Shadow mask and evaporation system incorporating the same  
A shadow mask and an evaporation system incorporating the same. The shadow mask comprises at least one opening. The length and the width of the opening range from about 100 μm to about 200 μm and...
US20120039789 APPARATUS FOR MANUFACTURING ALUMINUM NITRIDE SINGLE CRYSTAL, METHOD FOR MANUFACTURING ALUMINUM NITRIDE SINGLE CRYSTAL, AND ALUMINUM NITRIDE SINGLE CRYSTAL  
Provided is a manufacturing device of an aluminum nitride single crystal including a crucible. An aluminum nitride raw material and a seed crystal are stored in an inner portion of the crucible....
US20090196584 EVAPORATION CRUCIBLE AND EVAPORATION APPARATUS WITH ADAPTED EVAPORATION CHARACTERISTIC  
An evaporation crucible is described. The evaporation crucible (100; 300; 400; 500) includes: an electrically conductive body (120) and a cover (150; 550); the body having a first electrical...
US20110306187 METHOD AND APPARATUS FOR SILICON REFINEMENT  
A method and respect material for the production of chlorosilanes (primarily: trichlorosilane) and the deposition of high purity poly-silicon from these chlorosilanes. The source for the...
US20120048199 CRUCIBLE AND EVAPORATION DEPOSITION DEVICE HAVING SAME  
A crucible includes a body, an ejector and a drive member. The body has a receptacle for receiving coating material, and a bottom in the receptacle. The bottom has an ejector hole communicating...
US20090038549 SHAPED CRUCIBLE AND EVAPORATION APPARATUS HAVING SAME  
A crucible for an evaporation apparatus with the crucible having a length, a width, and a thickness is provided. The crucible comprises an evaporation side for receiving and evaporating material...
US20110124182 SYSTEM FOR THE DELIVERY OF GERMANIUM-BASED PRECURSOR  
A supply of a germanium precursor such as germanium n-butylamidinate is provided in close proximity to a microelectronic device substrate to be contacted therewith for deposition of...
US20050223995 Vacuum treatment installation with a variable pump arrangement  
A vacuum treatment installation, in particular a coating line for the continuous coating of plate-like substrates moving continuously along the line, preferably a glass-coating line having at...
US20140196659 APPARATUS FOR FABRICATING INGOT AND METHOD FOR FABRICATING INGOT  
An apparatus for fabricating an ingot includes a crucible for receiving a raw material, wherein the raw material has a shape extending in one direction.
US20130239878 APPARATUS AND METHOD FOR PRODUCTION OF ALUMINUM NITRIDE SINGLE CRYSTAL  
The invention is an apparatus for production of an aluminum nitride single crystal that produces the aluminum nitride single crystal by heating an aluminum nitride raw material to sublimate the...
US20080216749 EVAPORATION TUBE AND EVAPORATION APPARATUS WITH ADAPTED EVAPORATION CHARACTERISTIC  
An evaporation crucible is described. The evaporation crucible includes: an electrically conductive chamber tube (120) having a wall such that an enclosure is formed, the chamber tube having a...
US20080053371 Silicon carbide manufacturing device and method of manufacturing silicon carbide  
A silicon carbide manufacturing device includes a graphite crucible, in which a seed crystal is disposed, a gas-inducing pipe coupled with the graphite crucible, and an attachment prevention...
US20070148337 Flame-perforated aperture masks  
An aperture mask is provided comprising an elongated web of flexible film having at least one deposition mask pattern formed in the film, wherein the deposition mask pattern defines deposition...
US20150159263 EVAPORATION DEVICE  
The present disclosure relates to an evaporation device, including an evaporation device body, within which a plurality of thermal conductors that are contacted with one another for thermal...
US20070218199 Crucible eliminating line of sight between a source material and a target  
A crucible for heating material to be deposited on a target substrate includes a body configured to contain source material, a base formed at a first end of the body, and an emitting orifice...