Title:
Method of etching refractory metal based materials uniformly along a surface
United States Patent 3411999


Inventors:
Weinberg, Harold P.
Application Number:
US51293565A
Publication Date:
11/19/1968
Filing Date:
12/10/1965
Assignee:
VALUE ENGINEERING COMPANY
Primary Class:
Other Classes:
216/90, 216/108
International Classes:
C23F1/00; C25F3/04; C25F3/08
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