Title:
Multilevel expanded metallic contacts for semiconductor devices
United States Patent 3290570


Inventors:
Cunningham, James A.
Williams, Robert P.
Application Number:
US36319764A
Publication Date:
12/06/1966
Filing Date:
04/28/1964
Assignee:
TEXAS INSTRUMENTS INC
Primary Class:
Other Classes:
257/784, 257/E23.16, 428/632, 428/663
International Classes:
H01L21/00; H01L21/60; H01L23/485; H01L23/522; H01L23/532
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