Title:
Fabrication of pn junctions by deposition followed by diffusion
United States Patent 3089794


Inventors:
Marinace, John C.
Application Number:
US82586359A
Publication Date:
05/14/1963
Filing Date:
06/30/1959
Assignee:
IBM
Primary Class:
Other Classes:
148/33, 148/DIG.39, 438/912
International Classes:
C30B31/02; H01L21/00; H01L21/205; H01L21/225
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