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6905663 Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas  
Apparatus and process for the abatement of fluorine and fluorine-containing compounds from gases containing same, such as effluent gas streams from semiconductor manufacturing operations, wherein...
6905107 Inflatable slit/gate valve  
A sealable door assembly including a frontplate which faces an opening to be sealed, a backplate operatively coupled to the frontplate, and at least one inflatable member located between the...
6904637 Scrubber with sonic nozzle  
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a...
6902682 Method and apparatus for electrostatically maintaining substrate flatness  
An apparatus and method for holding a substrate on a support layer in a processing chamber. The method includes the steps of positioning the substrate a predetermined distance from the support...
6896763 Method and apparatus for monitoring a process by employing principal component analysis  
A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process)....
6891419 Methods and apparatus for employing feedback body control in cross-coupled inverters  
In a first aspect, a cross-coupled inverter is provided that includes a first inverter circuit having a first NFET coupled to a first PFET and a second inverter circuit having a second NFET...
6888402 Low voltage current reference circuits  
A current reference circuit, for generating a reference current from a low voltage supply source, includes a first n-channel field effect transistor (NFET) having a gate and a drain that are...
6887786 Method and apparatus for forming a barrier layer on a substrate  
A first method is provided for forming a barrier layer on a substrate by sputter-depositing a tantalum nitride layer on a substrate having (1) a metal feature formed on the substrate; (2) a...
6874067 Eliminating unnecessary data pre-fetches in a multiprocessor computer system  
A multiprocessor computer system employs a number of levels of cache memories with each processor. A cache controller for a lower level cache memory receives a memory block pre-fetch request which...
6865937 Deionized water spray on loss of fluid processing tank exhaust  
Methods and apparatus are provided for increasing the safety of a clogged or failed exhaust system. In accordance with a first embodiment, an apparatus is provided that includes (1) a tank adapted...
6865501 Using clock gating or signal gating to partition a device for fault isolation and diagnostic data collection  
In one aspect, an electronic device that has been partitioned into segments by using clock gating or signal gating is tested. One of the segments that is a source of a failure is identified....
6863077 Method and apparatus for enhanced chamber cleaning  
A system for processing substrates within a chamber and for cleaning accumulated material from chamber components is provided. The system includes a reactive species generator adapted to generate...
6863019 Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas  
A method of cleaning a semiconductor fabrication processing chamber involves recirculation of cleaning gas components. Consequently, input cleaning gas is utilized efficiently, and undesirable...
6857045 Method and system for updating data in a compressed read cache  
In a first aspect, a method is provided for updating a compressed cache. The method includes the steps of (1) initiating an update routine for replacing first data stored within the cache with...
6856858 Shared sensors for detecting substrate position/presence  
A transfer chamber of a semiconductor processing tool is adapted to couple to plural process and/or load lock chambers. A reduced number of substrate sensors are provided in the transfer chamber...
6855031 Slurry flow rate monitoring in chemical-mechanical polisher using pressure transducer  
In a first aspect of the invention, a polishing device is provided. The polishing device includes a platen adapted to support a polishing pad and also includes a source of polishing slurry. Also...
6836767 Pipelined hardware implementation of a neural network circuit  
In a first aspect, a pipelined hardware implementation of a neural network circuit includes an input stage, two or more processing stages and an output stage. Each processing stage includes one or...
6834353 Method and apparatus for reducing power consumption of a processing integrated circuit  
In a first aspect, a method is provided for conserving power in a processing integrated circuit. The method includes the steps of (1) calculating power consumption for executing an instruction and...
6822500 Methods and apparatus for operating master-slave latches  
A method for operating a master latch and a slave latch coupled to the master latch includes the steps of attempting to operate the master latch and the slave latch in a first mode in which (1)...
6822486 Multiplexer methods and apparatus  
In a first aspect, a method is provided for selecting a signal from a plurality of signals. The method includes the steps of (1) providing a plurality of multiplexers, each multiplexer configured...
6820298 Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint  
A brush mounting system for a wafer scrubbing device includes a brush mandrel and a mounting assembly on which the brush mandrel is mounted. The mounting assembly includes a mounting member...
6820174 Multi-processor computer system using partition group directories to maintain cache coherence  
In a multi-processor computer system, the processors are divided into broadcast groups and partition groups, with each processor belonging to exactly one broadcast group and exactly one partition...
6819304 Adjustable display device with display adjustment function and method therefor  
In a first aspect, an adjustable display device is provided which includes a plurality of display segments defining an adjustable size of a display device for displaying data, and a detection...
6817640 Four-bar linkage wafer clamping mechanism  
The wafer clamping mechanism comprises a linkage mechanism and a wafer contact point coupled to the linkage mechanism. The linkage mechanism includes a four-bar linkage having: a first link having...
6811516 Methods and apparatus for monitoring and encouraging health and fitness  
Methods and apparatus are provided for monitoring and encouraging health and fitness. In accordance with a first aspect, an apparatus is provided that is adapted to assist in weight loss and...
6809896 Power-efficient seek operations in hard disk drive  
An adaptive maximum seek velocity clipping technique is employed in a disk drive to reduce head movement power requirements. Separate maximum seek velocities are established for respective...
6804751 Method and apparatus for improving efficiency of operation of a hard disk drive by deferring command execution  
A command queue is maintained in a disk drive. The command queue includes a plurality of access commands that are awaiting execution. The command queue is sorted to provisionally select one of the...
6797074 Wafer edge cleaning method and apparatus  
A method and apparatus is provided for removing material from the edge of a disk. In one embodiment, the edge of the disk is contacted with etchant via an etchant containing swab or trough (which...
6793965 Clog resistant injection valve  
An injection valve is provided with vibration to dislodge residue therefrom and to thus avoid injection valve clogging. A wave generator which preferably generates an ultrasonic sine wave, is...
6791352 Method and apparatus for debugging a chip  
In a first aspect, an apparatus is provided that is adapted to multiplex debug signals of an integrated circuit. The apparatus includes at least a first multiplexing circuit and a second...
6786935 Vacuum processing system for producing components  
The present invention provides a vacuum processing system for creating processed substrates having a domed lid on at least the transfer chamber. The lid may be provided either convex to the...
6784096 Methods and apparatus for forming barrier layers in high aspect ratio vias  
In a first aspect, a method is provided that includes (1) forming a first barrier layer over the sidewalls and bottom of a via using atomic layer deposition within an atomic layer deposition (ALD)...
6776567 Valve/sensor assemblies  
In a first aspect, a valve/sensor assembly is provided that includes a door assembly. The door assembly has (1) a first position adapted to seal an opening of a chamber; (2) a second position...
6771440 Adaptive event-based predictive failure analysis measurements in a hard disk drive  
In a first aspect, a method of operating a disk drive includes detecting a trigger event during non-idle operation of the disk drive, and responding to the detected trigger event by performing a...
6767176 Lift pin actuating mechanism for semiconductor processing chamber  
A set of lift pins defines a storage location for a substrate in a substrate processing chamber. Each lift pin has an actuating mechanism including a translating mechanism that translates vertical...
6766405 Accelerated error detection in a bus bridge circuit  
A split operation such as a split read or a split write is handled by a bus bridge circuit. The bus bridge receives the read or write command from a requesting device, where the command includes a...
6746544 Apparatus for cleaning and drying substrates  
A method and apparatus for cleaning, rinsing and Marangoni drying substrates is provided. A line of fluid is sprayed along a substrate surface forming an air/fluid interface line, and a line of...
6745908 Shelf module adapted to store substrate carriers  
In a first aspect, a shelf module is adapted to store a plurality of substrate carriers. The shelf module includes (1) a plate; and (2) a plurality of shelves attached to the plate at respective...
6745288 Staggering call stack offsets for multiple duplicate control threads  
When a new control thread is initialized in a multi-thread software program, it is determined whether a like control thread has previously been instantiated. If so, a stack offset for the new...
6736408 Rotary vacuum-chuck with venturi formed at base of rotating shaft  
In a first aspect, a rotary vacuum-chuck is provided that may hold a substrate such as a silicon wafer for rotation. The vacuum-chuck includes a hollow rotary shaft and a chuck mounted on the...
6734020 Valve control system for atomic layer deposition chamber  
A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The...
6731122 Wafer test apparatus including optical elements and method of using the test apparatus  
Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An...
6728989 Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber  
A wafer scrubbing unit includes a mounting assembly for a scrubber brush. The mounting assembly has a rotary flow through tube through which cleaning liquid is delivered to the brush. A stationary...
6725869 Protective barrier for cleaning chamber  
A method and apparatus is provided that may protect a fragile component (such as a quartz plate) positioned within a megasonic tank from impact by falling objects. The megasonic tank may include a...
6709987 Method and apparatus for forming improved metal interconnects  
Methods of forming copper interconnects free from via-to-via leakage currents and having low resistances are disclosed. In a first aspect, a barrier layer is deposited on the first metal layer...
6698991 Fabrication system with extensible equipment sets  
A fabrication system is provided which includes a storage apparatus coupled perpendicularly to a branch transport aisle, and one or more environmentally controlled fabrication tools coupled...
6691719 Adjustable nozzle for wafer bevel cleaning  
A method and an apparatus is provided that may fix a point at which an etchant or a fluid sprayed from a nozzle impacts a substrate. By fixing a first angle measured between the inventive nozzle...
6671644 Using clock gating or signal gating to partition a device for fault isolation and diagnostic data collection  
In one aspect, an electronic device that has been partitioned into segments by using clock gating or signal gating is tested. One of the segments that is a source of a failure is identified....
6658763 Method for heating and cooling substrates  
A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating...
6654698 Systems and methods for calibrating integrated inspection tools  
Systems, methods and computer program products are provided for calibrating integrated the inspection tools of one or more processing tools. In a first aspect, a system is provided that includes...


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