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7225097 Methods and apparatus for memory calibration  
In a first aspect, a first method is provided for adjusting memory system calibration. The first method includes the steps of (1) while in a first operating state, calibrating the memory system...
7221993 Systems and methods for transferring small lot size substrate carriers between processing tools  
In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size...
7218983 Method and apparatus for integrating large and small lot electronic device fabrication facilities  
In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses...
7214349 Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases  
An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises a...
7213084 System and method for allocating memory allocation bandwidth by assigning fixed priority of access to DMA machines and programmable priority to processing unit  
In a first aspect, a first method is provided for allocating memory bandwidth. The first method includes the steps of (1) assigning a fixed priority of access to the memory bandwidth to one or...
7208047 Apparatus and method for thermally isolating a heat chamber  
An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient...
7201803 Valve control system for atomic layer deposition chamber  
A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The...
7201766 Methods and apparatus for light therapy  
In a first aspect, a therapy device is provided. The therapy device includes (1) a hyperbaric chamber adapted to expose at least a target tissue area of a patient to a hyperbaric environment; and...
7189191 Methods and apparatus for monitoring and encouraging health and fitness  
Methods and apparatus are provided for monitoring and encouraging health and fitness. In accordance with a first aspect, an apparatus is provided that is adapted to assist in weight loss and...
7187863 Identifying substreams in parallel/serial data link  
In a first aspect, a stream of data is transmitted by dividing the stream of data into a first substream and a second substream, transmitting the first substream in a first data channel, and...
7187684 Weighted fair queue having extended effective range  
A scheduler for a network processor includes a scheduling queue in which weighted fair queuing is applied to define a sequence in which flows are to be serviced. The scheduling queue includes at...
7177716 Methods and apparatus for material control system interface  
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots...
7168553 Dynamically balanced substrate carrier handler  
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
7165565 Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning  
In a first aspect, a first apparatus is provided. The first apparatus includes (1) a tank adapted to contain fluid; (2) at least one support component mounted in the tank and adapted to support a...
7156221 Break-away positioning conveyor mount for accommodating conveyor belt bends  
A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle...
7151981 Methods and apparatus for positioning a substrate relative to a support stage  
In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a...
7147424 Automatic door opener  
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer...
7138096 Method for decomposition oxidation of gaseous pollutants  
An apparatus is provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture and flame...
7135907 Clock signal distribution utilizing differential sinusoidal signal pair  
A differential sinusoidal signal pair is generated on an integrated circuit (IC). The differential sinusoidal signal pair is distributed to clock receiver circuits, which may be differential...
7131093 Methods and apparatus for creating a programmable link delay  
In a first aspect, a first method of creating a programmable link delay during cycle simulation of a system is provided. The first method includes the steps of (1) modeling a system for cycle...
7130270 Method and apparatus for varying bandwidth provided to virtual channels in a virtual path  
In a scheduler circuit for a network processor, bandwidth assigned to a virtual path is allocated among virtual channels associated with the virtual path. The allocation of bandwidth among the...
7104535 Methods and apparatus for positioning a substrate relative to a support stage  
An alignment device is provided that includes (1) a first pusher adapted to contact an edge of a substrate supported on a stage and to laterally translate along a first path; (2) a second pusher...
7091132 Ultrasonic assisted etch using corrosive liquids  
An ultrasonic etching apparatus for chemically-etching a workpiece is disclosed. The apparatus includes an outer tank at least partially filled with an aqueous solution, an inner tank at least...
7089387 Methods and apparatus for maintaining coherency in a multi-processor system  
In a first aspect, a method for maintaining control structure coherency is provided. The method includes the steps of (1) writing a pointer to a control structure in a hardware update list while...
7086638 Methods and apparatus for sealing an opening of a processing chamber  
In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a...
7080335 Methods for modeling latch transparency  
In a first aspect, a method is provided that includes the steps of (1) receiving a circuit design having a plurality of latches; and (2) allowing one or more latches of the circuit design to be...
7077264 Methods and apparatus for transporting substrate carriers  
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system...
7074000 Method and apparatus for undocking substrate pod with door status check  
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod....
7071757 Clock signal distribution utilizing differential sinusoidal signal pair  
A differential sinusoidal signal pair is generated on an integrated circuit (IC). The differential sinusoidal signal pair is distributed to clock receiver circuits, which may be differential...
7069557 Network processor which defines virtual paths without using logical path descriptors  
A virtual path feature in which several virtual channels share an assigned amount of bandwidth is implemented in a network processor. The network processor maintains a schedule indicative of...
7063749 Scrubber with sonic nozzle  
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a...
7063455 Chemical dilution system for semiconductor device processing system  
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution...
7063301 Facilities connection bucket for pre-facilitation of wafer fabrication equipment  
A facilities connection locator is provided for use with a support apparatus for supporting manufacturing equipment. The facilities connection locator comprises a fluid tight bucket having a...
7058839 Cached-counter arrangement in which off-chip counters are updated from on-chip counters  
In a first aspect, a counter is maintained in main memory, and a corresponding counter having a smaller number of bits is maintained in cache memory. The counter in cache memory is incremented and...
7045072 Cleaning process and apparatus for silicate materials  
A method for treating a surface of a quartz substrate includes preparing a substrate to provide a working surface having an initial roughness; and then ultrasonically acid-etching the working...
7032614 Facilities connection box for pre-facilitation of wafer fabrication equipment  
A facilities connection box is provided to accommodate pre-plumbing of facilities lines required in connection with an installation of semiconductor device manufacturing equipment. The facilities...
7018517 Transfer chamber for vacuum processing system  
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body...
7012440 Wafer test apparatus including optical elements and method of using the test apparatus  
Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An...
7007919 Slit valve method and apparatus  
An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve...
7001413 Methods and apparatus for light therapy  
In a first aspect, an apparatus for use in light therapy is provided that includes (1) at least one light emitting diode array adapted to emit a wavelength of light; and (2) a targeting mechanism...
6998579 Chamber for uniform substrate heating  
In a first aspect, a first apparatus is provided for heating substrates. The first apparatus includes (1) a chamber having a bottom portion and a top portion; (2) a plurality of heated supports...
6992316 Angled sensors for detecting substrates  
In a first aspect, an apparatus is provided for detecting substrates. The apparatus includes (1) a transmitter/receiver unit adapted to transmit a light beam through a substrate located within a...
6992012 Method and apparatus for forming improved metal interconnects  
Methods of forming copper interconnects free from via-to-via leakage currents and having low resistances are disclosed. In a first aspect, a barrier layer is deposited on the first metal layer...
6987761 Inbound data stream controller with pre-recognition of frame sequence  
A data communication controller processes incoming data frames. The controller includes a pre-processing block for receiving data frames and a frame processing unit coupled to the pre-processing...
6986185 Methods and apparatus for determining scrubber brush pressure  
In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The...
6974771 Methods and apparatus for forming barrier layers in high aspect ratio vias  
In a first aspect, a method is provided that includes (1) forming a first barrier layer over the sidewalls and bottom of a via using atomic layer deposition within an atomic layer deposition (ALD)...
6971049 Method and apparatus for detecting and isolating failures in equipment connected to a data bus  
In a first aspect, a computer system includes a storage adapter, a disk drive and a SCSI bus interconnecting the storage adapter and the disk drive. The storage adapter is connected to the SCSI...
6960263 Shadow frame with cross beam for semiconductor equipment  
A shadow frame and framing system for semiconductor fabrication equipment comprising a rectangular frame having four edges, the edges forming an interior lip with a top surface and an bottom...
6957749 Liquid delivery system  
In a first aspect, a liquid delivery system is provided that includes a first liquid delivery module adapted to store and dispense a first chemical and a second liquid delivery module adapted to...
6955517 Apparatus for storing and moving a cassette  
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a...


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