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7074000 |
Method and apparatus for undocking substrate pod with door status check
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod.... |
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7071757 |
Clock signal distribution utilizing differential sinusoidal signal pair
A differential sinusoidal signal pair is generated on an integrated circuit (IC). The differential sinusoidal signal pair is distributed to clock receiver circuits, which may be differential... |
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7069557 |
Network processor which defines virtual paths without using logical path descriptors
A virtual path feature in which several virtual channels share an assigned amount of bandwidth is implemented in a network processor. The network processor maintains a schedule indicative of... |
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7063749 |
Scrubber with sonic nozzle
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a... |
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7063455 |
Chemical dilution system for semiconductor device processing system
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution... |
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7063301 |
Facilities connection bucket for pre-facilitation of wafer fabrication equipment
A facilities connection locator is provided for use with a support apparatus for supporting manufacturing equipment. The facilities connection locator comprises a fluid tight bucket having a... |
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7058839 |
Cached-counter arrangement in which off-chip counters are updated from on-chip counters
In a first aspect, a counter is maintained in main memory, and a corresponding counter having a smaller number of bits is maintained in cache memory. The counter in cache memory is incremented and... |
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7045072 |
Cleaning process and apparatus for silicate materials
A method for treating a surface of a quartz substrate includes preparing a substrate to provide a working surface having an initial roughness; and then ultrasonically acid-etching the working... |
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7032614 |
Facilities connection box for pre-facilitation of wafer fabrication equipment
A facilities connection box is provided to accommodate pre-plumbing of facilities lines required in connection with an installation of semiconductor device manufacturing equipment. The facilities... |
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7018517 |
Transfer chamber for vacuum processing system
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body... |
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7012440 |
Wafer test apparatus including optical elements and method of using the test apparatus
Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An... |
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7007919 |
Slit valve method and apparatus
An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve... |
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7001413 |
Methods and apparatus for light therapy
In a first aspect, an apparatus for use in light therapy is provided that includes (1) at least one light emitting diode array adapted to emit a wavelength of light; and (2) a targeting mechanism... |
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6998579 |
Chamber for uniform substrate heating
In a first aspect, a first apparatus is provided for heating substrates. The first apparatus includes (1) a chamber having a bottom portion and a top portion; (2) a plurality of heated supports... |
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6992316 |
Angled sensors for detecting substrates
In a first aspect, an apparatus is provided for detecting substrates. The apparatus includes (1) a transmitter/receiver unit adapted to transmit a light beam through a substrate located within a... |
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6992012 |
Method and apparatus for forming improved metal interconnects
Methods of forming copper interconnects free from via-to-via leakage currents and having low resistances are disclosed. In a first aspect, a barrier layer is deposited on the first metal layer... |
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6987761 |
Inbound data stream controller with pre-recognition of frame sequence
A data communication controller processes incoming data frames. The controller includes a pre-processing block for receiving data frames and a frame processing unit coupled to the pre-processing... |
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6986185 |
Methods and apparatus for determining scrubber brush pressure
In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The... |
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6974771 |
Methods and apparatus for forming barrier layers in high aspect ratio vias
In a first aspect, a method is provided that includes (1) forming a first barrier layer over the sidewalls and bottom of a via using atomic layer deposition within an atomic layer deposition (ALD)... |
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6971049 |
Method and apparatus for detecting and isolating failures in equipment connected to a data bus
In a first aspect, a computer system includes a storage adapter, a disk drive and a SCSI bus interconnecting the storage adapter and the disk drive. The storage adapter is connected to the SCSI... |
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6960263 |
Shadow frame with cross beam for semiconductor equipment
A shadow frame and framing system for semiconductor fabrication equipment comprising a rectangular frame having four edges, the edges forming an interior lip with a top surface and an bottom... |
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6957749 |
Liquid delivery system
In a first aspect, a liquid delivery system is provided that includes a first liquid delivery module adapted to store and dispense a first chemical and a second liquid delivery module adapted to... |
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6955517 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a... |
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6955516 |
Single wafer dryer and drying methods
In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating... |
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6955197 |
Substrate carrier having door latching and substrate clamping mechanisms
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate... |
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6943122 |
Vacuum processing system for producing components
The present invention provides a vacuum processing system for creating processed substrates having a domed lid on at least the transfer chamber. The lid may be provided either convex to the... |
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6922765 |
Method of allocating physical memory space having pinned and non-pinned regions
In a physical memory space, a pinned memory region is defined at one end of the space and a non-pinned region is defined at the other end of the space. A free region is between the pinned and... |
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6922076 |
Scalable termination
In a first aspect, a first method is provided for providing multiple termination values using a plurality of binary termination signals. The first method includes the steps of (1) determining a... |
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6921494 |
Backside etching in a scrubber
A scrubber device is provided. The scrubber device may etch a backside of a wafer and may clean a frontside of the wafer simultaneously. The scrubber device may comprise a programmed controller... |
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6918864 |
Roller that avoids substrate slippage
A roller assembly is provided. The roller assembly comprises a groove that the includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove,... |
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6916397 |
Methods and apparatus for maintaining a pressure within an environmentally controlled chamber
In a first aspect, a system includes (1) a chamber; (2) a variable speed vacuum pump coupled to the chamber; and (3) a pressure controller coupled to the chamber. The pressure controller compares... |
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6914747 |
Disk drive having electrostatic discharge path defined between disk assembly and base
In a first aspect, a disk drive includes a base and a disk assembly, including at least one data storage disk, rotatably mounted on the base. The disk drive further includes structure for defining... |
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6905663 |
Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas
Apparatus and process for the abatement of fluorine and fluorine-containing compounds from gases containing same, such as effluent gas streams from semiconductor manufacturing operations, wherein... |
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6905107 |
Inflatable slit/gate valve
A sealable door assembly including a frontplate which faces an opening to be sealed, a backplate operatively coupled to the frontplate, and at least one inflatable member located between the... |
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6904637 |
Scrubber with sonic nozzle
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a... |
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6902682 |
Method and apparatus for electrostatically maintaining substrate flatness
An apparatus and method for holding a substrate on a support layer in a processing chamber. The method includes the steps of positioning the substrate a predetermined distance from the support... |
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6896763 |
Method and apparatus for monitoring a process by employing principal component analysis
A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process).... |
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6891419 |
Methods and apparatus for employing feedback body control in cross-coupled inverters
In a first aspect, a cross-coupled inverter is provided that includes a first inverter circuit having a first NFET coupled to a first PFET and a second inverter circuit having a second NFET... |
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6888402 |
Low voltage current reference circuits
A current reference circuit, for generating a reference current from a low voltage supply source, includes a first n-channel field effect transistor (NFET) having a gate and a drain that are... |
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6887786 |
Method and apparatus for forming a barrier layer on a substrate
A first method is provided for forming a barrier layer on a substrate by sputter-depositing a tantalum nitride layer on a substrate having (1) a metal feature formed on the substrate; (2) a... |
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6874067 |
Eliminating unnecessary data pre-fetches in a multiprocessor computer system
A multiprocessor computer system employs a number of levels of cache memories with each processor. A cache controller for a lower level cache memory receives a memory block pre-fetch request which... |
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6865937 |
Deionized water spray on loss of fluid processing tank exhaust
Methods and apparatus are provided for increasing the safety of a clogged or failed exhaust system. In accordance with a first embodiment, an apparatus is provided that includes (1) a tank adapted... |
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6865501 |
Using clock gating or signal gating to partition a device for fault isolation and diagnostic data collection
In one aspect, an electronic device that has been partitioned into segments by using clock gating or signal gating is tested. One of the segments that is a source of a failure is identified.... |
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6863077 |
Method and apparatus for enhanced chamber cleaning
A system for processing substrates within a chamber and for cleaning accumulated material from chamber components is provided. The system includes a reactive species generator adapted to generate... |
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6863019 |
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
A method of cleaning a semiconductor fabrication processing chamber involves recirculation of cleaning gas components. Consequently, input cleaning gas is utilized efficiently, and undesirable... |
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6857045 |
Method and system for updating data in a compressed read cache
In a first aspect, a method is provided for updating a compressed cache. The method includes the steps of (1) initiating an update routine for replacing first data stored within the cache with... |
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6856858 |
Shared sensors for detecting substrate position/presence
A transfer chamber of a semiconductor processing tool is adapted to couple to plural process and/or load lock chambers. A reduced number of substrate sensors are provided in the transfer chamber... |
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6855031 |
Slurry flow rate monitoring in chemical-mechanical polisher using pressure transducer
In a first aspect of the invention, a polishing device is provided. The polishing device includes a platen adapted to support a polishing pad and also includes a source of polishing slurry. Also... |
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6836767 |
Pipelined hardware implementation of a neural network circuit
In a first aspect, a pipelined hardware implementation of a neural network circuit includes an input stage, two or more processing stages and an output stage. Each processing stage includes one or... |
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6834353 |
Method and apparatus for reducing power consumption of a processing integrated circuit
In a first aspect, a method is provided for conserving power in a processing integrated circuit. The method includes the steps of (1) calculating power consumption for executing an instruction and... |