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7147424 |
Automatic door opener
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer... |
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7138096 |
Method for decomposition oxidation of gaseous pollutants
An apparatus is provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture and flame... |
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7135907 |
Clock signal distribution utilizing differential sinusoidal signal pair
A differential sinusoidal signal pair is generated on an integrated circuit (IC). The differential sinusoidal signal pair is distributed to clock receiver circuits, which may be differential... |
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7131093 |
Methods and apparatus for creating a programmable link delay
In a first aspect, a first method of creating a programmable link delay during cycle simulation of a system is provided. The first method includes the steps of (1) modeling a system for cycle... |
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7130270 |
Method and apparatus for varying bandwidth provided to virtual channels in a virtual path
In a scheduler circuit for a network processor, bandwidth assigned to a virtual path is allocated among virtual channels associated with the virtual path. The allocation of bandwidth among the... |
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7104535 |
Methods and apparatus for positioning a substrate relative to a support stage
An alignment device is provided that includes (1) a first pusher adapted to contact an edge of a substrate supported on a stage and to laterally translate along a first path; (2) a second pusher... |
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7091132 |
Ultrasonic assisted etch using corrosive liquids
An ultrasonic etching apparatus for chemically-etching a workpiece is disclosed. The apparatus includes an outer tank at least partially filled with an aqueous solution, an inner tank at least... |
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7089387 |
Methods and apparatus for maintaining coherency in a multi-processor system
In a first aspect, a method for maintaining control structure coherency is provided. The method includes the steps of (1) writing a pointer to a control structure in a hardware update list while... |
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7086638 |
Methods and apparatus for sealing an opening of a processing chamber
In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a... |
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7080335 |
Methods for modeling latch transparency
In a first aspect, a method is provided that includes the steps of (1) receiving a circuit design having a plurality of latches; and (2) allowing one or more latches of the circuit design to be... |
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7077264 |
Methods and apparatus for transporting substrate carriers
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system... |
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7074000 |
Method and apparatus for undocking substrate pod with door status check
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod.... |
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7071757 |
Clock signal distribution utilizing differential sinusoidal signal pair
A differential sinusoidal signal pair is generated on an integrated circuit (IC). The differential sinusoidal signal pair is distributed to clock receiver circuits, which may be differential... |
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7069557 |
Network processor which defines virtual paths without using logical path descriptors
A virtual path feature in which several virtual channels share an assigned amount of bandwidth is implemented in a network processor. The network processor maintains a schedule indicative of... |
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7063749 |
Scrubber with sonic nozzle
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a... |
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7063455 |
Chemical dilution system for semiconductor device processing system
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution... |
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7063301 |
Facilities connection bucket for pre-facilitation of wafer fabrication equipment
A facilities connection locator is provided for use with a support apparatus for supporting manufacturing equipment. The facilities connection locator comprises a fluid tight bucket having a... |
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7058839 |
Cached-counter arrangement in which off-chip counters are updated from on-chip counters
In a first aspect, a counter is maintained in main memory, and a corresponding counter having a smaller number of bits is maintained in cache memory. The counter in cache memory is incremented and... |
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7045072 |
Cleaning process and apparatus for silicate materials
A method for treating a surface of a quartz substrate includes preparing a substrate to provide a working surface having an initial roughness; and then ultrasonically acid-etching the working... |
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7032614 |
Facilities connection box for pre-facilitation of wafer fabrication equipment
A facilities connection box is provided to accommodate pre-plumbing of facilities lines required in connection with an installation of semiconductor device manufacturing equipment. The facilities... |
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7018517 |
Transfer chamber for vacuum processing system
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body... |
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7012440 |
Wafer test apparatus including optical elements and method of using the test apparatus
Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An... |
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7007919 |
Slit valve method and apparatus
An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve... |
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7001413 |
Methods and apparatus for light therapy
In a first aspect, an apparatus for use in light therapy is provided that includes (1) at least one light emitting diode array adapted to emit a wavelength of light; and (2) a targeting mechanism... |
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6998579 |
Chamber for uniform substrate heating
In a first aspect, a first apparatus is provided for heating substrates. The first apparatus includes (1) a chamber having a bottom portion and a top portion; (2) a plurality of heated supports... |
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6992316 |
Angled sensors for detecting substrates
In a first aspect, an apparatus is provided for detecting substrates. The apparatus includes (1) a transmitter/receiver unit adapted to transmit a light beam through a substrate located within a... |
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6992012 |
Method and apparatus for forming improved metal interconnects
Methods of forming copper interconnects free from via-to-via leakage currents and having low resistances are disclosed. In a first aspect, a barrier layer is deposited on the first metal layer... |
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6987761 |
Inbound data stream controller with pre-recognition of frame sequence
A data communication controller processes incoming data frames. The controller includes a pre-processing block for receiving data frames and a frame processing unit coupled to the pre-processing... |
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6986185 |
Methods and apparatus for determining scrubber brush pressure
In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The... |
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6974771 |
Methods and apparatus for forming barrier layers in high aspect ratio vias
In a first aspect, a method is provided that includes (1) forming a first barrier layer over the sidewalls and bottom of a via using atomic layer deposition within an atomic layer deposition (ALD)... |
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6971049 |
Method and apparatus for detecting and isolating failures in equipment connected to a data bus
In a first aspect, a computer system includes a storage adapter, a disk drive and a SCSI bus interconnecting the storage adapter and the disk drive. The storage adapter is connected to the SCSI... |
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6960263 |
Shadow frame with cross beam for semiconductor equipment
A shadow frame and framing system for semiconductor fabrication equipment comprising a rectangular frame having four edges, the edges forming an interior lip with a top surface and an bottom... |
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6957749 |
Liquid delivery system
In a first aspect, a liquid delivery system is provided that includes a first liquid delivery module adapted to store and dispense a first chemical and a second liquid delivery module adapted to... |
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6955517 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a... |
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6955516 |
Single wafer dryer and drying methods
In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating... |
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6955197 |
Substrate carrier having door latching and substrate clamping mechanisms
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate... |
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6943122 |
Vacuum processing system for producing components
The present invention provides a vacuum processing system for creating processed substrates having a domed lid on at least the transfer chamber. The lid may be provided either convex to the... |
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6922765 |
Method of allocating physical memory space having pinned and non-pinned regions
In a physical memory space, a pinned memory region is defined at one end of the space and a non-pinned region is defined at the other end of the space. A free region is between the pinned and... |
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6922076 |
Scalable termination
In a first aspect, a first method is provided for providing multiple termination values using a plurality of binary termination signals. The first method includes the steps of (1) determining a... |
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6921494 |
Backside etching in a scrubber
A scrubber device is provided. The scrubber device may etch a backside of a wafer and may clean a frontside of the wafer simultaneously. The scrubber device may comprise a programmed controller... |
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6918864 |
Roller that avoids substrate slippage
A roller assembly is provided. The roller assembly comprises a groove that the includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove,... |
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6916397 |
Methods and apparatus for maintaining a pressure within an environmentally controlled chamber
In a first aspect, a system includes (1) a chamber; (2) a variable speed vacuum pump coupled to the chamber; and (3) a pressure controller coupled to the chamber. The pressure controller compares... |
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6914747 |
Disk drive having electrostatic discharge path defined between disk assembly and base
In a first aspect, a disk drive includes a base and a disk assembly, including at least one data storage disk, rotatably mounted on the base. The disk drive further includes structure for defining... |
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6905663 |
Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas
Apparatus and process for the abatement of fluorine and fluorine-containing compounds from gases containing same, such as effluent gas streams from semiconductor manufacturing operations, wherein... |
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6905107 |
Inflatable slit/gate valve
A sealable door assembly including a frontplate which faces an opening to be sealed, a backplate operatively coupled to the frontplate, and at least one inflatable member located between the... |
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6904637 |
Scrubber with sonic nozzle
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a... |
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6902682 |
Method and apparatus for electrostatically maintaining substrate flatness
An apparatus and method for holding a substrate on a support layer in a processing chamber. The method includes the steps of positioning the substrate a predetermined distance from the support... |
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6896763 |
Method and apparatus for monitoring a process by employing principal component analysis
A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process).... |
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6891419 |
Methods and apparatus for employing feedback body control in cross-coupled inverters
In a first aspect, a cross-coupled inverter is provided that includes a first inverter circuit having a first NFET coupled to a first PFET and a second inverter circuit having a second NFET... |
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6888402 |
Low voltage current reference circuits
A current reference circuit, for generating a reference current from a low voltage supply source, includes a first n-channel field effect transistor (NFET) having a gate and a drain that are... |