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7256132 |
Substrate centering apparatus and method
A semiconductor substrate centering mechanism includes a plurality of substrate support pins, each pin having a top surface. The top surfaces of the pins define a plane in which the substrate is... |
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7252098 |
Apparatus for cleaning and drying substrates
A method and apparatus for cleaning, rinsing and Marangoni drying substrates is provided. A line of fluid is sprayed along a substrate surface forming an air/fluid interface line, and a line of... |
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7251185 |
Methods and apparatus for using memory
In an aspect, a method is provided for using memory. The method includes the steps of (1) employing memory stacking, memory mirroring and memory interleaving in a total memory to reduce a number... |
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7250778 |
Wafer test apparatus including optical elements and method of using the test apparatus
Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An... |
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7243003 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station... |
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7239559 |
Methods and apparatus for accessing memory
In a first aspect, a first method is provided for accessing memory. The first method includes the steps of (1) storing a bit in a cell included in a memory having a plurality of cells arranged... |
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7234908 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a... |
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7234584 |
System for transporting substrate carriers
In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor.... |
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7230702 |
Monitoring of smart pin transition timing
A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling... |
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7229504 |
Methods and apparatus for determining scrubber brush pressure
In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The... |
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7226514 |
Spin-rinse-dryer
An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer.... |
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7225419 |
Methods for modeling latch transparency
In a first aspect, a method is provided that includes the steps of (1) receiving a circuit design having a plurality of latches; and (2) allowing one or more latches of the circuit design to be... |
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7225097 |
Methods and apparatus for memory calibration
In a first aspect, a first method is provided for adjusting memory system calibration. The first method includes the steps of (1) while in a first operating state, calibrating the memory system... |
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7221993 |
Systems and methods for transferring small lot size substrate carriers between processing tools
In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size... |
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7218983 |
Method and apparatus for integrating large and small lot electronic device fabrication facilities
In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses... |
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7214349 |
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises a... |
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7213084 |
System and method for allocating memory allocation bandwidth by assigning fixed priority of access to DMA machines and programmable priority to processing unit
In a first aspect, a first method is provided for allocating memory bandwidth. The first method includes the steps of (1) assigning a fixed priority of access to the memory bandwidth to one or... |
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7208047 |
Apparatus and method for thermally isolating a heat chamber
An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient... |
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7201803 |
Valve control system for atomic layer deposition chamber
A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The... |
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7201766 |
Methods and apparatus for light therapy
In a first aspect, a therapy device is provided. The therapy device includes (1) a hyperbaric chamber adapted to expose at least a target tissue area of a patient to a hyperbaric environment; and... |
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7189191 |
Methods and apparatus for monitoring and encouraging health and fitness
Methods and apparatus are provided for monitoring and encouraging health and fitness. In accordance with a first aspect, an apparatus is provided that is adapted to assist in weight loss and... |
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7187863 |
Identifying substreams in parallel/serial data link
In a first aspect, a stream of data is transmitted by dividing the stream of data into a first substream and a second substream, transmitting the first substream in a first data channel, and... |
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7187684 |
Weighted fair queue having extended effective range
A scheduler for a network processor includes a scheduling queue in which weighted fair queuing is applied to define a sequence in which flows are to be serviced. The scheduling queue includes at... |
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7177716 |
Methods and apparatus for material control system interface
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots... |
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7168553 |
Dynamically balanced substrate carrier handler
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station... |
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7165565 |
Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning
In a first aspect, a first apparatus is provided. The first apparatus includes (1) a tank adapted to contain fluid; (2) at least one support component mounted in the tank and adapted to support a... |
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7156221 |
Break-away positioning conveyor mount for accommodating conveyor belt bends
A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle... |
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7151981 |
Methods and apparatus for positioning a substrate relative to a support stage
In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a... |
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7147424 |
Automatic door opener
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer... |
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7138096 |
Method for decomposition oxidation of gaseous pollutants
An apparatus is provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture and flame... |
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7135907 |
Clock signal distribution utilizing differential sinusoidal signal pair
A differential sinusoidal signal pair is generated on an integrated circuit (IC). The differential sinusoidal signal pair is distributed to clock receiver circuits, which may be differential... |
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7131093 |
Methods and apparatus for creating a programmable link delay
In a first aspect, a first method of creating a programmable link delay during cycle simulation of a system is provided. The first method includes the steps of (1) modeling a system for cycle... |
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7130270 |
Method and apparatus for varying bandwidth provided to virtual channels in a virtual path
In a scheduler circuit for a network processor, bandwidth assigned to a virtual path is allocated among virtual channels associated with the virtual path. The allocation of bandwidth among the... |
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7104535 |
Methods and apparatus for positioning a substrate relative to a support stage
An alignment device is provided that includes (1) a first pusher adapted to contact an edge of a substrate supported on a stage and to laterally translate along a first path; (2) a second pusher... |
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7091132 |
Ultrasonic assisted etch using corrosive liquids
An ultrasonic etching apparatus for chemically-etching a workpiece is disclosed. The apparatus includes an outer tank at least partially filled with an aqueous solution, an inner tank at least... |
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7089387 |
Methods and apparatus for maintaining coherency in a multi-processor system
In a first aspect, a method for maintaining control structure coherency is provided. The method includes the steps of (1) writing a pointer to a control structure in a hardware update list while... |
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7086638 |
Methods and apparatus for sealing an opening of a processing chamber
In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a... |
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7080335 |
Methods for modeling latch transparency
In a first aspect, a method is provided that includes the steps of (1) receiving a circuit design having a plurality of latches; and (2) allowing one or more latches of the circuit design to be... |
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7077264 |
Methods and apparatus for transporting substrate carriers
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system... |
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7074000 |
Method and apparatus for undocking substrate pod with door status check
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod.... |
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7071757 |
Clock signal distribution utilizing differential sinusoidal signal pair
A differential sinusoidal signal pair is generated on an integrated circuit (IC). The differential sinusoidal signal pair is distributed to clock receiver circuits, which may be differential... |
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7069557 |
Network processor which defines virtual paths without using logical path descriptors
A virtual path feature in which several virtual channels share an assigned amount of bandwidth is implemented in a network processor. The network processor maintains a schedule indicative of... |
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7063749 |
Scrubber with sonic nozzle
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a... |
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7063455 |
Chemical dilution system for semiconductor device processing system
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution... |
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7063301 |
Facilities connection bucket for pre-facilitation of wafer fabrication equipment
A facilities connection locator is provided for use with a support apparatus for supporting manufacturing equipment. The facilities connection locator comprises a fluid tight bucket having a... |
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7058839 |
Cached-counter arrangement in which off-chip counters are updated from on-chip counters
In a first aspect, a counter is maintained in main memory, and a corresponding counter having a smaller number of bits is maintained in cache memory. The counter in cache memory is incremented and... |
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7045072 |
Cleaning process and apparatus for silicate materials
A method for treating a surface of a quartz substrate includes preparing a substrate to provide a working surface having an initial roughness; and then ultrasonically acid-etching the working... |
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7032614 |
Facilities connection box for pre-facilitation of wafer fabrication equipment
A facilities connection box is provided to accommodate pre-plumbing of facilities lines required in connection with an installation of semiconductor device manufacturing equipment. The facilities... |
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7018517 |
Transfer chamber for vacuum processing system
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body... |
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7012440 |
Wafer test apparatus including optical elements and method of using the test apparatus
Wafer-level testing is performed on an electronic device to be used in an optical communications system. An optical test signal is generated and is provided to a first photo detector. An... |