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7422985 Method for reducing dielectric overetch using a dielectric etch stop at a planar surface  
A substantially planar surface coexposes conductive or semiconductor features and a dielectric etch stop material. In a preferred embodiment, the conductive or semiconductor features are pillars...
7418978 Methods and apparatus for providing fluid to a semiconductor device processing apparatus  
In a first aspect, a valve assembly is provided that includes a valve assembly output adapted to output at least one of DI water and a chemical. A first valve of the valve assembly includes (1) a...
7418637 Methods and apparatus for testing integrated circuits  
In some aspects a method is provided for testing an integrated circuit (IC). The method includes the steps of selecting a bit from each of a plurality of memory arrays formed on an IC chip,...
7413945 Electrically isolated pillars in active devices  
A method of forming an active device is provided. The method includes performing a first patterning operation on a first plurality of layers. This first patterning operation defines a first...
7413272 Methods and apparatus for precision control of print head assemblies  
The present invention provides methods and apparatus for controlling the quantity of fluid output (e.g., drop size) by individual nozzles of a print head to a very high precision at a frequency...
7413069 Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility  
In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate...
7411956 Methods and apparatus for routing packets  
In a first aspect, a first method is provided that includes the steps of (1) providing a pointer that includes a first keytype field and a second keytype field; and (2) assigning a value to the...
7409263 Methods and apparatus for repositioning support for a substrate carrier  
In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate...
7407081 Methods and apparatus for transferring conductive pieces during semiconductor device fabrication  
In a first aspect, a programmable transfer device is provided for transferring conductive pieces to electrode pads of a target substrate. The programmable transfer device includes (1) a transfer...
7405465 Deposited semiconductor structure to minimize n-type dopant diffusion and method of making  
In deposited silicon, n-type dopants such as phosphorus and arsenic tend to seek the surface of the silicon, rising as the layer is deposited. When a second undoped or p-doped silicon layer is...
7393730 Coplanar silicon-on-insulator (SOI) regions of different crystal orientations and methods of making the same  
In a first aspect, a first method is provided for semiconductor device manufacturing. The first method includes the steps of (1) providing a substrate; and (2) forming a first silicon-on-insulator...
7377991 Ultrasonic assisted etch using corrosive liquids  
An ultrasonic etching apparatus for chemically-etching a workpiece is disclosed. The apparatus includes an outer tank at least partially filled with an aqueous solution, an inner tank at least...
7377002 Scrubber box  
A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the...
7372250 Methods and apparatus for determining a position of a substrate relative to a support stage  
A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a...
7370133 Storage controller and methods for using the same  
In a first aspect, a first method is provided for processing a request. The first method includes the steps of (1) receiving a request in first logic of a controller from a device master; (2)...
7368787 Fin field effect transistors (FinFETs) and methods for making the same  
In a first aspect, a first method is provided for semiconductor device manufacturing. The first method includes the steps of (1) forming a first side of a fin of a fin field effect transistor...
7367446 Methods and apparatus for transporting substrate carriers  
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system...
7367342 Wound management systems and methods for using the same  
In one aspect, a wound management system is provided. The wound management system includes a multi-lumen cannula adapted to be disposed in a wound site. The multi-lumen cannula includes (1) a...
7364603 Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream  
An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a...
7364349 Chemical dilution system for semiconductor device processing system  
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution...
7360981 Datum plate for use in installations of substrate handling systems  
A datum plate is provided for use in installations of substrate handling systems. The datum plate has a set of predetermined attachment locations adapted to couple the datum plate to a chamber; a...
7359767 Substrate carrier handler that unloads substrate carriers directly from a moving conveyor  
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
7358823 Programmable capacitors and methods of using the same  
In a first aspect, a first method of adjusting capacitance of a semiconductor device is provided. The first method includes the steps of (1) providing a transistor including a dielectric material...
7346713 Methods and apparatus for servicing commands through a memory controller port  
In a first aspect, a first method is provided for servicing commands. The first method includes the steps of (1) receiving a first command for servicing in a memory controller including a...
7346431 Substrate carrier handler that unloads substrate carriers directly from a moving conveyer  
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
7330479 Shared transmit buffer for network processor and methods for using same  
In a first aspect, a first method is provided for controlling the flow of data between a first and second clock domain. The first method includes the steps of (1) selecting one of a plurality of...
7328887 Self-indexing spacer for air spring assembly  
An air spring spacer for use in mounting an associated air spring in spaced relation to an associated vehicle component. The air spring spacer includes a spacer body, a first indexing feature, and...
7325794 Air spring assembly and method  
An air spring assembly including a first end member that includes a side wall, and a second end member spaced from the first end member. A flexible sleeve includes a sleeve wall and opposing open...
7324913 Methods and apparatus for testing a link between chips  
In a first aspect, a first method of testing a link between a first chip and a second chip is provided. The first method includes the steps of, while operating in a test mode, (1) transmitting...
7323042 Abatement system targeting a by-pass effluent stream of a semiconductor process tool  
An apparatus and method for abating toxic and/or hazardous gas species in a diluent gas stream line deriving from a by-pass line of a semiconductor process tool, comprising contacting the diluent...
7319920 Method and apparatus for self-calibration of a substrate handling robot  
A substrate-handling robot which serves a processing tool such as a plating tool may be automatically controlled by a controller to perform a self-calibration procedure. As part of the procedure,...
7319729 Asynchronous interface methods and apparatus  
In a first aspect of the invention, a first method is provided for aligning signals from a first receiver located in a first clock domain to a second receiver located in a second clock domain. The...
7317683 Weighted fair queue serving plural output ports  
A data communication apparatus includes a plurality of output ports and a scheduler for assigning priorities for outbound data frames. The scheduler includes one or more scheduling queues. Each...
7313744 Methods and apparatus for testing a scan chain to isolate defects  
Systems, methods and apparatus are provided for isolating a defect in a scan chain. The invention includes modifying a first test mode of a plurality of latches included in a scan chain, operating...
7310345 Empty indicators for weighted fair queues  
A scheduler for a network processor includes one or more scheduling queues. Each scheduling queue defines a respective sequence in which flows are to be serviced. A respective empty indicator is...
7304888 Reverse-bias method for writing memory cells in a memory array  
A memory array having memory cells each comprising a diode and a phase change material or antifuse is reliably programmed by maintaining all word lines and bit lines connected to unselected memory...
7299831 Substrate carrier having door latching and substrate clamping mechanisms  
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate...
7293642 Methods and apparatus for transporting substrate carriers  
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system...
7290185 Methods and apparatus for reducing memory errors  
In a first aspect, a first method is provided for reducing memory errors. The first method includes the steps of (1) detecting at least one error in data output from a first physical memory unit...
7289659 Method and apparatus for manufacturing diamond shaped chips  
In a first aspect, an inventive apparatus for imaging a chip on a wafer includes a combined diamond chip image and kerf image having a plurality of sloped sides. The combined diamond chip image...
7289370 Methods and apparatus for accessing memory  
In a first aspect, a first method is provided for accessing memory. The first method includes the steps of (1) storing a bit in a cell included in a memory having a plurality of cells arranged...
7288165 Pad conditioning head for CMP process  
In a first aspect, a first apparatus is provided for a chemical mechanical polishing (CMP) process. The first apparatus includes (1) a rotatable member; (2) an end effector adapted to receive and...
7285464 Nonvolatile memory cell comprising a reduced height vertical diode  
A nonvolatile memory cell according to the present invention comprises a bottom conductor, a semiconductor pillar, and a top conductor. The semiconductor pillar comprises a junction diode,...
7280474 Weighted fair queue having adjustable scaling factor  
A scheduler for a network processor includes a scheduling queue in which weighted fair queuing is applied. The scheduling queue has a range R. Flows are attached to the scheduling queue at a...
7274971 Methods and apparatus for electronic device manufacturing system monitoring and control  
In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to...
7265696 Methods and apparatus for testing an integrated circuit  
In a first aspect, a method of testing an analog circuit is provided. The method includes (1) providing the analog circuit with a screening circuit adapted to cause the analog circuit to function...
7265049 Ultrathin chemically grown oxide film as a dopant diffusion barrier in semiconductor devices  
The invention is a chemically grown oxide layer which prevents dopant diffusion between semiconductor layers. The chemically grown oxide layer may be so thin that it does not form a barrier to...
7260765 Methods and apparatus for dynamically reconfigurable parallel data error checking  
In a first aspect, a first method is provided. The first method includes the steps of (1) transmitting data on a bus, wherein data is presented on the bus using varying widths; (2) configuring a...
7258520 Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing  
A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate...
7257124 Method and apparatus for improving the fairness of new attaches to a weighted fair queue in a quality of service (QoS) scheduler  
In a first aspect, a network processor includes a scheduler in which a scheduling queue is maintained. A last frame is dispatched from a flow queue maintained in the network processor, thereby...


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