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7611217 Methods and systems for inkjet drop positioning  
Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on...
7607881 ***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Compact apparatus and method for storing and loading semiconductor wafer carriers
 
An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated...
7607667 Method and system for aligning a stationary vehicle with an artificial horizon  
A method of positioning a vehicle chassis of a stationary vehicle in approximate alignment with a predetermined datum is provided. The vehicle has an axle and a fluid suspension system. The fluid...
7603196 Methods and apparatus for material control system interface  
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots...
7603195 Methods and apparatus for integrating large and small lot electronic device fabrication facilities  
In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses...
7598178 Carbon precursors for use during silicon epitaxial film formation  
The present invention provides systems and methods of forming an epitaxial film on a substrate. After heating in a process chamber, the substrate is exposed to a silicon source and at least one of...
7597183 Kinematic pin with shear member and substrate carrier for use therewith  
A kinematic pin and a substrate carrier adapted to deter dislodgment of the substrate carrier from the kinematic pin are provided. A shear member on the kinematic pin interacts with a shear...
7594789 Overhead transfer flange and support for suspending a substrate carrier  
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body...
7588980 Methods of controlling morphology during epitaxial layer formation  
A first aspect of the invention provides a method of selectively forming an epitaxial layer on a substrate. The method includes heating the substrate to a temperature of less than about 800° C....
7587812 Electronic device manufacturing component with an embedded chip and methods of using the same  
Systems, methods, and apparatus are provided for including a chip embedded in components of electronic device manufacturing systems adapted to sense, store, and/or update at least one of...
7586773 Large array of upward pointing p-i-n diodes having large and uniform current  
An upward-pointing p-i-n diode formed of deposited silicon, germanium, or silicon-germanium is disclosed. The diode has a bottom heavily doped p-type region, a middle intrinsic or lightly doped...
7578647 Load port configurations for small lot size substrate carriers  
In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier...
7577487 Methods and apparatus for a band to band transfer module  
A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate...
7570130 Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber  
In certain embodiments, an apparatus for providing a fixed impedance transformation network for driving a plasma chamber includes a pre-match network adapted to couple between an Active RF match...
7569434 PFETs and methods of manufacturing the same  
In a first aspect, a first method of manufacturing a PFET on a substrate is provided. The first method includes the steps of (1) forming a gate channel region of the PFET having a first thickness...
7569193 Apparatus and method for controlled combustion of gaseous pollutants  
The present invention relates to systems and methods for controlled combustion of gaseous pollutants while reducing and removing deposition of unwanted reaction products from within the treatment...
7566629 Patterned silicon-on-insulator layers and methods for forming the same  
In an aspect, a method is provided for forming a silicon-on-insulator (SOI) layer. The method includes the steps of (1) providing a silicon substrate; (2) selectively implanting the silicon...
7562267 Methods and apparatus for testing a memory  
In a first aspect, a first method is provided that includes the steps of (1) transmitting a first signal representative of a test operation from a test circuit to a memory via a first signal path;...
7561482 Defective block isolation in a non-volatile memory system  
A method and apparatus provide an improved identification and isolation of defective blocks in non-volatile memory devices having a plurality of user accessible blocks of non-volatile storage...
7560339 Nonvolatile memory cell comprising a reduced height vertical diode  
A nonvolatile memory cell according to the present invention comprises a bottom conductor, a semiconductor pillar, and a top conductor. The semiconductor pillar comprises a junction diode,...
7557405 High-density nonvolatile memory  
An improved nonvolatile memory cell made by a method for fabricating a three dimensional monolithic memory with increased density. The memory cell includes at least a part of a first conductor, a...
7556334 Methods and apparatus for aligning print heads  
In a first aspect, a system is provided. The system includes (1) a stage adapted to move a substrate relative to print heads during printing; (2) at least one print head suspended from a support...
7553611 Masking of repeated overlay and alignment marks to allow reuse of photomasks in a vertical structure  
In formation of monolithic three dimensional memory arrays, a photomask may be used more than once. Reuse of a photomask creates second, third or more instances of reference marks used by the...
7552816 Break-away positioning conveyor mount for accommodating conveyor belt bends  
A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle...
7552269 Synchronizing a plurality of processors  
In a first aspect, a first method of synchronizing a plurality of processors of a system is provided. The first method includes the steps of (1) modifying a peripheral component interconnect...
7548542 Methods and apparatus for transferring data  
In a first aspect, a method is provided for transferring data. The method includes the steps of (1) receiving information about a location and type of a data source and a location and type of a...
7547644 Methods and apparatus for forming barrier layers in high aspect ratio vias  
In a first aspect, a method is provided that includes (1) forming a first barrier layer over the sidewalls and bottom of a via using atomic layer deposition within an atomic layer deposition (ALD)...
D593317 Health management supply organizer  
7540371 Break-away positioning conveyor mount for accommodating conveyor belt bends  
A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle...
7537108 Methods and apparatus for transporting substrate carriers  
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system...
D592601 Inkjet printer cable  
7532952 Methods and apparatus for pressure control in electronic device manufacturing systems  
In one aspect, improved methods and apparatus for pressure control in an electronic device manufacturing system are provided. The method includes acquiring information related to a current state...
7531423 Reduced-resistance finFETs by sidewall silicidation and methods of manufacturing the same  
In a first aspect, a first method of manufacturing a finFET is provided. The first method includes the steps of (1) providing a substrate; and (2) forming at least one source/drain diffusion...
7527141 System for transporting substrate carriers  
In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor....
7525121 Coplanar silicon-on-insulator (SOI) regions of different crystal orientations and methods of making the same  
In a first aspect, a first method is provided for semiconductor device manufacturing. The first method includes the steps of (1) providing a substrate; and (2) forming a first silicon-on-insulator...
7522974 Interface for operating and monitoring abatement systems  
Method and systems are provided for monitoring and controlling one or more abatement systems. One or more abatement systems may be represented on a display alone with one or more effluent flows...
7522969 Methods and apparatus for material control system interface  
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots...
7521353 Method for reducing dielectric overetch when making contact to conductive features  
In a first preferred embodiment of the present invention, conductive features are formed on a first dielectric etch stop layer, and a second dielectric material is deposited over and between the...
7519752 Apparatus for using information and a count in reissuing commands requiring access to a bus and methods of using the same  
In a first aspect, a first method of reissuing a command involving bus access is provided. The first method includes the steps of (1) storing information associated with commands that are to be...
7518466 Methods and apparatus for symmetrical and/or concentric radio frequency matching networks  
Apparatus and methods are provided that are adapted to match the impedance of an electrical load to an impedance of an electrical signal generator. The invention includes providing a plurality of...
7517796 Method for patterning submicron pillars  
The present invention provides for a method to pattern and etch very small dimension pillars, for example in a memory array. When dimensions of pillars become very small, the photoresist pillars...
7513062 Single wafer dryer and drying methods  
In a first aspect, a first method of drying a substrate is provided. The first method includes the steps of (1) lifting a substrate through an air/fluid interface at a first rate; (2) directing a...
7507296 Methods and apparatus for determining scrubber brush pressure  
In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The...
7506752 Methods and apparatus for transporting substrate carriers  
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system...
7506747 Break-away positioning conveyor mount for accommodating conveyor belt bends  
A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle...
7506746 System for transporting substrate carriers  
In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor....
7506282 Apparatus and methods for predicting and/or calibrating memory yields  
An apparatus and methods for predicting and/or for calibrating memory yields due to process defects and/or device variations, including determining a model of a memory cell, identifying a subset...
7503448 Break-away positioning conveyor mount for accommodating conveyor belt bends  
A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle...
7501161 Methods and apparatus for reducing arcing during plasma processing  
In a first aspect, a method is provided for use during plasma processing. The first method includes the steps of (1) placing a substrate on a substrate holder of a plasma chamber; (2) positioning...
7499767 Methods and apparatus for positioning a substrate relative to a support stage  
In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a...


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