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7372565 |
Spectrometer measurement of diffracting structures
A normal incidence reflectometer includes a rotatable analyzer/polarizer for measurement of a diffracting structure. Relative rotation of the analyzer/polarizer with respect to the diffracting...
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7362425 |
Wide spatial frequency topography and roughness measurement
In one embodiment, a system to inspect a surface comprises an assembly to direct a first radiation beam onto a surface in a first plane of incidence, a first detector to generate a first signal...
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7271892 |
Method and apparatus for inspecting defects
Though it is necessary to enhance sensitivity in detecting defects as design rules grow finer, the resolution of a conventional optical system is not sufficient to cope with it. In order to...
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7190383 |
Misalignment detector and image forming apparatus
A misalignment detector includes a light source, a synthesizing unit, a focusing unit, an image sensor, and a misalignment calculator. The light source, the synthesizing unit, the focusing unit,...
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7146035 |
Pattern image comparison method, pattern image comparison device, and program
A pattern image comparison method is provided which comprises a first input step of inputting a first pattern image based on design data for a reticle mask or a semiconductor device; a second input...
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7142708 |
Defect detection method and its apparatus
An object of the present invention is to provide a defect detection method and its apparatus which can adjust sensitivity easily by managing both reduction in the number of false reports and...
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7115858 |
Apparatus and method for the measurement of diffracting structures
A normal incidence reflectometer includes a rotatable analyzer/polarizer, which permits measurement of a diffracting structure. Relative rotation of the analyzer/polarizer with respect to the...
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EP1615062A2 |
Microscopic imaging system and procedure for the emulation of a high aperture imaging system, in particular for mask inspection
A microscope imaging system for emulating high-aperture-type imaging systems has an imaging lens (2), a detector and an evaluating device. A beam splitter (3) with effective polarization fits...
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