Matches 1 - 2 out of 2
Match Document Document Title
7369913 Recipe editor and controller  
Apparatus and methods for automating a sequence of basic chemistry operations through a recipe. Software running on a workstation communicating with a controller allows an operator to operate the...
7292906 Formula-based run-to-run control  
A processing method of processing a substrate is presented that includes: receiving pre-process data, wherein the pre-process data comprises a desired process result and actual measured data for...
Matches 1 - 2 out of 2