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7383929 |
Anti-vibration technique
An anti-vibration apparatus includes a first magnet unit arranged on a support target and including a first permanent magnet, and a second magnet unit including a pair of second permanent magnets....
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7367117 |
Electronic component mounting apparatus and electronic component mounting method
The invention prevents mismounting of an electronic component caused by missetting of a component feeding unit in an apparatus. A recognition process of an electronic component is performed...
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6924492 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Pre-cleaning or in situ cleaning of optical components for use in a lithographic projection apparatus can be carried out by irradiating the optical component with microwave and/or infra-red...
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6897939 |
Exposure apparatus
An exposure apparatus for exposing a substrate in a vacuum atmosphere includes vibration absorbing mounts that are disposed in a vacuum chamber in order to make it possible to support at least one...
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6824277 |
Optical beam guidance system and method for preventing contamination of optical components contained therein
A method for reducing the contamination of at least one optical component ( 2, 3 ) contained in the beam guidance space ( 6 ) and held by a frame ( 4, 5 ) defining the beam guidance space and a...
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6740893 |
Optical instrument, and device manufacturing method
An optical instrument includes an optical element and a detector for detecting an impurity concentration in an ambience containing a space surrounding the optical element. By controlling the...
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6725557 |
Thickness measuring apparatus and method
A measuring system including a linear gauge 8 is placed on a vibration isolation table 7 , and this system assembly is placed in a temperature controllable, constant-temperature chamber. A...
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6724000 |
Reaction frame apparatus and method
A reaction frame having a first reaction frame portion and a second reaction frame portion receives reaction forces from a stage. First reaction frame portion is coupled to ground by a ground rod...
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6649859 |
Electron beam irradiation system and electron beam irradiation method
In a partial-vacuum-type, electron-beam irradiation system having a construction such that a static-pressure floating pad is connected to a vacuum chamber incorporating an electron-beam column, and...
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6639661 |
Technique for imaging electrical contacts
A congruence between the element that provides an electrical conductive path in a component of micron dimensions and an imaging of that element provides a basis for predicting the effectiveness and...
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