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7427819 |
Film-bulk acoustic wave resonator with motion plate and method
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an...
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7425787 |
Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and an...
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7424772 |
Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
The band-pass filter has a stacked pair of film bulk acoustic resonators (FBARs) and an acoustic decoupler between the FBARs. Each of the FBARs has opposed planar electrodes and a layer of...
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7423503 |
Acoustic galvanic isolator incorporating film acoustically-coupled transformer
Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and, connected between...
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7408428 |
Temperature-compensated film bulk acoustic resonator (FBAR) devices
The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack. The FBAR stack comprises an FBAR and a temperature-compensating element. The FBAR is characterized by...
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7400217 |
Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith
The band-pass filter has an upper film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic...
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7391286 |
Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters
A film acoustically-coupled transformer (FACT) has a first and a second stacked bulk acoustic resonator (SBAR 1 , SBAR 2 ). Each SBAR has a stacked pair of film bulk acoustic resonators (FBARs)...
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7391285 |
Film acoustically-coupled transformer
One embodiment of the film acoustically-coupled transformer (FACT) includes a decoupled stacked bulk acoustic resonator (DSBAR) having a lower film bulk acoustic resonator (FBAR) an upper FBAR...
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7388455 |
Film acoustically-coupled transformer with increased common mode rejection
The film acoustically-coupled transformer (FACT) has a first and second decoupled stacked bulk acoustic resonators (DSBARs). Each DSBAR has a lower film bulk acoustic resonator (FBAR), an upper...
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7388454 |
Acoustic resonator performance enhancement using alternating frame structure
Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is...
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7380320 |
Piezoelectric device and method of manufacturing the device
A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode...
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7369013 |
Acoustic resonator performance enhancement using filled recessed region
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the...
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7367095 |
Method of making an acoustically coupled transformer
Embodiments of an acoustically-coupled transformer have a first stacked bulk acoustic resonator (SBAR) and a second SBAR. Each of the SBARs has a lower film bulk acoustic resonator (FBAR) and an...
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7362198 |
Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
The decoupled stacked bulk acoustic resonator (DSBAR) device has a lower film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and an acoustic decoupler between the FBARs....
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7358831 |
Film bulk acoustic resonator (FBAR) devices with simplified packaging
The encapsulated film bulk acoustic resonator (FBAR) device comprises a substrate, an FBAR stack over the substrate, an element for acoustically isolating the FBAR stack from the substrate,...
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7332985 |
Cavity-less film bulk acoustic resonator (FBAR) devices
The film bulk acoustic resonator (FBAR) device comprises a substrate, an acoustic Bragg reflector over the substrate, a piezoelectric element over the acoustic Bragg reflector, and a remote-side...
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7276994 |
Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the...
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7212084 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST*** Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the...
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7202560 |
Wafer bonding of micro-electro mechanical systems to active circuitry
A single integrated wafer package includes a micro electromechanical system (MEMS) wafer, an active device wafer, and a seal ring. The MEMS wafer has a first surface and includes at least one MEMS...
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7161448 |
Acoustic resonator performance enhancements using recessed region
An acoustic resonator includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a recessed region. The substrate has a first surface. The first electrode...
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7098758 |
Acoustically coupled thin-film resonators having an electrode with a tapered edge
Acoustically coupled resonators include a first and a second acoustic resonator. Both the first and second acoustic resonators include a first electrode, a layer of piezoelectric material, and a...
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7002437 |
Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the...
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6903497 |
Thin film piezoelectric element
A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film...
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6812619 |
Resonator structure and a filter comprising such a resonator structure
A resonator structure ( 1200, 1300, 1400 ), where a certain wave mode is piezoelectrically excitable, comprises at least two conductor layers ( 110, 120 ) and at least one piezoelectric layer ( 110...
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6787970 |
Tuning of packaged film bulk acoustic resonator filters
Packaged film bulk acoustic resonators may be tuned after packaging by exposing them to irradiation. In one embodiment, transparent covers may be provided so that the film bulk acoustic resonator...
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6548943 |
Method of producing thin-film bulk acoustic wave devices
A method of producing a BAW device with reduced spurious resonance, wherein the device comprises a top electrode, a bottom electrode and a piezoelectric layer therebetween. A frame-like structure...
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