Matches 1 - 9 out of 9
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EP1695318B1 TRAFFIC LIGHT WITH MODULAR POLE  
7367769 Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool  
PS control sections MC 1 , MC 2 configured to independently control the operations in process ships PS 1 , PS 2 are provided respectively, and an LM control section MC 3 configured to control...
7254453 Secondary process controller for supplementing a primary process controller  
A method and an apparatus for implementing a multi-variate process control system. A workpiece is processed using a primary process control function during a first time period. A secondary process...
7139627 Calibration of plural processing systems  
Plural processing apparatuses 3 such as CVD apparatuses 31 and diffusion apparatuses 33 , measuring apparatuses 5 , and a control computer 7 for management are connected through a LAN 9 ....
7031792 Processing apparatus and information storage apparatus and method  
A processing apparatus comprises a process apparatus body equipped with a plurality of process sections for applying a predetermined processing to a target object and a transfer device for...
7029928 Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber  
A method of preventing the scrapping of semiconductor substrates due to improper deposition of thin films in a thin film vaporization system is disclosed. This is accomplished by providing a method...
6990380 Substrate processing apparatus and information storage apparatus and method  
An object of the present invention is to grasp easily a process history of a target object such as a semiconductor wafer. The processing apparatus of the present invention includes: a processing...
6778875 Noise filter for backside helium signal  
A system using backside helium in the processing of wafers in the manufacturing of semiconductor products can cause alarms that can interrupt the manufacturing of the wafers and create damaged...
6766215 Method and apparatus for detecting necking over field/active transitions  
A method and an apparatus for detecting a necking error during semiconductor manufacturing. At least one semiconductor wafer is processed. Metrology data from the processed semiconductor wafer is...
Matches 1 - 9 out of 9