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7413069 |
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate...
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7369914 |
Method for projecting build progression for a product in a manufacturing environment
A computer implemented method is used for determining a product build schedule for sequential fabrication steps. The computer implemented method comprises: receiving a routing of the sequential...
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7283890 |
Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method
There is a jump in the number of devices formed on a single wafer, and it takes a lot of time to inspect a single wafer. In addition, if wafers are inspected every lot, detected wafers remain in...
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7274971 |
Methods and apparatus for electronic device manufacturing system monitoring and control
In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to...
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7228194 |
Power supply system, power supply method and lot processing method
A power supply system is disclosed. The system includes a power supply unit which supplies power to a processing unit, an arrival time calculating portion which calculates arrival time taken for a...
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7076326 |
Proactive staging for distributed material handling
A system, method, and/or program that enables a material handling system to proactively stage lots at ideally located stockers. Input containing the lots to be processed on a process machine is...
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7024275 |
Control method and system for an automated material handling system
An automated material handling system for a semiconductor fabrication facility includes: at least one processing tool that performs a semiconductor fabrication process on semiconductor wafers, at...
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6745783 |
Cleaning processing method and cleaning processing apparatus
To provide a cleaning processing method and a cleaning processing apparatus which can improve cleaning efficiency. The apparatus is structured to install processing units 11 a- 11 d which...
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6701205 |
System integration based on time-dependent periodic complexity
A processing system having time-dependent combinatorial complexity is converted into a system having time-dependent periodic complexity. Consequently, system reliability is increased and system...
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6584369 |
Method and system for dispatching semiconductor lots to manufacturing equipment for fabrication
A method for dispatching available lots to unallocated machines is provided that includes receiving metrics data ( 26 ) providing performance measurements for a plurality of machines ( 18 ). The...
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6535778 |
Process control method and process control apparatus
In a process control method, when T 1 +Tw+T 2 <Td is satisfied, where a time obtained by adding a conveyance time from a hold stocker to the pre-treatment processing equipment to a waiting time...
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