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7282452 |
Etching method, semiconductor and fabricating method for the same
An organic/inorganic hybrid film represented by SiC x− H y O z (x>0, y≧0, z>0) is plasma-etched with an etching gas containing fluorine, carbon and nitrogen. During the etching, a carbon...
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7231940 |
Control valve for a hydraulic power steering system
A control valve for a hydraulic power steering system includes a pair of flow circuits arranged in parallel. Each flow circuit includes an upstream and downstream flow orifices arranged in series....
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7152627 |
Control valve for a hydraulic power steering system
A control valve for a hydraulic power steering system includes a pair of flow circuits arranged in parallel. Each flow circuit includes an upstream and downstream flow orifices arranged in series....
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6632746 |
Etching method, semiconductor and fabricating method for the same
An organic/inorganic hybrid film represented by SiC x H y O z (x>0, y≧0, z>0) is plasma-etched with an etching gas containing fluorine, carbon and nitrogen. During the etching, a carbon...
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5128788 |
Liquid-crystal orientating film, method of manufacturing the film, and liquid-crystal element having the film
Disclosed herein is a liquid-crystal orientating film which is a polymer film consisting of stripe-shaped contracted portions extending in a predetermined direction and non-contracted portions...
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