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7427819 |
Film-bulk acoustic wave resonator with motion plate and method
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an...
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7425787 |
Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and an...
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7424772 |
Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
The band-pass filter has a stacked pair of film bulk acoustic resonators (FBARs) and an acoustic decoupler between the FBARs. Each of the FBARs has opposed planar electrodes and a layer of...
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7423503 |
Acoustic galvanic isolator incorporating film acoustically-coupled transformer
Embodiments of the acoustic galvanic isolator comprise a carrier signal source, a modulator connected to receive an information signal and the carrier signal, a demodulator, and, connected between...
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7408428 |
Temperature-compensated film bulk acoustic resonator (FBAR) devices
The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack. The FBAR stack comprises an FBAR and a temperature-compensating element. The FBAR is characterized by...
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7400217 |
Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith
The band-pass filter has an upper film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic...
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7391286 |
Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters
A film acoustically-coupled transformer (FACT) has a first and a second stacked bulk acoustic resonator (SBAR 1 , SBAR 2 ). Each SBAR has a stacked pair of film bulk acoustic resonators (FBARs)...
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7391285 |
Film acoustically-coupled transformer
One embodiment of the film acoustically-coupled transformer (FACT) includes a decoupled stacked bulk acoustic resonator (DSBAR) having a lower film bulk acoustic resonator (FBAR) an upper FBAR...
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7388455 |
Film acoustically-coupled transformer with increased common mode rejection
The film acoustically-coupled transformer (FACT) has a first and second decoupled stacked bulk acoustic resonators (DSBARs). Each DSBAR has a lower film bulk acoustic resonator (FBAR), an upper...
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7388454 |
Acoustic resonator performance enhancement using alternating frame structure
Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is...
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7380320 |
Piezoelectric device and method of manufacturing the device
A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode...
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7369013 |
Acoustic resonator performance enhancement using filled recessed region
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the...
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7367095 |
Method of making an acoustically coupled transformer
Embodiments of an acoustically-coupled transformer have a first stacked bulk acoustic resonator (SBAR) and a second SBAR. Each of the SBARs has a lower film bulk acoustic resonator (FBAR) and an...
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7362198 |
Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
The decoupled stacked bulk acoustic resonator (DSBAR) device has a lower film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and an acoustic decoupler between the FBARs....
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7358831 |
Film bulk acoustic resonator (FBAR) devices with simplified packaging
The encapsulated film bulk acoustic resonator (FBAR) device comprises a substrate, an FBAR stack over the substrate, an element for acoustically isolating the FBAR stack from the substrate,...
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7332985 |
Cavity-less film bulk acoustic resonator (FBAR) devices
The film bulk acoustic resonator (FBAR) device comprises a substrate, an acoustic Bragg reflector over the substrate, a piezoelectric element over the acoustic Bragg reflector, and a remote-side...
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7299529 |
Film bulk acoustic resonator (FBAR) process using single-step resonator layer deposition
A process comprising, in a vacuum, depositing a bottom electrode layer and a piezoelectric layer over a cavity in a substrate, the cavity being filled with a sacrificial material, patterning and...
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7275292 |
Method for fabricating an acoustical resonator on a substrate
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material....
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7245057 |
Micro-electromechanical structure resonator frequency adjustment using radiant energy trimming and laser/focused ion beam assisted deposition
The invention relates to a microbeam oscillator. Tuning of the oscillator is carried out by addition or subtraction of material to an oscillator member in order to change the mass of the oscillator...
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7176604 |
Piezoelectric device and method of manufacturing the device
A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode...
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7078984 |
Duplexer and method of manufacturing same
A duplexer ( 1 ) comprises a chip ( 10 ) including a transmission filter ( 97 ) for passing a transmission signal therethrough and interrupting a reception signal and a reception filter ( 98 ) for...
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7042136 |
Piezoelectric thin-film element and a manufacturing method thereof
To provide a piezoelectric thin-film element small in leak current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element includes at least...
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7019604 |
Piezoelectric filter, duplexer, composite piezoelectric resonator, communication device and method for adjusting frequency of piezoelectric filter
A piezoelectric filter and other electronic components are constructed such that the accuracy of frequency adjustment can be increased and an improvement in efficiency of the adjustment operation...
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6989723 |
Piezoelectric resonant filter and duplexer
A piezoelectric resonant filter includes a group of series resonators and a group of parallel resonators for forming a ladder-type filter circuit. Each of the resonators has a piezoelectric thin...
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6985052 |
Component operating with bulk acoustic waves, and having coupled resonators
The invention relates to a component operating with bulk acoustic waves, which comprises a mount substrate, thin-film resonators and an acoustic mirror, with coupled resonators being arranged...
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EP1583233A1 |
Resonator, filter and fabrication of resonator
Abstract not available
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6909340 |
Bulk acoustic wave filter utilizing resonators with different aspect ratios
The invention relates to bulk acoustic wave filters including at least two bulk acoustic wave resonators. Each of these resonators includes at least one first electrode, a piezoelectric layer, and...
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6874211 |
Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by...
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6774746 |
Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide
An electric filter comprises a plurality of thin film bulk acoustic resonators arranged in series and in parallel which have different thicknesses of one or more non-piezoelectric layers, for...
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EP1385265A2 |
Piezoelectric filter, duplexer, composite piezoelectric resonator, communication device and method for adjusting frequency of piezoelectric filter
A piezoelectric filter and other electronic components are constructed such that the accuracy of frequency adjustment can be increased and an improvement in efficiency of the adjustment operation...
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6617249 |
Method for making thin film bulk acoustic resonators (FBARS) with different frequencies on a single substrate and apparatus embodying the method
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by...
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6483229 |
Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass...
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6476536 |
Method of tuning BAW resonators
A method of tuning a bulk acoustic wave device having a piezoelectric layer formed between a top electrode and a bottom electrode, wherein the top electrode has a frame-like structure at an edge...
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6462460 |
Method and system for wafer-level tuning of bulk acoustic wave resonators and filters
A method and system for tuning a bulk acoustic wave device at wafer level, wherein the thickness of topmost layer of the device is non-uniform. The thickness non-uniformity causes the resonant...
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6456173 |
Method and system for wafer-level tuning of bulk acoustic wave resonators and filters
A method and system for tuning a bulk acoustic wave device at the wafer level by adjusting the device thickness. In particular, the device thickness has a non-uniformity profile across the device...
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6441702 |
Method and system for wafer-level tuning of bulk acoustic wave resonators and filters
A method and system for tuning a bulk acoustic wave device at the wafer level by adjusting the thickness of the device. In particular, the thickness of the device has a non-uniformity profile...
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6414569 |
Method of adjusting frequency of piezoelectric resonance element by removing material from a thicker electrode or adding, material to a thinner electrode
A method of adjusting a frequency of an energy-trap type piezoelectric resonance element includes the steps of preparing a piezoelectric resonance element including first and second vibration...
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6407649 |
Monolithic FBAR duplexer and method of making the same
A monolithic bulk acoustic wave (BAW) duplexer, and a method for fabricating same, the duplexer having a, transmitter section as a first component filter and a receiver section as a second...
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