|
Match
|
Document |
Document Title |
|
|
7433751 |
Sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
|
|
|
7401728 |
Feed-forward control in event-based manufacturing systems
Communication between machines in an event-based manufacturing system. In an event-based manufacturing system, material-specific data obtained for a material produced during a first manufacturing...
|
|
|
7376479 |
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
A plasma processing method for processing a sample by using plasma on a lot unit basis, including: detecting plural kinds of information as monitor data relating to a processing state of the...
|
|
|
7368678 |
Method for sorting integrated circuit devices
A method for sorting integrated circuit (IC) devices of the type having a substantially unique identification (ID) code, such as a fuse ID, including automatically reading the ID code of each of...
|
|
|
7361862 |
Laser marking system for dice carried in trays and method of operation
A laser marking system for IC packages including a tray input shuttle assembly and a tray transport borne by a transport actuator for moving a tray carrier carrying a tray of unmarked packaged ICs...
|
|
|
7356177 |
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image...
|
|
|
7352890 |
Method for analyzing circuit pattern defects and a system thereof
A system for analyzing defects in electronic circuit patterns, including: comparing position information of structural defects with position information of electrical faults and extracting...
|
|
|
7345753 |
Apparatus and methods for analyzing defects on a sample
Disclosed are methods and apparatus for facilitating procedures implemented on an analysis tool are provided herein. In one embodiment, an apparatus includes an analyzer module arranged for...
|
|
|
7310438 |
Systems for detecting defects in printed solder paste
A method of inspecting a stencil having apertures through which a substance is deposited onto an electronic substrate includes depositing the substance through the stencil and onto the substrate,...
|
|
|
7276672 |
Method for sorting integrated circuit devices
A method for sorting integrated circuit (IC) devices of the type having a substantially unique identification (ID) code, such as a fuse ID, including automatically reading the ID code of each of...
|
|
|
7269280 |
Method and its apparatus for inspecting a pattern
In a pattern inspecting apparatus, images of places which can be expected to be the same pattern are compared with one another. However, a comparison of images obtained by different stage scans and...
|
|
|
7242467 |
Method and apparatus for high-resolution defect location and classification
In the manufacture of integrated circuits on a wafer, it is necessary to monitor the manufacturing process by inspecting the ICs as to whether errors or defects have occurred during production. It...
|
|
|
7236847 |
Systems and methods for closed loop defect reduction
Systems and methods for repairing defects on a specimen are provided. A method may include processing a specimen, detecting defects on the specimen, and repairing one or more of the defects. An...
|
|
|
7158848 |
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
A plasma processing apparatus for processing a sample within a vacuum vessel, including: a plurality of sensors for detecting plural kinds of information relating to a processing state of the...
|
|
|
7155300 |
Method for using data regarding manufacturing procedures integrated circuits (IC's) have undergone, such as repairs, to select procedures the IC's will undergo, such as additional repairs
An inventive method in an integrated circuit (IC) manufacturing process for using data regarding repair procedures conducted on IC's at probe to determine whether any further repairs will be...
|
|
|
7149344 |
Systems and methods for detecting defects in printed solder paste
A method of analyzing an image of a substance deposited onto a substrate, the image comprising a plurality of pixels, includes defining a region of interest in the image, associating the region of...
|
|
|
7124050 |
Method in an integrated circuit (IC) manufacturing process for identifying and redirecting IC's mis-processed during their manufacture
A method of manufacturing IC devices from semiconductor wafers includes providing the wafers and fabricating ICs on the wafers. At probe, a unique fuse ID is stored in each IC, and an electronic...
|
|
|
7120513 |
Method for using data regarding manufacturing procedures integrated circuits (ICS) have undergone, such as repairs, to select procedures the ICS will undergo, such as additional repairs
An inventive method in an integrated circuit (IC) manufacturing process for using data regarding repair procedures conducted on IC's at probe to determine whether any further repairs will be...
|
|
|
7120287 |
Non-lot based method for assembling integrated circuit devices
An inventive method tracks IC devices through the assembly steps in a manufacturing process. Prior to die attach, a laser scribe marks the lead frame of each of the devices with a coded hole matrix...
|
|
|
7117063 |
Sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
|
|
|
7117062 |
Determining transmission of error effects for improving parametric performance
A method and an apparatus for characterizing an uncertainty factor relating to processing workpieces. A first processing step is performed upon a workpiece. A first uncertainty factor associated...
|
|
|
7113628 |
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image...
|
|
|
7107117 |
Sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
|
|
|
7072786 |
Inspection system setup techniques
Techniques for efficiently setting up inspection, metrology, and review systems for operating upon semiconductor wafers are described. Specifically, this involves setting up recipes that allows...
|
|
|
7072503 |
Systems and methods for detecting defects in printed solder paste
A method of inspecting a stencil having apertures through which a substance is deposited onto an electronic substrate includes depositing the substance through the stencil and onto the substrate,...
|
|
|
7068834 |
Inspecting method, inspecting system, and method for manufacturing electronic devices
The present invention has an analyzing unit including an image detection device for producing a plurality of images of a workpiece, a storage for storing detected images produced by the image...
|
|
|
7062081 |
Method and system for analyzing circuit pattern defects
In order to allow critical flaws in an inspected item to be determined early during a production process, the present invention includes the following steps: a step of detecting defects in a...
|
|
|
7058467 |
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
A monitor data acquisition section acquires a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors. A data selection section selects monitor...
|
|
|
7035877 |
Quality management and intelligent manufacturing with labels and smart tags in event-based product manufacturing
Providing quality management and intelligent manufacturing with labels and smart tags in event-based product manufacturing. Some of the disclosed embodiments include a system, method, and...
|
|
|
7032816 |
Communication between machines and feed-forward control in event-based product manufacturing
Providing communication between machines and feed-forward control in event-based product manufacturing. Some of the disclosed embodiments include a system, method, and computer-readable media for...
|
|
|
6987873 |
Automatic defect classification with invariant core classes
A method and apparatus is provided for automatically classifying a defect on the surface of a semiconductor wafer into one of, e.g., seven core classes: a missing pattern on the surface, an extra...
|
|
|
6982556 |
System and method for classifying defects in and identifying process problems for an electrical circuit
A method for performing circuit defect analysis and process problem identification includes applying a test signal to a circuit, obtaining a signal generated in response to the test signal,...
|
|
|
6959251 |
Inspection system setup techniques
Techniques for efficiently setting up inspection, metrology, and review systems for operating upon semiconductor wafers are described. Specifically, this involves setting up recipes that allows...
|
|
|
6947803 |
Dispatch and/or disposition of material based upon an expected parameter result
A method and an apparatus for affecting dispatch and/or disposition of a workpiece. A process step upon a workpiece is performed based upon a predetermined routing plan. An end-of-line parameter is...
|
|
|
6944567 |
Method in an integrated circuit (IC) manufacturing process for identifying and redirecting ICs mis-processed during their manufacture
A method of manufacturing IC devices from semiconductor wafers includes providing the wafers and fabricating ICs on the wafers. At probe, a unique fuse ID is stored in each IC, and an electronic...
|
|
|
6941009 |
Method for evaluating pattern defects on a water surface
The invention concerns a method for evaluating pattern defects on a wafer surface, comprising the following steps: acquiring the surface data of a plurality of individual image fields ( 4 ) of a...
|
|
|
6937296 |
Flat panel display unit and method of repairing defects in its line pattern
Shorting defects between the scan lines and signal lines are repaired during the manufacture of a TFT or other flat panel display unit without causing liquid crystal orientation defects and...
|
|
|
6934920 |
Specimen analyzing method
In a sample analysis method, positional coordinates of reference points on a surface of the sample are measured using a first device. Positional coordinates of an object on the surface of the...
|
|
|
6903821 |
Inspection method, apparatus and system for circuit pattern
Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by...
|
|
|
6891967 |
Systems and methods for detecting defects in printed solder paste
A method of analyzing an image of a substance deposited onto a substrate, the image comprising a plurality of pixels, includes defining a region of interest in the image, associating the region of...
|
|
|
6879867 |
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
A monitor data acquisition section acquires a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors. A data selection section selects monitor...
|
|
|
6871114 |
Updating process controller based upon fault detection analysis
A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating...
|
|
|
6834213 |
Process control based upon a metrology delay
A method and an apparatus for performing process control based upon a metrology delay. A process step is performed upon a first workpiece. Metrology data related to the first workpiece is acquired....
|
|
|
6826735 |
Inspection data analysis program, defect inspection apparatus, defect inspection system and method for semiconductor device
Inspection data output from an inspection apparatus is read, the inspection data containing at least one information piece of coordinate value information and size information of a particle or a...
|
|
|
6807454 |
Method for automatically controlling defect -specification in a semiconductor manufacturing process
A method for automatically controlling defect-specification in a semiconductor manufacturing process is provided. The method provides a module to detect a position, number, size, and intensity...
|
|
|
6801824 |
Substrate selector
Substrate-selecting equipment selects substrates used for objective products from among a group of substrates with photosensitive material layers used for the production of photomask. The...
|
|
|
6763130 |
Real time defect source identification
A method and apparatus for inspecting a semiconductor wafer provides real-time information identifying tools visited by wafers under inspection and the process parameters used at those tools, and...
|
|
|
6759655 |
Inspection method, apparatus and system for circuit pattern
Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by...
|
|
|
6741941 |
Method and apparatus for analyzing defect information
To efficiently extract identification of apparatuses causing problems in a thin-film device manufacturing process, candidates for the problem-generating manufacturing apparatus are extracted by...
|
|
|
6741940 |
Computer-implemented method of defect analysis
In the step (S 11 ), chip classification data in which a plurality of chips are classified into four sorts on the basis of presence/absence of (new) defects and pass/fail (of integrated circuits)...
|