Matches 1 - 4 out of 4
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7216045 Selection of wavelengths for integrated circuit optical metrology  
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection...
6703621 Method for the optical acquisition of characteristic sizes of an illuminated sample  
A method for the optical acquisition of characteristic quantities of an illuminated specimen, wherein a signal that is backscattered, reflected and/or fluoresced and/or transmitted from the...
6690467 Optical system and method for optically analyzing light from a sample  
An optical system for analyzing light from a plurality of samples is provided. The optical system includes a plurality of holders adapted to have samples located therein, a collection lens, a...
5953118 Multiplexed spectrophotometry system  
A multiplexed spectrophotometry apparatus, including a rotary multiplexer fitted with a plurality of fiber terminals, a spectrophotometer mounted to the multiplexer and rotatable therewith, and a...
Matches 1 - 4 out of 4