Matches 1 - 48 out of 48
Match Document Document Title
7367359 Proportional micromechanical valve  
The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet...
7322246 Pressure sensor with pressure translation  
A pressure sensor integrated onto an electronic circuit substrate. The pressure sensor measures the effect of the ambient air pressure on a characteristic of the pressure sensor that can be...
7218193 MEMS-based inertial switch  
In one embodiment, an inertial switch of the invention includes a MEMS device manufactured using a layered wafer. The MEMS device has a movable electrode supported on a substrate layer of the wafer...
EP0969694B1 Pressure transducer and manufacturing method thereof  
Abstract of EP0969694 A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing...
7156365 Method of controlling microvalve actuator  
In a method of controlling an actuator of a microvalve, a controller is provided for supplying a voltage to the actuator. The controller provides an initial voltage to the actuator which is...
7061063 Microstructure and its fabrication method  
A microstructure includes a support substrate, a movable plate, and an elastic support portion having a first section with at least one concave portion and second sections having no concave...
7011378 Proportional micromechanical valve  
The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet...
6994115 Thermally actuated microvalve device  
A microvalve having a generally planar plate valve body defining a chamber and a plate valve member movable in the chamber about a pivot axis that is perpendicular to the valve body to control the...
6955089 Pressure sensor  
A pressure sensor includes a casing having a pressure detection chamber, a diaphragm for receiving pressure of a measuring object and disposed on the casing, and a pressure detection element. The...
6919521 Pressure sensor  
A pressure sensor integrated onto an electronic circuit substrate. The pressure sensor measures the effect of the ambient air pressure on a characteristic of the pressure sensor that can be...
6845962 Thermally actuated microvalve device  
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. The body further has first and second pilot ports placed in...
6761420 Proportional micromechanical device  
The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet...
6756248 Pressure transducer and manufacturing method thereof  
A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing the same are provided....
6699394 Micromachined parylene membrane valve and pump  
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon...
6694998 Micromachined structure usable in pressure regulating microvalve and proportional microvalve  
A microvalve device includes a first plate, a second plate and a third plate. The second plate is connected between the first plate and the third plate. The second plate contains a stationary...
6639165 Multiple contact fluid pressure switch  
A multiple contact fluid pressure switch includes a plate from which a rib extends to establish a cavity on the plate. Two lower contacts are on the plate within the cavity. A diaphragm is disposed...
6622368 Method of manufacturing a transducer having a diaphragm with a predetermined tension  
A method of manufacturing a transducer of the type having a diaphragm ( 11 ) with a predetermined tension. After the transducer has been manufactured with its basic structure the diaphragm is...
6581640 Laminated manifold for microvalve  
A manifold for distributing a fluid. The manifold can be used to distribute a fluid to and from a microvalve. The manifold includes a first plate having a groove formed in one face thereof. A...
6552404 Integratable transducer structure  
Electro-mechanical structures and methods for forming same are disclosed. The structures are integratable onto an integrated circuit. The structures have a deformeable element formed in a plane...
6540203 Pilot operated microvalve device  
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. A pilot valve supported by the body is movably disposed in...
6536213 Micromachined parylene membrane valve and pump  
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon...
6533366 Vehicle hydraulic braking systems incorporating micro-machined technology  
Hydraulic or electro-hydraulic braking systems which include at least one wheel braking device and micro-machined technology, such as microvalves, are described herein. The use of the microvalves...
6523560 Microvalve with pressure equalization  
Disclosed is a microvalve suitable for use in high pressure applications such as refriigeration. The microvalve has a displaceable member that slides across an inlet port, thereby creating an...
6499297 Micromachined parylene membrane valve and pump  
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon...
6494804 Microvalve for electronically controlled transmission  
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. An electronically controlled automatic transmission,...
6441451 Pressure transducer and manufacturing method thereof  
A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing the same are provided....
6436301 Method for manufacturing a liquid discharge head  
A method for manufacturing a liquid discharge head, which is provided with a movable film supporting member for supporting a movable film separating a first liquid flow path and a bubble creation...
6351996 Hermetic packaging for semiconductor pressure sensors  
A hermetic media interface for a sensor package is disclosed. Preferably, the hermetic media interface is incorporated into a pressure sensor package for interfacing directly to fluid and/or...
6346742 Chip-scale packaged pressure sensor  
A chip-scale sensor package is described. In one embodiment, the chip-scale sensor package includes a semiconductor substrate having a sensor region, and a semiconductor cap having a recess. The...
6345502 Micromachined parylene membrane valve and pump  
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon...
6255728 Rigid encapsulation package for semiconductor devices  
A rigid encapsulation package for semiconductor sensors, actuators, and devices is described. In one embodiment, a semiconductor pressure sensor includes a sensor element having a deformable...
6248249 Method of manufacture of a Lorenz diaphragm electromagnetic ink jet printer  
A method of manufacturing a printhead, the method including the step of providing a semiconductor wafer having an electrical circuity layer and a buried epitaxial layer. A nozzle chamber cavity is...
6236095 Carrier structure for semiconductor transducers  
A carrier structure for semiconductor transducers is disclosed. The carrier structure mounts as a single unit to a force-impacted base substrate and includes multiple piezoresistive elements...
6229190 Compensated semiconductor pressure sensor  
A semiconductor pressure sensor compatible with fluid and gaseous media applications is described. The semiconductor pressure sensor includes a sensor capsule having a semiconductor die and a...
6146543 Microbellows actuator  
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed...
6069392 Microbellows actuator  
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed...
EP0969694A2 Pressure transducer and manufacturing method thereof  
A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing the same are provided....
6006607 Piezoresistive pressure sensor with sculpted diaphragm  
The present invention is a semiconductor pressure sensor. In one embodiment, the semiconductor pressure sensor includes a diaphragm having a first thickness and at least cone raised boss that is...
5894144 Semiconductor acceleration sensor  
In a semiconductor acceleration sensor, a weight and thin beam parts adjacent to the weight are formed on a substrate, a moving electrode is formed on the weight, and a fixed electrode is formed at...
5883420 Sensor device having a pathway and a sealed cavity  
A sensor (10,30) is formed that does not require a bonding process in an oxygen rich or vacuum ambient. In a first embodiment, a port (14), a channel (15) and an opening (18) are used to provide an...
5821595 Carrier structure for transducers  
A carrier structure for transducers. The semiconductor carrier structure mounts as a single unit to a force-impacted substrate and includes multiple piezoelectric elements integrally formed with...
5802911 Semiconductor layer pressure switch  
A pressure switch element (1) including a semiconductor layer (3) having a diaphragm portion (5) in its center and a plate (2) having a through hole communicating with the exterior, which are...
5619022 Pneumatic snap action switch  
A miniaturized pneumatic snap action switch includes a glass or metallized ceramic body that has a convoluted metal diaphragm closing the open end with a glass to metal seal. The interior of the...
5545594 Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented  
A method for bonding a silicon substrate and a glass substrate through an anodic-bonding process, including steps of: forming at least two holes in the glass substrate; forming a recess on the...
5528070 Semiconductor sensor manufactured through anodic-bonding process  
A semiconductor sensor comprising a semiconductor substrate and a glass substrate. The semiconductor substrate includes a support member having an opening centrally defined therein, a diaphragm...
5399897 Microstructure and method of making such structure  
An integrated circuit having a semiconductor layer having formed therein a electronic circuit. An electrical device, electrically connected to the electronic circuit, has a corrugated platform...
5367878 Transient energy release microdevices and methods  
A microdevice in the form of an electrical switch. A microdevice for providing switching at a high repetition rate, including a cell divided into two chambers by a bistable movable membrane. A...
5294760 Digital pressure switch and method of fabrication  
A micromachined pressure switch and method of fabrication from silicon wafers using aligned fusion bonding. Pattern etched thermally grown silicon dioxide insulating pads are used to determine the...
Matches 1 - 48 out of 48