Matches 1 - 22 out of 22
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7192789 Method for monitoring an ion implanter  
A method for monitoring an ion implanter is disclosed. In one embodiment, the method comprises providing a wafer, forming a barrier layer on the surface of the wafer wherein the barrier layer has a...
7169015 Apparatus for optical inspection of wafers during processing  
The present invention is aimed to provide a measurement system installable within a processing equipment and more specifically within the exit station of a polishing machine. The optical scheme of...
6809828 Universal detector for biological and chemical separations or assays using plastic microfluidic devices  
An on-chip interferometric backscatter detector (OCIBD) makes use of plastic substrates in which a rectangular sample channel is formed. While any plastic material can be used to form the channel...
6752689 Apparatus for optical inspection of wafers during polishing  
An optical system is disclosed for the inspection of wafers during polishing which also includes a measurement system for measuring the thickness of the wafers top layer. The optical system views...
6731380 Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films  
A beam deflection technique for simultaneous measurements of the thickness, refractive index and optical absorption of transparent materials using a charge coupled device (CCD) camera is provided....
6580560 Laser light projector having beam diffuser and associated methods  
An apparatus and method for a laser light display projector for projecting a beam of laser light so as to produce a light pattern forming a visually perceptible light image includes a laser light...
6381025 Interferometric detection system and method  
An optical detection scheme for on-chip, high sensitivity refractive index detection is based on micro-interferometry, and allows for picoliter detection volumes and universal analyte sensitivity....
6368181 Apparatus for optical inspection of wafers during polishing  
An optical system is disclosed for the inspection of wafers during polishing which also includes a measurement system for measuring the thickness of the wafer's top layer. The optical system views...
EP1092991A2 Adhesion layer for optical coatings  
An optical component comprised of a plurality of optical thin films formed with good adhesion on a base, a manufacturing method thereof and an optical component manufacturing device are provided. A...
6045433 Apparatus for optical inspection of wafers during polishing  
An optical system is disclosed for the inspection of wafers during polishing which also includes a measurement system for measuring the thickness of the wafer's top layer. The optical system views...
5957749 Apparatus for optical inspection of wafers during polishing  
An optical system is disclosed for the inspection of wafers during polishing which also includes a measurement system for measuring the thickness of the wafer's top layer. The optical system views...
5953115 Method and apparatus for imaging surface topography of a wafer  
A method for imaging surface topography is based on Total Internal Reflection (TIR) and is particularly useful for imaging surface topography of wafers used in the manufacture of integrated...
EP0721577B1 DEVICE FOR EXAMINING OPTICAL WAVEGUIDES  
Abstract not available for EP0721577 Abstract of corresponding document: WO9424536 A device for examining optical waveguides comprises a prism (2) to be positioned on the waveguide to be...
5796484 System for detecting unevenness degree of surface of semiconductor device  
In a system for detecting a degree of unevenness of a surface of a semiconductor device, the surface is irradiated with light having a wavelength of approximately 240 nm to 500 nm. The degree of...
5771321 Micromechanical optical switch and flat panel display  
The invention provides an optical coupling switch and flat panel display including an array of such optical coupling switches. The optical coupling switch includes a light storage plate adapted to...
5657117 Device for examining optical waveguides  
A device for examining optical waveguides comprises a prism to be positioned on the waveguide to be investigated, an entering point at which incoming light enters the device, and control devices...
5554939 Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same  
The present invention provides a novel sensor preferably used for non-destructive measurement of the electrical characteristics of semiconductors. The sensor is easily manufactured and has a...
5475319 Method of measuring electric charge of semiconductor wafer  
Amounts of electric charges in a semiconductor wafer are measured by using a non-destructive measuring device. First and second flat-band voltages before and after a specific charging process are...
5280334 Apparatus for measuring cross-sectional distribution of refractive index of optical waveguide by RNF method  
According to the present invention, there are provided a projection system for emitting luminous flux for measurement, a light receiving unit or a prism member furnished with a light receiving...
5272342 Diffused layer depth measurement apparatus  
There is disclosed a diffused layer depth measurement apparatus equipment which has a sample table for supporting a sample cut from a measured semiconductor substrate including a high concentration...
5239183 Optical gap measuring device using frustrated internal reflection  
The invention provides a device which utilizes the tunnel effect occuring upon a condition of geometric total reflection, for measuring a narrow gap and surface unevenness of a specimen with high...
5225690 Gap measuring device and method using frustrated internal reflection  
A narrow gap or unevenness of a surface of a specimen is measured by utilizing the tunnel effect of a light wave reflected at a boundary plane on the condition of total reflection. A laser beam...
Matches 1 - 22 out of 22