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7429334 Methods of fabricating interferometric modulators by selectively removing a material  
Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of...
7424198 Method and device for packaging a substrate  
A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the...
7420728 Methods of fabricating interferometric modulators by selectively removing a material  
Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of...
7420725 Device having a conductive light absorbing mask and method for fabricating same  
A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device...
7417784 Microelectromechanical device and method utilizing a porous surface  
A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator...
7417783 Mirror and mirror layer for optical modulator and method  
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as...
7417735 Systems and methods for measuring color and contrast in specular reflective devices  
Disclosed herein are systems and methods for measuring color and contrast in specular reflective devices such as interferometric modulators. To make color and contrast determinations, light...
7415186 Methods for visually inspecting interferometric modulators for defects  
A method is provided for visual inspection of an array of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators...
7405924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate  
Disclosed is an electronic device utilizing interferometric modulation and a package of the device. The packaged device includes a substrate, an interferometric modulation display array formed on...
7405863 Patterning of mechanical layer in MEMS to reduce stresses at supports  
A method of fabricating a MEMS device includes the formation of support posts having horizontal wing portions at the edges of the post. A mechanical layer is deposited over the support posts and...
7405861 Method and device for protecting interferometric modulators from electrostatic discharge  
A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS...
7403323 Process control monitors for interferometric modulators  
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide...
RE40436 Hermetic seal and method to create the same  
An electronic display screen is created by processing a mirror on a substrate glass. A back plate glass is then placed on top of the substrate glass and sealed to the back plate glass. A hermetic...
7388704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs  
Air gap variation in an interferometric modulator over a two-dimensional spatial map of the modulator is determined by acquiring a digital photograph of the modulator. Color parameters of...
7385748 Visible spectrum modulator arrays  
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of...
7385744 Support structure for free-standing MEMS device and methods for forming the same  
A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first...
7382515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture  
The fabrication of a MEMS device such as an interferometric modulator is improved by employing an etch stop layer between a sacrificial layer and a an electrode. The etch stop may reduce...
7379227 Method and device for modulating light  
“Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each...
7373026 MEMS device fabricated on a pre-patterned substrate  
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper...
7372619 Display device having a movable structure for modulating light and method thereof  
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
7372613 Method and device for multistate interferometric light modulation  
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and...
7369296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator  
By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an...
7369294 Ornamental display device  
An ornamental display device having an interferometric modulator for displaying an ornamental image. The ornamental device may have a patterned diffuser formed on a transparent substrate to provide...
7369292 Electrode and interconnect materials for MEMS devices  
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity,...
7369252 Process control monitors for interferometric modulators  
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide...
7368803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion  
Disclosed is an electronic device utilizing interferometric modulation and a package of the device. The packaged device includes a substrate, an interferometric modulation display array formed on...
7359066 Electro-optical measurement of hysteresis in interferometric modulators  
Disclosed herein are methods and apparatus for testing interferometric modulators. The interferometric modulators may be tested by applying a time-varying voltage stimulus and measuring the...
7355782 Systems and methods of controlling micro-electromechanical devices  
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
7355780 System and method of illuminating interferometric modulators using backlighting  
An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the...
7349139 System and method of illuminating interferometric modulators using backlighting  
An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the...
7349136 Method and device for a display having transparent components integrated therein  
A display panel includes an array of interferometric modulators arranged over a transparent substrate and a transparent electrical device arranged between the array of interferometric modulators...
7343080 System and method of testing humidity in a sealed MEMS device  
One embodiment provides a method of testing humidity, comprising: determining a property of a device which encloses a plurality of interferometric modulators; and determining a relative humidity...
7327510 Process for modifying offset voltage characteristics of an interferometric modulator  
An interferometric modulator manufactured according to a particular set of processing parameters may have a non-zero offset voltage. A process has been developed for modifying the processing...
7321457 Process and structure for fabrication of MEMS device having isolated edge posts  
A method of fabricating an array of MEMS devices includes the formation of support structures located at the edge of upper strip electrodes. A support structure is etched to form a pair of...
7321456 Method and device for corner interferometric modulation  
A display is described, wherein the display includes surfaces arranged at a non-zero angle to one another. A least one of the surfaces may include an interferometric modulator. Compensation for...
7317568 System and method of implementation of interferometric modulators for display mirrors  
A specular interferometric modulator array is configured to be at least partially selectably reflective. As such, the array forms a mirror surface having the capability of displaying information to...
7304784 Reflective display device having viewable display on both sides  
An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.
7302157 System and method for multi-level brightness in interferometric modulation  
A display having a plurality of reflective display elements. In one embodiment, the display elements comprise at least one electrode having a plurality of active areas. In one embodiment, at least...
7299681 Method and system for detecting leak in electronic devices  
The methods and systems for testing electronic devices for leak detection are provided. In one method of detecting a leak in a sealed package, a sealed package is placed in a test gas environment,...
7297471 Method for manufacturing an array of interferometric modulators  
In one embodiment, the invention provides a method for manufacturing an array of interferometric modulators. Each interferometric modulator comprises first and second optical layers which when the...
7291921 Structure of a micro electro mechanical system and the manufacturing method thereof  
A structure of a micro electro mechanical system and a manufacturing method are provided, the structure and manufacturing method is adapted for an optical interference display cell. The structure...
7289259 Conductive bus structure for interferometric modulator array  
Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first...
7289256 Electrical characterization of interferometric modulators  
Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is...
7280265 Interferometric modulation of radiation  
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their...
7259865 Process control monitors for interferometric modulators  
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide...
7259449 Method and system for sealing a substrate  
A method of sealing a microelectromechanical system (MEMS) device from ambient conditions is described, wherein the MEMS device is formed on a substrate and a substantially hermetic seal is formed...
7256922 Interferometric modulators with thin film transistors  
A modulator has a transparent substrate with a first surface. At least one interferometric modulator element resides on the first surface. At least one thin film circuit component electrically...
7250315 Method for fabricating a structure for a microelectromechanical system (MEMS) device  
The invention provides a microfabrication process which may be used to manufacture a MEMS device. In one embodiment, the process comprises depositing at least one first layer on a substrate. The...
7236284 Photonic MEMS and structures  
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
7221495 Thin film precursor stack for MEMS manufacturing  
This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a...
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