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7422403 Non-explosive releasable coupling device  
A device and method for holding or clamping components together, and with the clamping being selectively loosened to permit the components to move through a predetermined distance without being...
7383967 Apparatus and methods for pumping high viscosity fluids  
A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are...
7367359 Proportional micromechanical valve  
The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet...
7309056 Dual pedestal shut-off valve  
Integrated micro-valve is formed to control fluid flow and pressure. The valve converts supplied energy to mechanical energy through a means for energy conversion resident above a flexible wall or...
7238083 Wafer carrier with pressurized membrane and retaining ring actuator  
A wafer carrier for controlling downward force and edge effect during chemical mechanical planarization. A retaining ring actuator is disposed within the retaining ring to control the height of the...
7214324 Technique for manufacturing micro-electro mechanical structures  
A technique for manufacturing a micro-electro mechanical structure includes a number of steps. Initially, a cavity is formed into a first side of a handling wafer, with a sidewall of the cavity...
7195026 Micro electromechanical systems for delivering high purity fluids in a chemical delivery system  
Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system....
7175772 Small scale actuators and methods for their formation and use  
An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second...
7156365 Method of controlling microvalve actuator  
In a method of controlling an actuator of a microvalve, a controller is provided for supplying a voltage to the actuator. The controller provides an initial voltage to the actuator which is...
RE39143 Method for making a wafer-pair having sealed chambers  
A method for fabricating a wafer-pair having at least one recess in one wafer and the recess formed into a chamber with the attaching of the other wafer which has a port plugged with a deposited...
7011378 Proportional micromechanical valve  
The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet...
7011288 Microelectromechanical device with perpendicular motion  
A microelectromechanical device wherein the displacement of an electrothermally compliant actuator is perpendicular to a mounting substrate allowing in a first embodiment a fluid control valve to...
7008309 Back pressure control system for CMP and wafer polishing  
A wafer carrier with a back pressure applicator system adapted to provide high resolution back pressure control. A plurality of millimeter scale distensible elements are disposed between the wafer...
6994115 Thermally actuated microvalve device  
A microvalve having a generally planar plate valve body defining a chamber and a plate valve member movable in the chamber about a pivot axis that is perpendicular to the valve body to control the...
6845962 Thermally actuated microvalve device  
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. The body further has first and second pilot ports placed in...
6789959 Fiber optic integrated circuit package using micromirrors  
An external fiber optic cable is snap fit onto the connector of the integrated circuit package, light passes from an optical fiber in the external cable, through the first optical fiber and to the...
6761420 Proportional micromechanical device  
The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet...
6708945 Flow rate control valve  
A flow rate control valve includes a second substrate having a flexible thin film and interposed between a first substrate having a heating mechanism and a third substrate having a sealing section....
6694998 Micromachined structure usable in pressure regulating microvalve and proportional microvalve  
A microvalve device includes a first plate, a second plate and a third plate. The second plate is connected between the first plate and the third plate. The second plate contains a stationary...
6629465 Miniature gauge pressure sensor using silicon fusion bonding and back etching  
A gauge or differential pressure sensor has a base portion having walls which define a cavity within the base portion and a diaphragm portion positioned over the cavity. The base portion comprises...
6612535 MEMS valve  
A valve where the valve membrane is made from silicone rubber. Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties...
6581640 Laminated manifold for microvalve  
A manifold for distributing a fluid. The manifold can be used to distribute a fluid to and from a microvalve. The manifold includes a first plate having a groove formed in one face thereof. A...
6540203 Pilot operated microvalve device  
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. A pilot valve supported by the body is movably disposed in...
6533366 Vehicle hydraulic braking systems incorporating micro-machined technology  
Hydraulic or electro-hydraulic braking systems which include at least one wheel braking device and micro-machined technology, such as microvalves, are described herein. The use of the microvalves...
6523560 Microvalve with pressure equalization  
Disclosed is a microvalve suitable for use in high pressure applications such as refriigeration. The microvalve has a displaceable member that slides across an inlet port, thereby creating an...
6505811 High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate  
A fluid control valve assembly including a microvalve for controlling fluid flow in a fluid circuit having a relatively high fluid pressure requirement, such as vehicular brake system, is fixed to...
6494804 Microvalve for electronically controlled transmission  
A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. An electronically controlled automatic transmission,...
6494433 Thermally activated polymer device  
A microfluidic device adapted for use with a power source is disclosed. The device includes a substrate and a heater member. The substrate and heater member form a first portion. A second portion...
6467354 Anodically bonded, gas impervious cavity structures fabricated in silicon  
Glass with metal deposited on it in a pattern which is slightly larger than the cavity area of the corresponding silicon wafer. The metal layer has a thickness such that the glass can deform...
6360424 Method of making micromotors with utilitarian features  
Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other...
EP0826886B1 Single crystal optical module  
Abstract of EP0826886 A single crystal component having a single crystal substrate (1) whose surface portion and depth direction are defined, characterized in that the single crystal substrate (1)...
6284525 Miniature reaction chamber and devices incorporating same  
The present invention generally relates to miniaturized devices for carrying out and controlling chemical reactions and analyses. In particular, the present invention provides devices which have...
6261431 Process for microfabrication of an integrated PCR-CE device and products produced by the same  
A fully integrated monolithic small volume PCR-CE device in glass, or the like materials, is fabricated using thin film metal heaters and thermocouples to thermally cycle sub-microliter PCR...
6206022 Integrated flow controller module  
A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow...
6149123 Integrated electrically operable micro-valve  
Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device having...
6132580 Miniature reaction chamber and devices incorporating same  
The present invention generally relates to miniaturized devices for carrying out and controlling chemical reactions and analyses. In particular, the present invention provides devices which have...
6129331 Low-power thermopneumatic microvalve  
A thernopneumatic valve comprises a fluid channel plate defining a fluid port. A diaphragm plate is attached to the fluid channel plate. The diaphragm plate includes a displaceable diaphragm to...
6032689 Integrated flow controller module  
A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow...
6029337 Methods of fabricating micromotors with utilitarian features  
Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other...
6019437 Vehicle hydraulic braking systems incorporating micro-machined technology  
Hydraulic or electro-hydraulic braking systems which include at least one wheel braking device and micro-machined technology, such as microvalves, are described herein. The use of the microvalves...
6016824 Control method and circuit for valve device  
An analog voltage signal V A generated from a command signal generating device is converted to a PWM signal V B by a converter, and a drive transistor is ON/OFF controlled by the PWM signal V B ,...
EP0636959B1 Hybrid valving system for varying fluid flow rate  
Abstract not available for EP0636959 Abstract of corresponding document: US5329965 In a fluid valving system, binary fluid control lines are connected in parallel between a common fluid inlet and...
EP0954450A1 MEMS VALVE  
Abstract not available for EP0954450 Abstract of corresponding document: WO9832616 A valve (100) where the valve membrane is made from silicone rubber (118). Preferably the valve is a...
5980119 Single-crystal component to be applied to optical module and its fabrication method  
To provide a single crystal component comprising a single crystal substrate whose surface portion and depth direction are defined, a tapered groove formed on the surface portion of the single...
5865417 Integrated electrically operable normally closed valve  
A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second...
5788468 Microfabricated fluidic devices  
A microfabricated, remotely actuated fluid pump includes a LIGA-fabricated movable member disposed within a cavity. The LIGA-fabricated movable member and the cavity cooperate to (a) define a...
5755942 Partitioned microelectronic device array  
A system for processing a plurality of tests or syntheses in parallel comprising a sample channel for moving samples into a microlaboratory array of a plurality of wells connected by one or more...
EP0826886A1 Single crystal optical module  
A single crystal component having a single crystal substrate (1) whose surface portion and depth direction are defined, characterized in that the single crystal substrate (1) having a tapered...
5705318 Micromotors and methods of fabrication  
A polysilicon micromotor, of either inner rotor or outer rotor design, is fabricated with a process that uses as few as three mask steps. In an outer rotor (wobble) micromotor, a free-rotating...
5640995 Electrofluidic standard module and custom circuit board assembly  
A miniature electrofluidic module is disclosed, for receiving one or more fluids and for receiving an electrical connection. In accordance with one aspect of the invention, the module includes a...
Matches 1 - 50 out of 59 1 2 >